JP2002184872A5 - - Google Patents
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- Publication number
- JP2002184872A5 JP2002184872A5 JP2000381458A JP2000381458A JP2002184872A5 JP 2002184872 A5 JP2002184872 A5 JP 2002184872A5 JP 2000381458 A JP2000381458 A JP 2000381458A JP 2000381458 A JP2000381458 A JP 2000381458A JP 2002184872 A5 JP2002184872 A5 JP 2002184872A5
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- transistor
- semiconductor device
- hole
- common wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004065 semiconductor Substances 0.000 claims 10
- 238000007599 discharging Methods 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000381458A JP2002184872A (ja) | 2000-12-15 | 2000-12-15 | 認識番号を有する半導体装置、その製造方法及び電子装置 |
| TW090119900A TWI276001B (en) | 2000-12-15 | 2001-08-14 | Semiconductor device having identification number, manufacturing method thereof and electronic device |
| KR1020010052807A KR100767555B1 (ko) | 2000-12-15 | 2001-08-30 | 인식 번호를 갖는 반도체 장치 |
| US09/942,612 US6617172B2 (en) | 2000-12-15 | 2001-08-31 | Semiconductor device having identification number, manufacturing method thereof and electronic device |
| US10/610,631 US7442959B2 (en) | 2000-12-15 | 2003-07-02 | Semiconductor device having identification number, manufacturing method thereof and electronic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000381458A JP2002184872A (ja) | 2000-12-15 | 2000-12-15 | 認識番号を有する半導体装置、その製造方法及び電子装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004362654A Division JP3746289B2 (ja) | 2004-12-15 | 2004-12-15 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002184872A JP2002184872A (ja) | 2002-06-28 |
| JP2002184872A5 true JP2002184872A5 (enExample) | 2005-07-28 |
Family
ID=18849448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000381458A Withdrawn JP2002184872A (ja) | 2000-12-15 | 2000-12-15 | 認識番号を有する半導体装置、その製造方法及び電子装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US6617172B2 (enExample) |
| JP (1) | JP2002184872A (enExample) |
| KR (1) | KR100767555B1 (enExample) |
| TW (1) | TWI276001B (enExample) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7316934B2 (en) * | 2000-12-18 | 2008-01-08 | Zavitan Semiconductors, Inc. | Personalized hardware |
| JP3809353B2 (ja) * | 2001-08-02 | 2006-08-16 | キヤノン株式会社 | Id付き加工物の製造方法 |
| EP1300872A1 (en) * | 2001-10-08 | 2003-04-09 | Infineon Technologies SC300 GmbH & Co. KG | Semiconductor device identification apparatus |
| US7668702B2 (en) * | 2002-07-19 | 2010-02-23 | Applied Materials, Inc. | Method, system and medium for controlling manufacturing process using adaptive models based on empirical data |
| JP4024619B2 (ja) * | 2002-08-09 | 2007-12-19 | 株式会社日立製作所 | 半導体装置の情報読み取り装置 |
| DE10241141B4 (de) * | 2002-09-05 | 2015-07-16 | Infineon Technologies Ag | Halbleiter-Bauelement-Test-Verfahren für ein Halbleiter-Bauelement-Test-System mit reduzierter Anzahl an Test-Kanälen |
| US6908037B2 (en) * | 2002-09-26 | 2005-06-21 | Samsung Electronics, Co., Ltd. | Circuit for generating clock signal and decoding data signal for use in contactless integrated circuit card |
| US6962293B2 (en) * | 2002-09-26 | 2005-11-08 | Samsung Electronics Co., Ltd. | Circuit for generating clock signal and decoding data signal for use in contactless integrated circuit card |
| JP2004206371A (ja) * | 2002-12-25 | 2004-07-22 | Renesas Technology Corp | 半導体装置 |
| WO2005024949A1 (ja) * | 2003-08-28 | 2005-03-17 | Hitachi, Ltd. | 半導体装置及びその製造方法 |
| CN1922727B (zh) * | 2004-02-20 | 2011-12-21 | 株式会社半导体能源研究所 | 半导体器件及ic卡、ic标签、rfid、转发器、票据、证券、护照、电子装置、包和外衣的制造方法 |
| CN100527157C (zh) | 2004-04-01 | 2009-08-12 | 株式会社日立制作所 | 识别信息管理方法及系统以及中心服务器 |
| JP4347340B2 (ja) | 2004-05-18 | 2009-10-21 | 株式会社日立製作所 | 無線icタグ及びその製造方法 |
| US7343214B2 (en) * | 2004-10-15 | 2008-03-11 | Applied Materials, Inc. | Die-level traceability mechanism for semiconductor assembly and test facility |
| KR100934918B1 (ko) * | 2004-12-13 | 2010-01-06 | 도쿄엘렉트론가부시키가이샤 | 식별 코드를 갖는 반도체 칩, 그 칩의 제조 방법, 및반도체 칩 관리 시스템 |
| WO2006090459A1 (ja) * | 2005-02-24 | 2006-08-31 | Hitachi, Ltd. | 無線icタグおよびその製造方法 |
| WO2006117853A1 (ja) | 2005-04-27 | 2006-11-09 | Spansion Llc | 半導体装置、データの読み出し方法及び半導体装置の製造方法 |
| JP4528239B2 (ja) * | 2005-10-03 | 2010-08-18 | 株式会社日立製作所 | 無線icタグ |
| JP5148932B2 (ja) * | 2006-06-30 | 2013-02-20 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| KR101362955B1 (ko) | 2006-06-30 | 2014-02-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 및 그 제조 방법 |
| US7494846B2 (en) * | 2007-03-09 | 2009-02-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Design techniques for stacking identical memory dies |
| WO2009075675A1 (en) * | 2007-12-10 | 2009-06-18 | Agere Systems Inc. | Chip identification using top metal layer |
| US9002673B2 (en) | 2010-06-16 | 2015-04-07 | Broadcom Corporation | Simultaneous testing of semiconductor components on a wafer |
| US20110313711A1 (en) | 2010-06-16 | 2011-12-22 | Broadcom Corporation | Identifying Defective Semiconductor Components on a Wafer Using Component Triangulation |
| KR20120000281A (ko) | 2010-06-25 | 2012-01-02 | 삼성전자주식회사 | 마스크 롬 |
| EP2712021B1 (de) * | 2012-09-21 | 2018-04-04 | Siemens Aktiengesellschaft | Antenne für ein Schreib-/Lesegerät für RFID-Anordnungen und Schreib-/Lesegerät für den Betrieb mit einer externen Antenne |
| US10909440B2 (en) * | 2013-08-22 | 2021-02-02 | Texas Instruments Incorporated | RFID tag with integrated antenna |
| US9691709B2 (en) | 2015-02-26 | 2017-06-27 | International Business Machines Corporation | Semiconductor device security |
| JP2016180673A (ja) * | 2015-03-24 | 2016-10-13 | 株式会社デンソー | 半導体集積回路及び半導体集積回路のテストシステム |
| US10312091B1 (en) * | 2015-10-13 | 2019-06-04 | Multibeam Corporation | Secure permanent integrated circuit personalization |
| US20170221871A1 (en) * | 2016-02-01 | 2017-08-03 | Octavo Systems Llc | Systems and methods for manufacturing electronic devices |
| GB201609781D0 (en) | 2016-06-03 | 2016-07-20 | Irdeto Bv | Secured chip |
| US20180068047A1 (en) * | 2016-09-08 | 2018-03-08 | Mapper Lithography Ip B.V. | Method and system for fabricating unique chips using a charged particle multi-beamlet lithography system |
| US10522472B2 (en) | 2016-09-08 | 2019-12-31 | Asml Netherlands B.V. | Secure chips with serial numbers |
| US10418324B2 (en) | 2016-10-27 | 2019-09-17 | Asml Netherlands B.V. | Fabricating unique chips using a charged particle multi-beamlet lithography system |
| US11133206B2 (en) * | 2019-04-15 | 2021-09-28 | Tokyo Electron Limited | Method for die-level unique authentication and serialization of semiconductor devices using electrical and optical marking |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4213192A (en) * | 1979-01-15 | 1980-07-15 | Christensen Alton O Sr | Electron beam accessed read-write-erase random access memory |
| US4353064A (en) * | 1981-01-14 | 1982-10-05 | Honeywell Inc. | Battery operated access control card |
| JPS6233475A (ja) | 1985-08-06 | 1987-02-13 | Nec Corp | 半導体装置 |
| JP2840321B2 (ja) | 1989-09-20 | 1998-12-24 | 株式会社日立製作所 | 半導体装置 |
| JP2910424B2 (ja) | 1992-06-10 | 1999-06-23 | 日本電気株式会社 | 半導体装置の製造方法 |
| JP3200475B2 (ja) * | 1992-10-05 | 2001-08-20 | 三菱電機株式会社 | 半導体装置の製造方法 |
| JPH07140236A (ja) * | 1993-11-17 | 1995-06-02 | Sekisui Chem Co Ltd | 無線応答システム |
| KR100380546B1 (ko) * | 1994-02-24 | 2003-06-25 | 가부시끼가이샤 히다치 세이사꾸쇼 | 반도체집적회로장치의제조방법 |
| JPH08139208A (ja) | 1994-11-04 | 1996-05-31 | Toyota Motor Corp | 不揮発性メモリの製造システム及びその製造方法 |
| JPH0991970A (ja) | 1995-09-26 | 1997-04-04 | Olympus Optical Co Ltd | 非破壊型強誘電体メモリ及びその駆動方法 |
| JPH09180980A (ja) * | 1995-12-21 | 1997-07-11 | Mitsubishi Electric Corp | 半導体装置の製造システム |
| JPH09251519A (ja) * | 1996-03-14 | 1997-09-22 | Toshiba Corp | Icカード |
| US5990507A (en) * | 1996-07-09 | 1999-11-23 | Kabushiki Kaisha Toshiba | Semiconductor device having ferroelectric capacitor structures |
| JPH1055939A (ja) * | 1996-08-08 | 1998-02-24 | Seiko Epson Corp | 半導体装置、半導体装置の製造方法及び電子機器システム |
| JP4025372B2 (ja) | 1996-12-04 | 2007-12-19 | 株式会社ルネサステクノロジ | 半導体装置 |
| JPH10224278A (ja) * | 1997-02-10 | 1998-08-21 | Omron Corp | 非接触データ通信システム |
| JPH118327A (ja) | 1997-06-16 | 1999-01-12 | Sony Corp | 半導体チップ識別コード付与方法及び半導体チップ管理方法 |
| KR20000046928A (ko) * | 1998-12-31 | 2000-07-25 | 조정일 | 전자 지갑 카드 운영 시스템 |
| US6428718B1 (en) * | 1999-08-26 | 2002-08-06 | Advanced Micro Devices, Inc. | Selective back side wet etch |
| JP2000332135A (ja) * | 2000-01-01 | 2000-11-30 | Hitachi Ltd | 半導体集積回路装置 |
| JP2001337439A (ja) * | 2000-05-26 | 2001-12-07 | Hitachi Ltd | 半導体集積回路の設計、製造方法および検査方法並びに半導体集積回路 |
| US7177190B2 (en) * | 2004-11-26 | 2007-02-13 | Aplus Flash Technology, Inc. | Combination nonvolatile integrated memory system using a universal technology most suitable for high-density, high-flexibility and high-security sim-card, smart-card and e-passport applications |
-
2000
- 2000-12-15 JP JP2000381458A patent/JP2002184872A/ja not_active Withdrawn
-
2001
- 2001-08-14 TW TW090119900A patent/TWI276001B/zh not_active IP Right Cessation
- 2001-08-30 KR KR1020010052807A patent/KR100767555B1/ko not_active Expired - Fee Related
- 2001-08-31 US US09/942,612 patent/US6617172B2/en not_active Expired - Lifetime
-
2003
- 2003-07-02 US US10/610,631 patent/US7442959B2/en not_active Expired - Fee Related
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