JP2004265895A5 - - Google Patents
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- JP2004265895A5 JP2004265895A5 JP2003011140A JP2003011140A JP2004265895A5 JP 2004265895 A5 JP2004265895 A5 JP 2004265895A5 JP 2003011140 A JP2003011140 A JP 2003011140A JP 2003011140 A JP2003011140 A JP 2003011140A JP 2004265895 A5 JP2004265895 A5 JP 2004265895A5
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Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003011140A JP2004265895A (ja) | 2003-01-20 | 2003-01-20 | 光学的測長器を備えたプローブ装置及びプローブ検査方法 |
| KR1020057013305A KR100787401B1 (ko) | 2003-01-20 | 2004-01-16 | 프로브 장치 및 피검사체 검사 방법 |
| CNB2004800024161A CN100395877C (zh) | 2003-01-20 | 2004-01-16 | 包含光学测距仪的探针装置以及探针的检查方法 |
| PCT/JP2004/000309 WO2004066378A1 (ja) | 2003-01-20 | 2004-01-16 | 光学的測長器を備えたプローブ装置及びプローブ検査方法 |
| EP04702857A EP1617468A4 (en) | 2003-01-20 | 2004-01-16 | PROBE WITH OPTICAL LENGTH MEASURING UNIT AND PROBE PROCESSING |
| TW093101370A TW200416397A (en) | 2003-01-20 | 2004-01-19 | Probe apparatus with distance-measuring device by optical way and probing method of the same |
| US11/184,796 US7221177B2 (en) | 2003-01-20 | 2005-07-20 | Probe apparatus with optical length-measuring unit and probe testing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003011140A JP2004265895A (ja) | 2003-01-20 | 2003-01-20 | 光学的測長器を備えたプローブ装置及びプローブ検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004265895A JP2004265895A (ja) | 2004-09-24 |
| JP2004265895A5 true JP2004265895A5 (https=) | 2006-02-09 |
Family
ID=32767271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003011140A Pending JP2004265895A (ja) | 2003-01-20 | 2003-01-20 | 光学的測長器を備えたプローブ装置及びプローブ検査方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7221177B2 (https=) |
| EP (1) | EP1617468A4 (https=) |
| JP (1) | JP2004265895A (https=) |
| KR (1) | KR100787401B1 (https=) |
| CN (1) | CN100395877C (https=) |
| TW (1) | TW200416397A (https=) |
| WO (1) | WO2004066378A1 (https=) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7071714B2 (en) | 2001-11-02 | 2006-07-04 | Formfactor, Inc. | Method and system for compensating for thermally induced motion of probe cards |
| US6972578B2 (en) * | 2001-11-02 | 2005-12-06 | Formfactor, Inc. | Method and system for compensating thermally induced motion of probe cards |
| US7352198B2 (en) * | 2006-01-18 | 2008-04-01 | Electroglas, Inc. | Methods and apparatuses for improved stabilization in a probing system |
| JP2007183194A (ja) * | 2006-01-10 | 2007-07-19 | Micronics Japan Co Ltd | プロービング装置 |
| JP2007183193A (ja) * | 2006-01-10 | 2007-07-19 | Micronics Japan Co Ltd | プロービング装置 |
| JP5040190B2 (ja) | 2006-06-27 | 2012-10-03 | 富士通セミコンダクター株式会社 | プローバ装置の制御方法、制御プログラム、およびプローバ装置 |
| US20080024796A1 (en) * | 2006-07-31 | 2008-01-31 | Samsung Electronics Co., Ltd. | Apparatus and method for sensing the position of a susceptor in semiconductor device manufacturing equipment |
| KR100790817B1 (ko) * | 2006-12-06 | 2008-01-03 | 삼성전자주식회사 | 반도체 제조관리 시스템 |
| KR100779029B1 (ko) * | 2006-12-15 | 2007-11-23 | 세크론 주식회사 | 프로브 스테이션 및 이를 이용한 웨이퍼 검사방법 |
| KR100878213B1 (ko) * | 2007-06-27 | 2009-01-13 | 세크론 주식회사 | 프로브카드 탐침 위치인지 장치 |
| JP2009276215A (ja) * | 2008-05-15 | 2009-11-26 | Tokyo Electron Ltd | プローブ装置及びコンタクト位置の補正方法 |
| JP5222038B2 (ja) | 2008-06-20 | 2013-06-26 | 東京エレクトロン株式会社 | プローブ装置 |
| JP5377915B2 (ja) * | 2008-09-30 | 2013-12-25 | 東京エレクトロン株式会社 | 検査装置及び検査方法 |
| JP5356769B2 (ja) * | 2008-10-15 | 2013-12-04 | 東京エレクトロン株式会社 | 載置台 |
| US8519728B2 (en) * | 2008-12-12 | 2013-08-27 | Formfactor, Inc. | Compliance control methods and apparatuses |
| US8120304B2 (en) | 2008-12-12 | 2012-02-21 | Formfactor, Inc. | Method for improving motion times of a stage |
| KR101052506B1 (ko) * | 2010-06-16 | 2011-07-29 | 주식회사 이노비즈 | 엘이디 검사장치 및 이를 이용한 엘이디 검사방법 |
| CN102350713B (zh) * | 2011-08-01 | 2014-04-02 | 济南德佳机器控股有限公司 | 物料优选加工设备及方法 |
| JP5781864B2 (ja) * | 2011-08-25 | 2015-09-24 | 株式会社日本マイクロニクス | 発光素子の検査装置及び検査方法 |
| EP2838107B1 (en) | 2013-08-14 | 2016-06-01 | Fei Company | Circuit probe for charged particle beam system |
| US9478237B2 (en) | 2013-09-18 | 2016-10-25 | Seagate Technology Llc | Work piece contact pad with centering feature |
| US10281518B2 (en) * | 2014-02-25 | 2019-05-07 | Formfactor Beaverton, Inc. | Systems and methods for on-wafer dynamic testing of electronic devices |
| JP6555002B2 (ja) * | 2015-08-19 | 2019-08-07 | 三星ダイヤモンド工業株式会社 | スクライブラインの検査方法 |
| CN106298578A (zh) * | 2016-10-21 | 2017-01-04 | 安徽鼎晖新能源科技有限公司 | 一种太阳能电池片测试台 |
| CN107768265B (zh) * | 2017-10-16 | 2021-01-26 | 德淮半导体有限公司 | 晶圆测试系统和方法 |
| CN109917194A (zh) | 2017-12-13 | 2019-06-21 | 清华四川能源互联网研究院 | 一种用于无线充电测试系统的自动激光距离校准套件 |
| CN109283452A (zh) * | 2018-10-19 | 2019-01-29 | 义乌臻格科技有限公司 | 一种激光二极管芯片光电属性检测方法和检测装置 |
| TWI704360B (zh) * | 2019-07-09 | 2020-09-11 | 致茂電子股份有限公司 | 覆晶式面射型雷射二極體之晶圓測試裝置 |
| KR102798910B1 (ko) * | 2020-08-26 | 2025-04-22 | 삼성디스플레이 주식회사 | 광학 검사 장치 및 광학 검사 방법 |
| TWI794968B (zh) * | 2021-09-10 | 2023-03-01 | 鴻勁精密股份有限公司 | 承置器檢知機構及其應用之作業裝置、作業機 |
| WO2026078079A1 (en) * | 2024-10-09 | 2026-04-16 | Technoprobe S.P.A. | Measurement system provided with means for measuring a distance from the semiconductor wafer |
| CN119178914B (zh) * | 2024-11-22 | 2025-08-08 | 杭州广立微电子股份有限公司 | 探针针压自动控制装置和晶圆接受测试系统 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4328553A (en) * | 1976-12-07 | 1982-05-04 | Computervision Corporation | Method and apparatus for targetless wafer alignment |
| US4929893A (en) * | 1987-10-06 | 1990-05-29 | Canon Kabushiki Kaisha | Wafer prober |
| JP2913609B2 (ja) * | 1991-03-08 | 1999-06-28 | 東京エレクトロン株式会社 | プロービング装置、プロービング方法およびプローブカード |
| JP2895989B2 (ja) * | 1991-06-10 | 1999-05-31 | 三菱電機株式会社 | プローバ装置およびウエハの検査方法 |
| KR100248569B1 (ko) * | 1993-12-22 | 2000-03-15 | 히가시 데쓰로 | 프로우브장치 |
| US5583445A (en) * | 1994-02-04 | 1996-12-10 | Hughes Aircraft Company | Opto-electronic membrane probe |
| JP2986142B2 (ja) * | 1994-04-19 | 1999-12-06 | 東京エレクトロン株式会社 | プローブ方法 |
| DE69533910T2 (de) * | 1994-03-31 | 2005-12-15 | Tokyo Electron Ltd. | Messfühlersystem und Messverfahren |
| JPH08124978A (ja) * | 1994-10-21 | 1996-05-17 | Hitachi Ltd | プローバ装置 |
| US5661548A (en) * | 1994-11-30 | 1997-08-26 | Nikon Corporation | Projection exposure method and apparatus including a changing system for changing the reference image-formation position used to generate a focus signal |
| JPH08213436A (ja) * | 1995-02-01 | 1996-08-20 | Tokyo Electron Ltd | 光学的高さ検出装置及びプローブ装置 |
| JP3639887B2 (ja) * | 1997-01-30 | 2005-04-20 | 東京エレクトロン株式会社 | 検査方法及び検査装置 |
| JP3491059B2 (ja) | 1997-05-08 | 2004-01-26 | 東京エレクトロン株式会社 | プローブ装置 |
| US6140828A (en) * | 1997-05-08 | 2000-10-31 | Tokyo Electron Limited | Prober and probe method |
| US6330052B1 (en) * | 1997-06-13 | 2001-12-11 | Canon Kabushiki Kaisha | Exposure apparatus and its control method, stage apparatus, and device manufacturing method |
| US6023172A (en) * | 1997-12-17 | 2000-02-08 | Micron Technology, Inc. | Light-based method and apparatus for maintaining probe cards |
| JP3356683B2 (ja) * | 1998-04-04 | 2002-12-16 | 東京エレクトロン株式会社 | プローブ装置 |
| JP3090132B2 (ja) * | 1998-12-18 | 2000-09-18 | 株式会社日立製作所 | プローブヘッドの製造方法 |
| JP2001110857A (ja) * | 1999-10-06 | 2001-04-20 | Tokyo Electron Ltd | プローブ方法及びプローブ装置 |
| JP2001358204A (ja) * | 2000-06-15 | 2001-12-26 | Tokyo Electron Ltd | 検査ステージ |
| JP4721247B2 (ja) * | 2001-03-16 | 2011-07-13 | 東京エレクトロン株式会社 | プローブ方法及びプローブ装置 |
| US6972578B2 (en) * | 2001-11-02 | 2005-12-06 | Formfactor, Inc. | Method and system for compensating thermally induced motion of probe cards |
| JP4357813B2 (ja) | 2002-08-23 | 2009-11-04 | 東京エレクトロン株式会社 | プローブ装置及びプローブ方法 |
-
2003
- 2003-01-20 JP JP2003011140A patent/JP2004265895A/ja active Pending
-
2004
- 2004-01-16 CN CNB2004800024161A patent/CN100395877C/zh not_active Expired - Fee Related
- 2004-01-16 EP EP04702857A patent/EP1617468A4/en not_active Ceased
- 2004-01-16 WO PCT/JP2004/000309 patent/WO2004066378A1/ja not_active Ceased
- 2004-01-16 KR KR1020057013305A patent/KR100787401B1/ko not_active Expired - Fee Related
- 2004-01-19 TW TW093101370A patent/TW200416397A/zh not_active IP Right Cessation
-
2005
- 2005-07-20 US US11/184,796 patent/US7221177B2/en not_active Expired - Fee Related