JP2003222654A - プローブ装置 - Google Patents

プローブ装置

Info

Publication number
JP2003222654A
JP2003222654A JP2002021048A JP2002021048A JP2003222654A JP 2003222654 A JP2003222654 A JP 2003222654A JP 2002021048 A JP2002021048 A JP 2002021048A JP 2002021048 A JP2002021048 A JP 2002021048A JP 2003222654 A JP2003222654 A JP 2003222654A
Authority
JP
Japan
Prior art keywords
probe
probe device
conversion element
mounting table
mechanical vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002021048A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003222654A5 (enExample
Inventor
Masahito Kobayashi
将人 小林
Haruhiko Yoshioka
晴彦 吉岡
Takashi Fujita
隆史 藤田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2002021048A priority Critical patent/JP2003222654A/ja
Priority to TW091137043A priority patent/TWI274163B/zh
Priority to US10/484,779 priority patent/US6933736B2/en
Priority to KR1020047001411A priority patent/KR100597227B1/ko
Priority to PCT/JP2003/000084 priority patent/WO2003065441A1/ja
Publication of JP2003222654A publication Critical patent/JP2003222654A/ja
Publication of JP2003222654A5 publication Critical patent/JP2003222654A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Vibration Prevention Devices (AREA)
  • Measuring Leads Or Probes (AREA)
JP2002021048A 2002-01-30 2002-01-30 プローブ装置 Pending JP2003222654A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2002021048A JP2003222654A (ja) 2002-01-30 2002-01-30 プローブ装置
TW091137043A TWI274163B (en) 2002-01-30 2002-12-23 Prober
US10/484,779 US6933736B2 (en) 2002-01-30 2003-01-08 Prober
KR1020047001411A KR100597227B1 (ko) 2002-01-30 2003-01-08 프로브장치
PCT/JP2003/000084 WO2003065441A1 (en) 2002-01-30 2003-01-08 Prober

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002021048A JP2003222654A (ja) 2002-01-30 2002-01-30 プローブ装置

Publications (2)

Publication Number Publication Date
JP2003222654A true JP2003222654A (ja) 2003-08-08
JP2003222654A5 JP2003222654A5 (enExample) 2005-07-28

Family

ID=27654380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002021048A Pending JP2003222654A (ja) 2002-01-30 2002-01-30 プローブ装置

Country Status (5)

Country Link
US (1) US6933736B2 (enExample)
JP (1) JP2003222654A (enExample)
KR (1) KR100597227B1 (enExample)
TW (1) TWI274163B (enExample)
WO (1) WO2003065441A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006029361A (ja) * 2004-07-12 2006-02-02 Toyota Motor Corp 圧電素子と電気装置が重合された圧電式振動抑制装置
JP2007227899A (ja) * 2006-01-13 2007-09-06 King Yuan Electronics Co Ltd Ｚｉｆコネクタつきプローブカード、その組立方法、ウェハテストシステム、及びそれを導入したウェハテスト方法
WO2008050518A1 (en) * 2006-10-20 2008-05-02 Panasonic Corporation Prober device
JP2022139421A (ja) * 2021-03-12 2022-09-26 レーザーテック株式会社 検査装置及び振動抑制方法

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
DE20114544U1 (de) 2000-12-04 2002-02-21 Cascade Microtech, Inc., Beaverton, Oreg. Wafersonde
AU2002327490A1 (en) 2001-08-21 2003-06-30 Cascade Microtech, Inc. Membrane probing system
EP1509776A4 (en) 2002-05-23 2010-08-18 Cascade Microtech Inc PROBE TO TEST ANY TESTING EQUIPMENT
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
WO2006017078A2 (en) 2004-07-07 2006-02-16 Cascade Microtech, Inc. Probe head having a membrane suspended probe
DE112004002554T5 (de) 2003-12-24 2006-11-23 Cascade Microtech, Inc., Beaverton Active wafer probe
DE202005021435U1 (de) 2004-09-13 2008-02-28 Cascade Microtech, Inc., Beaverton Doppelseitige Prüfaufbauten
US7265534B2 (en) * 2004-10-20 2007-09-04 Freescale Semiconductor, Inc. Test system for device characterization
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
WO2006137979A2 (en) 2005-06-13 2006-12-28 Cascade Microtech, Inc. Wideband active-passive differential signal probe
DE112007001399T5 (de) 2006-06-09 2009-05-07 Cascade Microtech, Inc., Beaverton Messfühler für differentielle Signale mit integrierter Symmetrieschaltung
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7750657B2 (en) * 2007-03-15 2010-07-06 Applied Materials Inc. Polishing head testing with movable pedestal
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3208734B2 (ja) * 1990-08-20 2001-09-17 東京エレクトロン株式会社 プローブ装置
JPH05149379A (ja) 1991-11-29 1993-06-15 Takenaka Komuten Co Ltd アクテイブ除振装置
JPH0669321A (ja) 1992-08-19 1994-03-11 Tokyo Electron Yamanashi Kk プローブ装置
US5642056A (en) * 1993-12-22 1997-06-24 Tokyo Electron Limited Probe apparatus for correcting the probe card posture before testing
JPH1082204A (ja) 1996-09-10 1998-03-31 Mitsubishi Steel Mfg Co Ltd 摩擦力制御型制振装置
US5814733A (en) * 1996-09-12 1998-09-29 Motorola, Inc. Method of characterizing dynamics of a workpiece handling system
JPH11304837A (ja) 1998-04-27 1999-11-05 Yokogawa Electric Corp プローブ装置
JP4588816B2 (ja) 1999-06-15 2010-12-01 特許機器株式会社 圧電制振ユニットおよびこれを用いた制振構造
DE19952943C2 (de) 1999-11-03 2003-07-03 Infineon Technologies Ag Nadelkarten-Justageeinrichtung zur Planarisierung von Nadelsätzen einer Nadelkarte

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006029361A (ja) * 2004-07-12 2006-02-02 Toyota Motor Corp 圧電素子と電気装置が重合された圧電式振動抑制装置
JP2007227899A (ja) * 2006-01-13 2007-09-06 King Yuan Electronics Co Ltd Ｚｉｆコネクタつきプローブカード、その組立方法、ウェハテストシステム、及びそれを導入したウェハテスト方法
WO2008050518A1 (en) * 2006-10-20 2008-05-02 Panasonic Corporation Prober device
JP2022139421A (ja) * 2021-03-12 2022-09-26 レーザーテック株式会社 検査装置及び振動抑制方法
JP7561662B2 (ja) 2021-03-12 2024-10-04 レーザーテック株式会社 検査装置及び振動抑制方法

Also Published As

Publication number Publication date
TW200302352A (en) 2003-08-01
WO2003065441A1 (en) 2003-08-07
US6933736B2 (en) 2005-08-23
KR100597227B1 (ko) 2006-07-06
US20040164759A1 (en) 2004-08-26
TWI274163B (en) 2007-02-21
KR20040020973A (ko) 2004-03-09

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