JP2004535674A5 - - Google Patents

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Publication number
JP2004535674A5
JP2004535674A5 JP2003513012A JP2003513012A JP2004535674A5 JP 2004535674 A5 JP2004535674 A5 JP 2004535674A5 JP 2003513012 A JP2003513012 A JP 2003513012A JP 2003513012 A JP2003513012 A JP 2003513012A JP 2004535674 A5 JP2004535674 A5 JP 2004535674A5
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JP
Japan
Prior art keywords
arm
link
load lock
lock chamber
cam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003513012A
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English (en)
Japanese (ja)
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JP2004535674A (ja
JP4352233B2 (ja
Filing date
Publication date
Priority claimed from US09/905,031 external-priority patent/US6663333B2/en
Application filed filed Critical
Publication of JP2004535674A publication Critical patent/JP2004535674A/ja
Publication of JP2004535674A5 publication Critical patent/JP2004535674A5/ja
Application granted granted Critical
Publication of JP4352233B2 publication Critical patent/JP4352233B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003513012A 2001-07-13 2002-07-12 ロードロック室アセンブリ及びウエハ移送装置 Expired - Fee Related JP4352233B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/905,031 US6663333B2 (en) 2001-07-13 2001-07-13 Wafer transport apparatus
PCT/US2002/023233 WO2003007340A2 (en) 2001-07-13 2002-07-12 Wafer transport apparatus

Publications (3)

Publication Number Publication Date
JP2004535674A JP2004535674A (ja) 2004-11-25
JP2004535674A5 true JP2004535674A5 (enExample) 2005-12-22
JP4352233B2 JP4352233B2 (ja) 2009-10-28

Family

ID=25420193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003513012A Expired - Fee Related JP4352233B2 (ja) 2001-07-13 2002-07-12 ロードロック室アセンブリ及びウエハ移送装置

Country Status (8)

Country Link
US (3) US6663333B2 (enExample)
EP (1) EP1407479A2 (enExample)
JP (1) JP4352233B2 (enExample)
KR (1) KR100940958B1 (enExample)
CN (1) CN1320595C (enExample)
AU (1) AU2002354691A1 (enExample)
TW (1) TW559863B (enExample)
WO (1) WO2003007340A2 (enExample)

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