JP2007501530A5 - - Google Patents

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Publication number
JP2007501530A5
JP2007501530A5 JP2006532543A JP2006532543A JP2007501530A5 JP 2007501530 A5 JP2007501530 A5 JP 2007501530A5 JP 2006532543 A JP2006532543 A JP 2006532543A JP 2006532543 A JP2006532543 A JP 2006532543A JP 2007501530 A5 JP2007501530 A5 JP 2007501530A5
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JP
Japan
Prior art keywords
electrode
frequency
power source
frequency power
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006532543A
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English (en)
Japanese (ja)
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JP4794449B2 (ja
JP2007501530A (ja
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Publication date
Priority claimed from US10/431,030 external-priority patent/US7976673B2/en
Application filed filed Critical
Publication of JP2007501530A publication Critical patent/JP2007501530A/ja
Publication of JP2007501530A5 publication Critical patent/JP2007501530A5/ja
Application granted granted Critical
Publication of JP4794449B2 publication Critical patent/JP4794449B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006532543A 2003-05-06 2004-04-29 ナローギャップ容量結合リアクタのｒｆパルシング技術 Expired - Fee Related JP4794449B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/431,030 2003-05-06
US10/431,030 US7976673B2 (en) 2003-05-06 2003-05-06 RF pulsing of a narrow gap capacitively coupled reactor
PCT/US2004/013707 WO2004102638A2 (en) 2003-05-06 2004-04-29 Rf pulsing of a narrow gap capacitively coupled reactor

Publications (3)

Publication Number Publication Date
JP2007501530A JP2007501530A (ja) 2007-01-25
JP2007501530A5 true JP2007501530A5 (enExample) 2007-06-14
JP4794449B2 JP4794449B2 (ja) 2011-10-19

Family

ID=33416370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006532543A Expired - Fee Related JP4794449B2 (ja) 2003-05-06 2004-04-29 ナローギャップ容量結合リアクタのｒｆパルシング技術

Country Status (9)

Country Link
US (2) US7976673B2 (enExample)
EP (1) EP1620876B1 (enExample)
JP (1) JP4794449B2 (enExample)
KR (2) KR20060013386A (enExample)
CN (1) CN1816893B (enExample)
AT (1) ATE470949T1 (enExample)
DE (1) DE602004027620D1 (enExample)
TW (1) TWI460784B (enExample)
WO (1) WO2004102638A2 (enExample)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002061173A2 (en) * 2001-01-29 2002-08-08 The Board Of Regents For Oklahoma State University Advanced composite ormosil coatings
US7887889B2 (en) * 2001-12-14 2011-02-15 3M Innovative Properties Company Plasma fluorination treatment of porous materials
US7431857B2 (en) * 2003-08-15 2008-10-07 Applied Materials, Inc. Plasma generation and control using a dual frequency RF source
US7144521B2 (en) * 2003-08-22 2006-12-05 Lam Research Corporation High aspect ratio etch using modulation of RF powers of various frequencies
US7838430B2 (en) * 2003-10-28 2010-11-23 Applied Materials, Inc. Plasma control using dual cathode frequency mixing
US20050241762A1 (en) * 2004-04-30 2005-11-03 Applied Materials, Inc. Alternating asymmetrical plasma generation in a process chamber
KR20060005560A (ko) * 2004-07-13 2006-01-18 삼성전자주식회사 플라즈마를 이용하는 반도체 소자 제조 장비
US9083392B2 (en) * 2005-05-17 2015-07-14 The Regents Of The University Of Michigan Wireless sensing and communication utilizing RF transmissions from microdischarges
KR100777151B1 (ko) * 2006-03-21 2007-11-16 주식회사 디엠에스 하이브리드형 플라즈마 반응장치
JP5192209B2 (ja) 2006-10-06 2013-05-08 東京エレクトロン株式会社 プラズマエッチング装置、プラズマエッチング方法およびコンピュータ読取可能な記憶媒体
JP5514413B2 (ja) * 2007-08-17 2014-06-04 東京エレクトロン株式会社 プラズマエッチング方法
US7736914B2 (en) * 2007-11-29 2010-06-15 Applied Materials, Inc. Plasma control using dual cathode frequency mixing and controlling the level of polymer formation
CN101736326B (zh) * 2008-11-26 2011-08-10 中微半导体设备(上海)有限公司 电容耦合型等离子体处理反应器
JP5390846B2 (ja) * 2008-12-09 2014-01-15 東京エレクトロン株式会社 プラズマエッチング装置及びプラズマクリーニング方法
US8540844B2 (en) * 2008-12-19 2013-09-24 Lam Research Corporation Plasma confinement structures in plasma processing systems
US8154209B2 (en) * 2009-04-06 2012-04-10 Lam Research Corporation Modulated multi-frequency processing method
US10707055B2 (en) * 2017-11-17 2020-07-07 Advanced Energy Industries, Inc. Spatial and temporal control of ion bias voltage for plasma processing
US8659335B2 (en) 2009-06-25 2014-02-25 Mks Instruments, Inc. Method and system for controlling radio frequency power
US20110011534A1 (en) * 2009-07-17 2011-01-20 Rajinder Dhindsa Apparatus for adjusting an edge ring potential during substrate processing
KR101384341B1 (ko) * 2010-06-10 2014-04-14 에스티에스반도체통신 주식회사 무선 전력과 무선 주파수 신호를 이용하는 스크린 프린팅 장치
US9184028B2 (en) * 2010-08-04 2015-11-10 Lam Research Corporation Dual plasma volume processing apparatus for neutral/ion flux control
US8869742B2 (en) 2010-08-04 2014-10-28 Lam Research Corporation Plasma processing chamber with dual axial gas injection and exhaust
US9793126B2 (en) 2010-08-04 2017-10-17 Lam Research Corporation Ion to neutral control for wafer processing with dual plasma source reactor
US20130059448A1 (en) * 2011-09-07 2013-03-07 Lam Research Corporation Pulsed Plasma Chamber in Dual Chamber Configuration
US9111728B2 (en) 2011-04-11 2015-08-18 Lam Research Corporation E-beam enhanced decoupled source for semiconductor processing
US20120258555A1 (en) * 2011-04-11 2012-10-11 Lam Research Corporation Multi-Frequency Hollow Cathode and Systems Implementing the Same
US8900403B2 (en) 2011-05-10 2014-12-02 Lam Research Corporation Semiconductor processing system having multiple decoupled plasma sources
US9039911B2 (en) 2012-08-27 2015-05-26 Lam Research Corporation Plasma-enhanced etching in an augmented plasma processing system
US20130119018A1 (en) * 2011-11-15 2013-05-16 Keren Jacobs Kanarik Hybrid pulsing plasma processing systems
US9030101B2 (en) * 2012-02-22 2015-05-12 Lam Research Corporation Frequency enhanced impedance dependent power control for multi-frequency RF pulsing
US9197196B2 (en) * 2012-02-22 2015-11-24 Lam Research Corporation State-based adjustment of power and frequency
US9114666B2 (en) * 2012-02-22 2015-08-25 Lam Research Corporation Methods and apparatus for controlling plasma in a plasma processing system
TWI599272B (zh) * 2012-09-14 2017-09-11 蘭姆研究公司 根據三個或更多狀態之功率及頻率調整
US9230819B2 (en) 2013-04-05 2016-01-05 Lam Research Corporation Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing
US9245761B2 (en) 2013-04-05 2016-01-26 Lam Research Corporation Internal plasma grid for semiconductor fabrication
US9017526B2 (en) 2013-07-08 2015-04-28 Lam Research Corporation Ion beam etching system
US9147581B2 (en) 2013-07-11 2015-09-29 Lam Research Corporation Dual chamber plasma etcher with ion accelerator
US9875873B2 (en) * 2014-08-08 2018-01-23 Shimadzu Corporation Particle charger
EP3038132B1 (en) * 2014-12-22 2020-03-11 IMEC vzw Method and apparatus for real-time monitoring of plasma etch uniformity
JP2018038988A (ja) * 2016-09-09 2018-03-15 株式会社島津製作所 粒子濃縮装置
US12266510B2 (en) * 2022-03-08 2025-04-01 Clean Crop Technologies, Inc. Plasma treatment device

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI62692C (fi) 1981-05-20 1983-02-10 Valmet Oy Pappersmaskinspress med bred presszon
US4500563A (en) 1982-12-15 1985-02-19 Pacific Western Systems, Inc. Independently variably controlled pulsed R.F. plasma chemical vapor processing
KR890004881B1 (ko) 1983-10-19 1989-11-30 가부시기가이샤 히다찌세이사꾸쇼 플라즈마 처리 방법 및 그 장치
US4585516A (en) * 1985-03-04 1986-04-29 Tegal Corporation Variable duty cycle, multiple frequency, plasma reactor
US5871811A (en) * 1986-12-19 1999-02-16 Applied Materials, Inc. Method for protecting against deposition on a selected region of a substrate
DE3733135C1 (de) * 1987-10-01 1988-09-22 Leybold Ag Vorrichtung zum Beschichten oder AEtzen mittels eines Plasmas
EP0395415B1 (en) 1989-04-27 1995-03-15 Fujitsu Limited Apparatus for and method of processing a semiconductor device using microwave-generated plasma
US4889588A (en) 1989-05-01 1989-12-26 Tegal Corporation Plasma etch isotropy control
KR100324792B1 (ko) * 1993-03-31 2002-06-20 히가시 데쓰로 플라즈마처리장치
JPH07131671A (ja) * 1993-10-28 1995-05-19 Matsushita Electric Ind Co Ltd ダイナミックフォーカス用増幅回路
US5468341A (en) 1993-12-28 1995-11-21 Nec Corporation Plasma-etching method and apparatus therefor
US5565036A (en) * 1994-01-19 1996-10-15 Tel America, Inc. Apparatus and method for igniting plasma in a process module
JP3093572B2 (ja) * 1994-07-07 2000-10-03 株式会社半導体エネルギー研究所 ドライエッチング方法
US5683538A (en) 1994-12-23 1997-11-04 International Business Machines Corporation Control of etch selectivity
US5614060A (en) 1995-03-23 1997-03-25 Applied Materials, Inc. Process and apparatus for etching metal in integrated circuit structure with high selectivity to photoresist and good metal etch residue removal
US5534751A (en) * 1995-07-10 1996-07-09 Lam Research Corporation Plasma etching apparatus utilizing plasma confinement
JPH09120957A (ja) 1995-08-23 1997-05-06 Fujitsu Ltd プラズマ装置及びプラズマ処理方法
US5983828A (en) 1995-10-13 1999-11-16 Mattson Technology, Inc. Apparatus and method for pulsed plasma processing of a semiconductor substrate
US6902683B1 (en) * 1996-03-01 2005-06-07 Hitachi, Ltd. Plasma processing apparatus and plasma processing method
KR970064327A (ko) * 1996-02-27 1997-09-12 모리시다 요이치 고주파 전력 인가장치, 플라즈마 발생장치, 플라즈마 처리장치, 고주파 전력 인가방법, 플라즈마 발생방법 및 플라즈마 처리방법
JP3663392B2 (ja) 1996-03-01 2005-06-22 株式会社日立製作所 プラズマエッチング処理装置
TW335517B (en) * 1996-03-01 1998-07-01 Hitachi Ltd Apparatus and method for processing plasma
JPH09330913A (ja) 1996-06-12 1997-12-22 Matsushita Electric Ind Co Ltd プラズマ発生方法及びプラズマ発生装置
JP3220383B2 (ja) * 1996-07-23 2001-10-22 東京エレクトロン株式会社 プラズマ処理装置及びその方法
US6214162B1 (en) * 1996-09-27 2001-04-10 Tokyo Electron Limited Plasma processing apparatus
JP3220394B2 (ja) * 1996-09-27 2001-10-22 東京エレクトロン株式会社 プラズマ処理装置
JP4114972B2 (ja) * 1997-05-27 2008-07-09 キヤノンアネルバ株式会社 基板処理装置
JP3629705B2 (ja) 1997-06-06 2005-03-16 東京エレクトロン株式会社 プラズマ処理装置
US6008130A (en) * 1997-08-14 1999-12-28 Vlsi Technology, Inc. Polymer adhesive plasma confinement ring
JPH11219938A (ja) 1998-02-02 1999-08-10 Matsushita Electron Corp プラズマエッチング方法
US6093332A (en) 1998-02-04 2000-07-25 Lam Research Corporation Methods for reducing mask erosion during plasma etching
JP2000031128A (ja) 1998-05-06 2000-01-28 Mitsubishi Electric Corp エッチング処理装置及びエッチング処理方法、並びに半導体装置の製造方法及び半導体装置
US6073577A (en) * 1998-06-30 2000-06-13 Lam Research Corporation Electrode for plasma processes and method for manufacture and use thereof
JP4578651B2 (ja) 1999-09-13 2010-11-10 東京エレクトロン株式会社 プラズマ処理方法およびプラズマ処理装置、プラズマエッチング方法
JP2001110798A (ja) * 1999-10-04 2001-04-20 Ulvac Japan Ltd プラズマｃｖｄ装置及び薄膜製造方法
US6363882B1 (en) 1999-12-30 2002-04-02 Lam Research Corporation Lower electrode design for higher uniformity
JP3792999B2 (ja) * 2000-06-28 2006-07-05 株式会社東芝 プラズマ処理装置
US6726804B2 (en) * 2001-01-22 2004-04-27 Liang-Guo Wang RF power delivery for plasma processing using modulated power signal
US6777344B2 (en) 2001-02-12 2004-08-17 Lam Research Corporation Post-etch photoresist strip with O2 and NH3 for organosilicate glass low-K dielectric etch applications
US6777037B2 (en) 2001-02-21 2004-08-17 Hitachi, Ltd. Plasma processing method and apparatus
US6770166B1 (en) 2001-06-29 2004-08-03 Lam Research Corp. Apparatus and method for radio frequency de-coupling and bias voltage control in a plasma reactor

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