JP2004508728A5 - - Google Patents

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Publication number
JP2004508728A5
JP2004508728A5 JP2002525911A JP2002525911A JP2004508728A5 JP 2004508728 A5 JP2004508728 A5 JP 2004508728A5 JP 2002525911 A JP2002525911 A JP 2002525911A JP 2002525911 A JP2002525911 A JP 2002525911A JP 2004508728 A5 JP2004508728 A5 JP 2004508728A5
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JP
Japan
Prior art keywords
chuck
electrostatic chuck
porous
region
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002525911A
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English (en)
Japanese (ja)
Other versions
JP4959905B2 (ja
JP2004508728A (ja
Filing date
Publication date
Priority claimed from US09/655,324 external-priority patent/US6606234B1/en
Application filed filed Critical
Publication of JP2004508728A publication Critical patent/JP2004508728A/ja
Publication of JP2004508728A5 publication Critical patent/JP2004508728A5/ja
Application granted granted Critical
Publication of JP4959905B2 publication Critical patent/JP4959905B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2002525911A 2000-09-05 2001-08-01 多孔領域を有する静電チャック Expired - Lifetime JP4959905B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/655,324 US6606234B1 (en) 2000-09-05 2000-09-05 Electrostatic chuck and method for forming an electrostatic chuck having porous regions for fluid flow
US09/655,324 2000-09-05
PCT/US2001/024135 WO2002021590A2 (en) 2000-09-05 2001-08-01 Electrostatic chuck with porous regions

Publications (3)

Publication Number Publication Date
JP2004508728A JP2004508728A (ja) 2004-03-18
JP2004508728A5 true JP2004508728A5 (https=) 2008-09-18
JP4959905B2 JP4959905B2 (ja) 2012-06-27

Family

ID=24628428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002525911A Expired - Lifetime JP4959905B2 (ja) 2000-09-05 2001-08-01 多孔領域を有する静電チャック

Country Status (9)

Country Link
US (1) US6606234B1 (https=)
EP (1) EP1316110B1 (https=)
JP (1) JP4959905B2 (https=)
KR (1) KR100557695B1 (https=)
AT (1) ATE417358T1 (https=)
AU (1) AU2001277237A1 (https=)
DE (1) DE60136940D1 (https=)
TW (1) TW526521B (https=)
WO (1) WO2002021590A2 (https=)

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US10274270B2 (en) 2011-10-27 2019-04-30 Applied Materials, Inc. Dual zone common catch heat exchanger/chiller
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JP7345379B2 (ja) * 2019-12-06 2023-09-15 株式会社ディスコ ゲッタリング性評価装置
KR102779855B1 (ko) * 2021-02-17 2025-03-10 어플라이드 머티어리얼스, 인코포레이티드 다공성 플러그 본딩
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