JP2001018185A - 位置検出機能付きチャック - Google Patents

位置検出機能付きチャック

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Publication number
JP2001018185A
JP2001018185A JP11193260A JP19326099A JP2001018185A JP 2001018185 A JP2001018185 A JP 2001018185A JP 11193260 A JP11193260 A JP 11193260A JP 19326099 A JP19326099 A JP 19326099A JP 2001018185 A JP2001018185 A JP 2001018185A
Authority
JP
Japan
Prior art keywords
scale
casing
drive rod
chuck
drive unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11193260A
Other languages
English (en)
Other versions
JP3293802B2 (ja
Inventor
Seiji Takanashi
梨 精 二 高
Satoru Ito
藤 哲 伊
Koichiro Kanda
田 浩一郎 神
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP19326099A priority Critical patent/JP3293802B2/ja
Priority to TW089119861A priority patent/TW464591B/zh
Priority to GB0024803A priority patent/GB2367803B/en
Priority to US09/684,672 priority patent/US6428070B1/en
Priority to CNB001319574A priority patent/CN1296183C/zh
Publication of JP2001018185A publication Critical patent/JP2001018185A/ja
Application granted granted Critical
Publication of JP3293802B2 publication Critical patent/JP3293802B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B5/00Clamps
    • B25B5/16Details, e.g. jaws, jaw attachments
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B5/00Clamps
    • B25B5/06Arrangements for positively actuating jaws
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00Controls for manipulators
    • B25J13/08Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/02Gripping heads and other end effectors servo-actuated
    • B25J15/0246Gripping heads and other end effectors servo-actuated actuated by an electromagnet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/02Gripping heads and other end effectors servo-actuated
    • B25J15/0253Gripping heads and other end effectors servo-actuated comprising parallel grippers
    • B25J15/0266Gripping heads and other end effectors servo-actuated comprising parallel grippers actuated by articulated links
    • B25J15/0273Gripping heads and other end effectors servo-actuated comprising parallel grippers actuated by articulated links comprising linear guide means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S294/00Handling: hand and hoist-line implements
    • Y10S294/907Sensor controlled device

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Human Computer Interaction (AREA)
  • Manipulator (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

(57)【要約】 【課題】 ジョー部材の動作位置を全ストロークについ
て検出することが可能な位置検出機能を備えたチャック
を得る。 【解決手段】 ケーシング2に、ワークを把持するため
の複数の開閉自在のジョー部材3,3と、直線往復運動
をする駆動ロッド9を備えた駆動部4と、上記駆動ロッ
ド9の直線往復運動をジョー部材3,3の開閉動作に変
換する変換機構7と、駆動ロッド9と同期して変移する
スケール33及び該スケール33上の目盛を読み取る読
取器34からなる、上記ジョー部材3,3の動作位置を
全ストロークについて検出可能な位置検出部5と、上記
スケール33の直線往復移動をガイドするリニアガイド
機構6とを組み込む。

Description

【発明の詳細な説明】
【0001】
【発明の属する技術分野】本発明は、開閉自在の複数の
ジョー部材間にワークを把持して目的の場所に搬送する
チャックに関するものであり、更に詳しくは、ジョー部
材の動作位置を検出可能な位置検出機能付きのチャック
に関するものである。
【0002】
【従来の技術】空気圧を利用するエアシリンダーや電磁
力を利用するリニアモーター等を駆動源として内蔵し、
これらのエアシリンダー又はリニアモーターの作用によ
り複数のジョー部材を開閉させてワークを把持するよう
にしたチャックは、従来より良く知られているところで
ある。
【0003】この種のチャックには、ジョー部材の開閉
位置を検出するために、磁気を利用した位置検出装置を
付設したものがある。この位置検出装置は、上記エアシ
リンダーやリニアモーターの駆動ロッドに取り付けるか
又はジョー部材に取り付けた永久磁石と、ケーシング側
に取り付けた磁気センサーとにより構成されていて、こ
の磁気センサーで永久磁石を検出することにより、ジョ
ー部材の開閉位置を検出するものである。
【0004】しかしながら、上記従来の位置検出装置
は、駆動ロッド又はジョー部材に取り付けた永久磁石を
検出する方式であるため、ジョー部材の開閉ストローク
端での位置、即ち、ジョー部材がワークを把持した位置
か又は開放した位置しか検出することができず、ジョー
部材の動作位置を全ストロークについて検出ことはでき
なかった。
【0005】
【発明が解決しようとする課題】本発明の主要な技術的
課題は、ジョー部材の動作位置を全ストロークについて
検出することが可能な位置検出機能を備えたチャックを
提供することにある。
【0006】本発明の他の技術的課題は、ジョー部材を
開閉するための駆動部とジョー部材の動作位置を検出す
るための位置検出部とを、その他の機構と共にケーシン
グ内に大形化することのないように効率良く組み込ん
だ、合理的設計構造のチャックを提供することにある。
【0007】本発明の更に他の技術的課題は、上記チャ
ックにおいて、上記駆動部と位置検出部とを有機的に結
合してケーシング内に組み込むことにより、ジョー部材
の開閉動作が不円滑になるのを防止して安定した開閉動
作が得られるようにすることにある。
【0008】
【課題を解決するための手段】上記課題を解決するた
め、本発明によれば、ケーシングの軸方向先端部に該ケ
ーシングの軸線と交差する方向に開閉自在なるように設
けられた、ワークを把持するための複数のジョー部材;
ケーシングの軸方向基端部側の部分に該ケーシングの左
右何れか一半部に位置するように設けられた、該ケーシ
ングの軸線方向に直線往復運動をする駆動ロッドを備え
た駆動部;ケーシングの基端部側の上記駆動部と左右隣
り合う位置に設けられ、上記駆動ロッドと同期してケー
シングの軸線方向に直線的に往復移動するスケールと、
ケーシング上の定位置に固定されて該スケールに刻まれ
た目盛を読み取る読取器とを有する、上記ジョー部材の
動作位置を全ストロークについて検出可能な位置検出
部;上記駆動部と位置検出部との間に配設された、上記
スケールの直線往復移動をガイドするためのリニアガイ
ド機構;上記ジョー部材と駆動部との間に設けられた、
上記駆動ロッドの直線往復運動をジョー部材の開閉動作
に変換するための変換機構;を有することを特徴とする
位置検出機能付きチャックが提供される。
【0009】上記構成を有するチャックは、駆動部の駆
動ロッドの移動によってジョー部材が開閉され、ワーク
が把持又は解放される。このとき、上記駆動ロッドと同
期して移動するスケール上の目盛が読取器で連続的に読
み取られることにより、ジョー部材の動作位置が全開閉
ストロークについて検出される。
【0010】ここで、上記駆動部と位置検出部及びリニ
アガイド機構が、ケーシングの左右隣り合う位置にケー
シングの幅内即ちジョー部材の設置領域内に納まるよう
に効率よく組み込まれているため、上記位置検出部やリ
ニアガイド機構等を新たに付加することによってチャッ
クが大形化することがない。しかも、リニアガイド機構
を駆動部と位置検出部との間に設けたことにより、スケ
ールを駆動ロッドと同期した状態で安定的に変移させる
ことができるだけでなく、該駆動ロッドの動きを変換機
構を介してジョー部材に確実に伝達させて該ジョー部材
を安定的に開閉させることができる。
【0011】本発明の具体的な実施形態によれば、上記
変換機構が、揺動によりジョー部材を開閉させる2つの
レバーと、これらのレバーを駆動ロッドに連結するため
の中継プレートとを有していて、該中継プレート上のチ
ャック中心に位置する中継軸に、各レバーの基端部が共
通の支軸で回動自在に枢支されると共に、該中継プレー
トの上記中継軸を挟んで互いに異なる位置に、上記駆動
ロッドとスケールを支持するスケール支持部材とがそれ
ぞれ連結されることにより、該中継プレートを介して上
記駆動ロッドとスケールとが相互に連結されている。
【0012】本発明の他の具体的な実施形態によれば、
上記リニアガイド機構が、ガイドレールと該ガイドレー
ルに沿って摺動自在のスライダーとからなっていて、ガ
イドレールが駆動部の外壁に駆動ロッドと平行に固定さ
れ、スライダーがスケール側に取り付けられている。
【0013】上記駆動ロッドを中継プレートに連結する
場合、こじりを防止するため、カラーの介在により傾斜
方向の僅かな自由度を持たせた状態で連結することが望
ましい。
【0014】
【発明の実施の形態】以下、本発明に係る位置検出機能
付きチャックの好ましい代表的な実施形態を図面を参照
しながら詳細に説明する。
【0015】図1〜図3は本発明の第1実施例を示すも
ので、この第1実施例のチャック1Aは、ジョー部材
3,3を開閉するための駆動源として、電磁力を利用す
るリニアモーターを用いたものである。更に詳しく説明
すると、このチャック1Aは、全体として角柱状をした
ケーシング2と、該ケーシング2の軸方向先端部に開閉
自在に設けられたワーク把持用の複数のジョー部材3,
3と、ケーシング2の軸方向基端部側の左右何れか一半
部に設けられた、該ケーシング2の軸線方向に直線往復
運動をする駆動ロッド9を有する駆動部4と、該駆動部
4と左右隣り合う位置に設けられた、上記ジョー部材
3,3の動作位置を全ストロークについて検出可能な位
置検出部5と、上記駆動部4と位置検出部5との間に配
設されたリニアガイド機構6と、上記ジョー部材3,3
と駆動部4との間に設けられて駆動ロッド9の直線往復
運動をジョー部材3,3の開閉動作に変換する変換機構
7とを有している。
【0016】上記ケーシング2は、矩形プレート状をし
た第1部材2aと、この第1部材2a上に取り付けられ
た縦長角柱状の第2部材2bとからなっていて、上記第
1部材2aに2つのジョー部材3,3がケーシング2の
軸線と直交する方向に開閉自在なるように支持され、第
2部材2bに上記駆動部4と位置検出部5及びリニアガ
イド機構6が並べて設けられている。
【0017】上記駆動部4は、ケーシング2の一部で形
成された筒部10を有していて、この筒部10内にリニ
アモーター8が収容されている。このリニアモーター8
は、磁性体からなる円筒形の磁気枠12と、該磁気枠1
2内に収容された非磁性体製のボビン13と、このボビ
ン13に巻かれた複数の磁気コイル14と、上記ボビン
13内に軸線方向に摺動自在に挿入されたピストン集合
体15とからなるもので、このピストン集合体15は、
上記筒部10の中心部を摺動自在に貫通する上記駆動ロ
ッド9の外周に、ヨーク15bを挟んで複数の円環状の
永久磁石15aを取り付けることにより形成されてい
る。これらの永久磁石15aは、軸線方向の両面にN極
とS極を着磁したもので、それらの極性を交互に逆向き
にした状態で配設されている。換言すれば、隣接する磁
石15a,15aのN極同士とS極同士が交互に向き合
うように配設され、押え板15cで上記駆動ロッド9上
の所定の位置に固定されている。
【0018】図中16は、上記筒部10の一端に取り付
けられたピストンカバー、17はその外側に取り付けら
れたキャップであって、上記ピストンカバー16により
駆動ロッド9の端部が摺動自在に支持されている。
【0019】従って上記駆動部4において、磁気コイル
14にリード線14aを通じて正方向又は逆方向の直流
電流を通電すると、その電流の向きに応じてピストン集
合体15が前進又は後退し、駆動ロッド9が伸縮する。
【0020】上記駆動ロッド9の先端は、上記変換機構
7の一部をなす平面視略L字形の中継プレート20に連
結され、この中継プレート20に、変換機構7の主要構
成部材である2つのレバー21,21が連結されてい
る。これらのレバー21,21は、ケーシング2の第1
部材2aと第2部材2bとの間の空間部内に左右対称に
配置され、各レバー21の中間部分が軸22でケーシン
グ2に回動自在に枢支され、各レバー21の基端部が、
上記中継プレート20からチャックの中心に位置するよ
うに延出する中継軸20aに共通の支軸23で回動自在
に枢支され、各レバー21,21の先端部は、上記第2
部材2bの孔24内に嵌合して2つのジョー部材3,3
にそれぞれ個別に連結されている。
【0021】上記ジョー部材3,3は、上面中央部に凹
部26を有する第1部分3aと、該第1部分3aからT
字形又はL字形に突出する第2部分3bとからなるもの
で、図3から分かるように、上記第1部分3aが、第2
部材2bの前面に形成されたガイド溝27内に摺動自在
に嵌合することにより、該ガイド溝27に沿って直線的
に開閉自在なるように支持されている。そして、相対す
る上記第1部分3aの外側面とガイド溝27の内側面に
形成された摺動溝の内部には、球状又はロール状をした
複数の転動子28が介在せしめられ、この転動子28に
よってジョー部材3,3の開閉が円滑に行われるように
なっている。これにより上記ガイド溝27とジョー部材
3,3の第1部分3aとは、2つのジョー部材3,3の
開閉を直線的に案内するリニアガイド機構を構成するも
のである。
【0022】また、上記中継プレート20は、上記中継
軸20aとは異なる位置で上記駆動ロッド9にボルト3
0で連結され、この駆動ロッド9の伸縮によって一緒に
前進又は後退するようになっている。そして、この中継
プレート20の前後進により上記レバー21,21が、
軸22を中心に揺動し、一対のジョー部材3,3が開閉
してそれらの間にワークが把持又は解放されるようにな
っている。実際には、ジョー部材3,3に設けた取付孔
3cを利用してワークに合ったアタッチメントが取り付
けられ、このアタッチメントによりワークが把持され
る。
【0023】なお、上記駆動ロッド9を中継プレート2
0に連結する場合、こじりが発生しないようにするた
め、カラー31を介在させてフローティング式に連結す
ることにより、傾斜方向の僅かな自由度を持たせておく
ことが望ましい。
【0024】上記位置検出部5は、表面に一定ピッチで
多数の線状目盛が刻まれたプレート状のガラス製スケー
ル33と、該スケール33上の目盛の数を読み取って読
取信号を出力するエンコーダー読取器34とを有してい
る。上記スケール33は、スケール支持部材38に取り
付けられていて、このスケール支持部材38が中継プレ
ート20に、上記駆動ロッド9とは中継軸20aを挟ん
で実質的に反対側の異なる位置にボルト39で固定さ
れ、一方の読取器34は、ケーシング2上の定位置に固
定されている。
【0025】また、上記位置検出部5には、上記読取器
34から出力される信号波形を成形してデジタル信号化
し、図示しないコントローラーに向けて出力する波形成
形器35が、駆動部4の外壁に固定された取付部材36
により、上記読取器34と隣接する位置にケーシング2
からはみ出さないように取り付けられている。
【0026】そして、駆動ロッド9と同期して直線的に
往復移動する上記スケール33上の目盛の数を上記読取
器34で読み取り、その信号波形を波形成形器35で成
形してコントローラーに送りこみ、このコントローラー
で演算処理することにより、上記駆動ロッド9の動作位
置、即ちジョー部材3,3の動作位置が検出されるよう
になっている。なお、このようなエンコーダー式検出装
置の検出原理自体は既に公知であるから、それに関する
これ以上の詳細な説明は省略する。
【0027】上記位置検出部5と駆動部4との間に設け
られたリニアガイド機構6は、ガイドレール6aと、該
ガイドレール6aに沿って摺動自在のスライダー6bと
からなっている。そして、上記ガイドレール6aが駆動
部4の外壁に駆動ロッド9と平行に取り付けられ、スラ
イダー6bがスケール支持部材38に取り付けられてい
る。このように位置検出部5と駆動部4との間にリニア
ガイド機構6を設けることにより、駆動ロッド9が中継
プレート20に中継軸20aとは軸心の異なる位置で連
結されていても、この駆動ロッド9により中継プレート
20を介してスケール33と一対のレバー21,21と
を、こじりなどを生じることなく円滑且つ確実に動作さ
せることができる。
【0028】かくして、上記駆動部4と位置検出部5及
びリニアガイド機構6が、ケーシング2内の相互に隣接
する位置に、上記ジョー部材3,3の設置領域内に納ま
ってそれより側方にはみ出すことがないように組み込ま
れている。
【0029】上記構成を有するチャックは、駆動部4の
駆動ロッド9の移動によってジョー部材3,3が開閉さ
れ、これらのジョー部材3,3によってワークが把持又
は解放される。このとき、上記駆動ロッド9と同期して
移動するスケール33上の目盛の数が読取器34で読み
取られ、該読取器34から出力される信号波形が波形成
形器35で成形されてデジタル信号化され、コントロー
ラーに送られて演算処理されることにより、ジョー部材
3,3の動作位置が全開閉ストロークについて検出され
る。
【0030】また、上記駆動部4と位置検出部5及びリ
ニアガイド機構6が、ケーシング2の隣り合う位置に該
ケーシング2の幅内即ちジョー部材3,3の設置領域内
に納まるように効率よく組み込まれているため、上記位
置検出部5やリニアガイド機構6等を新たに付加して
も、それによってチャックが大形化することがない。し
かも、上記リニアガイド機構6を駆動部4と位置検出部
5との間に設けたことにより、スケール33を駆動ロッ
ド9と同期した状態で安定的に変移させることができ、
特に、駆動ロッド9と中継軸20aとが同一軸線上にな
くても、該駆動ロッド9により中継プレート20を介し
て上記スケール33及びレバー21,21を確実且つ安
定的に動作させることができる。
【0031】図4は本発明の第2実施例を示すもので、
この第2実施例のチャック1Bは、ジョー部材3,3を
開閉するための駆動源として、空気圧を利用するエアシ
リンダー機構50を使用している点が上記第1実施例と
相違するものである。このエアシリンダー機構50は、
側面に2つのポート52a,52bを備えた円筒形のシ
リンダー部材51と、該シリンダー部材51内に摺動自
在に収容されたピストン53と、このピストン53に一
体に連結された駆動ロッド9と、シリンダー部材51の
開放端を塞ぐヘッドカバー54とからなるもので、この
エアシリンダー機構70が駆動部4の筒部10内に収容
されている。
【0032】この第2実施例は、2つのポート52a,
52bからピストン53の両側の第1圧力室55aと第
2圧力室55bとに圧縮空気を交互に給排することによ
り、上記ピストン53を摺動させて上記駆動ロッド9を
直線的に往復動作させるものである。
【0033】この第2実施例のようにジョー部材3,3
を開閉するための駆動源としてエアシリンダー機構50
を用いることにより、第1実施例のようにリニアモータ
ー8を使用する場合に比べて大きい把持力を得ることが
できる。
【0034】なお、第2実施例の上記以外の構成及び作
用については実質的に第1実施例と同じであるから、そ
れらの説明は省略する。
【0035】
【発明の効果】このように本発明によれば、ジョー部材
の動作位置を全ストロークについて検出することが可能
であると共に、駆動部と位置検出部及びリニアガイド機
構をケーシング内にチャックが大形化することのないよ
うに効率良く組み込んだ、合理的設計構造のチャックを
得ることができる。
【図面の簡単な説明】
【図1】本発明に係るチャックの第1実施例を示す縦断
正面図である。
【図2】図1のチャックの横断平面図である。
【図3】図1のチャックの要部側断面図である。
【図4】本発明に係るチャックの第2実施例を示す縦断
正面図である。
【符号の説明】
1A,1B チャック 2 ケーシング 3 ジョー部材 4 駆動部 5 位置検出部 6 リニアガイド機構 6a ガイドレール 6b スライダー 7 変換機構 9 駆動ロッド 20 中継プレート 21 レバー 23 支軸 31 カラー 33 スケール 34 読取器 38 スケール支持部材
───────────────────────────────────────────────────── フロントページの続き (72)発明者 神 田 浩一郎 茨城県筑波郡谷和原村絹の台4−2−2 エスエムシー株式会社筑波技術センター内 Fターム(参考) 3C029 BB02 3F061 AA01 BA03 BB08 BC09 BD00 BD04 DD00 DD05

Claims (4)

    【特許請求の範囲】
  1. 【請求項1】ケーシングの軸方向先端部に該ケーシング
    の軸線と交差する方向に開閉自在なるように設けられ
    た、ワークを把持するための複数のジョー部材;ケーシ
    ングの軸方向基端部側の部分に該ケーシングの左右何れ
    か一半部に位置するように設けられた、該ケーシングの
    軸線方向に直線往復運動をする駆動ロッドを備えた駆動
    部;ケーシングの基端部側の上記駆動部と左右隣り合う
    位置に設けられ、上記駆動ロッドと同期してケーシング
    の軸線方向に直線的に往復移動するスケールと、ケーシ
    ング上の定位置に固定されて該スケールに刻まれた目盛
    を読み取る読取器とを有する、上記ジョー部材の動作位
    置を全ストロークについて検出可能な位置検出部;上記
    駆動部と位置検出部との間に配設された、上記スケール
    の直線往復移動をガイドするためのリニアガイド機構;
    上記ジョー部材と駆動部との間に設けられた、上記駆動
    ロッドの直線往復運動をジョー部材の開閉動作に変換す
    るための変換機構;を有することを特徴とする位置検出
    機能付きチャック。
  2. 【請求項2】請求項1に記載のチャックにおいて、上記
    変換機構が、揺動によりジョー部材を開閉させる2つの
    レバーと、これらのレバーを駆動ロッドに連結するため
    の中継プレートとを有していて、該中継プレート上のチ
    ャック中心に位置する中継軸に、各レバーの基端部が共
    通の支軸で回動自在に枢支されると共に、該中継プレー
    トの上記中継軸を挟んで互いに異なる位置に、上記駆動
    ロッドとスケールを支持するスケール支持部材とがそれ
    ぞれ連結されることにより、該中継プレートを介して上
    記駆動ロッドとスケールとが相互に連結されていること
    を特徴とするもの。
  3. 【請求項3】請求項1又は2に記載のチャックにおい
    て、上記リニアガイド機構が、ガイドレールと該ガイド
    レールに沿って摺動自在のスライダーとからなってい
    て、ガイドレールが駆動部の外壁に駆動ロッドと平行に
    固定され、スライダーがスケール側に取り付けられてい
    ることを特徴とするもの。
  4. 【請求項4】請求項2に記載のチャックにおいて、上記
    駆動ロッドが、中継プレートにカラーの介在により傾斜
    方向の僅かな自由度を持たせた状態で連結されているこ
    とを特徴とするもの。
JP19326099A 1999-07-07 1999-07-07 位置検出機能付きチャック Expired - Fee Related JP3293802B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP19326099A JP3293802B2 (ja) 1999-07-07 1999-07-07 位置検出機能付きチャック
TW089119861A TW464591B (en) 1999-07-07 2000-09-26 Chuck with position detecting function
GB0024803A GB2367803B (en) 1999-07-07 2000-10-10 Chuck with position detecting means
US09/684,672 US6428070B1 (en) 1999-07-07 2000-10-11 Chuck with position detecting function
CNB001319574A CN1296183C (zh) 1999-07-07 2000-10-25 具有位置检测功能的夹头

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP19326099A JP3293802B2 (ja) 1999-07-07 1999-07-07 位置検出機能付きチャック
GB0024803A GB2367803B (en) 1999-07-07 2000-10-10 Chuck with position detecting means
US09/684,672 US6428070B1 (en) 1999-07-07 2000-10-11 Chuck with position detecting function
CNB001319574A CN1296183C (zh) 1999-07-07 2000-10-25 具有位置检测功能的夹头

Publications (2)

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JP2001018185A true JP2001018185A (ja) 2001-01-23
JP3293802B2 JP3293802B2 (ja) 2002-06-17

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Country Link
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JP (1) JP3293802B2 (ja)
CN (1) CN1296183C (ja)
GB (1) GB2367803B (ja)
TW (1) TW464591B (ja)

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GB2367803A (en) 2002-04-17
CN1349878A (zh) 2002-05-22
GB2367803B (en) 2003-01-15

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