JPH0327454B2 - - Google Patents
Info
- Publication number
- JPH0327454B2 JPH0327454B2 JP60231933A JP23193385A JPH0327454B2 JP H0327454 B2 JPH0327454 B2 JP H0327454B2 JP 60231933 A JP60231933 A JP 60231933A JP 23193385 A JP23193385 A JP 23193385A JP H0327454 B2 JPH0327454 B2 JP H0327454B2
- Authority
- JP
- Japan
- Prior art keywords
- movable body
- electromagnet
- linear motor
- box
- shaped duct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005294 ferromagnetic effect Effects 0.000 claims description 7
- 238000007667 floating Methods 0.000 claims description 5
- 101700004678 SLIT3 Proteins 0.000 description 5
- 102100027339 Slit homolog 3 protein Human genes 0.000 description 5
- 238000005339 levitation Methods 0.000 description 4
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000003302 ferromagnetic material Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Non-Mechanical Conveyors (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、例えば半導体のウエハなどのように
塵埃をきらうものを取扱うときに採用され、主と
してクリーンルーム内に配設されるリニアモータ
使用の荷搬送装置に関するものである。[Detailed Description of the Invention] Industrial Application Field The present invention is applied to a load transfer device using a linear motor, which is employed when handling objects that are sensitive to dust, such as semiconductor wafers, and is mainly installed in a clean room. It is related to.
従来の技術
例えば半導体のウエハを取扱う場合、搬送装置
を配設する工場（室）内をクリーン化すると共
に、搬送装置を防塵化している。すなわち従来で
は、電磁石の反発力あるいは噴射空気を利用して
可動体を浮上させ、この可動体をリニアモータに
より走行させる方式の荷搬送装置が用いられてい
る。このような荷搬送装置では、可動体の停止時
に可動体が静止せず、ガタツキを生じる。そこで
従来は、可動体の停止位置に電磁石を設け、この
電磁石の吸引力により可動体のガタツキを防止し
ていた。BACKGROUND TECHNOLOGY For example, when handling semiconductor wafers, the interior of a factory (room) in which a transfer device is installed is kept clean, and the transfer device is made dust-proof. That is, conventionally, a load conveying device has been used in which a movable body is levitated using the repulsive force of an electromagnet or jetted air, and the movable body is driven by a linear motor. In such a load conveying device, when the movable body is stopped, the movable body does not stand still, causing wobbling. Conventionally, an electromagnet was provided at the stop position of the movable body, and the attractive force of the electromagnet was used to prevent the movable body from wobbling.
発明が解決しようとする問題点
しかしながら上記従来の構成では、停止位置が
多い場合、多数の電磁石が必要であり、また停止
位置を変更する場合、電磁石の設置位置も変更し
なければならないという問題があつた。Problems to be Solved by the Invention However, with the above conventional configuration, if there are many stopping positions, a large number of electromagnets are required, and when changing the stopping positions, the installation position of the electromagnets must also be changed. It was hot.
本発明は上記従来の問題点を解消したリニアモ
ータ使用の荷搬送装置を提供することを目的とす
る。 SUMMARY OF THE INVENTION An object of the present invention is to provide a load conveying device using a linear motor that solves the above-mentioned conventional problems.
問題点を解決するための手段
上記問題点を解決するため、本発明のリニアモ
ータ使用の荷搬送装置は、浮上装置により浮上せ
しめられてリニアモータにより搬送経路上を走行
する可動体と、前記搬送経路に沿つて設置された
強磁性体と、この強磁性体に対向して前記可動体
に取付けられ、前記浮上装置による浮力に対向し
て前記強磁性体の間に吸引力を生じさせる電磁石
とを備えた構成としたものである。Means for Solving the Problems In order to solve the above-mentioned problems, a load conveyance device using a linear motor according to the present invention includes a movable body that is floated by a floating device and travels on a conveyance path by a linear motor, and a load conveyance device using a linear motor. a ferromagnetic body installed along the path; and an electromagnet attached to the movable body facing the ferromagnetic body to generate an attractive force between the ferromagnetic bodies in opposition to the buoyancy of the levitation device. The configuration is equipped with the following.
作 用
上記構成によれば、電磁石と強磁性体との間の
吸引力により停止時における可動体のガタツキを
防止でき、しかも電磁石を可動体側に設けたの
で、停止位置が多い場合には電磁石の数を大幅に
削減でき、また停止位置を変更しても電磁石の設
置位置を変更する必要がない。Effects According to the above configuration, the attractive force between the electromagnet and the ferromagnetic material can prevent the movable body from shaking when it is stopped.Moreover, since the electromagnet is provided on the movable body side, when there are many stopping positions, the electromagnet can be prevented from shaking. The number can be significantly reduced, and there is no need to change the installation position of the electromagnet even if the stop position is changed.
実施例
以下、本発明の一実施例を第１図〜第４図に基
づいて説明する。Embodiment Hereinafter, an embodiment of the present invention will be described based on FIGS. 1 to 4.
第１図は本発明の一実施例におけるリニアモー
タ使用の荷搬送装置の平面図、第２図は同縦断側
面図、第３図は同縦断正面図で、１は搬送経路を
構成する箱型ダクト、２は前記搬送経路に沿つて
走行する可動体である。前記箱型ダクト１は、天
板部１ａが強磁性体からなり、他の部分はアルミ
ニウムにより構成されている。天板部１ａの幅方
向中央部には長さ方向全長にわたつてスリツト３
が形成されており、スリツト３を形成する天板部
１ａの端面には静電シート４が装着されている。
前記箱型ダクト１の両側壁の内面側には、高さ方
向中央部に長さ方向全長にわたる突出部１ｂが突
設されており、この突出部１ｂには長さ方向全長
にわたる永久磁石５が設置されている。前記箱型
ダクト１の両側壁の内面側には、前記突出部１ｂ
よりも上方の位置に、長さ方向全長にわたる永久
磁石６が設置されており、前記箱型ダクト１の底
壁上には、リニアモータの１次側巻線などからな
る固定子７が長さ方向適当間隔おきに設置されて
いる。前記可動体２は、前記箱型ダクト１の内部
に位置する自走台車部８と、前記箱型ダクト１の
上方に位置して被搬送物（図示せず）が載置され
る被搬送物支持部９と、前記スリツト３を通つて
自走台車部８と被搬送物支持物９とを連結する連
結部１０とから構成されている。前記自走台車部
８は、第４図に示すように、台車本体１１と、こ
の台車本体１１の前端部及び後端部に縦軸心回り
に回動自在に取付けられた揺動体１２とにより構
成されており、各揺動体１２には、下面に前記永
久磁石５と対向する永久磁石１３が取付けられて
いると共に、両側面に前記永久磁石６と対向する
永久磁石１４が取付けられている。前記自走台車
部８の下面には、リニアモータの２次側導体から
なる移動子１５が取付けられており、この移動子
１５と前記固定子７とによりリニアモータ１６が
構成されている。前記永久磁石５と永久磁石１３
とは、相対向する面が互いに同極性で、前記可動
体２を浮上させる反発力を発生しており、浮上装
置を構成している。前記永久磁石６と永久磁石１
４とは、相対向する面が互いに同極性で、前記可
動体２の幅方向の位置を規制するための反発力を
発生している。前記可動体２の被搬送物支持部９
には、前面及び後面にブラケツト１７を介して太
陽電池１８が取付けられていると共に、底面から
は前記箱型ダクト１の天板部１ａに対向する複数
の電磁石１９が突出しており、さらに内部には前
記太陽電池１８から電磁石１９への電源供給を制
御する制御装置２０が設置されている。 FIG. 1 is a plan view of a load conveyance device using a linear motor according to an embodiment of the present invention, FIG. 2 is a longitudinal side view of the same, and FIG. 3 is a longitudinal front view of the same. The duct 2 is a movable body that travels along the conveyance path. The box-shaped duct 1 has a top plate portion 1a made of a ferromagnetic material, and other parts made of aluminum. A slit 3 is provided in the widthwise center of the top plate portion 1a over the entire lengthwise direction.
An electrostatic sheet 4 is attached to the end surface of the top plate portion 1a forming the slit 3.
A protruding part 1b extending over the entire length in the longitudinal direction is provided protrudingly provided on the inner surface side of both side walls of the box-shaped duct 1 at the central part in the height direction, and a permanent magnet 5 extending over the entire length in the longitudinal direction is provided in this protruding part 1b. is set up. On the inner side of both side walls of the box-shaped duct 1, the protrusion 1b is provided.
A permanent magnet 6 is installed over the entire length of the box-shaped duct 1, and a stator 7 consisting of the primary winding of a linear motor is placed on the bottom wall of the box-shaped duct 1. They are installed at appropriate intervals in the direction. The movable body 2 includes a self-propelled cart section 8 located inside the box-shaped duct 1, and a transported object (not shown) located above the box-shaped duct 1 on which a transported object (not shown) is placed. It is comprised of a support part 9 and a connecting part 10 that connects the self-propelled cart part 8 and the object support 9 through the slit 3. As shown in FIG. 4, the self-propelled truck section 8 includes a truck body 11 and a rocking body 12 attached to the front and rear ends of the truck body 11 so as to be rotatable around a vertical axis. Each oscillator 12 has a permanent magnet 13 facing the permanent magnet 5 attached to its lower surface, and permanent magnets 14 facing the permanent magnet 6 on both sides thereof. A mover 15 made of a secondary conductor of a linear motor is attached to the lower surface of the self-propelled cart portion 8, and a linear motor 16 is constituted by this mover 15 and the stator 7. The permanent magnet 5 and the permanent magnet 13
The surfaces facing each other have the same polarity and generate a repulsive force that levitates the movable body 2, thereby forming a levitation device. The permanent magnet 6 and the permanent magnet 1
4, the opposing surfaces have the same polarity and generate a repulsive force for regulating the position of the movable body 2 in the width direction. Transported object support section 9 of the movable body 2
A solar cell 18 is attached to the front and rear surfaces of the duct via brackets 17, and a plurality of electromagnets 19 protrude from the bottom of the duct 1, facing the top plate 1a of the box-shaped duct 1. A control device 20 for controlling power supply from the solar cell 18 to the electromagnet 19 is installed.
以下、上記構成における作用について説明す
る。可動体２は、電磁石５，１３の反発力により
浮上した状態で、リニアモータ１６により走行す
る。このとき、永久磁石６，１４の反発力により
箱型ダクト１に沿つて正確に案内される。また箱
型ダクト１により構成される搬送経路にカーブが
あつても、揺動体１２の揺動により走行可能であ
る。そして可動体２の停止時には、制御装置２０
により太陽電池１８からの電源が電磁石１９に通
電され、電磁石１９と強磁性体からなる箱型ダク
ト１の天板部１ａとの間に吸引力が発生し、可動
体２のガタツキが抑制される。この吸引力は、永
久磁石５，１３の反発力よりも小さいので、停止
時においても可動体２は浮上している。 Hereinafter, the effects of the above configuration will be explained. The movable body 2 is moved by a linear motor 16 while floating due to the repulsive force of the electromagnets 5 and 13. At this time, it is accurately guided along the box-shaped duct 1 by the repulsive force of the permanent magnets 6 and 14. Further, even if there is a curve in the conveyance path constituted by the box-shaped duct 1, the movement is possible due to the rocking of the rocking body 12. When the movable body 2 is stopped, the control device 20
As a result, the power from the solar cell 18 is applied to the electromagnet 19, and an attractive force is generated between the electromagnet 19 and the top plate part 1a of the box-shaped duct 1 made of ferromagnetic material, and the wobbling of the movable body 2 is suppressed. . Since this attractive force is smaller than the repulsive force of the permanent magnets 5 and 13, the movable body 2 remains floating even when stopped.
このように、ガタツキ防止のための電磁石１９
を可動体２に設けたので、電磁石１９の設置数は
可動体２の停止位置数に影響されず、停止位置が
多い場合には電磁石１９の数を大幅に削減でき
る。また停止位置の変更に際しても、電磁石１９
の位置を変更する必要がない。また電磁石１９の
電源として太陽電池１８を用いたので、バツテリ
などと比較して小型軽量化できると共に充電など
の手数も不要である。またスリツト３部分に静電
シート４を設けたので、スリツト３部分を通つて
箱型ダクト１の外部に飛び出そうとする塵埃を静
電シート４により吸着でき、したがつてクリーン
ルームの汚染を防止できる。なお、静電シート４
に通電するようにしてもよい。 In this way, the electromagnet 19 for preventing rattling
are provided on the movable body 2, the number of electromagnets 19 installed is not affected by the number of stopping positions of the movable body 2, and when there are many stopping positions, the number of electromagnets 19 can be significantly reduced. Also, when changing the stop position, the electromagnet 19
There is no need to change the position. Furthermore, since the solar cell 18 is used as a power source for the electromagnet 19, it can be made smaller and lighter than a battery or the like, and there is no need for trouble such as charging. In addition, since the electrostatic sheet 4 is provided at the slit 3 portion, the electrostatic sheet 4 can attract dust that is about to fly out of the box-shaped duct 1 through the slit 3 portion, thereby preventing contamination of the clean room. . In addition, the electrostatic sheet 4
It is also possible to energize.
なお上記実施例においては、浮上装置として永
久磁石５，１３を用いたが、これの代わりに、多
数の噴射口から空気を噴射して可動体２を浮上さ
せるエア浮上方式を用いてもよい。 In the above embodiment, the permanent magnets 5 and 13 are used as the levitation device, but instead of this, an air levitation method may be used in which the movable body 2 is levitated by injecting air from a number of injection ports.
発明の効果
以上述べたごとく本発明によれば、可動体のガ
タツキ防止のための電磁石を可動体に設けたの
で、電磁石の設置数は可動体の停止位置数に影響
されず、停止位置が多い場合、電磁石の数を大幅
に削減できる。また停止位置の変更に際しても、
電磁石の設置位置を変更する必要がない。Effects of the Invention As described above, according to the present invention, electromagnets are provided in the movable body to prevent the movable body from wobbling, so the number of installed electromagnets is not affected by the number of stopping positions of the movable body, and there are many stopping positions. In this case, the number of electromagnets can be significantly reduced. Also, when changing the stopping position,
There is no need to change the installation position of the electromagnet.
第１図は本発明の一実施例におけるリニアモー
タ使用の荷搬送装置の平面図、第２図は同縦断側
面図、第３図は同縦断正面図、第４図は同荷搬送
装置における可動体の自走台車部の平面図であ
る。
１…箱型ダクト、１ａ…天板部、２…可動体、
５，１３…永久磁石、１６…リニアモータ、１９
…電磁石。
Fig. 1 is a plan view of a load transfer device using a linear motor according to an embodiment of the present invention, Fig. 2 is a longitudinal side view of the same, Fig. 3 is a longitudinal front view of the same, and Fig. 4 is a movement of the load transfer device in the same embodiment. FIG. 1...Box-shaped duct, 1a...Top plate part, 2...Movable body,
5, 13...Permanent magnet, 16...Linear motor, 19
…electromagnet.
Claims (1)
タにより搬送経路上を走行する可動体と、前記搬
送経路に沿つて配置された強磁性体と、この強磁
性体に対向して前記可動体に取付けられ、前記浮
上装置による浮力に対向して前記強磁性体との間
に吸引力を生じさせる電磁石とを備えたリニアモ
ータ使用の荷搬送装置。1. A movable body that is levitated by a floating device and travels on a conveyance path by a linear motor, a ferromagnetic body arranged along the conveyance path, and a movable body that is attached to the movable body facing the ferromagnetic body, A load conveyance device using a linear motor, comprising an electromagnet that generates an attractive force between the ferromagnetic body and the ferromagnetic body in opposition to the buoyancy caused by the floating device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23193385A JPS6293120A (en) | 1985-10-16 | 1985-10-16 | Load transport device using linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23193385A JPS6293120A (en) | 1985-10-16 | 1985-10-16 | Load transport device using linear motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6293120A JPS6293120A (en) | 1987-04-28 |
| JPH0327454B2 true JPH0327454B2 (en) | 1991-04-16 |
Family
ID=16931337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23193385A Granted JPS6293120A (en) | 1985-10-16 | 1985-10-16 | Load transport device using linear motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6293120A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0638427Y2 (en) * | 1987-06-16 | 1994-10-05 | 東京エレクトロン東北株式会社 | Magnetically levitated wafer transfer device |
| JPH0759208A (en) * | 1993-08-13 | 1995-03-03 | Murata Mach Ltd | Holding unit for linear carrying truck |
| US8322509B2 (en) * | 2007-09-07 | 2012-12-04 | Tohoku Seiki Industries, Ltd. | Solar cell module conveyer line |
| JP2009176161A (en) * | 2008-01-25 | 2009-08-06 | Toshiba Corp | Electronic appliance |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60170401A (en) * | 1984-02-14 | 1985-09-03 | Toshiba Corp | Levitating type conveying apparatus |
-
1985
- 1985-10-16 JP JP23193385A patent/JPS6293120A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60170401A (en) * | 1984-02-14 | 1985-09-03 | Toshiba Corp | Levitating type conveying apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6293120A (en) | 1987-04-28 |
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