ES8702853A1 - Aparato de transferencia de pastillas - Google Patents

Aparato de transferencia de pastillas

Info

Publication number
ES8702853A1
ES8702853A1 ES551605A ES551605A ES8702853A1 ES 8702853 A1 ES8702853 A1 ES 8702853A1 ES 551605 A ES551605 A ES 551605A ES 551605 A ES551605 A ES 551605A ES 8702853 A1 ES8702853 A1 ES 8702853A1
Authority
ES
Spain
Prior art keywords
wafers
boats
elements
head
lifting elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES551605A
Other languages
English (en)
Other versions
ES551605A0 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of ES551605A0 publication Critical patent/ES551605A0/es
Publication of ES8702853A1 publication Critical patent/ES8702853A1/es
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G61/00Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00Material or article handling
    • Y10S414/135Associated with semiconductor wafer handling
    • Y10S414/137Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
    • Y10S414/138Wafers positioned vertically within cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Feeding Of Workpieces (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

APARATO DE TRANSFERENCIA PARA MOVER VERTICAL Y HORIZONTALMENTE PASTILLAS SEMICONDUCTORAS DESDE UNA ESTACION A OTRA. CONSTA DE UNA MESA (12) QUE INCLUYE UN PAR DE LADOS (14, 16) Y UN TABLERO (18) SOBRE EL QUE ESTA SITUADO UN PAR DE ELEMENTOS DE SOPORTE (21) PARA RECIBIR Y COLOCAR UN BOTE DE CUARZO (2) QUE INCLUYE UNA PLURALIDAD DE DISCOS O PASTILLAS SEMICONDUCTORAS (8); DE TRES UNIDADES IMPULSORAS ASOCIADAS CON LA MESA (12), QUE INCLUYEN UN PAR DE VARILLAS IMPULSORAS (30) Y UN SEGUNDO PAR DE VARILLAS IMPULSORAS (40); Y DE DOS CABEZALES IMPULSORES (32, 42) QUE INCLUYEN UNA PLURALIDAD DE RANURAS PARALELAS Y ALINEADAS QUE SE CORRESPONDEN CON EL NUMERO DE PASTILLAS QUE CONTIENE EL BOTE (2).
ES551605A 1984-05-30 1985-05-20 Aparato de transferencia de pastillas Expired ES8702853A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/615,288 US4611966A (en) 1984-05-30 1984-05-30 Apparatus for transferring semiconductor wafers

Publications (2)

Publication Number Publication Date
ES551605A0 ES551605A0 (es) 1987-01-16
ES8702853A1 true ES8702853A1 (es) 1987-01-16

Family

ID=24464766

Family Applications (2)

Application Number Title Priority Date Filing Date
ES551605A Expired ES8702853A1 (es) 1984-05-30 1985-05-20 Aparato de transferencia de pastillas
ES286863U Expired ES286863Y (es) 1984-05-30 1985-05-20 Aparato de transferencia de pastillas

Family Applications After (1)

Application Number Title Priority Date Filing Date
ES286863U Expired ES286863Y (es) 1984-05-30 1985-05-20 Aparato de transferencia de pastillas

Country Status (8)

Country Link
US (1) US4611966A (es)
EP (1) EP0163413B1 (es)
JP (1) JPS61166037A (es)
KR (1) KR890000598B1 (es)
CA (1) CA1298229C (es)
DE (1) DE3579496D1 (es)
ES (2) ES8702853A1 (es)
IL (1) IL75207A (es)

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* Cited by examiner, † Cited by third party
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IL75207A (en) 1989-02-28
EP0163413B1 (en) 1990-09-05
KR850007964A (ko) 1985-12-11
US4611966A (en) 1986-09-16
EP0163413A3 (en) 1987-07-29
ES286863Y (es) 1986-06-01
ES551605A0 (es) 1987-01-16
ES286863U (es) 1985-11-16
EP0163413A2 (en) 1985-12-04
IL75207A0 (en) 1985-09-29
KR890000598B1 (ko) 1989-03-21
CA1298229C (en) 1992-03-31
JPS61166037A (ja) 1986-07-26
DE3579496D1 (de) 1990-10-11

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