JP2007123906A5 - - Google Patents
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- Publication number
- JP2007123906A5 JP2007123906A5 JP2006294638A JP2006294638A JP2007123906A5 JP 2007123906 A5 JP2007123906 A5 JP 2007123906A5 JP 2006294638 A JP2006294638 A JP 2006294638A JP 2006294638 A JP2006294638 A JP 2006294638A JP 2007123906 A5 JP2007123906 A5 JP 2007123906A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- liquid crystal
- display device
- crystal display
- active layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 14
- 239000004973 liquid crystal related substance Substances 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 3
- 150000001875 compounds Chemical class 0.000 claims 3
- 230000007423 decrease Effects 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 2
- 230000003647 oxidation Effects 0.000 claims 2
- 238000007254 oxidation reaction Methods 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2005-0102429 | 2005-10-28 | ||
| KR1020050102429A KR101158896B1 (ko) | 2005-10-28 | 2005-10-28 | 박막트랜지스터 기판 및 이의 제조방법과,박막트랜지스터를 갖는 액정표시패널 및 전계발광 표시패널 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007123906A JP2007123906A (ja) | 2007-05-17 |
| JP2007123906A5 true JP2007123906A5 (enExample) | 2009-11-12 |
| JP5352912B2 JP5352912B2 (ja) | 2013-11-27 |
Family
ID=37995068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006294638A Expired - Fee Related JP5352912B2 (ja) | 2005-10-28 | 2006-10-30 | 液晶表示装置とその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7615867B2 (enExample) |
| JP (1) | JP5352912B2 (enExample) |
| KR (1) | KR101158896B1 (enExample) |
| CN (1) | CN1956225B (enExample) |
| TW (1) | TWI413256B (enExample) |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030086166A (ko) * | 2002-05-03 | 2003-11-07 | 엘지.필립스 엘시디 주식회사 | 유기전계 발광소자와 그 제조방법 |
| US8334537B2 (en) * | 2007-07-06 | 2012-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
| US7897971B2 (en) * | 2007-07-26 | 2011-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
| JP2009105390A (ja) * | 2007-10-05 | 2009-05-14 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
| JP2009103732A (ja) * | 2007-10-19 | 2009-05-14 | Sony Corp | 表示装置およびその製造方法 |
| KR101432109B1 (ko) * | 2007-10-31 | 2014-08-22 | 삼성디스플레이 주식회사 | 박막 트랜지스터의 제조 방법 |
| KR101485585B1 (ko) | 2008-02-14 | 2015-01-23 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
| KR101392162B1 (ko) * | 2008-02-15 | 2014-05-08 | 삼성디스플레이 주식회사 | 표시 기판 및 이의 제조 방법 |
| TWI467663B (zh) * | 2008-11-07 | 2015-01-01 | Semiconductor Energy Lab | 半導體裝置和該半導體裝置的製造方法 |
| JP2010249935A (ja) | 2009-04-13 | 2010-11-04 | Sony Corp | 表示装置 |
| USD632657S1 (en) * | 2009-07-28 | 2011-02-15 | Panasonic Electric Works Co., Ltd. | Electro luminescence module |
| USD633450S1 (en) * | 2009-07-28 | 2011-03-01 | Panasonic Electric Works Co., Ltd. | Electro luminescence module |
| USD633054S1 (en) * | 2009-07-28 | 2011-02-22 | Panasonic Electric Works Co., Ltd. | Electro luminescence module |
| USD633055S1 (en) * | 2009-09-25 | 2011-02-22 | Panasonic Electric Works Co., Ltd. | Electro luminescence module |
| USD633057S1 (en) * | 2009-09-25 | 2011-02-22 | Panasonic Electric Works Co., Ltd. | Electro luminescence module |
| USD633451S1 (en) * | 2009-09-25 | 2011-03-01 | Panasonic Electric Works Co., Ltd. | Electro luminescence module |
| USD633056S1 (en) * | 2009-09-25 | 2011-02-22 | Panasonic Electric Works Co., Ltd. | Electro luminescence module |
| KR101638977B1 (ko) * | 2009-11-13 | 2016-07-12 | 삼성전자주식회사 | 트랜지스터와 그 제조방법 및 트랜지스터를 포함하는 전자소자 |
| KR101635212B1 (ko) * | 2009-12-14 | 2016-06-30 | 엘지디스플레이 주식회사 | 플렉서블 유기발광다이오드 표시장치와 그 제조방법 |
| USD638379S1 (en) * | 2010-04-09 | 2011-05-24 | Panasonic Electric Works Co., Ltd. | Electroluminescence module |
| USD643820S1 (en) * | 2010-04-09 | 2011-08-23 | Panasonic Electric Works Co., Ltd. | Electroluminescence module |
| USD642996S1 (en) * | 2010-04-09 | 2011-08-09 | Panasonic Electric Works Co., Ltd. | Electroluminescence apparatus |
| USD638383S1 (en) * | 2010-04-09 | 2011-05-24 | Panasonic Electric Works Co., Ltd. | Electroluminescence module |
| USD637165S1 (en) * | 2010-04-09 | 2011-05-03 | Panasonic Electric Works Co., Ltd. | Electroluminescence module |
| JP1437719S (enExample) * | 2010-04-09 | 2015-03-30 | ||
| USD638382S1 (en) * | 2010-04-09 | 2011-05-24 | Panasonic Electric Works Co., Ltd. | Electroluminescence module |
| USD637166S1 (en) * | 2010-04-09 | 2011-05-03 | Panasonic Electric Works Co., Ltd. | Electroluminescence module |
| USD638381S1 (en) * | 2010-04-09 | 2011-05-24 | Panasonic Electric Works Co., Ltd. | Electroluminescence module |
| US9178071B2 (en) * | 2010-09-13 | 2015-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| JP2013026345A (ja) * | 2011-07-19 | 2013-02-04 | Toshiba Corp | 半導体装置の製造方法 |
| CN103229301B (zh) | 2011-11-29 | 2017-02-08 | 株式会社日本有机雷特显示器 | 薄膜晶体管以及薄膜晶体管的制造方法 |
| USD742841S1 (en) * | 2013-03-26 | 2015-11-10 | Sony Corporation | Touch sensitive device |
| KR102197854B1 (ko) | 2014-05-13 | 2021-01-05 | 삼성디스플레이 주식회사 | 박막 트랜지스터, 이를 포함하는 표시기판 및 이의 제조방법 |
| KR102279884B1 (ko) * | 2014-12-05 | 2021-07-22 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 그 제조 방법 |
| KR20190070380A (ko) | 2017-12-12 | 2019-06-21 | 삼성디스플레이 주식회사 | 표시 장치 |
| CN111490161A (zh) * | 2020-04-24 | 2020-08-04 | 电子科技大学 | 一种有机薄场效应晶体管及其制备方法 |
| CN113327935B (zh) * | 2021-05-21 | 2022-07-12 | Tcl华星光电技术有限公司 | 显示面板及其制备方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03220529A (ja) * | 1990-01-25 | 1991-09-27 | Nec Corp | アクティブマトリックス液晶ディスプレイの製造方法 |
| JPH0548106A (ja) * | 1991-02-20 | 1993-02-26 | Alps Electric Co Ltd | 薄膜トランジスタ及びその製造方法 |
| JP2809153B2 (ja) * | 1995-09-28 | 1998-10-08 | 日本電気株式会社 | 液晶表示装置及びその製造方法 |
| KR0175410B1 (ko) * | 1995-11-21 | 1999-02-01 | 김광호 | 액정 표시 장치용 박막 트랜지스터 기판 및 그 제조 방법 |
| JP3873158B2 (ja) * | 1998-06-11 | 2007-01-24 | カシオ計算機株式会社 | 表示パネル及びその製造方法 |
| JP3916334B2 (ja) * | 1999-01-13 | 2007-05-16 | シャープ株式会社 | 薄膜トランジスタ |
| JP2001147424A (ja) * | 1999-11-19 | 2001-05-29 | Hitachi Ltd | 導電性薄膜形成用の絶縁基板およびこの絶縁基板を用いた液晶表示素子 |
| JP2001257350A (ja) * | 2000-03-08 | 2001-09-21 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
| TWI336921B (en) * | 2003-07-18 | 2011-02-01 | Semiconductor Energy Lab | Method for manufacturing semiconductor device |
| CN100438119C (zh) * | 2003-12-15 | 2008-11-26 | 乐金显示有限公司 | 双面板型有机电致发光器件及其制造方法 |
| KR101090252B1 (ko) * | 2004-09-24 | 2011-12-06 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 그의 제조 방법 |
-
2005
- 2005-10-28 KR KR1020050102429A patent/KR101158896B1/ko not_active Expired - Fee Related
-
2006
- 2006-09-14 TW TW095134088A patent/TWI413256B/zh not_active IP Right Cessation
- 2006-10-03 US US11/538,394 patent/US7615867B2/en not_active Expired - Fee Related
- 2006-10-09 CN CN200610152496XA patent/CN1956225B/zh not_active Expired - Fee Related
- 2006-10-30 JP JP2006294638A patent/JP5352912B2/ja not_active Expired - Fee Related
-
2009
- 2009-10-22 US US12/604,318 patent/US8088653B2/en not_active Expired - Fee Related
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