CN100519095C - Conveying device - Google Patents
Conveying device Download PDFInfo
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- CN100519095C CN100519095C CNB2006101463650A CN200610146365A CN100519095C CN 100519095 C CN100519095 C CN 100519095C CN B2006101463650 A CNB2006101463650 A CN B2006101463650A CN 200610146365 A CN200610146365 A CN 200610146365A CN 100519095 C CN100519095 C CN 100519095C
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- rotating basis
- loop
- carrying device
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Abstract
The present invention provides a conveying device A1 comprising a fixed base 1; a rotating base 2 rotatablely held with respect to the fixed base 1; a link arm means 3 asway supported with respect to the rotating base 2; and a handle 4 supported by the link arm means 3, wherein the workpiece is horizontally held and conveyed by the handle 4 along with the action of the rotating base 2 and the link arm means 3; an air-tight sealing element 23A is arranged between the rotating base 2 and the fixed base 1, and a refrigerant circuit is provided on the rotating base 2 and the fixed base 1. A part of the refrigerant circuit is positioned near the air-tight sealing element 23A. On the other hand, the refrigerant circuit is configured to contain the annular space 110A, 210A formed on the rotating base 2 and the fixed base 1.
Description
Technical field
The present invention relates to a kind of carrying device that for example under vacuum environment, is used for the substrate after conveyance is heated.
Background technology
For example, 2005-No. 186259 communiques of TOHKEMY disclose a kind of carrying device that is used for the substrate after conveyance is heated under vacuum environment.This carrying device is that rotating basis is provided with the pair of links arm mechanism, and each leading section of these pitman arm mechanisms is provided with the handle that can level keeps plate workpieces such as substrate.In case rotating basis rotates around vertical axis on fixed pedestal, then follows this, the pair of links arm mechanism is rotated, in case the swing of pitman arm mechanism then makes the plate workpiece straight line in horizontal plane that remains on the handle move.Thereby, make tabular workpiece from assigned position to other position by conveyance.
For example, 2005-No. 125479 communiques of TOHKEMY disclose another kind of carrying device.Be used in the time of will swinging in pitman arm mechanism while supporting described handle to be fixed on the rotating basis of this carrying device to the prescribed direction mobile guide rail that leads.According to this structure, the handle straight line that maintains tabular workpiece is moved.
But the tabular workpiece of conveyance under vacuum environment in cleaning process perhaps under the plate workpiece situation after the conveyance heating, aspect the adjusting of environmental gas condition and heat, worries that existing carrying device can not bear too harsh environment for use.
For example, be arranged under the atmospheric pressure environment gas on the fixed pedestal under the state, rotating basis is arranged in the space that keeps vacuum state, under as the vacuum environment of environmental gas condition under the situation of conveyance plate workpiece, be provided for keeping bubble-tight vacuum seal at the periphery of rotating basis.But, under situation about this plate workpiece being heated to about 200 ℃,, worry the function reduction of vacuum seal because vacuum seal is born the heat from plate workpiece, air-tightness is damaged.
And, if the heat about 200 ℃ bears in pitman arm mechanism, then worry its distortion, thereby have the problem that is difficult to guarantee the conveyance precision.
Patent documentation 1: 2005-No. 186259 communiques of TOHKEMY
Patent documentation 1: 2005-No. 125479 communiques of TOHKEMY
Summary of the invention
The invention provides a kind of carrying device that solves or reduce at least the problems referred to above.
By carrying device provided by the present invention, it comprises: fixed pedestal, with respect to the maintained rotationally rotating basis of this fixed pedestal, with respect to the supported swingably pitman arm mechanism of this rotating basis, with handle by this pitman arm mechanism supports, wherein, be accompanied by the action of above-mentioned rotating basis and pitman arm mechanism, flatly keep plate workpiece and carry out conveyance by above-mentioned handle, it is characterized in that: between above-mentioned rotating basis and said fixing pedestal, be provided with gas-tight seal, and said fixing pedestal and above-mentioned rotating basis are provided with cold-producing medium circulation road, the part on this cold-producing medium circulation road be arranged on above-mentioned gas-tight seal near, above-mentioned cold-producing medium circulation road constitutes the annulus that comprises the intersection that is formed on above-mentioned rotating basis and said fixing pedestal.
Preferably as annulus, the outlet is set to concentric circles with annulus and loop with annulus.
Preferred above-mentioned annulus is formed by the endless groove that is arranged on said fixing pedestal or the rotating basis.
Preferably as annulus, the outlet constitutes the space that is separated from each other by gas-tight seal with annulus and loop with annulus.
Preferred above-mentioned cold-producing medium circulation road comprises that the outlet that is communicated with annulus with the outlet is with path and the loop path that is communicated with annulus with above-mentioned loop.
Preferred above-mentioned outlet extends to pitman arm mechanism and is interconnected from above-mentioned rotating basis with path with path and loop.
Preferably above-mentioned rotating basis is provided with the reductor that is used for driving force is sent to above-mentioned pitman arm mechanism, and this reductor perimembranous is provided with above-mentioned outlet with path and loop path.
Preferably support the guide rail that above-mentioned handle one edge prescribed direction is carried out mobile guide when being useful on one side fixedly installing on the above-mentioned rotating basis in the swing of above-mentioned pitman arm mechanism, above-mentioned outlet with path and loop with path extend to guide rail on every side and be interconnected.
Preferred above-mentioned gas-tight seal is a vacuum seal.
Description of drawings
Fig. 1 is the overall perspective view according to the carrying device of first embodiment of the invention.
Fig. 2 is the cutaway view of the key position of carrying device shown in Figure 1.
Fig. 3 is the exploded perspective view of the key position of carrying device shown in Figure 1.
Fig. 4 is the overall perspective view according to the carrying device of second embodiment of the invention.
Fig. 5 is the cutaway view of the key position of carrying device shown in Figure 4.
Fig. 6 is the stereogram of the key position of carrying device shown in Figure 4.
Fig. 7 is the cutaway view according to the key position of third embodiment of the invention carrying device.
Fig. 8 is the stereogram that has been equipped with the reductor of carrying device shown in Figure 7.
Label declaration:
A1, A2, A3 carrying device; 1: fixed pedestal; 2: rotating basis; 23A, 23A ', 23B, 23B ': vacuum seal (gas-tight seal); 3: pitman arm mechanism; 4: handle; 5: guide rail; 60: reductor; 100a～100f: outlet path; 110A, 110B: outlet endless groove; 100A ', 110B ': outlet annulus; 200a～200f: loop path; 210A, 210B: loop endless groove; 210A ', 210B ': loop annulus; 500: loop pipe.
The specific embodiment
Below, will be specifically introduced preferred implementation of the present invention with reference to the accompanying drawings.
At first, will describe with reference to figure 1～Fig. 3.Fig. 1～Fig. 3 is the view that shows according to the carrying device of first embodiment of the invention.
This carrying device A1 is used for the carrying device that conveyance for example is known as the sheet-like workpieces (not shown) of glass substrate that liquid crystal board uses etc.As shown in Figure 1, this carrying device A1 comprises: fixed pedestal 1, with respect to fixed pedestal 1 can center on the maintained rotatably rotating basis 2 of vertical axis, the pair of links arm mechanism 3 that in horizontal plane, is supported swingably with respect to rotating basis 2 and the handle 4 that supports by pitman arm mechanism 3.Handle 4 flatly keeps sheet-like workpieces such as above-mentioned glass substrate.
Wherein, carrying device A1 is the conveyance workpiece in the top of datum level B (with reference to figure 2) remains on the space of chamber under the vacuum state etc., and the space below datum level B remains atmospheric pressure.
As shown in Figure 2, fixed pedestal 1 comprises the housing 10 of substantial cylindrical.The upper wall portions 11 of housing 10 is fixed along datum level B by flange part 11B.The integral body of housing 10 is arranged on the below of datum level B.On the upper wall portions 11 of housing 10, be formed with central opening 11A.
Between the 12A of lower end flange portion of the upper wall portions 11 of housing 10 and lifting base 12, be provided with around the bellows 14 of this lifting base 12 integral body.Bellows 14 is accompanied by moving up and down of lifting base 12 and stretches.Bellows 14 has played the inner space (space of datum level B below) of maintenance housing 10 and the bubble-tight effect of cavity space of datum level B top.
Be provided with the cold-producing medium circulation road of the flow of refrigerant direction of Fig. 2 arrow demonstration in the inside of carrying device A1.And, in the present embodiment, use air as cold-producing medium.
Be provided with outlet path 100a and the loop path 200a that forms cold-producing medium circulation road towards the upper end from the inside of lifting base 12.On the bottom of outlet, be connected with the air pump 300 of conveying as the air of cold-producing medium with path 100a.The loop is designed to air is discharged in the inner space of lifting base 12 with the bottom of path 200a.
As shown in Figure 3, the outlet that links to each other with path 100a with the outlet with endless groove 110A and the loop that links to each other with path 200a with the loop with endless groove 210A concentric circles be formed on the upper end of lifting base 12. Endless groove 110A, 210A constitute annulus at the boundary of fixed pedestal 1 and rotating basis 2.
Rotating basis 2 is by the quill shaft 21 and the porose bottom 20A integral structure of housing 20 are formed.Quill shaft 21 is rotatably supported in by bearing 22a on the opening on the upper end that is arranged at lifting base 12.
Between the periphery wall of internal perisporium in the opening of lifting base 12 and porose bottom 20A, be provided with the cavity space of the space of datum level B below and datum level B top is covered and kept bubble-tight vacuum seal (gas-tight seal) 23A.Vacuum seal 23A be positioned at endless groove 110A, 210A near.Thereby vacuum seal 23A is cooled off effectively by the air that flows through endless groove 110A, 210A.
Be sent to the bottom of quill shaft 21 by driving-belt and pulley gear (pulley gear) from the rotating drive power of turning motor M1.Thereby rotating basis 2 rotates around vertical axis on lifting base 12.
Be provided with the power transmission shaft 24,25 that is used to make each pitman arm mechanism 3 swings in the inside of quill shaft 21.The power transmission shaft 24 corresponding with a pitman arm mechanism 3 is hollow form.Power transmission shaft 24 is rotatably supported on the internal perisporium of quill shaft 21 by bearing 22b.The power transmission shaft 25 corresponding with another pitman arm mechanism 3 is rotatably supported on the internal perisporium of power transmission shaft 24 by bearing 22c.
By driving-belt and pulley gear, the turning cylinder 3A of each pitman arm mechanism 3 is connected on the upper end of power transmission shaft 24 and 25.Come the rotating drive power of self-swinging electricity consumption motivation M2, M3 to be sent on the bottom of power transmission shaft 24 and 25 by driving-belt and pulley gear.
Rotating basis 2 be provided with cold-producing medium circulate the road extend to till each pitman arm mechanism 3 and outlet that forms with path 100b, 100c and loop with path 200b, 200c.The outlet connects porose bottom 20A and arrives endless groove 110A, 210A with path 100b and the loop bottom with path 200b, and is arranged to be communicated with endless groove 110A, 210A.In the inside of housing 20, the outlet links to each other with individual channel 100b, 200b by joint 410,420 with path 200c with the loop with path 100c.The upper end of individual channel 100c, 200c extends to the base end part of pitman arm mechanism 3.
When rotating basis 2 rotations, the bottom of path 100b, 200b is followed endless groove 110A, 210A and is moved to draw round mode.Thereby path 100b, 200b and endless groove 110A, 210A are in the state that relatively rotates and be communicated with.
A plurality of walls 30～33 are linked to each other and constitute pitman arm mechanism 3, the primary structure of pitman arm mechanism 3 and action are identical with existing pitman arm mechanism 3, thereby have omitted its detailed introduction.As shown in Figure 2, the base end part 30A of arm 30 is supported on rotationally by bearing 22d in the opening on housing 20 tops that are arranged at rotating basis 2.Turning cylinder 3A is arranged on the bottom of base end part 30A.
Between the internal perisporium of base end part 30A and the periphery wall in housing 20 tops, be provided with and be used to keep bubble-tight vacuum seal 23B.The loop that the outlet that communicates with path 100c with the outlet communicates with path 200c with endless groove 110B with the loop with endless groove 210B concentric circles be formed on the top of housing 20.Be provided with outlet path 100d and the loop path 200d that extends to the front end outside the figure in the inside of arm 30.The bottom of individual channel 100d, 200d arrives endless groove 110B, 210B, and is communicated with endless groove 110B, 210B.
In the leading section of arm 30, the outlet with path 100d and loop with the path 200d (not shown) that links to each other mutually.When arm 30 was the center rotation with turning cylinder 3A, the bottom of individual channel 100d, 200d was followed endless groove 110B, 210B and is moved to draw round mode.Thereby path 100d, 200d and endless groove 110B, 210B are in the air circulation that relatively rotates and make under the connected state all the time as cold-producing medium.Thereby path 100d, 200d according to extending to arm 30 inside flow through these paths by air, and arm 30 integral body are effectively cooled off.
The outlet constitutes with perforation road and the metal tube that path 200a～200d for example forms by connecting parts with path 100a～100d and loop.Described perforation road and metal tube can not damage hermetic and reliably link to each other.
In carrying device A1, back and forth conveyance for example is heated under the situation of the workpiece about 200 ℃ under vacuum environment, is received by rotating basis 2 or pitman arm mechanism 3 easily from the heat of workpiece.The vacuum seal 23A, the 23B that are arranged on the rotating part (the porose bottom 20A of the housing 20 and base end part 30A of arm 30) of rotating basis 2 and pitman arm mechanism 3 kept air-tightness before reaching certain temperature, if but worry to surpass the durable temperature of stipulating, then damage air-tightness.And, owing to arm 30 grades are made by metals such as stainless steels, thereby worry that temperature is high more, then size produces big error by thermal expansion.
Therefore, in the first embodiment, near vacuum seal 23A, 23B, be provided with endless groove 110A, the 110B, 210A, the 210B that constitute cold-producing medium circulation road.Improve radiating effect by the air (cold-producing medium) that flows through these endless grooves 110A, 110B, 210A, 210B, thereby vacuum seal 23A, 23B can not be superheated to above heat resisting temperature.
In the inside of arm 30 grades, to be provided with path 100d, the 200d that constitutes cold-producing medium circulation road towards the mode of leading section from its base end part.Owing to flow through path 100d, 200d by the air as cold-producing medium, and improved radiating effect, for example arm 30 is not superheated to because of thermal expansion and produces big scale error.Can not cause obstacle to the action of arm 30.
Thereby, according to the carrying device A1 of first embodiment,, also can not damage by the formed hermetic conveyance of vacuum seal 23A, 23B workpiece even be under the too harsh environment for use that is known as the workpiece after conveyance is heated under vacuum environment.Heat radiation effectively such as arm 30 grades by the path 100d, the 200d that constitute cold-producing medium circulation road, not thermal expansion exceedingly.Thereby arm 30 grades can correctly be swung handle 4 by pitman arm mechanism 3, can precision conveyance workpiece well and successfully.
Fig. 4～6 show the carrying device according to second embodiment of the invention.And, represent and the identical or similar structural element of above-mentioned first embodiment with same-sign, and omitted introduction them.
The carrying device A2 of second embodiment comprises as shown in Figure 4: fixed pedestal 1, rotating basis 2, pair of links arm mechanism 3 and a pair of handle 4.And carrying device A2 comprises two groups of guide rails 5 that are used to make a pair of handle 4 to lead movably along the horizontal linear direction of regulation.Said fixing pedestal 1, rotating basis 2 and pair of links arm mechanism 3 are made of the structure identical with above-mentioned first embodiment, and the structure of handle 4 and guide rail 5 is different with above-mentioned first embodiment.
As shown in Figure 5, guide rail 5 is supported on the central upper cover part 20B of rotating basis 2 by support frame 50.As shown in Figure 6, a plurality of rail 5A are connected and constitute each guide rail 5.Wherein, in Fig. 6, omitted a guide rail 5.
Downside handle 4 is supported on two inboard guide rails 5 by slide block 40.Upside handle 4 is walked around the side of downside handle 4 and is supported on by slide block 40 on two guide rails 5 in the outside.The leading section of the arm 31 of one pitman arm mechanism 3 (the pitman arm mechanism in left side among Fig. 5) is pivotally connected on the upside handle 4.Downside handle 4 is provided with by extending to the extension 4A in the outside below the follower rail 5.The leading section of the arm 31 of another pitman arm mechanism 3 (the pitman arm mechanism on right side among Fig. 5) is pivotally connected on the extension 4A.
If a pitman arm mechanism 3 swings, then with its interlock, upside handle 4 supports horizontal slip on one side by inboard two guide rails 5 on one side.If another pitman arm mechanism 3 swings are not then interfered with upside handle 4, downside handle 4 supports horizontal slip on one side by two guide rails in the outside 5 on one side.At this moment, the extension 4A that downside handle 4 is connected with pitman arm mechanism 3 is not hindered by support frame 50 and slides.Thereby, carried workpiece on handle 4 with firm position after dismount by conveyance.
As shown in Figure 6, setting up ring-type on each guide rail 5 centers on around it whole and form the loop pipe 500 on cold-producing medium circulation road.The outlet of being made up of metal tube of Yan Shening is connected with path 100e on the part of the loop pipe 500 of forming guide rail 5 front downwards, and the loop of being made up of same structure is connected on another part of the loop pipe 500 of forming guide rail 5 rear end side with path 200e.
The outlet that links to each other with each loop pipe 500 does not link to each other with joint 430 below the front of guide rail 5 with extension 4A with path 100e with interfering.The loop does not link to each other with joint 440 below the rear end side of guide rail 5 with extension 4A with path 200e with interfering.Each joint 430,440 is not interfered ground with extension 4A and is extended to guide rail 5 central authorities neighbouring path 100f, 200f and links to each other.As shown in Figure 5, the bottom of path 100f, 200f is run through the central upper cover part 20B of rotating basis 2 and is linked to each other with the joint 410,420 of rotating basis 2 inside.The outlet and the loop that just constitute cold-producing medium circulation road are interconnected by being arranged on each guide rail 5 loop pipe 500 on every side with path 100e, 100f, 200e, 200f.
In carrying device A2, if the heat that guide rail 5 receives from workpiece worries that then it is out of shape because of thermal expansion.In second embodiment, around guide rail 5, be provided with the loop pipe 500 that constitutes cold-producing medium circulation road, by the air that flows through loop pipe 500 (cold-producing medium), improved near the radiating effect the guide rail 5.Thereby guide rail 5 can not be superheated to the degree of being out of shape because of thermal expansion.
And, near vacuum seal 23A, 23B, be provided with the cold-producing medium circulation road identical with above-mentioned first embodiment with the inside of arm 30.Thereby near the radiating effect vacuum seal 23A, 23B and the arm 30 also is enhanced.
Thereby, according to the carrying device A2 of second embodiment, except the effect that above-mentioned first embodiment is obtained, can also prevent the distortion that the guide rail 5 by support shank 4 causes because of thermal expansion.Thereby, even be under the too harsh environment for use that is known as the workpiece after conveyance is heated under vacuum environment, by guide rail 5, also can be with more stable posture conveyance workpiece.
Fig. 7 and 8 carrying devices that show according to third embodiment of the invention.And, because the carrying device of present embodiment is by forming with the similar structure of above-mentioned first embodiment, thereby, represent and the identical or similar structural element of above-mentioned first embodiment with same-sign, and omitted introduction them.
As shown in Figure 7, the carrying device A3 of the 3rd embodiment is equipped with the reductor 60 that is used for driving force is sent to pitman arm mechanism (not shown) on rotating basis 2.In this regard, have very big difference with above-mentioned first embodiment, and other details and first embodiment are slightly different.
In order to improve air-tightness, the upside vacuum seal 23A that joins with porose bottom 20A is provided with dual structure.Be formed with the loop that links to each other with path 200a with loop annulus 210A ' between downside vacuum seal 23A ' that joins with loam cake 15A and the upside vacuum seal 23A.At the downside of downside vacuum seal 23A ', on the gap between the periphery wall of the internal perisporium of the upper opening of lifting base 12 and loam cake 15A, be formed with the outlet that links to each other with path 100a with outlet annulus 110A '.Described outlet with and loop annulus 110A ', 210A ' become the space that is separated from each other by vacuum seal 23A ', be configured and circulate and do not make air leakage as cold-producing medium.
Because described annulus 110A ', 210A ' and vacuum seal 23A, 23A ' adjacency, thereby vacuum seal 23A, 23A ' are cooled off effectively by the air that flows through annulus 110A ', 210A '.In addition, be provided with in the inside of driver element 15 and be used for the bearing 22a～22c of support hollow axle 21 grades rotationally, described bearing 22a～22c also by flow through the outlet with and the loop cooled off well by efficient with the air of path 100a, 200a and annulus 110A ', 210A '.
By driving- belt 24A, 25A and pulley gear 24B, 25B the main shaft 60A of reductor 60 is connected on the upper end of power transmission shaft 24,25.Reductor 60 is made up of planetary gears.As shown in Figure 8, reductor 60 constitutes the internal gear (not shown) that comprises main shaft 60A, have export-oriented flange 60B, is assembled in carrier 60D between main shaft 60A and the internal gear, is supported on by bearing 60E that carrier 60D goes up and and the central gear (not shown) of main shaft 60A and a plurality of planetary gear (not shown) of internal gear engagement by bearing 60C.The suitable position of export-oriented flange 60B is provided with outlet and loop path 100c, 200c, also is provided with outlet path 100c on the suitable position of carrier 60D.
As shown in Figure 7, this reductor 60 is fixed on porose upper cover part 20C, the 20D of rotating basis 2 by export-oriented flange 60B.Carrier 60D links to each other with the base end part 30A of arm (having omitted integral body among the figure).If main shaft 60A rotates, revolve round the sun while then center on the central gear autobiography by planetary gear, carrier 60D rotates around main shaft 60A.Thus, the base end part 30A of arm rotates, and arm is successfully swung.
Thereby, between the periphery wall of the base end part 30A of the internal perisporium of porose upper cover part 20C, the 20D of rotating basis 2 and arm, also be provided with and keep bubble- tight vacuum seal 23B, 23B '.In order to improve air-tightness, upside vacuum seal 23B is provided with dual structure.Downside vacuum seal 23B ' also joins with the top part of carrier 60D, is formed with the loop that links to each other with path 200c, 200d with loop annulus 210B ' between this vacuum seal 23B ' and upside vacuum seal 23B.At the downside of downside vacuum seal 23B ', be formed with the outlet that links to each other with path 100c with outlet annulus 110B ' in the gap between the periphery wall of the internal perisporium of porose upper cover part 20C, the 20D of rotating basis 2 and reductor 60.Described outlet uses annulus 110B ' and loop to use annulus 210B ' to constitute the space that is separated from each other by vacuum seal 23B ', is configured the not circulation of air as cold-producing medium with leaking.
Because described annulus 110B ', 210B ' and vacuum seal 23B, 23B ' adjoin, thereby vacuum seal 23B, 23B ' are cooled off effectively by the air that flows through annulus 110B ', 210B '.And reductor 60 is cooled off by efficient with the air of path 100c, 200c and annulus 110B ', 210B ' well by flowing through outlet and loop.Bearing 60C, the 60E etc. that are arranged on reductor 60 inside are also by as the air of cold-producing medium and cooled off well by efficient.
Thereby, according to the carrying device A3 of the 3rd embodiment, except the effect that above-mentioned first embodiment is obtained, owing to will be contained in minimum degree to the heat affecting of reductor 60, therefore conveyance workpiece more successfully.
Self-evident, scope of the present invention is not confined to above-mentioned embodiment.
For example,, also can use inert gases such as helium, perhaps also can make liquid circulations such as water as cold-producing medium.
Cold-producing medium circulation road also can by loop pipe or path form from pitman arm mechanism to handle.
Endless groove also can for example also can be provided with endless groove for the structure of rotating with respect to path and being communicated with all the time on one side on the porose bottom of rotating basis, at the inner path that is communicated with this endless groove that is provided with of lifting base.
Annulus also can be designed to constitute separate seal cavity with annulus and loop with annulus by the outlet in relative rotation between parts and the parts.
Reductor also can be arranged on the carrying device that is equipped with guide rail, also can be identical with second embodiment, near reductor, be provided with annulus.
Claims (9)
1. carrying device, comprise: fixed pedestal, with respect to the maintained rotationally rotating basis of this fixed pedestal, with respect to the supported swingably pitman arm mechanism of this rotating basis with by the handle of this pitman arm mechanism supports, wherein, be accompanied by the action of described rotating basis and pitman arm mechanism, flatly keep workpiece and carry out conveyance by described handle, it is characterized in that:
Between described rotating basis and described fixed pedestal, be provided with gas-tight seal, and described fixed pedestal and described rotating basis be provided with cold-producing medium circulation road, the part on this cold-producing medium circulation road be arranged on described gas-tight seal near,
Described cold-producing medium circulation road constitutes and comprises the annulus that is formed on described rotating basis and described fixed pedestal intersection,
Described cold-producing medium circulation road extends to described pitman arm mechanism from described rotating basis.
2. carrying device according to claim 1 is characterized in that:
As annulus, the outlet is set to concentric circles with annulus and loop with annulus.
3. carrying device according to claim 2 is characterized in that:
Described annulus is formed by the endless groove that is arranged on described fixed pedestal or the rotating basis.
4. carrying device according to claim 1 is characterized in that:
As annulus, the outlet is set to the space that is separated from each other by gas-tight seal with annulus with annulus and loop.
5. according to claim 2 or 4 described carrying devices, it is characterized in that:
Described cold-producing medium circulation road comprises that the outlet that is communicated with annulus with described outlet is with path and the loop path that is communicated with annulus with described loop.
6. carrying device according to claim 5 is characterized in that:
Described outlet extends to pitman arm mechanism and is interconnected from described rotating basis with path with path and loop.
7. carrying device according to claim 5 is characterized in that:
Described rotating basis is provided with the reductor that is used for driving force is sent to described pitman arm mechanism, and this reductor perimembranous is provided with described outlet with path and loop path.
8. carrying device according to claim 5 is characterized in that:
Support the guide rail that described handle one edge prescribed direction is carried out mobile guide when being used on one side being fixed with on the described rotating basis in the swing of described pitman arm mechanism, described outlet with path and loop with path extend to described guide rail on every side and be interconnected.
9. carrying device according to claim 1 is characterized in that:
Described gas-tight seal is a vacuum seal.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005285942 | 2005-09-30 | ||
| JP2005285942 | 2005-09-30 | ||
| JP2006227300 | 2006-08-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1939674A CN1939674A (en) | 2007-04-04 |
| CN100519095C true CN100519095C (en) | 2009-07-29 |
Family
ID=37958335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101463650A Expired - Fee Related CN100519095C (en) | 2005-09-30 | 2006-09-30 | Conveying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100519095C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102686367A (en) * | 2009-12-28 | 2012-09-19 | 株式会社爱发科 | Drive device and conveyance device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008055560A (en) * | 2006-08-31 | 2008-03-13 | Fanuc Ltd | Sealing device for joint section of robot and articulated robot |
| CN102476383B (en) * | 2010-11-30 | 2014-06-18 | 沈阳新松机器人自动化股份有限公司 | Planar articulated robot arm mechanism |
| JP6885980B2 (en) * | 2019-03-28 | 2021-06-16 | 平田機工株式会社 | Drive device and transfer device |
-
2006
- 2006-09-30 CN CNB2006101463650A patent/CN100519095C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102686367A (en) * | 2009-12-28 | 2012-09-19 | 株式会社爱发科 | Drive device and conveyance device |
| CN102686367B (en) * | 2009-12-28 | 2015-05-20 | 株式会社爱发科 | Drive device and conveyance device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1939674A (en) | 2007-04-04 |
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