ES2279402T5 - Crisol para un dispositivo de fabricacion de un bloque de material cristalino y procedimiento de fabricacion. - Google Patents
Crisol para un dispositivo de fabricacion de un bloque de material cristalino y procedimiento de fabricacion. Download PDFInfo
- Publication number
- ES2279402T5 ES2279402T5 ES04742479T ES04742479T ES2279402T5 ES 2279402 T5 ES2279402 T5 ES 2279402T5 ES 04742479 T ES04742479 T ES 04742479T ES 04742479 T ES04742479 T ES 04742479T ES 2279402 T5 ES2279402 T5 ES 2279402T5
- Authority
- ES
- Spain
- Prior art keywords
- crucible
- side walls
- silicon
- manufacturing
- crystalline material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000000463 material Substances 0.000 title claims description 19
- 238000002425 crystallisation Methods 0.000 claims abstract description 24
- 230000005855 radiation Effects 0.000 claims abstract description 14
- 239000002178 crystalline material Substances 0.000 claims abstract description 12
- 230000008025 crystallization Effects 0.000 claims description 21
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 229910002804 graphite Inorganic materials 0.000 claims description 11
- 239000010439 graphite Substances 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 230000006835 compression Effects 0.000 claims description 7
- 238000007906 compression Methods 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000000470 constituent Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 239000007791 liquid phase Substances 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 31
- 229910052710 silicon Inorganic materials 0.000 description 31
- 239000010703 silicon Substances 0.000 description 31
- 239000007788 liquid Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 238000007711 solidification Methods 0.000 description 11
- 230000008023 solidification Effects 0.000 description 11
- 239000007787 solid Substances 0.000 description 10
- 239000012530 fluid Substances 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 150000005829 chemical entities Chemical class 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000005204 segregation Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000012010 growth Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- -1 on the one hand Inorganic materials 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 230000004222 uncontrolled growth Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
- C30B29/605—Products containing multiple oriented crystallites, e.g. columnar crystallites
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/002—Crucibles or containers for supporting the melt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S65/00—Glass manufacturing
- Y10S65/08—Quartz
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1052—Seed pulling including a sectioned crucible [e.g., double crucible, baffle]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Optical Elements Other Than Lenses (AREA)
- Details Of Cutting Devices (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0304803A FR2853913B1 (fr) | 2003-04-17 | 2003-04-17 | Creuset pour un dispositif de fabrication d'un bloc de materiau cristallin et procede de fabrication |
| FR0304803 | 2003-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ES2279402T3 ES2279402T3 (es) | 2007-08-16 |
| ES2279402T5 true ES2279402T5 (es) | 2010-10-08 |
Family
ID=33041932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES04742479T Expired - Lifetime ES2279402T5 (es) | 2003-04-17 | 2004-04-09 | Crisol para un dispositivo de fabricacion de un bloque de material cristalino y procedimiento de fabricacion. |
Country Status (14)
| Country | Link |
|---|---|
| US (1) | US7442255B2 (de) |
| EP (1) | EP1613795B2 (de) |
| JP (1) | JP4607096B2 (de) |
| CN (1) | CN100429333C (de) |
| AT (1) | ATE350519T1 (de) |
| BR (1) | BRPI0409464A (de) |
| DE (1) | DE602004004095T3 (de) |
| ES (1) | ES2279402T5 (de) |
| FR (1) | FR2853913B1 (de) |
| NO (1) | NO20055454L (de) |
| PL (1) | PL1613795T5 (de) |
| RU (1) | RU2344206C2 (de) |
| WO (1) | WO2004094704A2 (de) |
| ZA (1) | ZA200507846B (de) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2892426B1 (fr) * | 2005-10-26 | 2008-01-11 | Apollon Solar Soc Par Actions | Dispositif de fabrication d'un ruban de silicium ou autres materiaux cristallins et procede de fabrication |
| FR2895749B1 (fr) * | 2006-01-04 | 2008-05-02 | Apollon Solar Soc Par Actions | Dispositif et procede de fabrication d'un bloc de materiau cristallin |
| JP2009541195A (ja) * | 2006-06-23 | 2009-11-26 | アール・イー・シー・スキャンウェハー・アー・エス | 半導体グレードの多結晶シリコンのインゴットの方向性凝固用の方法及び坩堝 |
| FR2908125B1 (fr) | 2006-11-02 | 2009-11-20 | Commissariat Energie Atomique | Procede de purification de silicium metallurgique par solidification dirigee |
| FR2909990B1 (fr) * | 2006-12-13 | 2009-03-13 | Efd Induction Sa Sa | Procede et installation de fabrication de blocs d'un materiau semiconducteur |
| FR2913434B1 (fr) * | 2007-03-08 | 2009-11-20 | Apollon Solar | Dispositif et procede de fabrication de plaques autosupportees de silicium ou autres materiaux cristallins. |
| DE102007026298A1 (de) * | 2007-06-06 | 2008-12-11 | Freiberger Compound Materials Gmbh | Anordnung und Verfahren zur Herstellung eines Kristalls aus der Schmelze eines Rohmaterials sowie Einkristall |
| FR2918675B1 (fr) * | 2007-07-10 | 2009-08-28 | Commissariat Energie Atomique | Dispositif de fabrication d'un bloc de materiau cristallin avec modulation de la conductivite thermique. |
| JP5277654B2 (ja) * | 2008-02-15 | 2013-08-28 | 住友化学株式会社 | ホウ素添加シリコンの製造方法 |
| US20090280050A1 (en) * | 2008-04-25 | 2009-11-12 | Applied Materials, Inc. | Apparatus and Methods for Casting Multi-Crystalline Silicon Ingots |
| US20110180229A1 (en) * | 2010-01-28 | 2011-07-28 | Memc Singapore Pte. Ltd. (Uen200614794D) | Crucible For Use In A Directional Solidification Furnace |
| JP5676900B2 (ja) * | 2010-03-26 | 2015-02-25 | 三菱マテリアル株式会社 | 多結晶シリコンインゴットの製造方法 |
| US8562740B2 (en) * | 2010-11-17 | 2013-10-22 | Silicor Materials Inc. | Apparatus for directional solidification of silicon including a refractory material |
| US20120248286A1 (en) | 2011-03-31 | 2012-10-04 | Memc Singapore Pte. Ltd. (Uen200614794D) | Systems For Insulating Directional Solidification Furnaces |
| US9982361B2 (en) * | 2011-08-01 | 2018-05-29 | Gtat Corporation | Liquid-cooled heat exchanger |
| FR2979638A1 (fr) * | 2011-09-05 | 2013-03-08 | Commissariat Energie Atomique | Dispositif de fabrication de materiau cristallin a partir d'un creuset a resistance thermique non uniforme |
| CN102677166B (zh) * | 2012-06-08 | 2015-06-03 | 常州天合光能有限公司 | 一种多晶硅铸锭用梯度坩埚的制备方法 |
| CN102703969B (zh) * | 2012-06-14 | 2015-04-15 | 天威新能源控股有限公司 | 低碳准单晶铸锭炉及应用该铸锭炉进行铸锭的方法 |
| DE102015118042A1 (de) | 2015-10-22 | 2017-04-27 | Nexwafe Gmbh | Verfahren und Vorrichtung zum Herstellen einer Halbleiterschicht |
| JP7068914B2 (ja) * | 2018-04-26 | 2022-05-17 | 昭和電工株式会社 | 断熱性遮蔽部材及びそれを備えた単結晶製造装置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2508803C3 (de) * | 1975-02-28 | 1982-07-08 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zur Herstellung plattenförmiger Siliciumkristalle mit Kolumnarstruktur |
| DE2543752B2 (de) * | 1975-10-01 | 1979-03-15 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren und Vorrichtung zum Herstellen eines Einkristalles |
| FR2487863A1 (fr) * | 1980-08-01 | 1982-02-05 | Sklyarov Alexei | Dispositif pour la croissance des monocristaux a partir d'alliages a constituants multiples |
| IT1137729B (it) * | 1981-07-20 | 1986-09-10 | Heliosil Spa | Stampo e procedimento per la fusione di lingotti di silicio atti ad essere utilizzati come materiale per celle solari |
| US4590043A (en) * | 1982-12-27 | 1986-05-20 | Sri International | Apparatus for obtaining silicon from fluosilicic acid |
| JPH01142464U (de) * | 1988-03-23 | 1989-09-29 | ||
| JP2553633B2 (ja) | 1988-05-19 | 1996-11-13 | 住友電気工業株式会社 | 高温炉の断熱方法 |
| CN1025633C (zh) * | 1992-06-19 | 1994-08-10 | 中国科学院固体物理研究所 | 金属双晶及三晶体的生长技术和装置 |
| DE4236827A1 (de) * | 1992-10-30 | 1994-05-05 | Wacker Chemitronic | Vorrichtung zur Herstellung multikristalliner Halbleiter-Blöcke mit kolumnarer Kristallstruktur |
| JP2934121B2 (ja) * | 1993-06-25 | 1999-08-16 | 信越化学工業株式会社 | 単結晶の製造方法 |
| JPH08301683A (ja) * | 1995-05-09 | 1996-11-19 | Nippon Koki Co Ltd | エアバッグ用ガス発生器 |
| JP2936392B2 (ja) * | 1995-12-12 | 1999-08-23 | 三菱マテリアルクォーツ株式会社 | シリコン単結晶引上げ用石英ルツボ |
| JPH10101484A (ja) * | 1996-09-30 | 1998-04-21 | Canon Inc | 結晶製造装置及び方法 |
| JPH10139580A (ja) * | 1996-11-13 | 1998-05-26 | Japan Steel Works Ltd:The | 一方向凝固材の製造方法および一方向凝固装置 |
| DE59801041D1 (de) † | 1997-02-06 | 2001-08-23 | Solar Gmbh Deutsche | Mit siliciumschutzschichten versehene schmelztiegel, ein verfahren zum aufbringen der siliciumschutzschicht und deren verwendung |
| JP2000351688A (ja) * | 1999-06-10 | 2000-12-19 | Mitsubishi Materials Corp | 結晶シリコン製造用ルツボ及びその製造方法 |
| JP2002160997A (ja) * | 2000-11-24 | 2002-06-04 | Ibiden Co Ltd | シリコン単結晶引上用ルツボの製造方法 |
-
2003
- 2003-04-17 FR FR0304803A patent/FR2853913B1/fr not_active Expired - Fee Related
-
2004
- 2004-04-09 PL PL04742479T patent/PL1613795T5/pl unknown
- 2004-04-09 ES ES04742479T patent/ES2279402T5/es not_active Expired - Lifetime
- 2004-04-09 CN CNB2004800103515A patent/CN100429333C/zh not_active Expired - Fee Related
- 2004-04-09 BR BRPI0409464-6A patent/BRPI0409464A/pt not_active Application Discontinuation
- 2004-04-09 AT AT04742479T patent/ATE350519T1/de active
- 2004-04-09 EP EP04742479A patent/EP1613795B2/de not_active Expired - Lifetime
- 2004-04-09 DE DE602004004095T patent/DE602004004095T3/de not_active Expired - Lifetime
- 2004-04-09 US US10/550,456 patent/US7442255B2/en not_active Expired - Fee Related
- 2004-04-09 JP JP2006505792A patent/JP4607096B2/ja not_active Expired - Fee Related
- 2004-04-09 RU RU2005135646/15A patent/RU2344206C2/ru not_active IP Right Cessation
- 2004-04-09 WO PCT/FR2004/000894 patent/WO2004094704A2/fr active IP Right Grant
-
2005
- 2005-09-28 ZA ZA200507846A patent/ZA200507846B/en unknown
- 2005-11-17 NO NO20055454A patent/NO20055454L/no not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| EP1613795A2 (de) | 2006-01-11 |
| EP1613795B2 (de) | 2010-06-02 |
| NO20055454L (no) | 2005-11-17 |
| EP1613795B1 (de) | 2007-01-03 |
| PL1613795T5 (pl) | 2010-10-29 |
| RU2005135646A (ru) | 2006-03-10 |
| ZA200507846B (en) | 2007-02-28 |
| DE602004004095T3 (de) | 2010-12-02 |
| WO2004094704A2 (fr) | 2004-11-04 |
| ATE350519T1 (de) | 2007-01-15 |
| BRPI0409464A (pt) | 2006-04-18 |
| FR2853913A1 (fr) | 2004-10-22 |
| JP4607096B2 (ja) | 2011-01-05 |
| JP2006526751A (ja) | 2006-11-24 |
| RU2344206C2 (ru) | 2009-01-20 |
| PL1613795T3 (pl) | 2007-05-31 |
| DE602004004095D1 (de) | 2007-02-15 |
| FR2853913B1 (fr) | 2006-09-29 |
| CN1774526A (zh) | 2006-05-17 |
| CN100429333C (zh) | 2008-10-29 |
| US20060144326A1 (en) | 2006-07-06 |
| US7442255B2 (en) | 2008-10-28 |
| ES2279402T3 (es) | 2007-08-16 |
| DE602004004095T2 (de) | 2007-07-12 |
| WO2004094704A3 (fr) | 2004-12-16 |
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