JP2001507864A5 - - Google Patents

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Publication number
JP2001507864A5
JP2001507864A5 JP1998530091A JP53009198A JP2001507864A5 JP 2001507864 A5 JP2001507864 A5 JP 2001507864A5 JP 1998530091 A JP1998530091 A JP 1998530091A JP 53009198 A JP53009198 A JP 53009198A JP 2001507864 A5 JP2001507864 A5 JP 2001507864A5
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JP
Japan
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JP1998530091A
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English (en)
Japanese (ja)
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JP2001507864A (ja
JP4518573B2 (ja
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Priority claimed from US08/775,571 external-priority patent/US5780346A/en
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Publication of JP2001507864A publication Critical patent/JP2001507864A/ja
Publication of JP2001507864A5 publication Critical patent/JP2001507864A5/ja
Application granted granted Critical
Publication of JP4518573B2 publication Critical patent/JP4518573B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP53009198A 1996-12-31 1997-12-16 ホウ素の外部拡散を防ぎ応力を減少させるためのｎ▲下２▼ｏ窒化酸化物トレンチ側壁 Expired - Fee Related JP4518573B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/775,571 US5780346A (en) 1996-12-31 1996-12-31 N2 O nitrided-oxide trench sidewalls and method of making isolation structure
US08/775,571 1996-12-31
PCT/US1997/023307 WO1998029905A1 (en) 1996-12-31 1997-12-16 N2o nitrided-oxide trench sidewalls to prevent boron outdiffusion and decrease stress

Publications (3)

Publication Number Publication Date
JP2001507864A JP2001507864A (ja) 2001-06-12
JP2001507864A5 true JP2001507864A5 (enExample) 2005-06-16
JP4518573B2 JP4518573B2 (ja) 2010-08-04

Family

ID=25104813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53009198A Expired - Fee Related JP4518573B2 (ja) 1996-12-31 1997-12-16 ホウ素の外部拡散を防ぎ応力を減少させるためのｎ▲下２▼ｏ窒化酸化物トレンチ側壁

Country Status (8)

Country Link
US (3) US5780346A (enExample)
EP (1) EP1002336B1 (enExample)
JP (1) JP4518573B2 (enExample)
KR (1) KR100384761B1 (enExample)
AU (1) AU5705798A (enExample)
DE (1) DE69733842T2 (enExample)
IL (1) IL130562A (enExample)
WO (1) WO1998029905A1 (enExample)

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