KR100597227B1 - 프로브장치 - Google Patents

프로브장치 Download PDF

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Publication number
KR100597227B1
KR100597227B1 KR1020047001411A KR20047001411A KR100597227B1 KR 100597227 B1 KR100597227 B1 KR 100597227B1 KR 1020047001411 A KR1020047001411 A KR 1020047001411A KR 20047001411 A KR20047001411 A KR 20047001411A KR 100597227 B1 KR100597227 B1 KR 100597227B1
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KR
South Korea
Prior art keywords
probe
conversion element
group
electrode pads
probe device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020047001411A
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English (en)
Korean (ko)
Other versions
KR20040020973A (ko
Inventor
후지타타카후미
고바야시마사히토
요시오카하루히코
Original Assignee
동경 엘렉트론 주식회사
후지타 타카후미
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Publication date
Application filed by 동경 엘렉트론 주식회사, 후지타 타카후미 filed Critical 동경 엘렉트론 주식회사
Publication of KR20040020973A publication Critical patent/KR20040020973A/ko
Application granted granted Critical
Publication of KR100597227B1 publication Critical patent/KR100597227B1/ko
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Vibration Prevention Devices (AREA)
KR1020047001411A 2002-01-30 2003-01-08 프로브장치 Expired - Fee Related KR100597227B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002021048A JP2003222654A (ja) 2002-01-30 2002-01-30 プローブ装置
JPJP-P-2002-00021048 2002-01-30
PCT/JP2003/000084 WO2003065441A1 (en) 2002-01-30 2003-01-08 Prober

Publications (2)

Publication Number Publication Date
KR20040020973A KR20040020973A (ko) 2004-03-09
KR100597227B1 true KR100597227B1 (ko) 2006-07-06

Family

ID=27654380

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020047001411A Expired - Fee Related KR100597227B1 (ko) 2002-01-30 2003-01-08 프로브장치

Country Status (5)

Country Link
US (1) US6933736B2 (enExample)
JP (1) JP2003222654A (enExample)
KR (1) KR100597227B1 (enExample)
TW (1) TWI274163B (enExample)
WO (1) WO2003065441A1 (enExample)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
DE10143173A1 (de) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
AU2002327490A1 (en) 2001-08-21 2003-06-30 Cascade Microtech, Inc. Membrane probing system
JP2005527823A (ja) 2002-05-23 2005-09-15 カスケード マイクロテック インコーポレイテッド デバイスのテスト用プローブ
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
DE202004021093U1 (de) 2003-12-24 2006-09-28 Cascade Microtech, Inc., Beaverton Aktiver Halbleiterscheibenmessfühler
JP4980903B2 (ja) 2004-07-07 2012-07-18 カスケード マイクロテック インコーポレイテッド 膜懸垂プローブを具えるプローブヘッド
JP4797341B2 (ja) * 2004-07-12 2011-10-19 トヨタ自動車株式会社 圧電素子と電気装置が重合された圧電式振動抑制装置
JP2008512680A (ja) 2004-09-13 2008-04-24 カスケード マイクロテック インコーポレイテッド 両面プロービング構造体
US7265534B2 (en) * 2004-10-20 2007-09-04 Freescale Semiconductor, Inc. Test system for device characterization
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
EP1932003A2 (en) 2005-06-13 2008-06-18 Cascade Microtech, Inc. Wideband active-passive differential signal probe
JP2007227899A (ja) * 2006-01-13 2007-09-06 King Yuan Electronics Co Ltd Ｚｉｆコネクタつきプローブカード、その組立方法、ウェハテストシステム、及びそれを導入したウェハテスト方法
US7609077B2 (en) 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
WO2008050518A1 (en) * 2006-10-20 2008-05-02 Panasonic Corporation Prober device
US7750657B2 (en) * 2007-03-15 2010-07-06 Applied Materials Inc. Polishing head testing with movable pedestal
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
JP7561662B2 (ja) * 2021-03-12 2024-10-04 レーザーテック株式会社 検査装置及び振動抑制方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3208734B2 (ja) * 1990-08-20 2001-09-17 東京エレクトロン株式会社 プローブ装置
JPH05149379A (ja) 1991-11-29 1993-06-15 Takenaka Komuten Co Ltd アクテイブ除振装置
JPH0669321A (ja) * 1992-08-19 1994-03-11 Tokyo Electron Yamanashi Kk プローブ装置
KR100248569B1 (ko) * 1993-12-22 2000-03-15 히가시 데쓰로 프로우브장치
JPH1082204A (ja) 1996-09-10 1998-03-31 Mitsubishi Steel Mfg Co Ltd 摩擦力制御型制振装置
US5814733A (en) * 1996-09-12 1998-09-29 Motorola, Inc. Method of characterizing dynamics of a workpiece handling system
JPH11304837A (ja) * 1998-04-27 1999-11-05 Yokogawa Electric Corp プローブ装置
JP4588816B2 (ja) 1999-06-15 2010-12-01 特許機器株式会社 圧電制振ユニットおよびこれを用いた制振構造
DE19952943C2 (de) * 1999-11-03 2003-07-03 Infineon Technologies Ag Nadelkarten-Justageeinrichtung zur Planarisierung von Nadelsätzen einer Nadelkarte

Also Published As

Publication number Publication date
US20040164759A1 (en) 2004-08-26
TWI274163B (en) 2007-02-21
US6933736B2 (en) 2005-08-23
TW200302352A (en) 2003-08-01
KR20040020973A (ko) 2004-03-09
WO2003065441A1 (en) 2003-08-07
JP2003222654A (ja) 2003-08-08

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