KR100628977B1 - Door opening and closing apparatus - Google Patents

Abstract

Disclosed is a door opening and closing device which is free of manufacturing and maintenance costs and uses air pressure of a processing device arranged in a clean room as a driving source. An opening provided between the first clean room 1 maintained in the first atmospheric pressure state P1 and the second clean room 2 maintained in the second atmospheric pressure state P2 lower than the first atmospheric pressure state ( A door opening / closing device (5) formed of a magnetic material disposed on the upper edge portion of the door opening and closing device (3a, 3b) to open and close the opening by opening and closing the door members (4a, 4b). 5) and a plurality of first permanent magnets 6 which are maintained in a magnetic suction state at a predetermined interval from the outer circumferential surface of the round bar member, and are fixed above the door member, the linear motion guide and the linear supporting the door member downward. And a driving device 20 for opening and closing the door member by a block.

Description

Door opening and closing apparatus

1 is an external perspective view showing a schematic configuration of the present invention,

2 is a cross-sectional view taken along line A-A in FIG. 1,

3A is an external perspective view showing the shape of magnetic attraction of the first permanent magnet 6 in which the round bar member 5 and the N pole and the S pole are magnetized in the thickness direction, and FIG. 3B is a round bar member 5. And an external perspective view showing the magnetic suction of the first permanent magnet 6 in which the north pole and the south pole are magnetized in the moving direction,

4A is an external perspective view of the pneumatic drive device 20, and FIG. 4B is a sectional view of the main part of the pneumatic drive device 20. As shown in FIG.

<Explanation of main code in drawing>

1st ...

2nd ...

3a, 3b ... first and second openings

4a, 4b ... first, second door member

5. Round bar member

6. Permanent magnet

7. First ferromagnetic material

8 ... top frame

9 ... lower frame

11.Resin cover

13 second magnetic material

20 ... Driver (Pneumatic)

21 ... magnetic material

22.2nd permanent magnet

24 ... Piping

26 ... end member

35.Tong member

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a door opening and closing device, and more particularly to an opening and closing door mechanism for dustproof use in a clean room.

Conventionally, the opening / closing door used in a clean room needed to have a dustproof function. Therefore, an open / close door having a suction mechanism on the friction part of the door or a non-contact door open / close device without a friction part is used.

In the case of the non-contact door opening and closing device, when the first door member and the second door member are provided with a sliding type, there is a slight gap between the rubs, and since the inside of the clean room is generally higher than the outside of the clean room, Even if it exists, it is known that there is little invasion of dust etc. from the outside. On the other hand, the mechanism disclosed in Japanese Patent Application Laid-open No. Hei 2-167979 has been adopted as a door opening and closing device for self-use which eliminates the friction part that causes dust generation.

However, according to the door opening and closing apparatus using magnetism according to the above publication, since electromagnets are used for both the support means for supporting the door to be opened and closed and the driving means for opening and closing the door, the production cost is high, and There is a problem that the maintenance cost is high because of the large power consumption. In other words, electromagnets are more expensive than permanent magnets, and electricity is always required to maintain the function of electromagnets, but permanent magnets do not require maintenance expenses.

On the other hand, as a drive source of various wafer processing apparatuses installed in a clean room, the pneumatic supply pipes are often installed. Therefore, when the pipes are connected to the control valve, it is possible to easily obtain a drive source for opening and closing the door.

In addition, the plurality of permanent magnets are fixed to the door and provided to be movable so as to face the round bar member made of a magnetic material, so that they can be guided in a non-contact state, but simply arranged, the magnetic attraction force can be applied to unnecessary parts. It becomes resistance at the time of movement.

Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide a door opening and closing device that does not require manufacturing and maintenance costs.

In order to solve the above-mentioned problems and achieve the object, according to the present invention, there is provided a cleaning system comprising: a first clean room maintained in a first atmospheric pressure state, a second clean room maintained in a second atmospheric pressure state lower than the first atmospheric pressure state; A door opening and closing device disposed in an opening provided between the door opening and closing doors, the door opening and closing device including a round bar member made of a magnetic material disposed along an upper edge of the opening, and the round bar; An anti-topper means consisting of a plurality of first permanent magnets which are held in a magnetic suction state at a predetermined interval from an outer circumferential surface of the member and fixed above the door member, and are disposed along a lower edge of the opening and downward of the door member. A lower prevention means for supporting the door, a second permanent magnet reciprocatingly moved, and the door part by being attracted by the second permanent magnet And a driving means composed of a magnetic member for opening and closing the ashes.

In addition, the driving means is a pneumatic drive composed of the second permanent magnet for reciprocating the inside of the hollow cylinder by air pressure, and a magnetic member for magnetically attracting by the second permanent magnet to open and close the door member. It is characterized by the means.

In addition, the plurality of first permanent magnets are formed in a cylindrical shape having an upper surface portion, a side portion, and a bottom portion facing the round bar member, and the upper surface portion and the bottom portion exhibit different polarities and the bottom surface. The magnetic suction state is maintained by covering the part and the side surface part with the first magnetic material.

The first door member may include a first door member disposed between the first processing apparatus disposed in the first clean room and the second clean room in a closed state and an open state, and in the first clean room. A second door member configured to close and open a second opening provided between the second processing device disposed adjacent to the first processing device and the second clean room, and the first opening and the second opening. A pair of said upper barrier paper means provided together with an upper edge portion, a pair of said lower barrier paper means provided together with lower edge portions of said first opening portion and said second opening portion, and said first opening portion and said second opening portion A pair of said drive means provided together with a lower edge part, detection means for detecting the opening / closing state of the said 1st door member and said 2nd door member, the said pair of drive means, and the said detection means It said, and is characterized in that it comprises control means for the drive control so that the first door member and the second member at the same time the door is not in the open state.

And a second magnetic material for covering the first permanent magnet along a surface where the first door member and the second door member rub against each other.

EMBODIMENT OF THE INVENTION Hereinafter, each preferred embodiment of this invention is described with reference to attached drawing. FIG. 1 is an external perspective view of the door opening and closing apparatus.

In this figure, the shape in which two door members 4a and 4b for opening the openings 3a and 3b to the open state or the closed state (in the figure, the closed state is shown) is representatively shown. Of course, whether to make two or one is set appropriately in accordance with the process of the workpiece (W).

By the way, in order to take out the workpiece | work W from a workpiece supply part (not shown) on the clean room bottom surface shown by the hatched in the figure, the hand shown to arrow X, Z direction is moved, hold | maintained, and arrow Y The robot apparatus 53 for moving in the direction, turning in the direction of the arrow θ, and then moving it into the first clean room 1 maintained in the first air pressure state P1.

The robot device 53 moves on the track 55 and moves inside the second clean room 2 in which the robot device 53 is maintained in the second air pressure state P2 lower than the first air pressure state P1. It is set as the structure which runs. Openings 3a and 3b surrounded by the upper frame 8 and the lower frame 9 and the left and right wall surfaces are provided between the first clean room 1 and the second clean room 2. The work W is moved in and out through 3a and 3b. In this opening part 3a, 3b, the 1st door member 4a and the 2nd door member 4b which are shown are provided in the sliding type which moves to the arrow D1, D2 direction, respectively, and the 1st door member 4a is provided. Is controlled so as not to open at the same time by allowing the work W to enter and exit from either the first processing device 51 inside the c) or the second processing device 52 inside the second door member 4b. .

If the door member is provided in a sliding manner as described above, a slight gap is generated in the rubbed areas, as in the clean room in which the processing apparatus is disposed as described above, since it is a higher pressure (P1> P2) than the clean room in which the robot apparatus is disposed, Even if there is a gap, there is almost no intrusion of dust or the like from the robot apparatus side.

The first door member 4a and the second door member 4b disposed as described above are supported by their linear guides fixed to the lower frame 9 so as to be movable in the directions of arrows D1, D2 and the opposite direction. While being supported, they are driven by the drive units 20 and 20 respectively. In addition, the upper end portions of the first door member 4a and the second door member 4b are moved by self-adsorption by the first permanent magnet 6 with respect to the round bar members 5 and 5 fixed to the upper frame 8. Supported as possible.

FIG. 2 is a cross-sectional view taken along line A-A in FIG. 1. In the drawings, the components already described are denoted by the same reference numerals, and the door member moving as described above is provided in a non-contact state at intervals of several millimeters in the recess 11a of the resin cover 11. Since the round bar member 5 of the steel cylinder is used as a guide, the resin cover 11 is fixed through the bracket 14.

A plurality of first permanent magnets 6 are partially embedded in the resin cover 11, and when the permanent magnets and the iron bar member 5 are brought close to each other, they are completely self-adsorbed. In the case where the magnet is placed as a solid with a magnet, the solid with the magnet is lifted by the iron if the weight of the object on which the permanent magnet is fixed is smaller than that of the iron and the permanent magnet. Here, by slightly increasing the weight of the door member side than the suction force of the permanent magnet 6, the posture of the plate-shaped door members 4a and 4b is kept upright by non-contact but magnetic attraction force.

For this reason, the round bar member 5 is made of steel, and the door member is always held upright at the nearest part by keeping the circular arc side surface in the suction state by the first permanent magnet 6. In other words, it becomes possible to more precisely define the place where magnetic attraction occurs than when the surfaces of the permanent magnet and the iron member face each other.

In addition, by covering the periphery of the first permanent magnet 6 with the resin cover 11 made of a resinous material, even if the iron member and the permanent magnet have come into contact with each other, it is easy to separate by interposing a non-magnetic resin cover. It becomes easy. In addition, when the permanent magnet is fixed to the bracket 14, if the resin cover is not provided, processing such as a screw hole for attachment to the magnet body is required, but the permanent magnet is covered by covering the resin cover 11 for processing. Processing to the body becomes unnecessary.

Further, the first permanent magnet 6 is formed in a cylindrical shape having an upper surface portion, a side portion, and a bottom portion facing the round bar member. The upper portion and the bottom portion exhibit different polarities, and the bottom portion and the side portion A part of the magnetic material is covered with the first magnetic material 7 to maintain the magnetic suction state to adjust the magnetic force. In addition, along the surface where the first door member 4a and the second door member 4b rub against each other, a second magnetic material 13 for covering the first permanent magnet 6 is disposed on the side surface of the resin cover 11. By fixing, the direction of the magnetic lines of force is controlled to prevent unnecessary magnetic suction of the door member on the opposite side when rubbed with each other.

Next, FIG. 3A is an external perspective view showing the shape of magnetic attraction of the round bar member 6 and the plurality of first permanent magnets 6 and the magnetic poles of the north pole and the south pole in the thickness direction. 3b is an external perspective view showing the shape of magnetic attraction of the round bar member 5 and the plurality of first permanent magnets 6, and the magnetic poles of the north pole and the south pole are different in the moving direction.

In FIG. 3A, in order to increase magnetic attraction between the round bar member 5 and the plurality of first permanent magnets 6, the N poles and the S poles are alternately arranged so that the flux F forms the closed magnetic flux circuit in the radial direction. Doing. That is, the magnetic force shown is made to act by making only one pole the surface which faces the round bar member 5 mutually.

In addition, as shown in FIG. 3B, the magnetic force is pulled from both sides to increase the magnetic force. In this case, the direction of the magnetic force only needs to act between the permanent magnet and the round bar member, but the permanent magnet exerts magnetic force in all directions with respect to the surroundings. Therefore, in order to suppress the action of the magnetic force in an unnecessary direction, the first magnetic material 7 is covered from below about half of the magnet body. By doing so, the magnetic force of the lower half of the magnet does not act on the surroundings. In addition, although the case where the shape of the permanent magnet was made into the cylindrical shape was shown in FIG. 3A and 3B, it is not limited to this, Any shape may be sufficient as long as it is a permanent magnet which can acquire a predetermined magnetic field line.

2, the structure of the door members 4a and 4b will be described. Since the door members 4a and 4b are made of vinyl chloride plate member 17 for the purpose of antistatic purpose, they are surrounded by a stainless steel frame 16 as a reinforcing material because they are unstable in strength when the width is greater than 1 m × 1 m, for example. It is fixed. The bracket 14 fixes the door member by tightening the spacers 15 therebetween.

In addition, the lower brackets fixing the linear blocks 19 supported by the two linear motion guides 30 fixed to the lower frame 9 so as to support the weight of the door members 4a and 4b, respectively. 18, it is also fixed to the door member by tightening each other via the spacer 15 as shown.

A small window portion 18a is formed in these brackets 18, and the tip portion of the bracket 25 of the pneumatic drive device 20 enters the small window portion 18a, thereby driving the driving force of the driving device 20. It is configured to deliver. Hereinafter, a configuration in the case of pneumatically driving the drive device will be described. The drive device may be constituted by a movable bush which reciprocally drives the guide rail by screwing into a ball screw fixed to the output shaft of the stepping motor. Of course there is a configuration.

4A is an external perspective view of the pneumatic drive device 20, and FIG. 4B is a sectional view of the main part of the pneumatic drive device 20. As shown in FIG.

4A and 4B, the pneumatic drive apparatus 20 uses a rodless cylinder which is a kind of air cylinder. The pneumatic drive device 20 is configured to be able to open and close the door at a low speed at the time of starting and stopping, and to achieve a complete dustproof effect even when installed in a clean room.

Therefore, in FIGS. 4A and 4B, the pneumatic drive device 20 is fixed with end members 26 and 26 so as to block both ends of the cylindrical member 35 formed of a hollow cylindrical nonmagnetic material. Supplying and discharging air from the pipe 24 connected to 26 is performed inside the cylinder member 35, and the shaft member 23a is fixed to both ends in the cylinder member 35, and the cylinder member (as shown) By making the inner circumferential surface of 35) airtight, the second permanent magnets 22 which are formed to form the cylinder chambers on the left and right sides are provided to be movable left and right.

In addition, on the outer circumferential surface of the tubular member 35, a magnetic body 21 having the bracket 25 described above with reference to FIG. 2 is provided to move in the longitudinal direction of the tubular member 35, and the second permanent magnet ( When 22) moves to either of the left and right sides according to the air supply, the magnetic body 21 is magnetically attracted and configured to interlock similarly.

In addition, the end member 26 is provided with a cavity 26a through which the shaft 23a is housed. The inner diameter of the cavity 26a is set to be larger than the outer diameter of the shaft 23a by a clearance. Further, a spiral groove portion 23h is formed on the outer circumferential surface of the shaft 23a to allow air to bleed out, and the shaft 23a is formed into the cavity portion 26a by causing the air in the cavity portion 26a to gradually run out of the cylinder. It is housed in and configured to move to the final position. On the contrary, when the shaft 23a extends outward from the cavity portion 26a, air is gradually supplied into the cylinder member 35 through the spiral groove portion 23h so that the shaft 23a does not protrude sharply. By the damper function as described above, it is possible to perform smooth door operation at low speed, at least at the time of stopping and starting. In addition, the cavity is provided with a pipe having an aperture for discharging air, in addition to a pipe for supplying and discharging air, so that the stopping speed at the time of stopping can be controlled.

In FIG. 1, while the processing apparatus is in operation, the first and second door members 4a and 4b are closed for dust prevention, but when the processing is completed and the next processing is performed, the first door member 4a is used. By the air supply to the pneumatic drive device 20 is moved in the direction of the arrow D1 until the sensor (not shown) detects. At this time, the door starts to open at low speed and stops at low speed.

In addition, the doors may overlap each other back and forth. In this case, since the first permanent magnet is used, the magnetic force may splash on the guide part of the other door and cause interference by mutual interference. In use, as shown in FIG. 2, the influence is eliminated by the 2nd magnetic material 13 of the side surface of a guide part.

In addition, this invention is not limited to said embodiment, Various configurations prescribed | regulated by the Claim are possible, For example, you may make it move a door up and down. As described above, since the permanent magnet generates magnetic force around the magnet, there is a possibility that the harmful magnet may be caused by acting even in an unnecessary direction. As described above, the permanent magnet is covered with a magnetic material so as to apply the magnetic force only in the required direction. It solved by controlling the direction of magnetic force.

In addition, if the opening and closing operation of the door is fast, there is a possibility of causing wind speeds around the airflow to reduce the airflow in the clean room and invading dust. That is, the start and stop of the opening / closing operation of the door member are performed at low speed to eliminate the vortex of dust and the like.

In addition, since the guide portion of the door member is non-contact, a slight gap is formed in the upper portion and a gap is formed also in the front and rear directions. There is almost no intrusion of dust from the second clean room side from the pressure difference.

As described above, according to the present invention, it is possible to provide a door opening and closing device that does not cost production and maintenance.

Claims (5)

An opening provided between a first clean room maintained in a first air pressure state and a second clean room maintained in a second air pressure state lower than the first air pressure state, and opening and closing the door member to open and close the opening. As a door opening and closing device for A round bar member made of a magnetic material disposed along an upper edge of the opening, and a plurality of first permanent magnets held in a magnetic suction state at a predetermined distance from an outer circumferential surface of the round bar member and fixed above the door member. Preventive means, A lower prevention paper means disposed along a lower edge of the opening and supporting the lower portion of the door member; And a driving means comprising a reciprocating second permanent magnet and a magnetic member magnetically attracted by the second permanent magnet to open and close the door member. The method of claim 1, The drive means is a pneumatic drive means consisting of the second permanent magnet for reciprocating the inside of the hollow cylinder by air pressure, and a magnetic member for magnetically attracting by the second permanent magnet to open and close the door member. Door opening and closing device characterized in that. The method according to claim 1 or 2, The plurality of first permanent magnets are formed in a cylindrical shape having an upper surface portion facing the round bar member, a side portion, and a bottom surface portion, the upper surface portion and the bottom portion having different polarities, and the bottom portion and A door opening and closing device, characterized in that the magnetic suction state is maintained by covering a portion of the side portion with a first magnetic material. delete delete

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