JP2004270022A - 薄膜の製造方法および薄膜 - Google Patents
薄膜の製造方法および薄膜 Download PDFInfo
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- JP2004270022A JP2004270022A JP2003295768A JP2003295768A JP2004270022A JP 2004270022 A JP2004270022 A JP 2004270022A JP 2003295768 A JP2003295768 A JP 2003295768A JP 2003295768 A JP2003295768 A JP 2003295768A JP 2004270022 A JP2004270022 A JP 2004270022A
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- Prior art keywords
- thin film
- carbon
- pulse voltage
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- diamond
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
【解決手段】対向電極4、5の少なくとも一方の上に基材6を設置する。炭素源を含む原料ガスAを含む雰囲気下で、100〜1600Torrの圧力下において対向電極4、5間にパルス電圧を印加することにより放電プラズマを生じさせ、基材6上に薄膜7を生成させる。パルス電圧のパルス継続時間が10〜1000nsecである。
【選択図】 図2
Description
こうした薄膜の強度は、例えば10GPa以上とすることが可能であった。10GPaの硬度は、ダイヤモンド状炭素膜として十分に特性発揮できる硬度である。
メタノ−ル、エタノ−ル等のアルコ−ル
メタン、エタン、プロパン、ブタン、ペンタン、ヘキサン等のアルカン
エチレン、プロピレン、ブテン、ペンテン等のアルケン
ペンタジエン、ブタジエン等のアルカジエン
アセチレン、メチルアセチレン等のアルキン、
ベンゼン、トルエン、キシレン、インデン、ナフタレン、フェナントレン等の芳香族炭化水素
シクロプロパン、シクロヘキサン等のシクロアルカン
シクロペンテン、シクロヘキセン等のシクロアルケン
(a) 酸素ガス
(b) 水素ガス
酸素や水素は放電中に原子状となり、ダイヤモンドと同時に生成するグラファイトを除去する効果を有する。
(c) 一酸化炭素、二酸化炭素
(d) 希釈ガス
Claims (6)
- 炭素源を含む原料ガスを含む雰囲気下で100〜1600Torrの圧力下において前記対向電極間にパルス電圧を印加することにより放電プラズマを生じさせ、基材上に薄膜を生成させるのに際して、前記パルス電圧のパルス継続時間が10〜1000nsecであることを特徴とする、薄膜の製造方法。
- 前記パルス電圧の立ち上がり時間及び/又は立ち下がり時間が1000nsec以下であることを特徴とする、請求項1記載の方法。
- 前記薄膜が実質的にダイヤモンド状炭素からなることを特徴とする、請求項1または2記載の方法。
- 請求項1〜3のいずれか一つの請求項に記載の方法によって得られたことを特徴とする、薄膜。
- 実質的にダイヤモンド状炭素からなることを特徴とする、請求項4記載の薄膜。
- 硬度が10GPa以上であることを特徴とする、請求項4または5記載の薄膜。
Priority Applications (2)
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---|---|---|---|
JP2003295768A JP4738724B2 (ja) | 2003-02-18 | 2003-08-20 | 薄膜の製造方法 |
US10/774,454 US7883750B2 (en) | 2003-02-18 | 2004-02-10 | Thin films and a method for producing the same |
Applications Claiming Priority (3)
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JP2003039304 | 2003-02-18 | ||
JP2003039304 | 2003-02-18 | ||
JP2003295768A JP4738724B2 (ja) | 2003-02-18 | 2003-08-20 | 薄膜の製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2004270022A true JP2004270022A (ja) | 2004-09-30 |
JP4738724B2 JP4738724B2 (ja) | 2011-08-03 |
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JP2003295768A Expired - Fee Related JP4738724B2 (ja) | 2003-02-18 | 2003-08-20 | 薄膜の製造方法 |
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US (1) | US7883750B2 (ja) |
JP (1) | JP4738724B2 (ja) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007138253A (ja) * | 2005-11-18 | 2007-06-07 | Ngk Insulators Ltd | 薄膜の製造方法 |
JP2007146262A (ja) * | 2005-11-30 | 2007-06-14 | Ngk Insulators Ltd | 薄膜の製造方法 |
JP2007194110A (ja) * | 2006-01-20 | 2007-08-02 | Ngk Insulators Ltd | 放電プラズマ発生方法 |
JP2007257860A (ja) * | 2006-03-20 | 2007-10-04 | Ngk Insulators Ltd | ヒーター用部材 |
JP2007327089A (ja) * | 2006-06-07 | 2007-12-20 | Kirin Brewery Co Ltd | 被覆プラスチック製品及び被膜 |
JP2009084591A (ja) * | 2007-09-27 | 2009-04-23 | Ngk Insulators Ltd | Dlc成膜装置 |
JP2009242879A (ja) * | 2008-03-31 | 2009-10-22 | Ngk Insulators Ltd | Dlc成膜方法 |
US7914692B2 (en) | 2006-08-29 | 2011-03-29 | Ngk Insulators, Ltd. | Methods of generating plasma, of etching an organic material film, of generating minus ions, of oxidation and nitriding |
US7923377B2 (en) | 2008-03-27 | 2011-04-12 | Ngk Insulators, Ltd. | Method for forming amorphous carbon film |
WO2012144580A1 (ja) * | 2011-04-20 | 2012-10-26 | Ntn株式会社 | 非晶質炭素膜およびその成膜方法 |
JP2013220987A (ja) * | 2012-04-19 | 2013-10-28 | Mitsuba Corp | 炭素膜、高分子製品、炭素膜被覆材の製造方法、成膜方法、及び、成膜装置 |
WO2015119199A1 (ja) * | 2014-02-06 | 2015-08-13 | 国立大学法人東京工業大学 | 管状体内にプラズマを発生させる発生装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5390230B2 (ja) * | 2008-03-31 | 2014-01-15 | 日本碍子株式会社 | シリコン系薄膜成膜装置及びその方法 |
JP5455405B2 (ja) * | 2008-03-31 | 2014-03-26 | 日本碍子株式会社 | シリコン系薄膜量産方法 |
US8425662B2 (en) | 2010-04-02 | 2013-04-23 | Battelle Memorial Institute | Methods for associating or dissociating guest materials with a metal organic framework, systems for associating or dissociating guest materials within a series of metal organic frameworks, and gas separation assemblies |
TWI606490B (zh) * | 2010-07-02 | 2017-11-21 | 半導體能源研究所股份有限公司 | 半導體膜的製造方法,半導體裝置的製造方法,和光電轉換裝置的製造方法 |
JP6427478B2 (ja) * | 2015-11-04 | 2018-11-21 | 学校法人慶應義塾 | 薄膜積層フィルム、その製造方法及びその製造装置 |
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JPH09104985A (ja) * | 1995-08-08 | 1997-04-22 | Sanyo Electric Co Ltd | 回転電極を用いた高速成膜方法及びその装置 |
JPH1112735A (ja) * | 1997-06-25 | 1999-01-19 | Sekisui Chem Co Ltd | ダイヤモンド状炭素薄膜の製造方法 |
JP2001220681A (ja) * | 2000-02-07 | 2001-08-14 | Anelva Corp | プラズマcvd装置及び薄膜形成方法 |
JP2003019433A (ja) * | 2001-07-06 | 2003-01-21 | Sekisui Chem Co Ltd | 放電プラズマ処理装置及びそれを用いた処理方法 |
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JP3698887B2 (ja) | 1998-03-16 | 2005-09-21 | 株式会社アルバック | ダイヤモンド状炭素膜の製造装置 |
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JP2002339072A (ja) | 2001-05-17 | 2002-11-27 | Ngk Insulators Ltd | 薄膜作製方法及び薄膜作製装置 |
US20020170495A1 (en) | 2001-05-17 | 2002-11-21 | Ngk Insulators, Ltd. | Method for fabricating a thin film and apparatus for fabricating a thin film |
JP2003328137A (ja) | 2002-05-10 | 2003-11-19 | Mitsubishi Heavy Ind Ltd | 成膜装置 |
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2003
- 2003-08-20 JP JP2003295768A patent/JP4738724B2/ja not_active Expired - Fee Related
-
2004
- 2004-02-10 US US10/774,454 patent/US7883750B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH09104985A (ja) * | 1995-08-08 | 1997-04-22 | Sanyo Electric Co Ltd | 回転電極を用いた高速成膜方法及びその装置 |
JPH1112735A (ja) * | 1997-06-25 | 1999-01-19 | Sekisui Chem Co Ltd | ダイヤモンド状炭素薄膜の製造方法 |
JP2001220681A (ja) * | 2000-02-07 | 2001-08-14 | Anelva Corp | プラズマcvd装置及び薄膜形成方法 |
JP2003019433A (ja) * | 2001-07-06 | 2003-01-21 | Sekisui Chem Co Ltd | 放電プラズマ処理装置及びそれを用いた処理方法 |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007138253A (ja) * | 2005-11-18 | 2007-06-07 | Ngk Insulators Ltd | 薄膜の製造方法 |
JP4566119B2 (ja) * | 2005-11-18 | 2010-10-20 | 日本碍子株式会社 | 薄膜の製造方法 |
JP2007146262A (ja) * | 2005-11-30 | 2007-06-14 | Ngk Insulators Ltd | 薄膜の製造方法 |
US7750574B2 (en) | 2006-01-20 | 2010-07-06 | Ngk Insulators, Ltd. | Method of generating discharge plasma |
JP2007194110A (ja) * | 2006-01-20 | 2007-08-02 | Ngk Insulators Ltd | 放電プラズマ発生方法 |
JP4578412B2 (ja) * | 2006-01-20 | 2010-11-10 | 日本碍子株式会社 | 放電プラズマ発生方法 |
JP2007257860A (ja) * | 2006-03-20 | 2007-10-04 | Ngk Insulators Ltd | ヒーター用部材 |
JP2007327089A (ja) * | 2006-06-07 | 2007-12-20 | Kirin Brewery Co Ltd | 被覆プラスチック製品及び被膜 |
US7914692B2 (en) | 2006-08-29 | 2011-03-29 | Ngk Insulators, Ltd. | Methods of generating plasma, of etching an organic material film, of generating minus ions, of oxidation and nitriding |
JP2009084591A (ja) * | 2007-09-27 | 2009-04-23 | Ngk Insulators Ltd | Dlc成膜装置 |
US7923377B2 (en) | 2008-03-27 | 2011-04-12 | Ngk Insulators, Ltd. | Method for forming amorphous carbon film |
JP2009242879A (ja) * | 2008-03-31 | 2009-10-22 | Ngk Insulators Ltd | Dlc成膜方法 |
WO2012144580A1 (ja) * | 2011-04-20 | 2012-10-26 | Ntn株式会社 | 非晶質炭素膜およびその成膜方法 |
JP2012233257A (ja) * | 2011-04-20 | 2012-11-29 | Ntn Corp | 非晶質炭素膜およびその成膜方法 |
US9217195B2 (en) | 2011-04-20 | 2015-12-22 | Ntn Corporation | Amorphous carbon film and method for forming same |
JP2013220987A (ja) * | 2012-04-19 | 2013-10-28 | Mitsuba Corp | 炭素膜、高分子製品、炭素膜被覆材の製造方法、成膜方法、及び、成膜装置 |
WO2015119199A1 (ja) * | 2014-02-06 | 2015-08-13 | 国立大学法人東京工業大学 | 管状体内にプラズマを発生させる発生装置 |
Also Published As
Publication number | Publication date |
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US20040161534A1 (en) | 2004-08-19 |
US7883750B2 (en) | 2011-02-08 |
JP4738724B2 (ja) | 2011-08-03 |
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