ATE417358T1 - Elektrostatischer scheibenhalter mit porösen bereichen - Google Patents

Elektrostatischer scheibenhalter mit porösen bereichen

Info

Publication number
ATE417358T1
ATE417358T1 AT01955029T AT01955029T ATE417358T1 AT E417358 T1 ATE417358 T1 AT E417358T1 AT 01955029 T AT01955029 T AT 01955029T AT 01955029 T AT01955029 T AT 01955029T AT E417358 T1 ATE417358 T1 AT E417358T1
Authority
AT
Austria
Prior art keywords
porous region
disc holder
electrostatic chuck
porous areas
chuck
Prior art date
Application number
AT01955029T
Other languages
German (de)
English (en)
Inventor
Ramesh Divakar
Original Assignee
Saint Gobain Ceramics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Ceramics filed Critical Saint Gobain Ceramics
Application granted granted Critical
Publication of ATE417358T1 publication Critical patent/ATE417358T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • H10P72/722—Details of electrostatic chucks

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Porous Artificial Stone Or Porous Ceramic Products (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
AT01955029T 2000-09-05 2001-08-01 Elektrostatischer scheibenhalter mit porösen bereichen ATE417358T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/655,324 US6606234B1 (en) 2000-09-05 2000-09-05 Electrostatic chuck and method for forming an electrostatic chuck having porous regions for fluid flow

Publications (1)

Publication Number Publication Date
ATE417358T1 true ATE417358T1 (de) 2008-12-15

Family

ID=24628428

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01955029T ATE417358T1 (de) 2000-09-05 2001-08-01 Elektrostatischer scheibenhalter mit porösen bereichen

Country Status (9)

Country Link
US (1) US6606234B1 (https=)
EP (1) EP1316110B1 (https=)
JP (1) JP4959905B2 (https=)
KR (1) KR100557695B1 (https=)
AT (1) ATE417358T1 (https=)
AU (1) AU2001277237A1 (https=)
DE (1) DE60136940D1 (https=)
TW (1) TW526521B (https=)
WO (1) WO2002021590A2 (https=)

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Also Published As

Publication number Publication date
JP2004508728A (ja) 2004-03-18
US6606234B1 (en) 2003-08-12
WO2002021590A2 (en) 2002-03-14
AU2001277237A1 (en) 2002-03-22
EP1316110A2 (en) 2003-06-04
KR100557695B1 (ko) 2006-03-07
DE60136940D1 (de) 2009-01-22
KR20030031177A (ko) 2003-04-18
EP1316110B1 (en) 2008-12-10
JP4959905B2 (ja) 2012-06-27
WO2002021590A3 (en) 2002-08-01
TW526521B (en) 2003-04-01

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Legal Events

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