JPH06341267A - Door opening/closing device - Google Patents

Abstract

PURPOSE:To prevent the danger of dust generation and realize smooth operations. CONSTITUTION:A door opening/closing device is provided with a door 1 as an opening/closing means, a track 2 guiding the movement of the door 1, a magnetic levitation device 3 levitating the door 1 against the track 2, a magnetic propulsion device 6 moving the door 1 along the track 2, and a power feed device 7 feeding electric power to the magnetic levitation device 3 and the magnetic propulsion device 6. Electric power is fed to the magnetic levitation device 3 by the power feed device 7, and the door 1 is levitated from the track 2 by the magnetic action. Electric power is also fed to the magnetic propulsion device 6, the polarity of the magnetic pole installed on the track 2 side is controlled, and the prescribed driving force is applied to the door 1. The door 1 is moved in no contact in the desired direction along the track 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a door opening / closing device installed in a room requiring a high degree of cleanliness such as a clean room in a semiconductor device manufacturing process.

[0002]

2. Description of the Related Art Generally, semiconductor devices are manufactured in a clean room having a high air cleanliness. As the integration of semiconductor devices progresses, the demand for cleanliness also increases. In addition, a clean room that requires such a high degree of cleanliness is partitioned into an appropriate room through a door, and a door opening / closing device for driving the opening / closing of the door is installed. In addition, the provision of a fixed door like this
This is because, for example, in a photolithography process or the like, it may be necessary to shield only the room due to the lighting used for the process.

FIG. 4 shows a schematic configuration example of a conventional door opening / closing device. A door 21 is provided in the clean room 20, and the door 21 reciprocates (see an arrow A) along a rail 22 horizontally installed at a proper position in the clean room 20. And in this example, the door 21
A rotatable wheel 23 or a rotating roller is provided on the upper part of the door so that the door 21 is suspended from the rail 22 via the wheel 23.

When the door 21 is driven to open and close, the door 21
A driving force is applied to the door 21 to drive the door 21 along the rail 22. That is, for example, clean room 2
An actuator 24 such as an air pressure or hydraulic cylinder fixedly mounted on the wall of No. 0 is connected to the door 2 via the rod 24a.
1 in place. Then, the actuator 24 drives the door 21 to open and close. In addition to the case where the driving force is applied to the door 21 by the actuator 24, the wheels 23 are directly driven by a motor or the like (not shown).
The door 21 can also be reciprocated along the rail 22 by being driven by.

[0005]

However, in the conventional door opening / closing device, the door 21 is mounted on the rail 2 via the wheels 23.
2, the wheel 23 rolls on the rail 22, and the rod 24a moves back and forth with respect to the actuator 24. As described above, since the rolling contact or sliding contact portions are required in the constituent members of the apparatus, there is a risk that dust is generated due to friction of those portions. Needless to say, this dust and the like is a very important problem that hinders the cleanliness of the clean room 20 and eventually affects the quality of the semiconductor device.

Therefore, an object of the present invention is to provide a door opening / closing device which eliminates the risk of dust generation and realizes a smooth operation thereof.

[0007]

A door opening / closing device according to the present invention comprises:
A door as an opening / closing means, and a track for guiding the movement of the door,
A magnetic levitation device that levitates the door with respect to the track,
A magnetic propulsion device that moves the door along the trajectory,
And a power supply device that supplies power to the magnetic levitation device and the magnetic propulsion device.

[0008]

According to the present invention, for example, the power supply device is housed in the door, but the power supply device supplies power to the magnetic levitation device installed in the door, and the magnetic action causes the door to be opened. Ascend from orbit. At the same time, the power supply device supplies power to the magnetic propulsion device installed on the door, and at the same time controls the polarity of the magnetic poles of the magnetic force applying means installed on the track side. A predetermined propulsion force is applied. The door moves along the track in the desired direction, but in this case there is no contact with the track and therefore there is no danger of dusting since no rolling or sliding contact occurs during the movement of the door. In addition, since it moves without contacting the track, smooth operation characteristics can be obtained when the door is opened and closed.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of a door opening / closing device according to the present invention will be described below with reference to FIGS. FIG. 1 is a front view of a main part of the device of the present invention, and FIG. 2 is a vertical sectional view thereof. In the figure, reference numeral 1 denotes a door as an opening / closing means, which opens and closes a predetermined portion of a clean room. Upper part 1a of door 1
Extends to both sides as shown and has a substantially T-shaped cross-sectional shape. Reference numeral 2 is a track for guiding the movement of the door 1 so that the door 1 can reciprocate along the same (see FIG. 1, arrow B). In this embodiment, the track 2 sandwiches the door 1 from both sides. is set up.

Further, 3 is a magnetic levitation device installed at a predetermined position on both sides of the door 1, and 4 is a suction means installed corresponding to the magnetic levitation device 3 along the longitudinal direction of the track 2. . The magnetic levitation device 3 is composed of an electromagnet, while the attraction means 4 is made of a material such as steel or stainless steel. Further, in this embodiment, as shown in FIG. 1, a plurality of (for example, three) electromagnets constituting the magnetic levitation device 3 are arranged in a row in the horizontal direction.

A fixed gap (vertical direction) is set between the magnetic levitation device 3 and the suction means 4. The magnetic levitation device 3 is supplied with electric power by an electric power supply unit which will be described later and generates a magnetic force (attracting force) between the magnetic levitation device 3 and the suction means 4. It has become. In this case, as shown in FIG. 2, appropriate damper means 5 may be attached to the lower surfaces of the upper portions 1a, 1a of the doors 1 and the seats may be seated via the damper means 5.

Further, 6 is a magnetic propulsion device for moving the door 1 along the track 2. The magnetic propulsion device 6 is composed of, for example, two electromagnets 6a and 6b (see FIG. 3). Further, two magnetic propulsion devices 6 are provided on both sides of the door 1 so as to be sandwiched between the magnetic levitation devices 3 in this embodiment, as shown in FIG. The magnetic levitation device 3 and the magnetic propulsion device 6 are adapted to be supplied with electric power by a power supply unit embedded in a proper place in the door 1. The power supply unit 7 includes a charging terminal 7a used to charge a battery (not shown) inside the power supply unit 7 (see FIG. 1).

Numeral 8 is a magnetic force applying means installed along the track 2 so as to generate a magnetic force between the magnetic propulsion device 6 and the magnetic propulsion means on both sides of the door 1 as shown in FIG. It can be arranged to face the device 6.
The magnetic force applying means 8 is, for example, as shown in FIG.
A plurality of electromagnets 8a, 8b, 8c, 8d ,. ． ． , 8k. Each of these electromagnets 8a to 8k is connected to the control means 9 and its polarity is controlled.

The door opening / closing device according to the present invention is constructed as described above, and its operation will be described below. Here first
When the door 1 is opened and closed, an open / close switch (not shown) is turned on / off. When the open / close switch is OFF, power is not supplied to the magnetic levitation device 3 and the magnetic propulsion device 6 and the like. Therefore, when this power is not supplied, the door 1 is stably seated on the track 2 via the damper means 5. is doing. At this time, an extremely small gap G is set between the lower end of the door 1 and the floor F of the clean room, as shown in FIG.

Next, when the open / close switch is turned on, electric power is supplied from the power supply unit 7 to the magnetic levitation device 3, whereby an attractive magnetic force is generated between the magnetic levitation device 3 and the attraction means 4. The magnetic levitation device 3 is levitated from the track 2 by this attracting magnetic force. At the same time, electric power is supplied to the magnetic propulsion device 6 from the electric power supply unit 7, and the magnetic force applying means 8 is controlled in polarity by the control means 9.

In this case, for example, as shown in FIG. 3, the polarities of the electromagnets 6a and 6b of the magnetic propulsion device 6 become the polarities as shown by the power feeding of the power supply unit 7. Further, each electromagnet 8a, 8b, 8c, 8d ,. ． ． , 8k has a polarity of N on the side facing the magnetic propulsion device 6 as shown in the figure.
Pole, south pole, north pole, south pole ,. ． As a result of the overall magnetic action between the magnetic propulsion device 6 and the magnetic force applying means 8, a propulsive force in the direction of arrow C is generated on the door 1.

In FIG. 3, when the door 1 moves in the direction of arrow C, the door 1 opens, but on the other hand, when the door 1 is open, a propulsive force in the direction opposite to the direction of arrow C is generated. Moreover, the door 1 can be closed by performing the polarity control by the control means 9. In addition, with the door 1 closed, the power supply unit 7 is connected via the charging terminal 7a shown in FIG.
The battery inside can be charged. Further, at the open / closed movement end of the door 1, an appropriate buffering means capable of absorbing the inertia of the door 1 which has moved along the track 2 may be provided to realize an accurate operation of the door 1. can do.

As described above, the door 1 moves along the track 2 in a desired direction and opens and closes. However, since it uses the magnetic force as described above, it operates without contact with the track 2. Therefore, when the door 1 is moved, there is no rolling contact or sliding contact, so there is no danger of dust generation and a high cleanliness of the clean room can be guaranteed. Moreover, since the door 1 moves in a non-contact state, a smooth operating characteristic can be obtained.
No rolling noise or sliding noise is generated, and an extremely high noise prevention effect can be obtained in terms of noise.

In the above embodiment, an example in which the power supply unit 7 including a battery is embedded in the door 1 as a power supply source for the magnetic levitation device 3, the magnetic propulsion device 6, etc. has been described. In addition to the above case, for example, electric power may be supplied from the outside of the door 1 to the magnetic levitation device 3 and the magnetic propulsion device 6 via appropriate lead wires or the like.

Further, the magnetic propulsion device 6 is a magnetic levitation device 3.
An example has been described in which the magnetic levitation device 3 is arranged in the same direction so as to be sandwiched between the magnetic levitation device 3 and the magnetic levitation device 3 as shown by a chain double-dashed line in FIG.
The magnetic force applying means 8 may be arranged so as to be displaced downward from the magnetic propulsion device 6 in correspondence with the magnetic propulsion device 6.
Further, the number of electromagnets constituting the magnetic levitation device 3, the magnetic propulsion device 6 and the like, their polarities and the like are not limited to those in the above embodiment, and can be appropriately changed as necessary.

[0021]

As described above, according to the present invention, the magnetic force is used as the power source for opening and closing the door, so that the door can be opened and closed without contact with the track, and the door can be opened or closed by sliding or friction. Dust can be effectively prevented. Then, a high cleanliness of the clean room can be guaranteed, and the quality of the semiconductor device or the like to be manufactured can be improved. In addition, the door can be operated smoothly and the noise can be effectively prevented.

[Brief description of drawings]

FIG. 1 is a front view of an embodiment of a door opening / closing device of the present invention.

FIG. 2 is a cross-sectional view taken along line II-II of FIG. 1 showing a configuration example of a main part of the door opening / closing device of the present invention.

FIG. 3 is a cross-sectional view taken along line III-III in FIG. 1 showing an operational relationship of the magnetic propulsion device in the door opening / closing device of the present invention.

FIG. 4 is a front view showing a configuration example of a conventional door opening / closing device.

[Explanation of symbols]

 1 door 1a upper part 2 orbit 3 magnetic levitation device 4 suction means 5 damper means 6 magnetic propulsion device 6a electromagnet 6b electromagnet 7 power supply unit 8 magnetic force applying means 8a to 8k electromagnet 9 control means

Claims (1)

[Claims] 1. A door as opening / closing means, a track for guiding the movement of the door, a magnetic levitation device for levitating the door with respect to the track, and a magnetic propulsion device for moving the door along the track. And a power supply device that supplies power to the magnetic levitation device and the magnetic propulsion device.