WO2016021063A1 - 粒子荷電装置 - Google Patents
粒子荷電装置 Download PDFInfo
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- WO2016021063A1 WO2016021063A1 PCT/JP2014/071078 JP2014071078W WO2016021063A1 WO 2016021063 A1 WO2016021063 A1 WO 2016021063A1 JP 2014071078 W JP2014071078 W JP 2014071078W WO 2016021063 A1 WO2016021063 A1 WO 2016021063A1
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- 239000002245 particle Substances 0.000 title claims abstract description 168
- 150000002500 ions Chemical class 0.000 claims abstract description 75
- 239000007789 gas Substances 0.000 claims description 75
- 239000012159 carrier gas Substances 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000000638 solvent extraction Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 abstract description 13
- 238000011144 upstream manufacturing Methods 0.000 description 9
- 239000000443 aerosol Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 238000004088 simulation Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910052695 Americium Inorganic materials 0.000 description 1
- LXQXZNRPTYVCNG-UHFFFAOYSA-N americium atom Chemical compound [Am] LXQXZNRPTYVCNG-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
- H01J27/024—Extraction optics, e.g. grids
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/017—Combinations of electrostatic separation with other processes, not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/38—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/40—Electrode constructions
- B03C3/41—Ionising-electrodes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/40—Electrode constructions
- B03C3/45—Collecting-electrodes
- B03C3/47—Collecting-electrodes flat, e.g. plates, discs, gratings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/40—Electrode constructions
- B03C3/45—Collecting-electrodes
- B03C3/49—Collecting-electrodes tubular
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0266—Investigating particle size or size distribution with electrical classification
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/622—Ion mobility spectrometry
- G01N27/623—Ion mobility spectrometry combined with mass spectrometry
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
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- H—ELECTRICITY
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
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- H—ELECTRICITY
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- H01J37/32—Gas-filled discharge tubes
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- H01J37/32532—Electrodes
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- H—ELECTRICITY
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- H01J49/061—Ion deflecting means, e.g. ion gates
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- H—ELECTRICITY
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- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/12—Ion sources; Ion guns using an arc discharge, e.g. of the duoplasmatron type
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/145—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using chemical ionisation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C2201/00—Details of magnetic or electrostatic separation
- B03C2201/06—Ionising electrode being a needle
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N2015/0038—Investigating nanoparticles
Definitions
- the charged particle take-out means forms a potential gradient in a direction intersecting with the direction from the first space toward the second space, and takes out the charged particles from the casing by the movement of the charged particles along the potential gradient. It can also be.
- the particle charging device is arranged between the sampling device 100 and the classification device 300 in the particle classification / observation system as shown in FIG. 8, and is arranged on the particle charging unit 20 and the upper part thereof.
- a gas ion generator 10 (corresponding to the gas ion supply means in the present invention).
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Abstract
Description
a)筐体と、
b)前記筐体内を第1空間と第2空間とに仕切る仮想的な面内で延伸する複数の電極から成るフィルタと、
c)前記第1空間に荷電対象の粒子を導入する粒子導入手段と、
d)前記第1空間にガスイオンを供給するガスイオン供給手段と、
e)前記ガスイオン及び該ガスイオンに前記粒子が接触することで生成された帯電粒子を前記第1空間から前記第2空間に向かって移動させるべく前記筐体内に電位勾配を形成する電位勾配形成手段と、
f)前記フィルタを構成する前記複数の電極の各々に交流電圧を印加するものであって、前記複数の電極のうち互いに隣接する電極に位相の相違する電圧を印加する交流電圧印加手段と、
g)前記第1空間から前記第2空間に向かって移動する前記帯電粒子及び前記ガスイオンのうち、前記帯電粒子は前記複数の電極の間を通過させ、前記ガスイオンは該複数の電極のいずれかによって捕捉するべく予め定められた電圧を前記複数の電極に印加するよう前記交流電圧印加手段を制御する制御手段と、
h)前記第2空間に移動してきた前記帯電粒子を前記筐体の外に取り出す帯電粒子取り出し手段と、
を有することを特徴としている。
11…チャンバ
12…放電電極
13…接地電極
14…放電用電源
15…ガス導入口
16…ガスイオン排出口
20…粒子帯電部
21…チャンバ
22…上流側第1開口
23…上流側第2開口
24…下流側第1開口
25…下流側第2開口
26…第1電極板
27…第2電極板
28…フィルタ
28a…電極
28b…電極
29…第1空間
30…第2空間
31…直流電源
32…第1交流電源
33…第2交流電源
34…キャリアガス供給部
35…制御部
36…記憶部
41…ガスイオン
42…帯電粒子
61…対向電極
62…引き出し電極
63…開口部
Claims (6)
- a)筐体と、
b)前記筐体内を第1空間と第2空間とに仕切る仮想的な面内で延伸する複数の電極から成るフィルタと、
c)前記第1空間に荷電対象の粒子を導入する粒子導入手段と、
d)前記第1空間にガスイオンを供給するガスイオン供給手段と、
e)前記ガスイオン及び該ガスイオンに前記粒子が接触することで生成された帯電粒子を前記第1空間から前記第2空間に向かって移動させるべく前記筐体内に電位勾配を形成する電位勾配形成手段と、
f)前記フィルタを構成する前記複数の電極の各々に交流電圧を印加するものであって、前記複数の電極のうち互いに隣接する電極に位相の相違する電圧を印加する交流電圧印加手段と、
g)前記第1空間から前記第2空間に向かって移動する前記帯電粒子及び前記ガスイオンのうち、前記帯電粒子は前記複数の電極の間を通過させ、前記ガスイオンは該複数の電極のいずれかによって捕捉するべく予め定められた電圧を前記複数の電極に印加するよう前記交流電圧印加手段を制御する制御手段と、
h)前記第2空間に移動してきた前記帯電粒子を前記筐体の外に取り出す帯電粒子取り出し手段と、
を有することを特徴とする粒子荷電装置。 - 前記帯電粒子取り出し手段が、前記第2空間内にキャリアガスの流れを形成し、該キャリアガスの流れによって前記帯電粒子を前記筐体の外に押し流すものであることを特徴とする請求項1に記載の粒子荷電装置。
- 前記帯電粒子取り出し手段が、前記第2空間内に前記電位勾配と交差する方向に電位勾配を形成し、該勾配に沿った前記帯電粒子の移動によって該帯電粒子を前記筐体の外に引き出すものであることを特徴とする請求項1に記載の粒子荷電装置。
- 前記フィルタが、複数の棒状の電極を平行に並べて成るものであることを特徴とする請求項1~3のいずれかに記載の粒子荷電装置。
- 前記フィルタが、複数の棒状の電極を格子状に配置して成るものであることを特徴とする請求項1~3のいずれかに記載の粒子荷電装置。
- 前記フィルタが、複数の円形の電極を同心円状に配置して成るものであることを特徴とする請求項1~3のいずれかに記載の粒子荷電装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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CN201480081074.0A CN106573253B (zh) | 2014-08-08 | 2014-08-08 | 粒子荷电装置 |
JP2016539790A JP6210159B2 (ja) | 2014-08-08 | 2014-08-08 | 粒子荷電装置 |
PCT/JP2014/071078 WO2016021063A1 (ja) | 2014-08-08 | 2014-08-08 | 粒子荷電装置 |
US15/501,935 US9875873B2 (en) | 2014-08-08 | 2014-08-08 | Particle charger |
EP14899188.8A EP3195935B1 (en) | 2014-08-08 | 2014-08-08 | Particle charger |
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PCT/JP2014/071078 WO2016021063A1 (ja) | 2014-08-08 | 2014-08-08 | 粒子荷電装置 |
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EP (1) | EP3195935B1 (ja) |
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Cited By (3)
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CN107774451A (zh) * | 2016-08-25 | 2018-03-09 | 宁波方太厨具有限公司 | 一种静电净化单元 |
CN107809065A (zh) * | 2016-09-09 | 2018-03-16 | 株式会社岛津制作所 | 粒子浓缩装置 |
CN108072594A (zh) * | 2016-11-10 | 2018-05-25 | 株式会社岛津制作所 | 粒子捕集装置 |
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JP2019163975A (ja) * | 2018-03-19 | 2019-09-26 | 日本碍子株式会社 | 微粒子検出器 |
CN108918358A (zh) * | 2018-07-17 | 2018-11-30 | 中煤科工集团重庆研究院有限公司 | 一种基于dma的颗粒物粒径分布检测系统和方法 |
KR102616653B1 (ko) * | 2018-12-14 | 2023-12-21 | 삼성전자주식회사 | 탄소섬유 대전장치 및 이를 구비한 가전기기 |
GB2624389A (en) * | 2022-11-15 | 2024-05-22 | Thermo Fisher Scient Bremen Gmbh | Ion guide |
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- 2014-08-08 WO PCT/JP2014/071078 patent/WO2016021063A1/ja active Application Filing
- 2014-08-08 EP EP14899188.8A patent/EP3195935B1/en not_active Not-in-force
- 2014-08-08 CN CN201480081074.0A patent/CN106573253B/zh not_active Expired - Fee Related
- 2014-08-08 US US15/501,935 patent/US9875873B2/en active Active
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107774451A (zh) * | 2016-08-25 | 2018-03-09 | 宁波方太厨具有限公司 | 一种静电净化单元 |
CN107774451B (zh) * | 2016-08-25 | 2023-12-15 | 宁波方太厨具有限公司 | 一种静电净化单元 |
CN107809065A (zh) * | 2016-09-09 | 2018-03-16 | 株式会社岛津制作所 | 粒子浓缩装置 |
CN108072594A (zh) * | 2016-11-10 | 2018-05-25 | 株式会社岛津制作所 | 粒子捕集装置 |
Also Published As
Publication number | Publication date |
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EP3195935A4 (en) | 2017-07-26 |
JPWO2016021063A1 (ja) | 2017-04-27 |
JP6210159B2 (ja) | 2017-10-11 |
CN106573253A (zh) | 2017-04-19 |
EP3195935B1 (en) | 2019-04-10 |
US9875873B2 (en) | 2018-01-23 |
EP3195935A1 (en) | 2017-07-26 |
US20170229275A1 (en) | 2017-08-10 |
CN106573253B (zh) | 2018-05-15 |
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