EP2520398A4 - Drive device and conveyance device - Google Patents

Drive device and conveyance device

Info

Publication number
EP2520398A4
EP2520398A4 EP10840757.8A EP10840757A EP2520398A4 EP 2520398 A4 EP2520398 A4 EP 2520398A4 EP 10840757 A EP10840757 A EP 10840757A EP 2520398 A4 EP2520398 A4 EP 2520398A4
Authority
EP
European Patent Office
Prior art keywords
conveyance
drive
drive device
conveyance device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10840757.8A
Other languages
German (de)
French (fr)
Other versions
EP2520398A1 (en
Inventor
Hirotoshi Nakao
Muneyoshi Nishitsuji
Takahiro Yoshino
Takuya Kuriyama
Taiji Chiba
Daisuke Kawakubo
Kiyotaka Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of EP2520398A1 publication Critical patent/EP2520398A1/en
Publication of EP2520398A4 publication Critical patent/EP2520398A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/003—Programme-controlled manipulators having parallel kinematics

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
EP10840757.8A 2009-12-28 2010-12-22 Drive device and conveyance device Withdrawn EP2520398A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009297918 2009-12-28
PCT/JP2010/007446 WO2011080897A1 (en) 2009-12-28 2010-12-22 Drive device and conveyance device

Publications (2)

Publication Number Publication Date
EP2520398A1 EP2520398A1 (en) 2012-11-07
EP2520398A4 true EP2520398A4 (en) 2014-10-29

Family

ID=44226325

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10840757.8A Withdrawn EP2520398A4 (en) 2009-12-28 2010-12-22 Drive device and conveyance device

Country Status (7)

Country Link
US (1) US9252038B2 (en)
EP (1) EP2520398A4 (en)
JP (1) JP5463367B2 (en)
KR (1) KR101477366B1 (en)
CN (1) CN102686367B (en)
TW (1) TWI498203B (en)
WO (1) WO2011080897A1 (en)

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US8573919B2 (en) * 2005-07-11 2013-11-05 Brooks Automation, Inc. Substrate transport apparatus
JP5729319B2 (en) * 2012-02-01 2015-06-03 株式会社安川電機 robot
CN104428884B (en) * 2012-07-05 2017-10-24 应用材料公司 Suspension rod drive device, multi-arm robot device, electronic device processing system and the method for transmitting substrate in electronic device manufacturing system
JP5682721B1 (en) * 2014-03-31 2015-03-11 ソニー株式会社 Industrial robot and its mounting unit
JP6474971B2 (en) * 2014-07-03 2019-02-27 株式会社ダイヘン Work transfer device
CN106695763B (en) * 2017-01-20 2023-05-05 珠海格力智能装备有限公司 Pneumatic component mounting structure
CN107283405B (en) * 2017-08-24 2024-01-30 上海岭先机器人科技股份有限公司 Mechanical arm
DE102017217907B4 (en) * 2017-10-09 2019-06-19 Kuka Deutschland Gmbh Robot arm with a robot hand drive device
US10109517B1 (en) 2018-01-10 2018-10-23 Lam Research Corporation Rotational indexer with additional rotational axes
CN109227571A (en) * 2018-11-20 2019-01-18 东台市海邦电气有限公司 Rocker arm robot primary axes rotating control assembly improved process
US11781238B2 (en) 2019-05-20 2023-10-10 Applied Materials, Inc. Systems and methods for plate-up detection
US11443973B2 (en) 2019-07-12 2022-09-13 Applied Materials, Inc. Robot for simultaneous substrate transfer
US11117265B2 (en) * 2019-07-12 2021-09-14 Applied Materials, Inc. Robot for simultaneous substrate transfer
JP2022540608A (en) * 2019-07-12 2022-09-16 アプライド マテリアルズ インコーポレイテッド Simultaneous substrate transfer robot
KR20220031700A (en) 2019-07-12 2022-03-11 어플라이드 머티어리얼스, 인코포레이티드 Robot for simultaneous board transfer
US11574826B2 (en) 2019-07-12 2023-02-07 Applied Materials, Inc. High-density substrate processing systems and methods
US20220111513A1 (en) * 2020-10-14 2022-04-14 Applied Materials, Inc. Infinite rotation of vacuum robot linkage through timing belt with isolated environment
KR102307690B1 (en) * 2021-06-25 2021-10-05 (주) 티로보틱스 Transfer robot for transferring substrate in vaccum chamber

Citations (2)

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Publication number Priority date Publication date Assignee Title
WO2007008797A1 (en) * 2005-07-11 2007-01-18 Brooks Automation, Inc. Substrate transport apparatus
KR20070037362A (en) * 2005-09-30 2007-04-04 가부시키가이샤 다이헨 Transfer apparatus

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JPS63315387A (en) * 1988-06-10 1988-12-23 本田技研工業株式会社 Car body frame
JPH0224075A (en) * 1988-07-13 1990-01-26 Mitsubishi Electric Corp Industrial robot
JP2808826B2 (en) * 1990-05-25 1998-10-08 松下電器産業株式会社 Substrate transfer device
JP3033083B2 (en) 1992-10-19 2000-04-17 コベルコ建機株式会社 Wheel loader floor step device
JP3264076B2 (en) * 1994-01-31 2002-03-11 松下電器産業株式会社 Vacuum processing equipment
JPH10249757A (en) * 1997-03-18 1998-09-22 Komatsu Ltd Carrying robot
US5993142A (en) * 1997-07-10 1999-11-30 Genmark Automation, Inc. Robot having multiple degrees of freedom in an isolated environment
JPH1138909A (en) * 1997-07-18 1999-02-12 Toa Resin Kk Signboard
JP3722598B2 (en) * 1997-07-16 2005-11-30 株式会社ダイヘン 2-arm type transfer robot
JP3806812B2 (en) * 1997-07-16 2006-08-09 株式会社ダイヘン 2-arm type transfer robot
JPH11188671A (en) * 1997-12-26 1999-07-13 Daihen Corp Two-arm type conveying robot
JPH11188670A (en) * 1997-12-26 1999-07-13 Daihen Corp Two-arm type conveying robot
JP2000195923A (en) * 1998-12-28 2000-07-14 Hitachi Ltd Robot for carrying, carrier, carrier in vacuum chamber, and process treatment equipment
JP2003054482A (en) 2001-08-09 2003-02-26 Yamaha Motor Co Ltd Frame structure for snow vehicle
JP5264050B2 (en) * 2005-09-02 2013-08-14 東京エレクトロン株式会社 Lifting mechanism and transfer device
CN100519095C (en) * 2005-09-30 2009-07-29 株式会社大亨 Conveying device
JP4668100B2 (en) 2006-03-17 2011-04-13 コバレントマテリアル株式会社 Recharge tube for solid material and recharge method using the same
JP2008035630A (en) * 2006-07-28 2008-02-14 Toyota Motor Corp Stepping motor
WO2008059815A1 (en) * 2006-11-14 2008-05-22 Ulvac, Inc. Rotation introducing mechanism, substrate transfer device, and vacuum treating apparatus
JP2008135630A (en) 2006-11-29 2008-06-12 Jel:Kk Substrate conveying device
KR101312989B1 (en) * 2007-03-08 2013-10-01 주식회사 로보스타 A transfer robot for specific environment
JP4758376B2 (en) * 2007-03-20 2011-08-24 株式会社岡本工作機械製作所 Semiconductor substrate delivery method
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Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007008797A1 (en) * 2005-07-11 2007-01-18 Brooks Automation, Inc. Substrate transport apparatus
KR20070037362A (en) * 2005-09-30 2007-04-04 가부시키가이샤 다이헨 Transfer apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2011080897A1 *

Also Published As

Publication number Publication date
EP2520398A1 (en) 2012-11-07
WO2011080897A1 (en) 2011-07-07
TW201139250A (en) 2011-11-16
US20120293026A1 (en) 2012-11-22
KR101477366B1 (en) 2015-01-06
CN102686367A (en) 2012-09-19
CN102686367B (en) 2015-05-20
JP5463367B2 (en) 2014-04-09
TWI498203B (en) 2015-09-01
KR20120097528A (en) 2012-09-04
US9252038B2 (en) 2016-02-02
JPWO2011080897A1 (en) 2013-05-09

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Legal Events

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Effective date: 20140930

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