JPH03244777A - Magnetic levitation self-running type suspension sliding door - Google Patents
Magnetic levitation self-running type suspension sliding doorInfo
- Publication number
- JPH03244777A JPH03244777A JP2038272A JP3827290A JPH03244777A JP H03244777 A JPH03244777 A JP H03244777A JP 2038272 A JP2038272 A JP 2038272A JP 3827290 A JP3827290 A JP 3827290A JP H03244777 A JPH03244777 A JP H03244777A
- Authority
- JP
- Japan
- Prior art keywords
- door body
- rail
- linear motor
- yoke rail
- yoke
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 title claims abstract description 5
- 239000000725 suspension Substances 0.000 title description 17
- 239000000428 dust Substances 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、無接触で、案内レールに沿って走行しうる磁
気浮上式懸垂引き戸に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a magnetically levitated suspension sliding door that can travel along a guide rail without contact.
[従来の技術]
従来の自走式の引き戸は、天井等に固着した懸垂レール
に、ドア本体の上部に設けた懸垂用ローラを介して、走
行自在に懸垂され、索条やチェーン等の引張り手段を介
して、ドア本体を、電動モータにより駆動するようにな
っている。[Prior Art] Conventional self-propelled sliding doors are freely suspended from suspension rails fixed to the ceiling, etc. via suspension rollers provided at the top of the door body, and are suspended from tension rails, chains, etc. Through means, the door body is driven by an electric motor.
また、実開平1−105180号公報に開示されている
ように、ドア本体の上端に永久磁石を固着して、ドア本
体を懸垂レールに吸引させ、懸垂用ローラに掛かる懸垂
荷重を小さくすることも公知である。Furthermore, as disclosed in Japanese Utility Model Application Publication No. 1-105180, a permanent magnet may be fixed to the upper end of the door body to attract the door body to the suspension rail, thereby reducing the suspension load applied to the suspension roller. It is publicly known.
[発明が解決しようとする課題]
ドア本体の上端に永久磁石を設けて、ドア本体を懸垂レ
ールに吸引させも、懸垂レールに沿って転勤するローラ
が、完全に浮上することはない。[Problems to be Solved by the Invention] Even if a permanent magnet is provided at the upper end of the door body and the door body is attracted to the suspension rail, the rollers that move along the suspension rail will not completely float.
もし、ローラが懸垂レールから浮上する程度に永久磁石
を強力にすると、永久磁石か懸垂レールに吸着してしま
う。If the permanent magnet is made strong enough to cause the roller to float above the suspension rail, either the permanent magnet or the suspension rail will stick to it.
ローラがドア本体の荷重をささえて回転すると、ローラ
の回転軸や懸垂レールとローラの接触部に摩擦を生じる
。When the roller rotates while supporting the load of the door body, friction occurs at the roller's rotating shaft and the contact area between the roller and the suspension rail.
また、従来の自走式引き戸においては、駆動モータや索
条、チェーン等の伝達部から、振動音や擦過音が発生す
るとともに、摩擦部分からの発塵もさけられなかった。Furthermore, in conventional self-propelled sliding doors, vibration and scraping noises are generated from transmission parts such as drive motors, cables, chains, etc., and dust generation from frictional parts cannot be avoided.
そのため、病院やクリーンルーム等の騒音や粉塵を嫌う
場所では、従来の自走引き戸の採用は困難であった。Therefore, it has been difficult to use conventional self-propelled sliding doors in places where noise and dust are averse, such as hospitals and clean rooms.
さらに、動力を電動モータとした従来のものでは、停電
等の際に、電動モータを伝達機構から切り離さなければ
、引き戸か開閉不能となるという問題点もある。Furthermore, with conventional devices powered by an electric motor, there is a problem that the sliding door cannot be opened or closed unless the electric motor is disconnected from the transmission mechanism in the event of a power outage or the like.
[課題を解決するための手段]
本発明は、長手方向に多数のリニアモータコイルを埋設
したリニアモータ用ヨークレールと、ヨークレールの下
方に位置し、このヨクレールに沿って移動するドア本体
と、家屋構造体に固着されて、ヨークレールを支持する
水平の支持杆と、ドア本体の上部に設けられて、リニア
モータレールの下面と対向し、そのヨークレールのコイ
ルと協動してリニアモータとして働く永久磁石と、ヨー
クレールもしくはそれに同等の静止体とドア本体の間に
設けられ、ヨークレールとドア本体の相対位置を検出し
、その相対位置に応じて、リニアモータコイルの駆動コ
イルを選択制御する位置検出手段と、ドア本体の上部に
おける移動方向の両端部附近にそれぞれ設けられ、ヨー
クレールに吸引する電磁石と、ドア本体の上部における
移動方向の両端部附近にそれぞれ設けられ、ヨークレー
ルと電磁石の空隙を検出するギャップセンサとを備える
ことにより、上述の課題は解決される。[Means for Solving the Problems] The present invention provides a yoke rail for a linear motor in which a large number of linear motor coils are embedded in the longitudinal direction, a door body that is located below the yoke rail and moves along the yoke rail, A horizontal support rod is fixed to the house structure and supports the yoke rail, and a linear motor is provided at the top of the door body and faces the bottom surface of the rail, working together with the coils of the yoke rail to act as a linear motor. It is installed between a working permanent magnet, a yoke rail or equivalent stationary body, and the door body, and detects the relative position of the yoke rail and the door body, and selects and controls the drive coil of the linear motor coil according to that relative position. a position detection means provided near both ends of the upper part of the door body in the direction of movement, and an electromagnet that attracts the yoke rail; The above-mentioned problem is solved by providing a gap sensor that detects the gap between the two.
[作 用]
ドア本体は、その上部両端に設けた電磁石により、ギャ
ップセンサで離間距離を一定に制御され、ヨークレール
に吸引されて、磁気浮上し、かつこの磁気浮上状態で、
リニアモータコイルに走行移動用の制御電流を流すこと
により、所要方向に移動させられる。[Function] The door body is controlled to have a constant separation distance by a gap sensor using electromagnets installed at both ends of the upper part, and is attracted to the yoke rail and magnetically levitates, and in this magnetically levitated state,
By passing a control current for running movement through the linear motor coil, it can be moved in a desired direction.
永久磁石とリニアモータコイルによるリニアモータ部が
動作するとき、ヨークレールと永久磁石の間に吸引力が
働くが、この吸引作用の大きさや変動は、電磁石とギャ
ップセンサによるギャップ制御式吸引部のギャップセン
サの間隙に反映されて、相互干渉は自動的に吸収される
。When the linear motor section, which is made up of a permanent magnet and a linear motor coil, operates, an attractive force acts between the yoke rail and the permanent magnet, but the magnitude and fluctuations of this attractive force are determined by the gap between the gap-controlled attraction section using the electromagnet and the gap sensor. Reflected in the sensor gap, mutual interference is automatically absorbed.
2種類の磁気吸引手段は、互いに干渉することなく、リ
ニアモータ部とギャップ制御式吸引部とが、互いに他方
の欠点を補うように相補的に作用する。The two types of magnetic attraction means do not interfere with each other, and the linear motor section and the gap control type attraction section act complementary to each other so as to compensate for the shortcomings of the other.
[実施例]
(1)は、部屋の出入口や廊下等の通路を開閉する引き
戸におけるドア本体である。[Example] (1) is a door body in a sliding door that opens and closes a passageway such as an entrance/exit of a room or a hallway.
(2)は、ドア本体(1)の上方において、廊下や部屋
の天井等の構造体(A)に固設された断面■形の水平支
持杆である。(2) is a horizontal support rod with a square cross section that is fixed to a structure (A) such as a hallway or a ceiling of a room above the door body (1).
(3)は、支持杆(2)の下面(4)に固着されたリニ
アモータ用ヨークレールである。 (5)は、ドア本体
(1)の磁気浮上を停止した時に、ドア本体(1)を懸
垂支持する断面り形の左右1対の懸垂レールで、その垂
直片(7)は、それぞれ、支持杆(2)の中央片(6)
の側面に固着されている。(3) is a yoke rail for a linear motor fixed to the lower surface (4) of the support rod (2). (5) is a pair of cross-sectional left and right suspension rails that suspend and support the door body (1) when the magnetic levitation of the door body (1) is stopped; Center piece (6) of rod (2)
is fixed to the side of the
ドア本体(1)の上端には、ドアの幅とほぼ等しい長さ
の横桟(8)が固着され、横桟(8)の上面の中間部に
は、1対の永久磁石(9)(9)が、所要の間隔をあけ
て取付けられている。A horizontal bar (8) having a length approximately equal to the width of the door is fixed to the upper end of the door body (1), and a pair of permanent magnets (9) ( 9) are installed at the required intervals.
横桟(8)の上面の両端近くには、それぞれ電磁石(1
0)が固着されている。Electromagnets (1
0) is fixed.
各電磁石(10)の外方において、横桟(8)の上面に
は、前記懸垂レール(5)の水平片の先端に形成された
上向き凸部(11)の上端に、乗り上がるようになって
いるローラ(12)を上端に支持する支持片(13)の
下端部が固着されている。On the outside of each electromagnet (10), the upper surface of the horizontal beam (8) is configured to ride on the upper end of an upward convex portion (11) formed at the tip of the horizontal piece of the suspension rail (5). The lower end of the support piece (13) that supports the roller (12) at the upper end is fixed.
また、横桟(8)の両端には、それに近い電磁石(10
)の上面(14)とヨークレール(3)の下面(15)
との間隙を制御するギャップセンサ(16)が設けられ
ている。In addition, at both ends of the horizontal bar (8), electromagnets (10
) upper surface (14) and lower surface (15) of the yoke rail (3)
A gap sensor (16) is provided to control the gap between the two.
ギャップセンサ(16)は、それとヨークレール(3)
の下面(15)との間隙が常に一定に保たれるように、
左右の両端部で、それぞれに対応する電磁石(10)の
電流を制御し、この制御がなされた状態で、ローラ(1
2)は、懸垂レール(5)の上向き凸部(11)がら上
方へ外れて、ドア本体(1)は無接触状態で浮上するよ
うになっている。Gap sensor (16) and yoke rail (3)
so that the gap between the bottom surface (15) and the bottom surface (15) is always kept constant.
The currents of the electromagnets (10) corresponding to the left and right ends are controlled, and in this controlled state, the roller (10)
2), the upward convex portion (11) of the suspension rail (5) is removed upwardly, and the door body (1) floats in a non-contact state.
各永久磁石(9)と、第5図に示す如くヨークレール(
3)の下面に埋め込まれたリニアモータコイル(17)
とにより、リニアモータが構成されている。Each permanent magnet (9) and the yoke rail (
3) Linear motor coil (17) embedded in the bottom surface
A linear motor is constructed by these.
リニアモータコイル(17)は、ドア本体(1)の移動
方向に分極させた永久磁石(9)の磁極間ピッチ(P)
の間に、所要数(N)のコイル(17)を、はぼP /
(2N)の溝幅で、かっP/Nピッチで設けられた多
数のスロット(18)に、1ループを形成する1つのコ
イル(17)がP/2ピッチすれた2個のスロット(1
8)に巻回され、かつ1つの磁極間ピッチ(P)の間に
、N個のコイル(17)がスロット(18)を順次1ピ
ツチ(P/2N)つらせて、埋設されている。The linear motor coil (17) has a pitch (P) between magnetic poles of a permanent magnet (9) polarized in the moving direction of the door body (1).
In between, the required number (N) of coils (17) are connected to P/
(2N) groove width, one coil (17) forming one loop is inserted into two slots (18) with P/2 pitch between each other.
8), and between one pitch (P) between magnetic poles, N coils (17) are embedded by sequentially extending one pitch (P/2N) of slots (18).
このリニアモータコイル(17)の埋設は、磁極間ピッ
チ(P)毎に、同じ構造で繰返されている。This embedding of the linear motor coil (17) is repeated in the same structure for each magnetic pole pitch (P).
リニアモータコイル(17)と協動する1対の永久磁石
(9)は、磁極間ピッチ(P)の半分のP/2整数倍の
間隔で設けられる。A pair of permanent magnets (9) that cooperate with the linear motor coil (17) are provided at intervals of an integral multiple of P/2, which is half the pitch (P) between magnetic poles.
なお、永久磁石(9)は、走行方向への駆動力か十分で
あれば、1個としてもよく、駆動力が不足すれば3個、
またはそれ以上とする。The number of permanent magnets (9) may be one as long as the driving force in the running direction is sufficient, or three if the driving force is insufficient.
or more.
ドア本体(1)の移動方向と、ドア位置検出手段(19
)によって得られるドア本体(1)の位置に応じて、リ
ニアモータコイル(17)の各スロット(18)毎に順
次電流が流される。The moving direction of the door body (1) and the door position detection means (19)
) A current is sequentially applied to each slot (18) of the linear motor coil (17) depending on the position of the door body (1) obtained by the method.
永久磁石(9)とリニアモータコイル(17)を埋設し
たヨークレール(3)の作動原理は、従来のリニアモー
タと同じである。The operating principle of the yoke rail (3) in which a permanent magnet (9) and a linear motor coil (17) are embedded is the same as that of a conventional linear motor.
ドア位置検出手段(19)は、天井等の構造体(A)と
ドア本体(1)の間に設けた非接触型のリニアエンコー
ダ、例えばマグネスケール(登録商標)等で構成される
。なお、(20)は固定側の磁気スケール、(21)は
固定側のヘッドである。The door position detection means (19) is composed of a non-contact linear encoder, such as Magnescale (registered trademark), provided between the structure (A) such as the ceiling and the door body (1). Note that (20) is a magnetic scale on the fixed side, and (21) is a head on the fixed side.
ドア本体(1)は、それの上部両端に設けた電磁石(1
0) (10)により、ギャップセンサ(16)で離間
距離を一定に制御されて、天井等の構造体(A)に固着
されたヨークレール(3)に吸引され、磁気浮上する。The door body (1) has electromagnets (1) installed at both ends of its upper part.
0) According to (10), the separation distance is controlled to be constant by the gap sensor (16), and the object is attracted to the yoke rail (3) fixed to the structure (A) such as the ceiling and magnetically levitates.
この磁気浮上状態でリニアモータコイル(17)に制御
電流を流すと、ドア本体(1)は所要方向に移動させら
れる。When a control current is applied to the linear motor coil (17) in this magnetically levitated state, the door body (1) is moved in a desired direction.
永久磁石(9)とリニアモータコイル(17)によるリ
ニアモータ部が動作すると、ヨークレール(3)と永久
磁石(9)の間に吸引力が働くか、この作用の大きさや
変動は、電磁石(10)とギャップセンサ(16)によ
るギャップ制御式吸引部のギャップセンサ(16)の間
隙に反映され、相互干渉は自動的に吸収される。When the linear motor unit consisting of the permanent magnet (9) and the linear motor coil (17) operates, an attractive force is exerted between the yoke rail (3) and the permanent magnet (9), and the magnitude and fluctuation of this action are determined by the electromagnet ( 10) and the gap sensor (16) of the gap control type suction section by the gap sensor (16), and mutual interference is automatically absorbed.
そのため、本発明では、2種類の磁気吸引手段を利用し
ているが、互いに干渉することはなく、その動作は安定
している。Therefore, although two types of magnetic attraction means are used in the present invention, they do not interfere with each other and their operation is stable.
また、リニアモータ部とギャップ制御式吸引部とは、互
いに他方の欠点を補うように、相補的に作用する。Furthermore, the linear motor section and the gap-controlled suction section act in a complementary manner so as to compensate for the shortcomings of the other.
例えば、リニアモータ部の各リニアモータコイル(17
)の電流は、多数のスイッチ素子によって、オン・オフ
制御されている。For example, each linear motor coil (17
) is controlled on/off by a large number of switching elements.
そのため、本発明によると、リニアモータ部がドア本体
(1)を磁気浮上させるだけの吸引力をだすようにする
と、コイル電流が多大となって、制御スイッチの容量に
問題を生じるとともに、制御スイッチの数が多いため、
大容量で高価なスイッチが多数要求されて価格が高くな
るという問題、並びに、ギャップ制御式吸引部のみでは
、ドア本体(1)を磁気浮上させる吸引力は容易に出せ
るが、左右方向へ移動させる力は出せないという問題点
は、同時に解決される。Therefore, according to the present invention, if the linear motor section generates an attractive force sufficient to magnetically levitate the door body (1), the coil current becomes large, causing problems with the capacity of the control switch, and Due to the large number of
The problem is that many large-capacity and expensive switches are required, which increases the price.Also, with only a gap-controlled suction unit, it is easy to generate the suction force that magnetically levitates the door body (1), but it moves the door body (1) in the left and right direction. The problem of not being able to exert force will be solved at the same time.
[効 果]
ドア本体は、磁気浮上した状態で左右に移動するので、
振動音や擦過音等の騒音を発生しない。[Effect] The door body moves from side to side while magnetically levitated.
Does not generate noise such as vibration or scraping noise.
ドア本体の移動に対する機械的擦過部かないので、発塵
することはない。Since there are no mechanical abrasions due to the movement of the door body, no dust is generated.
停電などの無電源時には、容易に通常のローラ式懸垂引
き戸として、手動で簡単に開閉することかできる。When there is no power such as a power outage, it can be easily opened and closed manually as a normal roller-type suspension sliding door.
第1図は、本発明の一実施例を示す分解斜視図、第2図
は、第1図の実施例の要部正面図、第3図は、第2図に
おける■−■線矢視図第4図は、第2図におけるIV−
IV線拡大断面図第5図よ、第2図におけるV部拡大縦
断正面図である。
(13)ローラ支持体 (14)上面(15)下面
(16)ギャップセンサ(17)コイル
(18)スロット(19)ドア位置検出手段(2
0)磁気スケール(21)ヘッド
(1)ドア本体
(3)ヨークレール
(5)懸垂レール
(7)垂直片
(9)永久磁石
(11)凸部
(2)支持杆
(4)下面
(6)中央片
(8)横桟
(10)電磁石
(12)ローラ
第4図Fig. 1 is an exploded perspective view showing an embodiment of the present invention, Fig. 2 is a front view of main parts of the embodiment of Fig. 1, and Fig. 3 is a view taken along the line ■-■ in Fig. 2. FIG. 4 shows IV- in FIG.
FIG. 5 is an enlarged longitudinal sectional view of the V section in FIG. 2. (13) Roller support (14) Top surface (15) Bottom surface
(16) Gap sensor (17) Coil
(18) Slot (19) Door position detection means (2
0) Magnetic scale (21) Head (1) Door body (3) Yoke rail (5) Suspension rail (7) Vertical piece (9) Permanent magnet (11) Convex part (2) Support rod (4) Bottom surface (6) Center piece (8) Horizontal bar (10) Electromagnet (12) Roller Figure 4
Claims (1)
モータ用ヨークレールと、 ヨークレールの下方に位置し、このヨクレールに沿って
移動するドア本体と、 家屋構造体に固着されて、ヨークレールを支持する水平
の支持杆と、 ドア本体の上部に設けられて、リニアモータレールの下
面と対向し、そのヨークレールのコイルと協動してリニ
アモータとして働く永久磁石と、ヨークレールもしくは
それに同等の静止体とドア本体の間に設けられ、ヨーク
レールとドア本体の相対位置を検出し、その相対位置に
応じて、リニアモータコイルの駆動コイルを選択制御す
る位置検出手段と、 ドア本体の上部における移動方向の両端部附近にそれぞ
れ設けられ、ヨークレールに吸引する電磁石と、 ドア本体の上部における移動方向の両端部附近にそれぞ
れ設けられ、ヨークレールと電磁石の空隙を検出するギ
ャップセンサ とを備ることを特徴とする磁気浮上自走式懸垂引き戸。[Claims] A yoke rail for a linear motor in which a large number of linear motor coils are embedded in the longitudinal direction, a door body located below the yoke rail and moving along the yoke rail, and a door body fixed to a house structure. , a horizontal support rod that supports the yoke rail, a permanent magnet that is provided at the top of the door body and faces the bottom surface of the linear motor rail and works as a linear motor in cooperation with the coil of the yoke rail, and a yoke rail. or a position detecting means provided between a stationary body equivalent thereto and the door body, detecting the relative position of the yoke rail and the door body, and selectively controlling the drive coil of the linear motor coil according to the relative position; Electromagnets are installed near both ends of the upper part of the door body in the moving direction to attract the yoke rail, and gap sensors are installed near both ends of the upper part of the door body in the moving direction to detect the gap between the yoke rail and the electromagnet. A magnetic levitation self-propelled suspended sliding door characterized by comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2038272A JPH03244777A (en) | 1990-02-21 | 1990-02-21 | Magnetic levitation self-running type suspension sliding door |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2038272A JPH03244777A (en) | 1990-02-21 | 1990-02-21 | Magnetic levitation self-running type suspension sliding door |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03244777A true JPH03244777A (en) | 1991-10-31 |
Family
ID=12520679
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2038272A Pending JPH03244777A (en) | 1990-02-21 | 1990-02-21 | Magnetic levitation self-running type suspension sliding door |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03244777A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0614844A2 (en) * | 1993-03-10 | 1994-09-14 | Otis Elevator Company | Linear door motor system for elevators |
KR20030097569A (en) * | 2002-06-28 | 2003-12-31 | 엄용식 | Door operating equipment |
KR20040006100A (en) * | 2002-07-09 | 2004-01-24 | 황규선 | Apparatus to automatically open and shut a door |
US6832449B2 (en) | 2000-12-22 | 2004-12-21 | Inventio Ag | Door suspension system |
EP1217160A3 (en) * | 2000-12-22 | 2010-04-14 | Inventio Ag | Door suspension system |
US8020346B2 (en) | 2007-08-16 | 2011-09-20 | Joseph Singiser | Magnetically supported sliding track system |
CN105164356A (en) * | 2013-05-06 | 2015-12-16 | 希珀雅内拉斯公司 | Magnetic levitation system for doors and windows |
KR20190087967A (en) * | 2017-06-08 | 2019-07-25 | 어플라이드 머티어리얼스, 인코포레이티드 | CLOSED DEVICE, VACUUM SYSTEM WITH CLOSED DEVICE, AND METHOD OF OPERATING CLOSED DEVICE |
-
1990
- 1990-02-21 JP JP2038272A patent/JPH03244777A/en active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0614844A2 (en) * | 1993-03-10 | 1994-09-14 | Otis Elevator Company | Linear door motor system for elevators |
EP0614844A3 (en) * | 1993-03-10 | 1995-01-25 | Otis Elevator Co | Linear door motor system for elevators. |
US6832449B2 (en) | 2000-12-22 | 2004-12-21 | Inventio Ag | Door suspension system |
EP1217160A3 (en) * | 2000-12-22 | 2010-04-14 | Inventio Ag | Door suspension system |
KR20030097569A (en) * | 2002-06-28 | 2003-12-31 | 엄용식 | Door operating equipment |
KR20040006100A (en) * | 2002-07-09 | 2004-01-24 | 황규선 | Apparatus to automatically open and shut a door |
US8020346B2 (en) | 2007-08-16 | 2011-09-20 | Joseph Singiser | Magnetically supported sliding track system |
CN105164356A (en) * | 2013-05-06 | 2015-12-16 | 希珀雅内拉斯公司 | Magnetic levitation system for doors and windows |
CN105164356B (en) * | 2013-05-06 | 2017-11-03 | 希珀雅内拉斯公司 | Magnetic suspension system for door and window |
KR20190087967A (en) * | 2017-06-08 | 2019-07-25 | 어플라이드 머티어리얼스, 인코포레이티드 | CLOSED DEVICE, VACUUM SYSTEM WITH CLOSED DEVICE, AND METHOD OF OPERATING CLOSED DEVICE |
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