GB2486839B - Method and structure for forming high-performance fets with embedded stressors - Google Patents

Method and structure for forming high-performance fets with embedded stressors

Info

Publication number
GB2486839B
GB2486839B GB1204634.8A GB201204634A GB2486839B GB 2486839 B GB2486839 B GB 2486839B GB 201204634 A GB201204634 A GB 201204634A GB 2486839 B GB2486839 B GB 2486839B
Authority
GB
United Kingdom
Prior art keywords
forming high
embedded stressors
performance fets
fets
performance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB1204634.8A
Other languages
English (en)
Other versions
GB201204634D0 (en
GB2486839A (en
Inventor
Kangguo Cheng
Ali Khakifirooz
Bruce Doris
Ghavam G Shahidi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB201204634D0 publication Critical patent/GB201204634D0/en
Publication of GB2486839A publication Critical patent/GB2486839A/en
Application granted granted Critical
Publication of GB2486839B publication Critical patent/GB2486839B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0223—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
    • H10D30/0227—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate having both lightly-doped source and drain extensions and source and drain regions self-aligned to the sides of the gate, e.g. lightly-doped drain [LDD] MOSFET or double-diffused drain [DDD] MOSFET
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/027—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs
    • H10D30/0275—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs forming single crystalline semiconductor source or drain regions resulting in recessed gates, e.g. forming raised source or drain regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H10D30/608—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  having non-planar bodies, e.g. having recessed gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/791—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions
    • H10D30/797—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions being in source or drain regions, e.g. SiGe source or drain
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/01—Manufacture or treatment
    • H10D62/021—Forming source or drain recesses by etching e.g. recessing by etching and then refilling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/82—Heterojunctions
    • H10D62/822—Heterojunctions comprising only Group IV materials heterojunctions, e.g. Si/Ge heterojunctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
    • H10D64/251—Source or drain electrodes for field-effect devices
    • H10D64/258—Source or drain electrodes for field-effect devices characterised by the relative positions of the source or drain electrodes with respect to the gate electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
    • H01L21/2251—Diffusion into or out of group IV semiconductors
    • H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
    • H01L21/2257—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides the applied layer being silicon or silicide or SIPOS, e.g. polysilicon, porous silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26586—Bombardment with radiation with high-energy radiation producing ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0212—Manufacture or treatment of FETs having insulated gates [IGFET] using self-aligned silicidation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/017—Manufacture or treatment using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/021—Manufacture or treatment using multiple gate spacer layers, e.g. bilayered sidewall spacers
GB1204634.8A 2009-09-24 2010-09-08 Method and structure for forming high-performance fets with embedded stressors Expired - Fee Related GB2486839B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/566,004 US8022488B2 (en) 2009-09-24 2009-09-24 High-performance FETs with embedded stressors
PCT/US2010/048039 WO2011037743A2 (en) 2009-09-24 2010-09-08 Method and structure for forming high-performance fets with embedded stressors

Publications (3)

Publication Number Publication Date
GB201204634D0 GB201204634D0 (en) 2012-05-02
GB2486839A GB2486839A (en) 2012-06-27
GB2486839B true GB2486839B (en) 2013-09-04

Family

ID=43755874

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1204634.8A Expired - Fee Related GB2486839B (en) 2009-09-24 2010-09-08 Method and structure for forming high-performance fets with embedded stressors

Country Status (7)

Country Link
US (1) US8022488B2 (enExample)
JP (1) JP5689470B2 (enExample)
CN (1) CN102511081B (enExample)
DE (1) DE112010002895B4 (enExample)
GB (1) GB2486839B (enExample)
TW (1) TW201125124A (enExample)
WO (1) WO2011037743A2 (enExample)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011086728A (ja) * 2009-10-14 2011-04-28 Renesas Electronics Corp 半導体装置およびその製造方法
US8236660B2 (en) 2010-04-21 2012-08-07 International Business Machines Corporation Monolayer dopant embedded stressor for advanced CMOS
US8299535B2 (en) * 2010-06-25 2012-10-30 International Business Machines Corporation Delta monolayer dopants epitaxy for embedded source/drain silicide
KR101721036B1 (ko) * 2010-09-02 2017-03-29 삼성전자주식회사 반도체 소자 및 그 제조 방법
US9698054B2 (en) 2010-10-19 2017-07-04 Taiwan Semiconductor Manufacturing Company, Ltd. Strained structure of a p-type field effect transistor
US8946064B2 (en) * 2011-06-16 2015-02-03 International Business Machines Corporation Transistor with buried silicon germanium for improved proximity control and optimized recess shape
DE102011080438B3 (de) * 2011-08-04 2013-01-31 Globalfoundries Inc. Herstellverfahren für einen N-Kanaltransistor mit einer Metallgateelektrodenstruktur mit großem ε und einem reduzierten Reihenwiderstand durch epitaktisch hergestelltes Halbleitermaterial in den Drain- und Sourcebereichen und N-Kanaltransistor
US9064892B2 (en) * 2011-08-30 2015-06-23 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor devices utilizing partially doped stressor film portions and methods for forming the same
CN102280379B (zh) * 2011-09-05 2016-06-01 上海集成电路研发中心有限公司 一种应变硅nmos器件的制造方法
CN103137480B (zh) * 2011-11-25 2015-07-08 中芯国际集成电路制造(上海)有限公司 Mos器件的形成方法及其形成的mos器件
US8658505B2 (en) * 2011-12-14 2014-02-25 International Business Machines Corporation Embedded stressors for multigate transistor devices
US9006069B2 (en) * 2011-12-19 2015-04-14 Intel Corporation Pulsed laser anneal process for transistors with partial melt of a raised source-drain
CN103187299B (zh) * 2011-12-31 2015-08-05 中芯国际集成电路制造(上海)有限公司 晶体管的形成方法
US9012277B2 (en) * 2012-01-09 2015-04-21 Globalfoundries Inc. In situ doping and diffusionless annealing of embedded stressor regions in PMOS and NMOS devices
US8828831B2 (en) 2012-01-23 2014-09-09 International Business Machines Corporation Epitaxial replacement of a raised source/drain
US9142642B2 (en) * 2012-02-10 2015-09-22 Taiwan Semiconductor Manufacturing Company, Ltd. Methods and apparatus for doped SiGe source/drain stressor deposition
US8592916B2 (en) 2012-03-20 2013-11-26 International Business Machines Corporation Selectively raised source/drain transistor
CN103325684B (zh) 2012-03-23 2016-03-02 中国科学院微电子研究所 一种半导体结构及其制造方法
US8853750B2 (en) 2012-04-27 2014-10-07 International Business Machines Corporation FinFET with enhanced embedded stressor
US8674447B2 (en) * 2012-04-27 2014-03-18 International Business Machines Corporation Transistor with improved sigma-shaped embedded stressor and method of formation
US8936977B2 (en) * 2012-05-29 2015-01-20 Globalfoundries Singapore Pte. Ltd. Late in-situ doped SiGe junctions for PMOS devices on 28 nm low power/high performance technologies using a silicon oxide encapsulation, early halo and extension implantations
US20130328135A1 (en) * 2012-06-12 2013-12-12 International Business Machines Corporation Preventing fully silicided formation in high-k metal gate processing
KR101909204B1 (ko) * 2012-06-25 2018-10-17 삼성전자 주식회사 내장된 스트레인-유도 패턴을 갖는 반도체 소자 및 그 형성 방법
US9029208B2 (en) 2012-11-30 2015-05-12 International Business Machines Corporation Semiconductor device with replacement metal gate and method for selective deposition of material for replacement metal gate
US9356136B2 (en) * 2013-03-07 2016-05-31 Taiwan Semiconductor Manufacturing Co., Ltd. Engineered source/drain region for n-Type MOSFET
DE102013105705B4 (de) * 2013-03-13 2020-03-12 Taiwan Semiconductor Manufacturing Company, Ltd. Halbleitervorrichtung und dessen Herstellung
US9691882B2 (en) * 2013-03-14 2017-06-27 International Business Machines Corporation Carbon-doped cap for a raised active semiconductor region
JP2014187238A (ja) * 2013-03-25 2014-10-02 Toyoda Gosei Co Ltd Ｍｉｓ型半導体装置の製造方法
US9059217B2 (en) 2013-03-28 2015-06-16 International Business Machines Corporation FET semiconductor device with low resistance and enhanced metal fill
US9252014B2 (en) 2013-09-04 2016-02-02 Globalfoundries Inc. Trench sidewall protection for selective epitaxial semiconductor material formation
CN104465383B (zh) * 2013-09-23 2018-03-06 中芯国际集成电路制造(上海)有限公司 降低mos晶体管短沟道效应的方法
US10090392B2 (en) * 2014-01-17 2018-10-02 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor device and manufacturing method thereof
US9324830B2 (en) 2014-03-27 2016-04-26 International Business Machines Corporation Self-aligned contact process enabled by low temperature
JP6194516B2 (ja) 2014-08-29 2017-09-13 豊田合成株式会社 Ｍｉｓ型半導体装置
US9543438B2 (en) * 2014-10-15 2017-01-10 Taiwan Semiconductor Manufacturing Company, Ltd. Contact resistance reduction technique
KR102152285B1 (ko) * 2014-12-08 2020-09-04 삼성전자주식회사 스트레서를 갖는 반도체 소자 및 그 형성 방법
US9991343B2 (en) * 2015-02-26 2018-06-05 Taiwan Semiconductor Manufacturing Company Ltd. LDD-free semiconductor structure and manufacturing method of the same
KR102326112B1 (ko) 2015-03-30 2021-11-15 삼성전자주식회사 반도체 소자
US9947755B2 (en) * 2015-09-30 2018-04-17 International Business Machines Corporation III-V MOSFET with self-aligned diffusion barrier
CN106960838B (zh) * 2016-01-11 2019-07-02 中芯国际集成电路制造(上海)有限公司 静电保护器件及其形成方法
US9997631B2 (en) * 2016-06-03 2018-06-12 Taiwan Semiconductor Manufacturing Company Methods for reducing contact resistance in semiconductors manufacturing process
JP6685870B2 (ja) 2016-09-15 2020-04-22 株式会社東芝 半導体装置
CN107958935B (zh) * 2016-10-18 2020-11-27 中芯国际集成电路制造(上海)有限公司 鳍式场效应管及其形成方法
US10879354B2 (en) * 2016-11-28 2020-12-29 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device and forming method thereof
CN109300788A (zh) * 2017-07-25 2019-02-01 中芯国际集成电路制造(北京)有限公司 半导体结构及其形成方法
US10468530B2 (en) 2017-11-15 2019-11-05 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor structure with source/drain multi-layer structure and method for forming the same
US10510889B2 (en) 2017-11-29 2019-12-17 Taiwan Semiconductor Manufacturing Co., Ltd. P-type strained channel in a fin field effect transistor (FinFET) device
CN110838521B (zh) * 2019-11-19 2023-04-07 上海华力集成电路制造有限公司 P型半导体器件及其制造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050280098A1 (en) * 2004-06-22 2005-12-22 Samsung Electronics Co., Ltd. Method of fabricating CMOS transistor and CMOS transistor fabricated thereby
US20060014366A1 (en) * 2002-06-07 2006-01-19 Amberwave Systems Corporation Control of strain in device layers by prevention of relaxation
US20060234504A1 (en) * 2005-02-04 2006-10-19 Matthias Bauer Selective deposition of silicon-containing films
US20060234488A1 (en) * 2003-10-10 2006-10-19 Yihwan Kim METHODS OF SELECTIVE DEPOSITION OF HEAVILY DOPED EPITAXIAL SiGe

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2839018B2 (ja) * 1996-07-31 1998-12-16 日本電気株式会社 半導体装置の製造方法
JP2001127291A (ja) * 1999-11-01 2001-05-11 Mitsubishi Electric Corp 半導体装置及びその製造方法
US6621131B2 (en) 2001-11-01 2003-09-16 Intel Corporation Semiconductor transistor having a stressed channel
KR100406537B1 (ko) 2001-12-03 2003-11-20 주식회사 하이닉스반도체 반도체장치의 제조 방법
US6995430B2 (en) * 2002-06-07 2006-02-07 Amberwave Systems Corporation Strained-semiconductor-on-insulator device structures
US7329923B2 (en) 2003-06-17 2008-02-12 International Business Machines Corporation High-performance CMOS devices on hybrid crystal oriented substrates
US6891192B2 (en) 2003-08-04 2005-05-10 International Business Machines Corporation Structure and method of making strained semiconductor CMOS transistors having lattice-mismatched semiconductor regions underlying source and drain regions
US7303949B2 (en) * 2003-10-20 2007-12-04 International Business Machines Corporation High performance stress-enhanced MOSFETs using Si:C and SiGe epitaxial source/drain and method of manufacture
US7023055B2 (en) 2003-10-29 2006-04-04 International Business Machines Corporation CMOS on hybrid substrate with different crystal orientations using silicon-to-silicon direct wafer bonding
US20050116290A1 (en) 2003-12-02 2005-06-02 De Souza Joel P. Planar substrate with selected semiconductor crystal orientations formed by localized amorphization and recrystallization of stacked template layers
US6946350B2 (en) 2003-12-31 2005-09-20 Intel Corporation Controlled faceting of source/drain regions
US7226842B2 (en) 2004-02-17 2007-06-05 Intel Corporation Fabricating strained channel epitaxial source/drain transistors
JP4369359B2 (ja) * 2004-12-28 2009-11-18 富士通マイクロエレクトロニクス株式会社 半導体装置
US7202513B1 (en) * 2005-09-29 2007-04-10 International Business Machines Corporation Stress engineering using dual pad nitride with selective SOI device architecture
DE102006009226B9 (de) * 2006-02-28 2011-03-10 Advanced Micro Devices, Inc., Sunnyvale Verfahren zum Herstellen eines Transistors mit einer erhöhten Schwellwertstabilität ohne Durchlass-Strombeeinträchtigung und Transistor
US7618866B2 (en) * 2006-06-09 2009-11-17 International Business Machines Corporation Structure and method to form multilayer embedded stressors
JP2008235568A (ja) * 2007-03-20 2008-10-02 Toshiba Corp 半導体装置およびその製造方法
US7745847B2 (en) * 2007-08-09 2010-06-29 United Microelectronics Corp. Metal oxide semiconductor transistor
US7759199B2 (en) * 2007-09-19 2010-07-20 Asm America, Inc. Stressor for engineered strain on channel
US20090140351A1 (en) * 2007-11-30 2009-06-04 Hong-Nien Lin MOS Devices Having Elevated Source/Drain Regions

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060014366A1 (en) * 2002-06-07 2006-01-19 Amberwave Systems Corporation Control of strain in device layers by prevention of relaxation
US20060234488A1 (en) * 2003-10-10 2006-10-19 Yihwan Kim METHODS OF SELECTIVE DEPOSITION OF HEAVILY DOPED EPITAXIAL SiGe
US20050280098A1 (en) * 2004-06-22 2005-12-22 Samsung Electronics Co., Ltd. Method of fabricating CMOS transistor and CMOS transistor fabricated thereby
US20060234504A1 (en) * 2005-02-04 2006-10-19 Matthias Bauer Selective deposition of silicon-containing films

Also Published As

Publication number Publication date
US20110068396A1 (en) 2011-03-24
CN102511081A (zh) 2012-06-20
DE112010002895T5 (de) 2012-06-21
JP5689470B2 (ja) 2015-03-25
GB201204634D0 (en) 2012-05-02
TW201125124A (en) 2011-07-16
DE112010002895B4 (de) 2012-11-08
CN102511081B (zh) 2015-10-14
US8022488B2 (en) 2011-09-20
JP2013506291A (ja) 2013-02-21
GB2486839A (en) 2012-06-27
WO2011037743A3 (en) 2011-07-07
WO2011037743A2 (en) 2011-03-31

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