518390 Α7 ____ Β7 五、發明說明（1) 【發明所屬之技術領域】 本發明係關於門扉開關裝置，尤其關於在無塵室內所 使用以防塵爲目的之門扉開關裝置。 【習知技術】 從以往，在無塵室內所使用之開關門扉需要具有防麈 機能。於是’在門扉之摩擦部分具有吸引機構之開關門扉 或無摩擦部分之非接觸式之門扉開關裝置。 於非接觸式門扉開關裝置時，若將第1門扉構件與第 2門扉構件裝設拉門式時，互相交錯處所雖然會形成間隙 ，但是，一般無塵室內因較無塵室外爲高壓，即使具有間 隙已知幾乎無從外之灰塵等之侵入。另者，作爲消除成爲 發生灰塵要因之摩擦部分利用磁性之門扉開關裝置採用曰 本專利特開平2 - 1 6 7 9 7 9號公報所揭示之機構。然 而，倘若依據上述公報利用磁性之門扉開關裝置，因利用 將門扉支持成開關自如所用之支持裝置，與在開關驅動門 扉之驅動裝置之雙方利用電磁鐵，所以，製作成本變高， 並且因消費電力多所以具有維修成本高之問題。亦即，電 磁鐵係較永久磁鐵相較，爲昂貴，爲了維持電磁鐵之機會g 經常需要電氣之供給但是使用永久磁鐵時也不需要維修經 費。 另者，作爲設置於無塵室內之種種晶圓處理裝置之驅 動源，因已設有空壓供給用配管之情形爲居多，所以進行 控制閥與配管時將可簡單地得到門扉開關所用之驅動源。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐〉 (請先閱讀背面之注意事項再填寫本頁) —Aw ·1111111 ^ ·11111111 I · 經濟部智慧財產局員Η消費合作社印製 經濟部智慧財產局員工消費合作社印製 518390 A7 _____ B7 五、發明說明（2) 又，將複數永久磁鐵固定於門扉，使其成爲由磁性體 所成之圓桿構件對向裝設成行動自如，就可用非接觸狀態 導引，但是，若只單純地配置時，即使於不需要之部分導 致磁性吸引力作用，移動時反而變成阻力。 因此，本發明係鑑於上述問題所開發者，其目的係提 供不花費製作及維修成本之門扉開關裝置。 【解決問題之手段】 爲了解決上述問題，達成上述目的，若依據本發明， 其特徵爲具備：維持於第1氣壓狀態之第i無塵室，與配 設於較上述第1氣壓狀態更低第2氣壓狀態所維持之第2 無塵室之間所裝設之開口部，藉開關驅動門扉將上述開口 部成爲閉狀態與開狀態之門扉開關裝置，由沿著上述開口 部上方緣部所配設之磁性材料所成之圓桿構件，保持從上 述圓桿構件外周面相隔既定間隔之磁性吸引狀態，並且， 固定於上述門扉構件上方之複數第1永久磁鐵所構成之上 方支持裝置，與沿著上述開口部之下方緣部所配設，支持 上述門扉構件下方之下方支持裝置，與往復移動之第2永 久磁鐵，與藉由上述第2永久磁鐵磁性吸引將上述門扉構 件上述開關驅動之磁性材料所構成之驅動裝置。 又，上述驅動裝置，其特徵爲：由空氣壓往復移動於 中空筒體內部之上述第2永久磁鐵，與藉由上述第2永久 磁鐵磁性吸引以上述開關驅動上述門扉構件之磁性構件所 構成之空壓驅動裝置。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閲讀背面之注意事項再填寫本頁) -i! —丨丨丨訂！ ！-線丨· 518390 A7 B7 五、發明說明（3) 又，其特徵爲：上述複數之第1永久磁鐵，係具有： 對向於上述圓桿構件之上面部，與側面部，與底面部之圓 筒形狀所形成，並且，上述上面部與上述底面部係被異極 磁化，且上述底面部與上述側面部之一部藉第1磁性材料 覆蓋，以保持上述磁性吸引狀態。 一種門扉開關裝置，其特徵爲具有：配置於上述第i 無塵室之第1處理裝置與設於上述第1無麈室間將第1開 口部成爲閉狀態與開狀態之第1門扉構件，與將於上述第 1無塵室鄰接於上述第1處理裝置所配置之第2處理裝置 與設於上述第2無塵室間之第2開口部成爲閉狀態與開狀 態之第2門扉構件，與倂設於上述第1開口部與上述第2 開口部之上方緣部之一對上述上方支持裝置，與倂設於上 述第1開口部與上述第2開口部下方緣部之一對上述下方 支持裝置，與倂設於上述第1開口部與上述第2開口部下 方緣部之一對上述驅動裝置，與檢測上述第1門扉構件與 上述第2門扉構件之開閉狀態之檢測裝置，與上述一對驅 動裝置，連接於上述檢測裝置，並且，爲了使上述第1門 扉構件與上述第2門扉構件不能同時變成開狀態加以驅動 控制之控制裝置。 並且，其特徵爲；沿著上述第1門扉構件與上述第2 門扉構件之交錯面，設有覆蓋上述第1永久磁鐵所用之第 2磁性材料。 【發明之實施形態】 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閲讀背面之注意事項再填寫本頁) .· 訂---------線丨-#-· 經濟部智慧財產局員工消費合作社印製 518390 A7 B7 五、發明說明（4) 茲就本發明之較佳各實施形態，參照附圖說明如下。 第1圖係門扉開關裝置之外觀斜視圖。 於本圖係代表表示將開口部3 a、3 b成爲開狀態或 閉狀態（圖示係表示閉狀態）所用之門扉構件4 a、4 b 設有2片之情形，但是當然也可以爲一片，成爲2片或1 片係因應工件W之工程適當設定。 按，圖中以剖面線所圖示之無塵室地板面上，爲了將 工件W從未圖示之工件供給部取出，裝設有，在箭頭X、 Z方向移動圖示之手，保持之後，向箭頭Y方向移動，向 箭頭0方向旋轉之後，向維持第1氣壓狀態P 1之第1無 塵室1內移載所用之機器手臂裝置5 3。 此機器手臂裝置5 3係移動於軌道5 5上，將機器手 臂裝置5 3行走於維持成將第1氣壓狀態P 1更低第2氣 壓狀態P 2之第2無塵室2之構成。第1無塵室1與第2 無塵室2之間，設有由上方之上框8與下方之下框9與左 右壁面所圍住之開口部3 a、3b，經此開口部3 a、 3b進行工件W之取進取出。於此開口部3a、3b有圖 示之第1門扉構件4 a與第2門扉構件4 b設有分別向箭 頭D1、D2方向移動之拉門式，第1門扉構件4a內側 之第1處理裝置51與第2門扉構件4b內側之第2處理 裝置5 2進行任一工件W之取進取出，同時被控制爲不會g 開啓。 如以上裝設拉門式門扉構件時，雖然交錯處所會發生 些許間隙，但是如上述配置處理裝置之無塵室內爲較配置 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) I ·1111111 ^ ·11111111 I - 經濟部智慧財產局員工消費合作社印製 518390 A7 _ B7 五、發明說明（5) 機器手臂裝置之無塵室爲高壓（P1>P2)，所以即使 具間隙幾乎不會從機器手臂裝置側之灰塵等之侵入。 如以上，所配設之第1門扉構件4 a與第2門扉構件 4b，係由固定於下框9之線性導件支持自重向箭頭D1 、D 2方向及相反方向移動自如地支持之外，由驅動裝置 2 0、2 0個別地驅動。又，第1門扉構件4 a與第2門 扉構件4 b上端部，係對於固定在上框8之圓桿構件5、 5由第1永久磁鐵6磁性吸引支持成移動自如。 第2圖係第1圖之A - A線箭頭符號剖面圖。於本圖 ，關於已說明之構成零件標示了同樣之符號省略說明時， 移動成如上述之門扉構件係在樹脂蓋板11之凹溝部 1 1 a內相隔數m m間隔導引以非接觸狀態所裝設之鐵製 圓柱之圓桿構件5所需，經由托架1 4固定樹脂蓋板1 1 〇 在樹脂蓋板11內部局部地埋入複數第1永久磁鐵6 ，單純地接近永久磁鐵與鐵製圓桿構件5時完全被磁性吸 附，但是，若將在上配置鐵，在下配置附永久磁鐵之固體 時，因鐵與永久磁鐵之磁性吸引力固定永久磁鐵之物體自 重若小時就由鐵拿起附磁鐵之固體，於此藉將永久磁鐵6 之吸引力較門扉構件側之重量成爲稍大，雖然是非接觸但 是以磁性吸引力可將板狀之門扉構件4a、4b之姿勢維 持爲直立狀態。 因此，將圓桿構件5以鐵製造，因將圓孤側面藉由第 1永久磁鐵6維持吸引狀態就可將門扉構件經常直立地維 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） <請先閱讀背面之注意事項再填寫本頁) I· ·1 ·1 ·_ϋ ·1 1 1» mmae 一δ， I I μ··靡 線— φ· 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 518390 A7 ________ B7 五、發明說明（6) 持在最靠近部分。亦即，將永久磁鐵與鐵製之構件較互相 相向之平面，可將磁性吸引所發生之處所成爲更嚴格地限 定。 又，藉將第1永久磁鐵6周圍由樹脂製材料所成之樹 脂蓋板1 1覆蓋，即使鐵製構件與永久磁鐵接觸時使其介 中具有非磁性體之樹脂蓋就可簡單地容易地拉開。又，·將 永久磁鐵藉固定於上述托架1 4時，若不設樹脂蓋時就需 要對於磁鐵本體之安裝用螺絲孔等之加工，但是，藉由容 易加工之樹脂蓋板11覆蓋就不需要對於永久磁鐵體之加 工。 並且，第1永久磁鐵6係由：對向於圓桿構件之上面 部，與側面部，與具有底面部之圓筒形狀所形成，並且， 上面部與底面部係受到異極磁化，並且，將底面部與側面 部之一部以第1磁性材料7覆蓋，藉保持磁性吸引狀態以 達成磁力之調整。又，沿著第1門扉構件4 a與第2門扉 構件4 b相交錯之面，將覆蓋第1永久磁鐵6所用之第3 磁性材料1 3藉固定於樹脂蓋板1 1側面，就可控制磁力 線，來防止於相交錯時對於對方側之門扉構件之不必磁性 吸引。 接著，第3 ( a )係表示圓桿構件5與複數第1永久 磁鐵6之磁性吸引之情形，而N極、S極向厚度方向被異 極磁化之外觀斜視圖，又，第3 (b)圖，係表示圓桿構 件5與複數第1永久磁鐵6之磁性吸引之情形，而N極、 S極向移動方向被異極磁化之外觀斜視圖。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -------------·------- 丨訂---------線— (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 518390 A7 B7 五、發明說明（7) 於第3 ( a )圖，係欲提高圓桿構件5與複數第17欠 久磁鐵6間之磁性吸引交替地配置N極、S極磁通（flux )F將閉磁通迴路向半徑方向形成。亦即，將與圓桿構件 5相向面只使其位於任一方之極以作用圖示之磁力。又， 如第3 ( b )作用磁力者將變成從雙方互相拉動，致使磁 力變成更強。磁力方向時，雖然只作用於永久磁鐵與圓桿 構件之間即可，但是，永久磁鐵係對於周圍將作用向四方 之磁力。於是，爲了抑制對於不需要方向之磁力作用從磁 鐵本體之約略一半將下由上述第1磁性材料7覆蓋。藉這 樣，磁鐵之下一半之磁力將不對於周圍發生作用。按，於 第3 (a)(b)，雖然表示將永久磁鐵形狀成爲圓筒形 狀之情形，但是，不限定於此只要是可得到既定磁力線之 永久磁鐵則其爲如何形狀皆可。 再次，依據第2圖就門扉構件4a、4b之構成說明 如下。門扉構件4 a、4 b係以防止帶電爲目的因由氯乙 烯板構件1 7所製成，例如變成1 m X 1 m以上寬度時， 就會在強度上變成不安定所以作爲補強材使用不銹鋼製框 1 6圍住固定。上述之托架1 4係在其間放入間隔件1 5 一起栓緊固定於門扉構件。 又，爲了支持門扉構件4 a、4 b重量將分別固定由 固定於下框9之2支線性移動導件3 0被支持爲移動自如 之線性塊1 9之下方托架1 8，也如圖示具於其間之間隔 件15—起栓緊固定於門扉構件。 在這些托架1 8穿設有小窗部1 8 a，在此小窗部 本紙張尺度適用中關家標準（CNS)A4規格（210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) I · ϋ ϋ n I n ϋ 1 一δϋ· ϋ ϋ I ϋ 1 線！ 518390 A7 ____ __________ B7 五、發明說明（8) 1 8 a因潛入於空壓驅動裝置2 0之托架2 5之先端部， 以構成傳達驅動裝置2 0之驅動力。以下，將空壓驅動驅 動裝置之情形說明，但是作爲此驅動裝置，也可以由螺合 於對於固定於步進馬達輸出軸之滾珠螺旋，將在軌道上往 復驅動之移動套筒所構成，當然具有種種之構成。 第4 ( a )圖，係空壓驅動裝置2 0之外觀斜視圖， 第4 ( b )係空壓驅動裝置2 0之要部剖面圖。 於第4圖，空壓驅動裝置2 0係使用空壓缸一種之無 桿壓缸。此空壓驅動裝置2 0，係於起動與停止時不僅以 低速可進行門扉開閉，並且，·可構成即使設置於無塵室時 也可得到完全防塵效果。 因此，於第（a) 、( b )，空壓驅動裝置20係如 堵塞中空筒型之非磁性材料所形成之筒構件3 5兩端固定 有端部構件26、26，從連接於端部構件26之配管 2 4將空氣之供給排氣在筒構件3 5內部進行，並且，在 筒構件3 5中係在兩端固定軸構件2 3 a，如圖示，將筒 構件3 5內周面藉成爲氣密狀態以形成左右之壓缸室之第 2永久磁鐵2 2被裝設成左右移動自如。 又，構成爲在筒構件3 5外周面固定於第2圖所述之 托架2 5之磁性體2 1爲被裝設成向筒構件3 5之長向移 動，若筒構件3 5內之第2永久磁鐵2 2隨著空氣之供給 向左右任一方移動時，因磁性體2 1被磁性吸引同樣地被 連動。 並且，在端部構件2 6穿設有可收納上述軸2 3 a之 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂· — 線·命 經濟部智慧財產局員工消費合作社印製 518390 A7 B7 五、發明說明（9) 空洞部26a ，此空洞部26a內徑尺寸爲較軸23a外 徑被設定爲較間隙分量爲大，又，也可構成爲在軸2 3 a 外周面形成有螺旋溝部2 3 h可逃逸空氣，藉將空洞部 2 6 a內之空氣徐緩地逃逸於筒外，就可將軸2 3 a收納 於空洞部2 6 a而可移動於最終位置。又，相反地軸 2 3 a爲從空洞部2 6 a向上外出去時，就透過螺旋溝部 2 3 h空氣徐緩地供給於筒構件3 5內，所以不會急驟地 突出。由以上之阻尼機能，至少於停止時與起動時，可由 低速順利地進行門扉之移動。又，在空洞部，除了供給及 排氣空氣之配管之外，裝設有具有排氣空氣縮孔之配管， 可控制停止時之停止速度。 再次，於第1圖，處理裝置爲運轉片，爲了防止灰麈 ，第1、第2之門扉構件4a、4b雖然關閉，但是結束 處理進行下一次處理時，第1門扉構件4 a爲對於上述空 壓驅動裝置2 0之空氣供給直到感測器（未圖示）感測爲 止’將向箭頭D 1方向移動。此時以低速門扉開始打開， 而以低速停止。 又，雖然門扉有時會前後重疊之情形，此時，因利用 上述第1永久磁鐵，所以磁力就移於另方門扉之導引部， 因互相發生干擾有可能發生弊病，所以，將門扉向前後複 數重疊使用時如第2圖所示以導引部側面之第2磁性材料 1 3來消除其影響。 按，本發明係並非限定於上述實施形態，可構成爲申 請專利範圍所限定之種種，例如也可將將門扉向上下方向 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公茇） (請先閱讀背面之注意事項再填寫本頁) -I m mm§ I ·1 ϋ ϋ Βϋ」：OJ· am— n n I ϋ ϋ I I 線！ 經濟部智慧財產局員工消費合作社印製 518390518390 Α7 ____ Β7 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a door-liner switch device, and more particularly to a door-liner switch device used for dust-proof purposes in a clean room. [Know-how] From the past, the door opening and closing cymbals used in clean rooms need to have anti-slug function. Therefore, 'the frictional part of the door lintel has a door opening / closing mechanism for a suction mechanism or a non-contact door lintel opening / closing device without a friction part. In the non-contact lintel switch device, if the first lintel member and the second lintel member are installed with a sliding door type, a gap will be formed between the interlaced spaces, but generally, the clean room is higher in pressure than the clean room. It is known that there is almost no penetration of dust or the like from outside. In addition, as a door switch device utilizing magnetism as a friction part to eliminate the cause of dust generation, a mechanism disclosed in Japanese Patent Laid-Open No. 2-1 6 7 9 7 9 is adopted. However, if a magnetic door switch device is used in accordance with the above-mentioned bulletin, since the door switch is used to support the door switch to open and close, and the electromagnet is used in both the drive device that drives the door switch, the production cost becomes high, and due to consumption There is a problem of high maintenance cost due to the large amount of power. That is, an electromagnet is more expensive than a permanent magnet, and in order to maintain the opportunity of the electromagnet, electrical supply is often required, but maintenance costs are not required when using a permanent magnet. In addition, as the driving source of various wafer processing devices installed in clean rooms, there are many cases where piping for air pressure supply is already provided, so when controlling valves and piping, the drive for the door switch can be easily obtained. source. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling out this page) —Aw · 1111111 ^ · 11111111 I · Printed by the Intellectual Property Office of the Ministry of Economic Affairs and Consumer Cooperatives Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and Economics 518390 A7 _____ B7 V. Description of the invention (2) In addition, a plurality of permanent magnets are fixed to the door lintel so that they become opposite actions of round rod members made of magnetic bodies. It can be guided in a non-contact state freely. However, if it is simply arranged, the magnetic attraction will be caused when it is not needed, and it will become resistance when moving. Therefore, the present invention is developed by the developer in view of the above problems. The purpose is to provide a door switch device that does not cost production and maintenance costs. [Means for Solving the Problem] In order to solve the above problems and achieve the above object, according to the present invention, it is characterized by being provided with an i-th dust-free state maintained at a first air pressure state The opening is installed between the second clean room and the second clean room maintained in the second air pressure state which is lower than the first air pressure state. The door lintel switch device that closes and drives the opening to close and open the opening, and a round rod member made of a magnetic material disposed along the upper edge of the opening is maintained at a predetermined distance from the outer peripheral surface of the round rod member. The magnetically attracted state of the interval, and the upper support device composed of a plurality of first permanent magnets fixed above the door lintel member is arranged along the lower edge portion of the opening portion to support the lower support device below the door lintel member And a second permanent magnet reciprocating, and a driving device composed of a magnetic material that drives the switch of the door lintel member and the switch by the second permanent magnet magnetic attraction. The driving device is characterized by air pressure reciprocating An air pressure driving device composed of the second permanent magnet moving inside the hollow cylinder and the magnetic member that drives the door lintel member with the switch magnetically attracted by the second permanent magnet. This paper size applies the Chinese National Standard (CNS ) A4 size (210 X 297 mm) (Please read the notes on the back before filling this page) -i! — 丨 丨 丨 Order !!-line 丨 · 518390 A7 B7 V. Description of the invention (3) It is also characterized in that: the above-mentioned plurality of first permanent magnets are provided with: facing the upper surface of the round rod member, and The side surface portion is formed in a cylindrical shape with the bottom surface portion, and the upper surface portion and the bottom surface portion are magnetized with different polarities, and one of the bottom surface portion and the side surface portion is covered with a first magnetic material to maintain the magnetic property. A door opening / closing device including a first processing device disposed between the i-th clean room and a first opening provided between the first clean room and the first opening in a closed state and an open state. The door lintel member is in a closed state and a second state in which the second processing unit disposed adjacent to the first clean room and the first processing unit and the second opening portion provided between the second clean room are closed and open. The door cymbal member faces the upper support device on one of the upper edge portions of the first opening portion and the second opening portion, and on one of the lower edge portions of the first opening portion and the second opening portion. For the support device above, and The driving device is provided at one of the first opening portion and the lower edge portion of the second opening portion, and the detecting device detects the opening and closing states of the first door lintel member and the second door lintel member, and the pair of driving devices. A control device that is connected to the detection device and is driven and controlled so that the first door lintel member and the second door lintel member cannot be turned on simultaneously. Furthermore, it is characterized in that a second magnetic material for covering the first permanent magnet is provided along the interlaced surface of the first door lintel member and the second door lintel member. [Implementation form of the invention] This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page). · Order --------- Line 丨-#-· Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 518390 A7 B7 V. Description of the Invention (4) The preferred embodiments of the present invention are described below with reference to the drawings. Figure 1 is a perspective view of the appearance of a door lintel switch device. This figure represents the case where there are two pieces of door lintel members 4 a and 4 b used to open or close the openings 3 a and 3 b (the illustration shows the closed state), but of course it can also be one piece. The two pieces or one piece are appropriately set according to the process of the workpiece W. In order to remove the workpiece W from the workpiece supply section (not shown) on the floor of the clean room illustrated by the hatching in the figure, install it, and move the illustrated hand in the directions of arrows X and Z. , Move in the direction of arrow Y and rotate in the direction of arrow 0, and then transfer the robot arm device 53 used in the first clean room 1 maintaining the first air pressure state P 1. This robot arm device 5 3 is moved on the track 55, and the robot arm device 5 3 is configured to walk on the second clean room 2 maintained to lower the first air pressure state P 1 to the second air pressure state P 2. Between the first clean room 1 and the second clean room 2, there are openings 3a, 3b surrounded by the upper upper frame 8 and the lower lower frame 9 and the left and right wall surfaces, and through this opening 3a 3b takes in and out the workpiece W. The first door lintel member 4 a and the second door lintel member 4 b shown in the openings 3 a and 3 b are provided with a sliding door type that moves in the directions of arrows D1 and D2, and a first processing device inside the first door lintel member 4a. 51 and the second processing device 5 2 on the inner side of the second lintel member 4b take in and take out any workpiece W, and at the same time are controlled so as not to open. When the sliding door type lintel member is installed as above, although there may be some gaps in the staggered spaces, the clean room with the processing device as described above is more suitable for this paper. The Chinese national standard (CNS) A4 specification (210 X 297 mm) is applicable. ) (Please read the precautions on the back before filling out this page) I · 1111111 ^ · 11111111 I-Printed by the Intellectual Property Bureau Staff Consumer Cooperatives of the Ministry of Economic Affairs 518390 A7 _ B7 V. Description of the invention (5) Clean room of robot arm device The pressure is high (P1> P2), so even if there is a gap, it will hardly enter the machine from the side of the robot arm device. As described above, the first lintel member 4 a and the second lintel member 4 b are supported by a linear guide fixed to the lower frame 9 and can move freely in the directions of the arrows D1 and D 2 and the opposite directions. It is individually driven by the driving devices 20 and 20. The upper ends of the first lintel member 4a and the second lintel member 4b are magnetically attracted and supported by the first permanent magnet 6 to the round rod members 5, 5 fixed to the upper frame 8 to move freely. Figure 2 is a cross-sectional view of the arrow symbol A-A in Figure 1. In this figure, when the same components are described with the same reference numerals and the description is omitted, the door lintel member moved as described above is guided in a non-contact state at intervals of several millimeters in the groove portion 1 1 a of the resin cover 11. It is necessary to install the round cylindrical member 5 made of iron, and the resin cover 1 1 is fixed through the bracket 14. The first permanent magnet 6 is partially embedded inside the resin cover 11, and the permanent magnet and iron are simply approached. When the rod member 5 is made, it is completely magnetically attracted. However, if iron is arranged above and solids with permanent magnets are arranged below, the object holding the permanent magnet due to the magnetic attraction of iron and the permanent magnet will be taken by the iron if the weight is small The solid body with the attached magnets is used to make the attractive force of the permanent magnet 6 slightly larger than the weight of the lintel member side. Although it is non-contact, the posture of the plate-like lintel members 4a and 4b can be maintained in an upright state by magnetic attraction. . Therefore, the round rod member 5 is made of iron, and the lintel member can always be kept upright because the rounded side is kept attracted by the first permanent magnet 6. The paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm) < Please read the precautions on the back before filling out this page) I · · 1 · 1 · _ϋ · 1 1 1 »mmae a δ, II μ ·· Extraordinary — φ · Employees of Intellectual Property Office, Ministry of Economic Affairs Printed by the Consumer Cooperatives. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs. Printed by the Consumer Cooperatives. 518390 A7 ________ B7 V. Description of the invention (6) Hold at the closest part. That is, the permanent magnet and the iron-made member may be more restrictively defined than the plane facing each other. In addition, by covering the first permanent magnet 6 with a resin cover 11 made of a resin material, even if an iron member is in contact with the permanent magnet, a resin cover having a non-magnetic body interposed therebetween can be simply and easily used. Pull away. In addition, when the permanent magnet is fixed to the bracket 14 described above, if a resin cover is not provided, processing of a screw hole for mounting the magnet body or the like is required, but it is not covered by a resin cover 11 that is easy to process. Processing of permanent magnets is required. In addition, the first permanent magnet 6 is formed of a cylindrical shape facing the upper face, the side face, and the bottom face of the round member, and the upper face and the bottom face are magnetized differently, and One of the bottom surface portion and the side surface portion is covered with the first magnetic material 7, and the magnetic force is adjusted by maintaining the magnetic attraction state. The third magnetic material 1 3 covering the first permanent magnet 6 can be controlled along the side where the first lintel member 4 a and the second lintel member 4 b intersect, and can be controlled by fixing it to the side of the resin cover 1 1. Magnetic lines of force to prevent unnecessary magnetic attraction to the lintel member on the opposite side when interlaced. Next, the third (a) is a perspective view showing the appearance of the magnetic attraction of the round rod member 5 and the plurality of first permanent magnets 6, and the N and S poles are magnetized by the opposite poles in the thickness direction, and the 3 (b ) Is a perspective view showing the appearance of the magnetic attraction of the round rod member 5 and the plurality of first permanent magnets 6 while the N and S poles are magnetized in opposite directions in the moving direction. This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------------- · ------- 丨 Order -------- -Line— (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 518390 A7 B7 V. Description of the invention (7) In Figure 3 (a), it is intended to improve the round member The magnetic attraction between 5 and the plurality of 17th ephemeral magnets 6 alternately arranges N-pole and S-pole magnetic fluxes (flux) F to form a closed magnetic flux circuit in a radial direction. That is, the surface facing the round rod member 5 is placed only on one of its poles to exert the magnetic force shown in the figure. In addition, if the magnetic force is applied in the third (b), the two will pull from each other, making the magnetic force stronger. In the direction of the magnetic force, although it only needs to be applied between the permanent magnet and the round rod member, the permanent magnet system will exert a magnetic force on the surroundings in all directions. Therefore, in order to suppress a magnetic force acting in an unwanted direction, the first magnetic material 7 is covered from about half of the magnetic body. In this way, half of the magnetic force below the magnet will have no effect on the surroundings. According to (3) (a) and (b), the shape of the permanent magnet is cylindrical, but it is not limited to any shape as long as the permanent magnet can obtain a predetermined magnetic field line. Again, the structure of the door lintel members 4a, 4b will be described with reference to Fig. 2 as follows. The door lintel members 4 a and 4 b are made of vinyl chloride sheet member 17 for the purpose of preventing electrification. For example, when the width is 1 m X 1 m or more, the strength will become unstable. Therefore, stainless steel is used as a reinforcing material. Boxes 16 are fixed around. The above-mentioned brackets 14 and 4 are provided with spacers 15 therebetween and bolted and fixed to the lintel members. In addition, in order to support the weight of the door lintel members 4 a and 4 b, the two linear moving guides 30 fixed to the lower frame 9 are respectively supported by the lower brackets 18 of the linear block 19 that can move freely, as shown in the figure. The spacer 15 therebetween is bolted and fixed to the lintel member. These brackets 18 are provided with a small window portion 18a, and the paper size of this small window portion applies the Zhongguanjia Standard (CNS) A4 specification (210 X 297 mm) (please read the precautions on the back first) (Fill in this page) I · ϋ I n I n ϋ 1-δϋ · ϋ ϋ I ϋ 1 line! 518390 A7 ____ __________ B7 V. Description of the invention (8) 1 8 a Because it sneaks into the front end of the bracket 25 of the air pressure driving device 20 to constitute the driving force of the driving device 20. In the following, the case of a pneumatically driven driving device will be described. However, the driving device can also be composed of a moving sleeve screwed onto a ball screw fixed to the output shaft of a stepping motor and reciprocatingly driven on the track. Has various constitutions. Fig. 4 (a) is a perspective view of the external appearance of the air pressure driving device 20, and Fig. 4 (b) is a sectional view of a main part of the air pressure driving device 20. In FIG. 4, the air pressure driving device 20 is a rodless pressure cylinder using a type of air pressure cylinder. This air-pressure driving device 20 is not only capable of opening and closing the door sills at a low speed during starting and stopping, but also provides a complete dust-proof effect even when installed in a clean room. Therefore, in paragraphs (a) and (b), the air pressure driving device 20 is a cylindrical member 35 formed by blocking a hollow cylindrical non-magnetic material. End members 26, 26 are fixed at both ends, and are connected to the ends. The piping 24 of the member 26 supplies and exhausts air to the inside of the cylindrical member 35, and the shaft member 2 3a is fixed at both ends of the cylindrical member 35, and as shown in the figure, the inner periphery of the cylindrical member 35 is fixed. The second permanent magnet 22, which is hermetically sealed to form the left and right cylinder chambers, is installed to move freely from side to side. In addition, the magnetic body 2 1 configured to be fixed on the outer peripheral surface of the cylindrical member 35 to the bracket 25 described in FIG. 2 is installed to move in the longitudinal direction of the cylindrical member 35, and if When the second permanent magnet 22 is moved to either of the left and right sides with the supply of air, the magnetic body 21 is magnetically attracted in the same manner and is also linked. In addition, the end member 2 6 is provided with a paper size capable of accommodating the above-mentioned shaft 2 3 a. The Chinese paper standard (CNS) A4 (210 X 297 mm) is applicable. (Please read the precautions on the back before filling in this page. ) Order · Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 518390 A7 B7 V. Description of the invention (9) The hollow portion 26a has an inner diameter dimension larger than the outer diameter of the shaft 23a and a gap component It is large and can also be configured such that a spiral groove portion 2 3 h is formed on the outer peripheral surface of the shaft 2 3 a to escape the air. By slowly escaping the air in the hollow portion 2 6 a out of the cylinder, the shaft 2 3 can be escaped. a is accommodated in the hollow portion 2 6 a and can be moved to the final position. On the other hand, when the shaft 2 3a goes out from the hollow portion 2 6a upward, air passes through the spiral groove portion 2 3h and is slowly supplied into the tube member 35, so it does not protrude suddenly. With the above-mentioned damping function, the lintel can be smoothly moved at a low speed at least during stopping and starting. In addition, in the hollow part, in addition to the piping for supplying and exhausting air, a piping having a shrinkage hole for exhaust air is installed to control the stopping speed at the time of stopping. Again, in Figure 1, the processing device is a running piece. In order to prevent graying, the first and second door lintel members 4a and 4b are closed, but when the process is completed and the next processing is performed, the first door lintel member 4a is the same as described above. The air supply of the air-pressure driving device 20 until the sensor (not shown) senses' will move in the direction of the arrow D 1. At this time, the door 扉 starts to open at a low speed and stops at a low speed. In addition, although the lintel may sometimes overlap, in this case, because the first permanent magnet described above is used, the magnetic force is moved to the guide portion of the other lintel, and interference may occur due to mutual interference. When the plural numbers are used in front and back, as shown in FIG. 2, the second magnetic material 13 on the side of the guide portion is used to eliminate the influence. According to the invention, the present invention is not limited to the above-mentioned embodiments, and may be constituted as various in the scope of the patent application. For example, the door hinge can also be moved up and down. ) (Please read the notes on the back before filling this page) -I m mm§ I · 1 ϋ ϋ Βϋ ": OJ · am— nn I ϋ ϋ II line! Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 518390
經濟部智慧財產局員工消費合作社印製 五、發明說明（ 移動。如以上，永久磁鐵爲了在磁鐵之周圍一帶產生磁力 ，向不需要方向也發生作用時可能引起弊病，但是如上述 如只對於必要方向作用磁力對於不需要方向則以磁性材料 覆蓋以控制磁力方向加以消除。 又，若門扉之開閉動作快速時就在周圍引起風速變成 無塵室內之氣流阻礙可能會有灰塵侵入，但是，使門扉之 開閉動作進行順利使灰塵不會侵入於無塵室內。亦即，將 門扉構件之開閉動作之起動，停止以低速進行消除了灰塵 之捲起等。 並且，因門扉構件之導引部爲非接觸，只在上部形成 些許間隙，並且，雖然在前後方向會形成間隙，但是從上 述壓力差由第2無塵室側幾乎不會有灰塵之侵入。 【發明效果】 如以上所說明，若依據本發明，可提供製作及維修成 本低之門扉開閉裝置。 圖式之簡單說明 第1圖係表示本發明之槪略構成之外觀斜視圖。 第2圖係第1圖之Α—Α線箭頭符號剖面圖。 第3圖（a )係表示圓桿構件5與N、S極爲向厚度 方向磁化之第1永久磁鐵6之磁性吸引情形之外觀斜視圖 ，（b )係表示圓桿構件5與N、S極爲向移動方向磁化 之第1永久磁鐵6之磁性吸引情形之外觀斜視圖。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---·---：-------·____ ϋ 1· § 1 一so, · ϋ I I ·ϋ _1 mmmme ϋ I 線-岭 (請先閱讀背面之注意事項再填寫本頁) 518390 A7 _B7_ 五、發明說明（n) 第4圖（a)係空壓驅動裝置20之外觀斜視圖，（ b )係空壓驅動裝置2 0之要部剖面圖。 【符號之說明】 1 第1無塵室，2 第2無塵室，3a、3b 第 1、第2開口部，4a、4b 第1、第2門扉構件， 5 圓桿構件，6 第1永久磁鐵，7 第1磁性材料， 8 上框，9 下框，11 樹脂蓋板，13 第2磁性 材料，20 驅動裝置（空壓），21 磁性體， 22 第2永久磁鐵，24 配管，26 端部構件， 3 5 筒構件。 --I--------i!訂·！ ！線— (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱）Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (moving. As above, permanent magnets may cause ill effects when they act in unwanted directions in order to generate magnetic force around the magnets. However, as mentioned above, it is only necessary if necessary. If the direction of the magnetic force is not needed, it is covered with magnetic material to control the direction of the magnetic force. If the opening and closing movement of the door lintel is fast, the wind speed in the surrounding area will cause the airflow in the dust-free room. The opening and closing operation is performed smoothly so that dust does not enter the clean room. That is, the opening and closing operation of the door lintel member is started, and the rolling of the dust is eliminated at a low speed. The guide portion of the door lintel member is not. There is only a slight gap in the upper part of the contact, and although a gap is formed in the front-rear direction, there is almost no intrusion of dust from the second clean room side from the pressure difference. [Effects of the Invention] As explained above, The invention can provide a door opening and closing device with low production and maintenance costs. The first figure is a perspective view showing the outline of the outline structure of the present invention. The second figure is a cross-sectional view taken along the line AA of the first figure. The third figure (a) shows the round rod members 5 and N, The external perspective view of the magnetic attraction of the first permanent magnet 6 whose S pole is magnetized in the thickness direction. (B) shows the magnetic attraction of the first permanent magnet 6 whose round rod members 5 and N, S are magnetized in the direction of movement. Appearance oblique view. This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) --------: ------- ____ ϋ 1 · § 1 一 so, · ϋ II · ϋ _1 mmmme ϋ I line-ridge (please read the precautions on the back before filling this page) 518390 A7 _B7_ V. Description of the invention (n) Figure 4 (a) is a perspective view of the appearance of the air pressure drive device 20, (B) Sectional view of the main part of the air drive device 20. [Description of symbols] 1st clean room, 2nd clean room, 3a, 3b, 1st, 2nd opening, 4a, 4b 1. 2nd lintel member, 5 round rod member, 6 1st permanent magnet, 7 1st magnetic material, 8 upper frame, 9 lower frame, 11 resin cover, 13 2nd magnetic material, 20 drive Actuator (air pressure), 21 magnetic body, 22 second permanent magnet, 24 piping, 26 end member, 3 5 cylinder member. --I -------- i! Order ·! Line— ( Please read the notes on the back before filling out this page) Printed on the paper by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the paper size is applicable to China National Standard (CNS) A4 (210 X 297 public love)