KR910017527A - 반도체 웨이퍼등을 탑재한 보우트를 반송하는 수평수직 변환장치 - Google Patents

반도체 웨이퍼등을 탑재한 보우트를 반송하는 수평수직 변환장치

Info

Publication number
KR910017527A
KR910017527A KR1019900002944A KR900002944A KR910017527A KR 910017527 A KR910017527 A KR 910017527A KR 1019900002944 A KR1019900002944 A KR 1019900002944A KR 900002944 A KR900002944 A KR 900002944A KR 910017527 A KR910017527 A KR 910017527A
Authority
KR
South Korea
Prior art keywords
conveying
horizontal
semiconductor wafer
conversion device
vertical conversion
Prior art date
Application number
KR1019900002944A
Other languages
English (en)
Other versions
KR0139027B1 (ko
Inventor
가츠미 이시이
아츠시 와다
Original Assignee
도오교오 에레구토론 사가미 가부시끼 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도오교오 에레구토론 사가미 가부시끼 가이샤 filed Critical 도오교오 에레구토론 사가미 가부시끼 가이샤
Publication of KR910017527A publication Critical patent/KR910017527A/ko
Application granted granted Critical
Publication of KR0139027B1 publication Critical patent/KR0139027B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Specific Conveyance Elements (AREA)
KR1019900002944A 1989-01-26 1990-03-06 반도체 웨이퍼등을 탑재한 보우트를 반송하는 수평수직 변환장치 KR0139027B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1692189A JP2683675B2 (ja) 1989-01-26 1989-01-26 搬送装置

Publications (2)

Publication Number Publication Date
KR910017527A true KR910017527A (ko) 1991-11-05
KR0139027B1 KR0139027B1 (ko) 1998-06-01

Family

ID=11929590

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900002944A KR0139027B1 (ko) 1989-01-26 1990-03-06 반도체 웨이퍼등을 탑재한 보우트를 반송하는 수평수직 변환장치

Country Status (3)

Country Link
US (1) US5028195A (ko)
JP (1) JP2683675B2 (ko)
KR (1) KR0139027B1 (ko)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03125453A (ja) * 1989-10-09 1991-05-28 Toshiba Corp 半導体ウエハ移送装置
JP2605164B2 (ja) * 1990-05-28 1997-04-30 信越半導体 株式会社 単結晶棒搬出装置及びその搬送方法
KR0153250B1 (ko) * 1990-06-28 1998-12-01 카자마 겐쥬 종형 열처리 장치
US5668056A (en) * 1990-12-17 1997-09-16 United Microelectronics Corporation Single semiconductor wafer transfer method and manufacturing system
US5452981A (en) * 1991-03-06 1995-09-26 Leland D. Blatt Automatic tool changer
JP3322912B2 (ja) * 1992-08-17 2002-09-09 東京エレクトロン株式会社 ウエハボート回転装置及びこれを用いた熱処理装置
JP2747269B2 (ja) * 1996-02-21 1998-05-06 山形日本電気株式会社 箱体搬送装置
US6244422B1 (en) * 1999-03-31 2001-06-12 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus for sensing and controlling tipping movement of a semiconductor boat
US6835039B2 (en) * 2002-03-15 2004-12-28 Asm International N.V. Method and apparatus for batch processing of wafers in a furnace
JP4667376B2 (ja) * 2003-07-02 2011-04-13 クック インコーポレイテッド 小ゲージ針カテーテル挿入器具
US7181132B2 (en) 2003-08-20 2007-02-20 Asm International N.V. Method and system for loading substrate supports into a substrate holder
US20060060145A1 (en) * 2004-09-17 2006-03-23 Van Den Berg Jannes R Susceptor with surface roughness for high temperature substrate processing
US20060065634A1 (en) * 2004-09-17 2006-03-30 Van Den Berg Jannes R Low temperature susceptor cleaning
JP5006122B2 (ja) 2007-06-29 2012-08-22 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP5128918B2 (ja) 2007-11-30 2013-01-23 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP5001828B2 (ja) 2007-12-28 2012-08-15 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP5179170B2 (ja) 2007-12-28 2013-04-10 株式会社Ｓｏｋｕｄｏ 基板処理装置
CN102626923A (zh) * 2012-04-12 2012-08-08 山西省机电设计研究院 互感器自动检测线机械手装置
CN104084786B (zh) * 2014-07-10 2016-09-14 国家电网公司 一种电流互感器的安装装置
CN104209735A (zh) * 2014-09-11 2014-12-17 郑州贝龙液压技术有限公司 大型磨机衬板螺栓及法兰盘一体化拆卸装置
CN104191223B (zh) * 2014-09-11 2016-08-24 郑州贝龙液压技术有限公司 大型磨机法兰盘及螺栓专用拆卸车
CN106001817A (zh) * 2016-06-29 2016-10-12 北京金迈斯智能设备科技有限公司 一种电火花机床专用机器人
CN110077774B (zh) * 2019-06-05 2020-12-11 台州精微顺自动化有限公司 一种货架之间的货物换位装置
CN110155721B (zh) * 2019-06-06 2021-03-12 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 传输机械臂
CN112045666A (zh) * 2020-08-24 2020-12-08 湖北文理学院 鼓式刹车片热压成型生产线用双横移桁架机械手
CN114684551B (zh) * 2020-12-25 2023-08-25 上海沧龙科技有限公司 一种大型风电设备海上运输辅助设备
CN114988090A (zh) * 2022-06-01 2022-09-02 芜湖长鹏汽车零部件有限公司 辅助加工汽车轮罩用的综合性取料装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3935950A (en) * 1973-09-04 1976-02-03 Quality Steel Fabricators, Inc. Industrial robot
US3951271A (en) * 1974-05-03 1976-04-20 Mette Klaus Hermann Robot control device
JPS605432B2 (ja) * 1980-09-30 1985-02-12 ファナック株式会社 工業用ロボット
DE3138484A1 (de) * 1981-09-28 1983-04-14 Deutsche Gesellschaft für Wiederaufarbeitung von Kernbrennstoffen mbH, 3000 Hannover "verfahren zur instandhaltung von vorrichtungen und bauteilen in heissen zellen, insbesondere von wiederaufarbeitungsanlagen fuer abgebrannte kernbrennstoffe, und vorrichtung zur durchfuehrung des verfahrens
DE3224703A1 (de) * 1982-07-02 1984-01-05 Deutsche Gesellschaft für Wiederaufarbeitung von Kernbrennstoffen mbH, 3000 Hannover Fernbedienbares manipulatortraegersystem fuer verfahrenstechnische grosszellen
JPS60258459A (ja) * 1984-06-04 1985-12-20 Deisuko Saiyaa Japan:Kk 縦型熱処理装置
US4770590A (en) * 1986-05-16 1988-09-13 Silicon Valley Group, Inc. Method and apparatus for transferring wafers between cassettes and a boat
GB2198413B (en) * 1986-11-20 1990-01-17 Shimizu Construction Co Ltd Transporting robot for semiconductor wafers
KR970008320B1 (ko) * 1987-11-17 1997-05-23 도오교오 에레구토론 가부시끼가이샤 열처리 장치

Also Published As

Publication number Publication date
US5028195A (en) 1991-07-02
JP2683675B2 (ja) 1997-12-03
KR0139027B1 (ko) 1998-06-01
JPH02197143A (ja) 1990-08-03

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