JP2006100808A5 - - Google Patents

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Publication number
JP2006100808A5
JP2006100808A5 JP2005246919A JP2005246919A JP2006100808A5 JP 2006100808 A5 JP2006100808 A5 JP 2006100808A5 JP 2005246919 A JP2005246919 A JP 2005246919A JP 2005246919 A JP2005246919 A JP 2005246919A JP 2006100808 A5 JP2006100808 A5 JP 2006100808A5
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JP
Japan
Prior art keywords
mask
forming
semiconductor
inorganic film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005246919A
Other languages
English (en)
Japanese (ja)
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JP2006100808A (ja
JP5025110B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2005246919A priority Critical patent/JP5025110B2/ja
Priority claimed from JP2005246919A external-priority patent/JP5025110B2/ja
Publication of JP2006100808A publication Critical patent/JP2006100808A/ja
Publication of JP2006100808A5 publication Critical patent/JP2006100808A5/ja
Application granted granted Critical
Publication of JP5025110B2 publication Critical patent/JP5025110B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005246919A 2004-08-31 2005-08-29 半導体装置の作製方法 Expired - Fee Related JP5025110B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005246919A JP5025110B2 (ja) 2004-08-31 2005-08-29 半導体装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004251926 2004-08-31
JP2004251926 2004-08-31
JP2005246919A JP5025110B2 (ja) 2004-08-31 2005-08-29 半導体装置の作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008212906A Division JP4927045B2 (ja) 2004-08-31 2008-08-21 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2006100808A JP2006100808A (ja) 2006-04-13
JP2006100808A5 true JP2006100808A5 (enExample) 2008-10-09
JP5025110B2 JP5025110B2 (ja) 2012-09-12

Family

ID=36240270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005246919A Expired - Fee Related JP5025110B2 (ja) 2004-08-31 2005-08-29 半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JP5025110B2 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100719547B1 (ko) 2005-03-24 2007-05-17 삼성에스디아이 주식회사 유기박막 패터닝방법, 이를 이용한 유기박막 트랜지스터 및그의 제조방법과 유기 박막 트랜지스터를 구비한평판표시장치
JP5023437B2 (ja) * 2005-04-01 2012-09-12 セイコーエプソン株式会社 半導体装置の製造方法、電気光学装置の製造方法、及び電子機器の製造方法
JP2007294723A (ja) * 2006-04-26 2007-11-08 Konica Minolta Holdings Inc 有機薄膜トランジスタの製造方法
US8900970B2 (en) * 2006-04-28 2014-12-02 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a semiconductor device using a flexible substrate
JP5256583B2 (ja) * 2006-05-29 2013-08-07 大日本印刷株式会社 有機半導体素子、および、有機半導体素子の製造方法
JP2007318025A (ja) * 2006-05-29 2007-12-06 Dainippon Printing Co Ltd 有機半導体素子、および、有機半導体素子の製造方法
JP5098269B2 (ja) * 2006-09-26 2012-12-12 大日本印刷株式会社 有機半導体素子の製造方法
JP5098270B2 (ja) * 2006-09-26 2012-12-12 大日本印刷株式会社 有機半導体素子の製造方法
JP5147215B2 (ja) * 2006-10-31 2013-02-20 株式会社日立製作所 表示素子の画素駆動回路およびこれを利用した表示装置
JP2008135615A (ja) * 2006-11-29 2008-06-12 Sony Corp 有機半導体素子および表示装置
US7888671B2 (en) 2006-12-18 2011-02-15 Panasonic Corporation Semiconductor device
JP5103982B2 (ja) * 2007-03-28 2012-12-19 大日本印刷株式会社 有機半導体素子の製造方法
JP2009218327A (ja) * 2008-03-10 2009-09-24 Konica Minolta Holdings Inc 薄膜トランジスタの製造方法
US8389987B2 (en) 2008-11-10 2013-03-05 Nec Corporation Switching element and method for fabricating same
KR20130050914A (ko) * 2010-03-30 2013-05-16 도판 인사츠 가부시키가이샤 박막 트랜지스터의 제조 방법 및 박막 트랜지스터 및 화상 표시 장치
JP5656049B2 (ja) * 2010-05-26 2015-01-21 ソニー株式会社 薄膜トランジスタの製造方法
JP5598410B2 (ja) 2011-04-11 2014-10-01 大日本印刷株式会社 有機半導体素子の製造方法および有機半導体素子

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4815765B2 (ja) * 2004-07-29 2011-11-16 ソニー株式会社 有機半導体装置の製造方法

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