JP4794449B2 - ナローギャップ容量結合リアクタのrfパルシング技術 - Google Patents
ナローギャップ容量結合リアクタのrfパルシング技術 Download PDFInfo
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- JP4794449B2 JP4794449B2 JP2006532543A JP2006532543A JP4794449B2 JP 4794449 B2 JP4794449 B2 JP 4794449B2 JP 2006532543 A JP2006532543 A JP 2006532543A JP 2006532543 A JP2006532543 A JP 2006532543A JP 4794449 B2 JP4794449 B2 JP 4794449B2
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- 238000000034 method Methods 0.000 claims abstract description 43
- 230000008569 process Effects 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 238000001020 plasma etching Methods 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 claims description 3
- 238000005530 etching Methods 0.000 abstract description 15
- 239000007789 gas Substances 0.000 description 17
- 150000002500 ions Chemical class 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010494 dissociation reaction Methods 0.000 description 4
- 230000005593 dissociations Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32155—Frequency modulation
- H01J37/32165—Plural frequencies
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Magnetic Resonance Imaging Apparatus (AREA)
Description
Claims (12)
- ウェーハ上のレイヤにプラズマエッチングを施す装置であって、
流体の移動が可能にガス源と連通し容量的に結合されたプロセスチャンバと、
前記プロセスチャンバ内に設けられた第1電極と、
前記ウェーハを保持する基板チャッキングメカニズムを形成し、前記第1電極から間隔を置いて対向する第2電極と、
前記第2電極に電気的に接続され、約150kHzから約10MHzの間の第1高周波電力を供給する第1高周波電源と、
前記第2電極に電気的に接続され、約12MHzから約200MHzの間の第2高周波電力を供給する第2高周波電源と、
前記第1高周波電源に制御可能に接続され、前記第1高周波電源の供給電力を約1kHzから約100kHzの間の周波数に変調する制御を行う第1変調制御器と、
前記第2高周波電源に制御可能に接続され、前記第2高周波電源の供給電力を約1kHzから約100kHzの間の周波数に変調する制御を行う第2変調制御器と
を備え、
前記第1変調制御器および前記第2変調制御器は、前記第2電極に供給される前記第1高周波電力および前記第2高周波電力の各周波数を変調させ、
前記第2電極は、前記第1電極と前記第2電極との間の間隔と、前記ウェーハの直径との比が1:15から1:60との間になるように、前記第1電極から間隔を置いて対向する、装置。 - 前記第1電極と前記第2電極との間の間隔は、8cm未満である請求項1に記載の装置。
- 前記第2高周波電源の周波数は、前記第1高周波電源の周波数の10倍より大きい請求項1または請求項2に記載の装置。
- 更に、前記プロセスチャンバ内に設けられ、前記ウェーハの周囲にプラズマ空間を画定する閉じ込めリングを備える請求項1ないし請求項3のいずれか一項に記載の装置。
- 更に、前記第1変調制御器および前記第2変調制御器に制御可能に接続されたコントローラを備える請求項1ないし請求項4のいずれか一項に記載の装置。
- ウェーハ上のレイヤにプラズマエッチングを施す装置であって、
流体の移動が可能にガス源と連通し容量的に結合されたプロセスチャンバと、
前記プロセスチャンバ内に設けられた第1電極と、
前記第1電極から間隔を置いて対向し、前記第1電極との間に前記ウェーハをマウント可能な第2電極であって、前記第1電極と前記第2電極との間の間隔に対する前記ウェーハの直径のアスペクト比は、15:1から40:1の間である第2電極と、
前記第2電極に電気的に接続され、第1周波数で第1電力信号を供給する第1高周波電源と、
前記第2電極に電気的に接続され、前記第1高周波と異なる第2周波数で第2電力信号を供給する第2高周波電源と、
前記第1高周波電源に制御可能に接続され、前記第1電力信号を約1kHzから約100kHzの間の周波数に変調する制御を行う第1変調制御器と、
前記第2高周波電源に制御可能に接続され、前記第2電力信号を約1kHzから約100kHzの間の周波数に変調する制御を行う第2変調制御器と
を備え、
前記第2電極は、前記ウェーハを保持する基板チャッキングメカニズムを形成し、
前記第1変調制御器および前記第2変調制御器は、前記第2電極に供給される前記第1電力信号および前記第2電力信号の各周波数を変調させる、装置。 - 前記第1電極と前記第2電極との間の間隔は、8cm未満である請求項6に記載の装置。
- 前記第2高周波電源の周波数は、前記第1高周波電源の周波数の10倍より大きい請求項6または請求項7に記載の装置。
- 更に、前記プロセスチャンバ内に設けられ、前記ウェーハの周囲にプラズマ空間を画定する閉じ込めリングを備える請求項6ないし請求項8のいずれか一項に記載の装置。
- 更に、前記第1変調制御器および前記第2変調制御器に制御可能に接続されたコントローラを備える請求項6ないし請求項9のいずれか一項に記載の装置。
- 前記第1の電極は接地される請求項1ないし請求項10のいずれか一項に記載の装置。
- 前記第1変調制御器および前記第2変調制御器による変調によって、前記第1電極と前記第2電極との間のギャップに占めるプラズマのシース領域を増加させる、請求項1ないし請求項11のいずれか一項に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/431,030 US7976673B2 (en) | 2003-05-06 | 2003-05-06 | RF pulsing of a narrow gap capacitively coupled reactor |
US10/431,030 | 2003-05-06 | ||
PCT/US2004/013707 WO2004102638A2 (en) | 2003-05-06 | 2004-04-29 | Rf pulsing of a narrow gap capacitively coupled reactor |
Publications (3)
Publication Number | Publication Date |
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JP2007501530A JP2007501530A (ja) | 2007-01-25 |
JP2007501530A5 JP2007501530A5 (ja) | 2007-06-14 |
JP4794449B2 true JP4794449B2 (ja) | 2011-10-19 |
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JP2006532543A Expired - Fee Related JP4794449B2 (ja) | 2003-05-06 | 2004-04-29 | ナローギャップ容量結合リアクタのrfパルシング技術 |
Country Status (9)
Country | Link |
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US (2) | US7976673B2 (ja) |
EP (1) | EP1620876B1 (ja) |
JP (1) | JP4794449B2 (ja) |
KR (2) | KR20060013386A (ja) |
CN (1) | CN1816893B (ja) |
AT (1) | ATE470949T1 (ja) |
DE (1) | DE602004027620D1 (ja) |
TW (1) | TWI460784B (ja) |
WO (1) | WO2004102638A2 (ja) |
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2003
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2004
- 2004-04-29 JP JP2006532543A patent/JP4794449B2/ja not_active Expired - Fee Related
- 2004-04-29 KR KR1020057021083A patent/KR20060013386A/ko active Application Filing
- 2004-04-29 WO PCT/US2004/013707 patent/WO2004102638A2/en active Application Filing
- 2004-04-29 KR KR1020127020117A patent/KR101303969B1/ko active IP Right Grant
- 2004-04-29 EP EP04751199A patent/EP1620876B1/en not_active Expired - Lifetime
- 2004-04-29 DE DE602004027620T patent/DE602004027620D1/de not_active Expired - Lifetime
- 2004-04-29 AT AT04751199T patent/ATE470949T1/de not_active IP Right Cessation
- 2004-04-29 CN CN2004800191395A patent/CN1816893B/zh not_active Expired - Fee Related
- 2004-05-04 TW TW093112507A patent/TWI460784B/zh active
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2011
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Also Published As
Publication number | Publication date |
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ATE470949T1 (de) | 2010-06-15 |
TW200504870A (en) | 2005-02-01 |
KR20060013386A (ko) | 2006-02-09 |
DE602004027620D1 (de) | 2010-07-22 |
EP1620876B1 (en) | 2010-06-09 |
WO2004102638A2 (en) | 2004-11-25 |
EP1620876A2 (en) | 2006-02-01 |
US7976673B2 (en) | 2011-07-12 |
US8337713B2 (en) | 2012-12-25 |
JP2007501530A (ja) | 2007-01-25 |
KR20120098951A (ko) | 2012-09-05 |
US20110263130A1 (en) | 2011-10-27 |
CN1816893A (zh) | 2006-08-09 |
CN1816893B (zh) | 2012-09-19 |
TWI460784B (zh) | 2014-11-11 |
US20040221958A1 (en) | 2004-11-11 |
KR101303969B1 (ko) | 2013-09-03 |
WO2004102638A3 (en) | 2005-07-28 |
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