EP1778598A2 - Abrieb- und kratzfeste beschichtungen mit niedriger brechzahl auf einem substrat - Google Patents
Abrieb- und kratzfeste beschichtungen mit niedriger brechzahl auf einem substratInfo
- Publication number
- EP1778598A2 EP1778598A2 EP05752553A EP05752553A EP1778598A2 EP 1778598 A2 EP1778598 A2 EP 1778598A2 EP 05752553 A EP05752553 A EP 05752553A EP 05752553 A EP05752553 A EP 05752553A EP 1778598 A2 EP1778598 A2 EP 1778598A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- substrate
- metal
- coating
- precursor
- magnesium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 55
- 238000005299 abrasion Methods 0.000 title claims abstract description 11
- 239000006120 scratch resistant coating Substances 0.000 title claims abstract description 9
- 239000002243 precursor Substances 0.000 claims abstract description 41
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims abstract description 40
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims abstract description 39
- 238000000576 coating method Methods 0.000 claims abstract description 34
- 239000011248 coating agent Substances 0.000 claims abstract description 29
- 239000008199 coating composition Substances 0.000 claims abstract description 24
- 230000003287 optical effect Effects 0.000 claims abstract description 18
- 230000003667 anti-reflective effect Effects 0.000 claims abstract description 6
- 239000010410 layer Substances 0.000 claims description 46
- 229910052751 metal Inorganic materials 0.000 claims description 45
- 239000002184 metal Substances 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 26
- 150000001875 compounds Chemical class 0.000 claims description 24
- 239000011777 magnesium Substances 0.000 claims description 21
- 239000011521 glass Substances 0.000 claims description 13
- 229910052749 magnesium Inorganic materials 0.000 claims description 11
- 150000002681 magnesium compounds Chemical class 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 9
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 9
- 239000002318 adhesion promoter Substances 0.000 claims description 9
- 239000008139 complexing agent Substances 0.000 claims description 9
- DTQVDTLACAAQTR-UHFFFAOYSA-N Trifluoroacetic acid Chemical compound OC(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-N 0.000 claims description 8
- 150000002894 organic compounds Chemical class 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000003960 organic solvent Substances 0.000 claims description 7
- 230000007062 hydrolysis Effects 0.000 claims description 6
- 238000006460 hydrolysis reaction Methods 0.000 claims description 6
- 239000002356 single layer Substances 0.000 claims description 6
- 150000002576 ketones Chemical class 0.000 claims description 5
- XDKQUSKHRIUJEO-UHFFFAOYSA-N magnesium;ethanolate Chemical compound [Mg+2].CC[O-].CC[O-] XDKQUSKHRIUJEO-UHFFFAOYSA-N 0.000 claims description 5
- 150000001735 carboxylic acids Chemical class 0.000 claims description 4
- 229920003023 plastic Polymers 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 4
- 239000005357 flat glass Substances 0.000 claims description 3
- 238000007639 printing Methods 0.000 claims description 3
- 239000002985 plastic film Substances 0.000 claims description 2
- 229920006255 plastic film Polymers 0.000 claims description 2
- 125000003158 alcohol group Chemical group 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract description 13
- 150000004706 metal oxides Chemical class 0.000 abstract description 11
- 238000007669 thermal treatment Methods 0.000 abstract description 2
- 229910052752 metalloid Inorganic materials 0.000 abstract 2
- 150000002738 metalloids Chemical class 0.000 abstract 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 29
- -1 magnesium alkoxides Chemical class 0.000 description 16
- 239000002904 solvent Substances 0.000 description 16
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 14
- 239000000243 solution Substances 0.000 description 13
- 239000000203 mixture Substances 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 9
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 9
- 239000010936 titanium Substances 0.000 description 9
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 8
- 125000003545 alkoxy group Chemical group 0.000 description 7
- 150000003254 radicals Chemical class 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 150000001298 alcohols Chemical class 0.000 description 6
- 239000012267 brine Substances 0.000 description 6
- 239000002131 composite material Substances 0.000 description 6
- 125000000524 functional group Chemical group 0.000 description 6
- 150000004756 silanes Chemical class 0.000 description 6
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 5
- 239000006117 anti-reflective coating Substances 0.000 description 5
- 229910052736 halogen Inorganic materials 0.000 description 5
- 150000002367 halogens Chemical class 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000003980 solgel method Methods 0.000 description 5
- 239000007858 starting material Substances 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 231100000252 nontoxic Toxicity 0.000 description 4
- 230000003000 nontoxic effect Effects 0.000 description 4
- 239000011541 reaction mixture Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 238000009987 spinning Methods 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 229910052726 zirconium Inorganic materials 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 150000004703 alkoxides Chemical class 0.000 description 3
- 125000004448 alkyl carbonyl group Chemical group 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000007323 disproportionation reaction Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 3
- WROMPOXWARCANT-UHFFFAOYSA-N tfa trifluoroacetic acid Chemical compound OC(=O)C(F)(F)F.OC(=O)C(F)(F)F WROMPOXWARCANT-UHFFFAOYSA-N 0.000 description 3
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 3
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 125000004423 acyloxy group Chemical group 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 125000003342 alkenyl group Chemical group 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 150000001408 amides Chemical class 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 229910052793 cadmium Inorganic materials 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 230000000536 complexating effect Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 125000003707 hexyloxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- UEGPKNKPLBYCNK-UHFFFAOYSA-L magnesium acetate Chemical compound [Mg+2].CC([O-])=O.CC([O-])=O UEGPKNKPLBYCNK-UHFFFAOYSA-L 0.000 description 2
- 229940069446 magnesium acetate Drugs 0.000 description 2
- 235000011285 magnesium acetate Nutrition 0.000 description 2
- 239000011654 magnesium acetate Substances 0.000 description 2
- 159000000003 magnesium salts Chemical class 0.000 description 2
- OJOZHRCRUJKPIJ-UHFFFAOYSA-N magnesium;2,2,2-trifluoroacetic acid Chemical compound [Mg].OC(=O)C(F)(F)F OJOZHRCRUJKPIJ-UHFFFAOYSA-N 0.000 description 2
- CRGZYKWWYNQGEC-UHFFFAOYSA-N magnesium;methanolate Chemical compound [Mg+2].[O-]C.[O-]C CRGZYKWWYNQGEC-UHFFFAOYSA-N 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 125000004043 oxo group Chemical group O=* 0.000 description 2
- 125000004115 pentoxy group Chemical group [*]OC([H])([H])C([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 2
- 239000012266 salt solution Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 239000005368 silicate glass Substances 0.000 description 2
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 238000009736 wetting Methods 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- SHXHPUAKLCCLDV-UHFFFAOYSA-N 1,1,1-trifluoropentane-2,4-dione Chemical compound CC(=O)CC(=O)C(F)(F)F SHXHPUAKLCCLDV-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- RVDLHGSZWAELAU-UHFFFAOYSA-N 5-tert-butylthiophene-2-carbonyl chloride Chemical compound CC(C)(C)C1=CC=C(C(Cl)=O)S1 RVDLHGSZWAELAU-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- 125000000882 C2-C6 alkenyl group Chemical group 0.000 description 1
- 125000003601 C2-C6 alkynyl group Chemical group 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910005793 GeO 2 Inorganic materials 0.000 description 1
- 241000951490 Hylocharis chrysura Species 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical group OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 235000011941 Tilia x europaea Nutrition 0.000 description 1
- RMKZLFMHXZAGTM-UHFFFAOYSA-N [dimethoxy(propyl)silyl]oxymethyl prop-2-enoate Chemical compound CCC[Si](OC)(OC)OCOC(=O)C=C RMKZLFMHXZAGTM-UHFFFAOYSA-N 0.000 description 1
- 125000000218 acetic acid group Chemical group C(C)(=O)* 0.000 description 1
- 125000005595 acetylacetonate group Chemical group 0.000 description 1
- 125000003668 acetyloxy group Chemical group [H]C([H])([H])C(=O)O[*] 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910052768 actinide Inorganic materials 0.000 description 1
- 150000001255 actinides Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 125000004450 alkenylene group Chemical group 0.000 description 1
- 125000005248 alkyl aryloxy group Chemical group 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 125000000304 alkynyl group Chemical group 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 150000005840 aryl radicals Chemical class 0.000 description 1
- 125000004104 aryloxy group Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 125000001231 benzoyloxy group Chemical group C(C1=CC=CC=C1)(=O)O* 0.000 description 1
- 229910001593 boehmite Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000005387 chalcogenide glass Substances 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 239000007859 condensation product Substances 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 238000007766 curtain coating Methods 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 125000004663 dialkyl amino group Chemical group 0.000 description 1
- 150000001983 dialkylethers Chemical class 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000004945 emulsification Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- CWAFVXWRGIEBPL-UHFFFAOYSA-N ethoxysilane Chemical compound CCO[SiH3] CWAFVXWRGIEBPL-UHFFFAOYSA-N 0.000 description 1
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 1
- 239000000706 filtrate Substances 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000035784 germination Effects 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 239000005283 halide glass Substances 0.000 description 1
- QAMFBRUWYYMMGJ-UHFFFAOYSA-N hexafluoroacetylacetone Chemical compound FC(F)(F)C(=O)CC(=O)C(F)(F)F QAMFBRUWYYMMGJ-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229940097364 magnesium acetate tetrahydrate Drugs 0.000 description 1
- HFTSQAKJLBPKBD-UHFFFAOYSA-N magnesium;butan-1-olate Chemical compound [Mg+2].CCCC[O-].CCCC[O-] HFTSQAKJLBPKBD-UHFFFAOYSA-N 0.000 description 1
- XKPKPGCRSHFTKM-UHFFFAOYSA-L magnesium;diacetate;tetrahydrate Chemical compound O.O.O.O.[Mg+2].CC([O-])=O.CC([O-])=O XKPKPGCRSHFTKM-UHFFFAOYSA-L 0.000 description 1
- WNJYXPXGUGOGBO-UHFFFAOYSA-N magnesium;propan-1-olate Chemical compound CCCO[Mg]OCCC WNJYXPXGUGOGBO-UHFFFAOYSA-N 0.000 description 1
- SOYXEODKJRNYFJ-UHFFFAOYSA-K magnesium;sodium;trifluoride Chemical compound [F-].[F-].[F-].[Na+].[Mg+2] SOYXEODKJRNYFJ-UHFFFAOYSA-K 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- PHQOGHDTIVQXHL-UHFFFAOYSA-N n'-(3-trimethoxysilylpropyl)ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCN PHQOGHDTIVQXHL-UHFFFAOYSA-N 0.000 description 1
- NHBRUUFBSBSTHM-UHFFFAOYSA-N n'-[2-(3-trimethoxysilylpropylamino)ethyl]ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCNCCN NHBRUUFBSBSTHM-UHFFFAOYSA-N 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 150000004812 organic fluorine compounds Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000007649 pad printing Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- OGHBATFHNDZKSO-UHFFFAOYSA-N propan-2-olate Chemical compound CC(C)[O-] OGHBATFHNDZKSO-UHFFFAOYSA-N 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 235000013024 sodium fluoride Nutrition 0.000 description 1
- 239000011775 sodium fluoride Substances 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 229910052566 spinel group Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 125000005402 stannate group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- 150000003462 sulfoxides Chemical class 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 125000004213 tert-butoxy group Chemical group [H]C([H])([H])C(O*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- WOZZOSDBXABUFO-UHFFFAOYSA-N tri(butan-2-yloxy)alumane Chemical compound [Al+3].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-] WOZZOSDBXABUFO-UHFFFAOYSA-N 0.000 description 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- JSPLKZUTYZBBKA-UHFFFAOYSA-N trioxidane Chemical compound OOO JSPLKZUTYZBBKA-UHFFFAOYSA-N 0.000 description 1
- 238000000108 ultra-filtration Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- G02B1/105—
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/284—Halides
- C03C2217/285—Fluorides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/29—Mixtures
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/11—Deposition methods from solutions or suspensions
- C03C2218/113—Deposition methods from solutions or suspensions by sol-gel processes
Definitions
- the invention relates to a substrate with an abrasion and scratch-resistant coating with a low refractive index, comprising magnesium fluoride and at least one metal or semimetal oxide, a process for its production and its use and the coating composition used for the process and its production.
- magnesium fluoride MgF 2
- MgF 2 magnesium fluoride
- These materials are used both as components in multilayer systems and as single layers.
- Magnesium fluoride is used in particular as the ⁇ / 4 anti-reflective single layer.
- thin MgF 2 layers are produced using complex and expensive PVD and CVD processes or sputtering.
- the disadvantage of this method is that the coating of large substrates becomes very tedious and expensive and curved substrates cannot be coated homogeneously. In addition, good abrasion resistance cannot be achieved.
- the transmission of the coated glasses is only 94.05% (550 nm) compared to 91.61% (550 nm) for the uncoated glass.
- the inadequate antireflection effect of these layers is a disadvantage.
- JP-A-2026824 produces magnesium fluoride brine.
- aqueous magnesium salt solutions are mixed with aqueous fluoride solutions and heated.
- by-product salts have to be removed by means of ultrafiltration.
- thin layers with a refractive index of n 1.16 (193 nm) on optical substrates lead to a transmission loss of less than 0.5%.
- the layers are produced by applying an MgF 2 sol.
- the MgF 2 sol is obtained by reacting magnesium acetate with hydrofluoric acid in methanol and then autoclaved.
- magnesium is dissolved in an anhydrous solvent and converted to the fluoroalkoxide with fluorinated alcohols. After filtering the solution, the Mg alkoxides are hydrolysed.
- this process has the advantage that non-toxic, harmless starting materials are assumed, starting materials such as anhydrous solvents and fluorinated alcohols are expensive.
- this patent application does not contain any information about the optical or mechanical properties of layers which can be obtained by immersion application, for example on glass of the brine described above.
- Magnesium fluoride layers are produced there by the thermal disproportionation of fluorine-containing magnesium compounds such as magnesium trifluoroacetate, magnesium t ⁇ ' fluoroacetylacetonate or magnesium hexafluoroacetylacetonate.
- fluorine-containing magnesium compounds such as magnesium trifluoroacetate, magnesium t ⁇ ' fluoroacetylacetonate or magnesium hexafluoroacetylacetonate.
- the compounds mentioned are dissolved in organic solvents such as butyl acetate or ethylene glycol monoethyl ether, applied to substrates (glass, quartz glass) by spinning, spraying or dipping and cured at at least 300 ° C. for at least 1 min.
- the layers obtained in this way have a refractive index of 1.36 to 1.38 and are therefore in the range of the bulk material. Glass substrates coated in this way nevertheless show a residual reflection of 0.5%.
- Magnesium fluoride layers are produced in a similar manner according to S. Fujihara et al., Journal of Sol-Gel-Science and Technology 19 (2000) 311-314.
- One route includes the conversion of magnesium acetate with trifluoroacetic acid (TFA) and water in 2-propanol.
- TFA trifluoroacetic acid
- n 1.2
- magnesium ethanolate (Mg (OEt) 2 ) is reacted with trifluoroacetic acid (TFA) in 2-propanol to magnesium trifluoroacetate
- TFA trifluoroacetic acid
- the brine produced in this way was applied by spinning onto quartz glass and cured at temperatures from 300 ° C. to 600 ° C. for 10 minutes.
- the substrates coated in this way have a relatively low transmission of a maximum of approximately 96.6%. Information on the refractive index of these layers is missing.
- sols of metal or semi-metal oxides for layers made of metal or semi-metal oxides such as ZrO 2 , Al 2 O 3, TiO 2 , Ta 2 O 5 or SiO 2 layers, give coatings with good optical quality can, but their refractive index is significantly higher (1.46 to 2.3) than that of MgF 2 layers.
- the object of the invention was to provide a wet-chemical synthesis route for low-refractive optical layers using non-toxic or only slightly toxic starting materials, which are characterized by good optical quality and in particular a low refractive index.
- these layers should have an abrasion resistance that goes beyond the state of the art.
- the object was achieved by a coating composition comprising magnesium fluoride or a precursor thereof and at least one metal or semimetal oxide or a precursor thereof.
- the coating composition according to the invention can easily be applied wet-chemically to a substrate and hardened or compacted by heat treatment.
- the invention thus also provides a substrate with an abrasion and scratch resistant coating with a low refractive index, comprising magnesium fluoride and at least one metal or semimetal oxide.
- the coating composition comprises magnesium fluoride or a precursor thereof and at least one metal or semimetal oxide or a precursor thereof.
- the at least one metal or semimetal oxide or a precursor thereof is present in the coating composition as a sol, i.e. the coating composition is preferably a coating sol.
- the magnesium fluoride or a precursor thereof can be in the form of a sol or as a solution.
- the coating composition is preferably prepared by mixing a sol or a solution of magnesium fluoride or a precursor thereof and a sol of at least one metal or semimetal oxide or a precursor thereof.
- the sol or solution of magnesium fluoride or a precursor thereof can be prepared in any manner known in the art, some of which have been listed above.
- the sol or solution is preferably obtained from the reaction of a magnesium compound, preferably a hydrolyzable magnesium compound, with a fluorinated organic compound, the reaction usually being carried out in an organic solvent.
- Hydrolyzable here also means the hydration ability of the Mg compound.
- a preliminary stage here means, in particular, compounds of magnesium which can be converted into MgF 2 , in particular under the conditions for producing the substrate according to the invention, such as in the heat treatment.
- magnesium compounds or complexes of fluorinated organic compounds can be converted into magnesium fluoride by a thermal disproportionation reaction. If necessary, disproportionation reactions or the conversion into MgF 2 take place already at room temperature, so that MgF 2 can already be contained in the sol or the solution.
- the mixture of magnesium compound and fluorinated compound can also be heated, for example in order to promote the conversion into MgF 2 in the sol or the solution.
- All compounds which can be reacted with a fluorinated organic compound, in particular hydrolyzable magnesium compounds, are suitable as the magnesium compound.
- examples are magnesium alkoxides.
- the alkoxy group of the magnesium alkoxide preferably has 1 to 12 carbon atoms, with magnesium methoxide, magnesium ethoxide, magnesium propoxide and magnesium butoxide being preferred.
- the most preferred compound is magnesium ethanolate (Mg (OEt) 2 ).
- the alkoxide can be linear or branched, for example n-propanolate or isopropanolate.
- Any suitable solvent may be used as the solvent, e.g. one of those listed below for the manufacture of the metal or semimetal oxides.
- Alcohols examples are ethanol, n-propanol, 2-propanol or butanol.
- a preferred production route for the sol or the solution with magnesium fluoride or a precursor thereof can be described as follows.
- a hydrolyzable magnesium compound preferably magnesium alcoholate, particularly preferably magnesium ethylate
- an organic solvent preferably an alcohol, particularly preferably 2-propanol
- ketones and carboxylic acid, in particular trifluoroacetic acid, containing CF 3 groups are preferably used. Any undissolved constituents that may be present are then filtered off.
- All oxides of metals or semimetals can be used as metal or semimetal oxides.
- Preferred metals or semimetals M for the metal or semimetal oxides are, for example, B, Al, Ga, In, Si, Ge, Sn, Pb, Y, Ti, Zr, V, Nb, Ta, Mo, W, Fe, Cu, Ag , Zn, Cd, Ce and La or mixed oxides thereof.
- a type of oxide or a mixture of oxides can be used.
- oxides which can optionally be hydrated are ZnO, CdO, SiO 2 , GeO 2 , TiO 2 , ZrO 2 , CeO 2 , SnO 2 , Al 2 O 3 (boehmite, AIO (OH), also as aluminum hydroxide), B 2 O 3l ln 2 O 3 , La 2 O 3 , Fe 2 O 3 , Fe 3 O, Cu 2 O, Ta 2 O 5 , Nb 2 O 5 , V 2 O 5 , M0O3 or WO 3 .
- silicates, zirconates, aluminates, stannates of metals or semimetals, and mixed oxides such as indium tin oxide (ITO), antimony tin oxide (ATO), fluorine-doped tin oxide (FTO), luminous pigments with Y or Eu- containing compounds, spinels, ferrites or mixed oxides with a perovskite structure such as BaTi ⁇ 3 and PbTiO 3 can be used.
- ITO indium tin oxide
- ATO antimony tin oxide
- FTO fluorine-doped tin oxide
- luminous pigments with Y or Eu- containing compounds such as spinels, ferrites or mixed oxides with a perovskite structure such as BaTi ⁇ 3 and PbTiO 3
- a perovskite structure such as BaTi ⁇ 3 and PbTiO 3
- semimetal or metal oxides which are optionally hydrated (oxide hydrate), of Si, Ge, Al, B, Zn, Cd, Ti, Zr, Ce, Sn, In, La, Fe, Cu, Ta, Nb, V, Mo or W.
- SiO 2 , Al 2 O 3 , Ta 2 Os, ZrO 2 and TiO 2 are particularly preferred.
- the sol of at least one semimetal or metal oxide can be produced by dispersing produced particles, in particular nanoscale particles, in a solvent or in situ.
- the particles can usually be made in various ways, e.g. through flame pyrolysis, plasma processes, colloid techniques, sol-gel processes, controlled germination and growth processes, MOCVD processes and emulsion processes. These methods are described in detail in the literature.
- the sol of at least one semimetal or metal oxide is preferably produced by a sol-gel process.
- hydrolyzable compounds are usually hydrolyzed with water, if appropriate with acidic or basic catalysis, and, if appropriate, at least partially condensed.
- the Hydrolysis and / or condensation reactions lead to the formation of compounds or condensates with hydroxyl, oxo groups and / or oxo bridges, which serve as precursors.
- the sol containing the oxides or precursors can be obtained by suitably setting the parameters, for example degree of condensation, solvent, temperature, water concentration, duration or pH.
- the precursors of the oxides mean in particular the condensation products mentioned.
- sol-gel process Further details of the sol-gel process are available, for example, from CJ Brinker, GW Scherer: "Sol-Gel Science - The Physics and Chemistry of Sol-Gel-Processi ⁇ g", Academic Press, Boston, San Diego, New York, Sydney (1990) described.
- the hydrolysis and condensation can be carried out in a solvent, but they can also be carried out without a solvent, with the hydrolysis being able to form solvents or other liquid constituents.
- Suitable solvents are both water and organic solvents or mixtures. These are the usual solvents used in the field of coating.
- suitable organic solvents are alcohols, preferably lower aliphatic alcohols (Ci-Cs alcohols), such as methanol, ethanol, 1-propanol, isopropanol and 1-butanol, ketones, preferably lower dialkyl ketones, such as acetone and methyl isobutyl ketone, ethers, preferably lower Dialkyl ethers, such as diethyl ether, or diol monoethers, amides, such as dimethylformamide, tetrahydrofuran, dioxane, sulfoxides, sulfones or butyl glycol and mixtures thereof. Alcohols are preferably used. High-boiling solvents can also be used. In the sol-gel process, the solvent can optionally be an alcohol formed from the alcoholate compounds during the hydrolysis.
- hydrolyzable metal or semimetal compounds for example the metals and semimetals M listed above, are suitable as hydrolyzable compounds.
- One or more hydrolyzable compounds can be used.
- the hydrolyzable metal or semimetal compound is preferably a compound of the general formula MX n (1), in which M is the metal or semimetal defined above, X is a hydrolyzable group which can be identical or different, two groups X being by a bidentate hydrolyzable group or an oxo group can be replaced or three groups X can be replaced by a tridentate hydrolyzable group, and n corresponds to the valence of the element when X has a charge of 1 and is often 3 or 4.
- the hydrolyzable compound can also have non-hydrolyzable groups which partially replace the hydrolyzable groups.
- hydrolyzable groups X which can be identical or different, are hydrogen, halogen (F, Cl, Br or I, in particular Cl or Br), alkoxy (for example C 1-6 alkoxy, for example methoxy, ethoxy, n-propoxy, i-propoxy and n-, i-, sec.- or tert-butoxy), aryloxy (preferably C ⁇ -io-aryloxy, such as phenoxy), alkaryloxy, e.g. benzoyloxy, acyloxy (e.g.
- C ⁇ -6 - Acyloxy preferably -C -4 -acyloxy, such as acetoxy or propionyloxy
- amino and alkylcarbonyl eg C 2-7 alkylcarbonyl such as acetyl
- complexing agents such as ß-dicarbonyls (eg acetyl acetonato).
- the groups mentioned can optionally contain substituents, such as halogen or alkoxy.
- Preferred hydrolyzable radicals X are halogen, alkoxy groups and acyloxy groups, with alcoholates being particularly preferred.
- the compounds can also be stabilized with additional complexing compounds.
- titanium compounds of the formula 1X 4 are TiCl 4 , Ti (OCH 3 ) 4 , Ti (OC 2 H 5 ) 4 , Ti (pentoxy) 4 , Ti (hexoxy), Ti (2-ethylhexoxy), Ti (n-OC 3 H 7 ) or Ti (i-OC 3 H 7 ) 4 .
- ⁇ -diketone and (meth) acrylic residues are examples of usable hydrolyzable compounds of elements M.
- usable hydrolyzable compounds of elements M are AI (OCH 3 ) 3 , AI (OC 2 H 5 ) 3 , AI (OnC 3 H 7 ) 3 , AI (OiC 3 H 7 ) 3 , AI (OnC 4 H 9 ) 3 , AI (O-sec.-C 4 H 9 ) 3 , AICI 3 , AICI (OH) 2 , AI (OC 2 H 4 OC 4 H 9 ) 3 , ZrCI 4 , Zr (OC 2 H 5 ) 4 , Zr (OnC 3 H 7 ) 4 , Zr (0-iC 3 H 7 ) 4 , Zr (OC Hg), ZrOCI, Zr (pentoxy) 4 , Zr (hexoxy) 4 , Zr (2-ethylhexoxy) 4 , and Zr compounds that have complexing residues, such as, for example,
- silanes of the formula SiX 4 are Si (OCH 3 ), Si (OC 2 H 5 ) 4, Si (0-n- or -iC 3 H 7 ) 4 , Si (OC 4 H 9 ) 4 , SiCl 4 , HSiCI 3 , Si (OOCCH 3 ) 4 .
- Si (OCH 3 ) 4 is preferred tetraalkoxysilanes, with those having CC alkoxy being particularly preferred, in particular tetramethoxysilane and tetraethoxysilane (TEOS).
- the semimetal or metal oxides can also be prepared in the presence of a complexing agent.
- suitable complexing agents are e.g. unsaturated carboxylic acids and ß-dicarbonyl compounds, e.g. (Meth) acrylic acid, acetylacetone and ethyl acetoacetate.
- an adhesion promoter can be used, which usually interacts or is bound or complexed with the particle of semimetal or metal oxide or the precursor thereof and thereby surface-modifies the particle and thereby promotes adhesion to the substrate.
- the adhesion promoter preferably has another functional group.
- Complexing agents can also be suitable as adhesion promoters.
- an adhesion promoter examples include unsaturated carboxylic acids such as (meth) acrylic acid and a hydrolyzable silane with at least one non-hydrolyzable group, the silane being particularly suitable for sols of SiO 2 .
- hydrolyzable silanes with at least one non-hydrolyzable group as adhesion promoters are compounds of the formula RSiX 3 (II), in which X is as defined in formula (I).
- the non-hydrolyzable radical R can be non-hydrolyzable radicals R without a functional group or preferably with a functional group.
- Examples of the functional groups of the radical R are the epoxy, hydroxy, ether, amino, monoalkylamino, dialkylamino, amide, carboxy, vinyl, acryloxy, Methacryloxy, cyano, halogen, aldehyde, alkylcarbonyl, and phosphoric acid groups. These functional groups are bonded to the silicon atom via alkylene, alkenylene or arylene bridge groups, which can be interrupted by oxygen or -NH groups.
- the bridge groups mentioned are derived, for example, from the alkyl, alkenyl or aryl radicals mentioned above.
- the radicals R having a functional group preferably contain 1 to 18, in particular 1 to 8, carbon atoms.
- silanes of the formula (II) are hydrolyzable silanes with a glycidyloxy group, amino group or (meth) acryloxy groups, such as ⁇ -glycidyloxypropyltrimethoxysilane, ⁇ -glycidyloxypropyltriethoxysilane, 3- (meth) acryloxypropyltri (m) ethoxysilane, 3- (meth ) acryloxypropyltrimethoxysilane, 3-aminopropyltriethoxysilane, N-2-aminoethyl-3-aminopropyltrimethoxysilane, trimethoxysilylpropyldiethylenetriamine.
- a glycidyloxy group, amino group or (meth) acryloxy groups such as ⁇ -glycidyloxypropyltrimethoxysilane, ⁇ -glycidyloxypropyltriethoxysilane, 3- (meth
- (Meth) acrylic stands for methacrylic or acrylic. Further specific examples of hydrolyzable silanes with non-hydrolyzable groups can e.g. can be found in EP-A-195493.
- the surface modification of nanoscale particles is a known method, as described by the applicant e.g. in WO 93/21127 (DE 4212633) or WO 96/31572.
- the semimetal or metal oxide sol is thus preferably synthesized from the corresponding hydrolyzable compound, preferably from the metal alkoxide, by hydrolysis, optionally in the presence of a catalyst and / or complexing agent.
- ZrO 2 sols are preferably used, the z. B. from zirconium tetra- ⁇ -propylate can be prepared by reaction with hydrochloric acid in the presence of acetylacetone.
- the sol from the at least one metal or semimetal oxide or its precursors are then mixed with the solution or the sol of magnesium fluoride or its precursors.
- the ratio can vary widely. In general, however, the amounts are chosen such that the molar ratio of the amount of magnesium (Mg) in magnesium fluoride or its precursors to metal or semimetal (M) in the at least one metal or semimetal oxide or its precursors Mg / M in the coating composition in the range of 1: 0.01 to 1: 1.8, more preferably in the range from 1: 0.05 to 1: 0.5 or 1: 0.1 to 1: 0.5 and particularly preferably from 1: 0.1 to 1 : 0.2 lies.
- the coating composition preferably comprises essentially no further components. However, it is conceivable to add other additives.
- magnesium fluoride or its precursors and the at least one metal or semimetal oxide or its precursors preferably make up at least 80% by weight, more preferably at least 90% by weight and particularly preferably at least 95% by weight of the solids content of the coating composition.
- the proportion of magnesium fluoride or its precursors is preferably at least 10% by weight, more preferably at least 20% by weight and particularly preferably at least 30% by weight, based on the solids content of the coating composition.
- the coating composition is applied to a substrate.
- substrates come into consideration.
- a suitable substrate are substrates made of metal, semiconductor, glass, ceramic, glass ceramic, plastic, crystalline substrates or inorganic-organic composite materials.
- substrates are used which are stable to a thermal treatment of the coating.
- the substrates can be pretreated, e.g. for cleaning, through a corona treatment or with a pre-coating (e.g. a paint or a metallized surface).
- the layers obtained are used in particular for optical coatings or optical or optoelectronic applications.
- Preferred substrates are in particular those which are translucent at least in a certain region or in certain regions of the light spectrum from UV light to visible light to infrared light.
- Transparent substrates with translucency in the range of visible light are particularly useful.
- plastic substrates are polycarbonate, polymethyl methacrylate, polyacrylate, polyethylene terephthalate.
- Transparent plastics, glasses e.g. silicate glasses, such as window glass or optical glasses, silica glass, quartz glass, borosilicate glass or soda lime silicate glass, chalcogenide and halide glasses etc.
- crystalline substrates e.g. sapphire, silicon or lithium niobate
- Suitable substrates for optical applications are e.g. Flat glasses, watch glasses, instrument covers, lenses and other optical elements, plastic films or transparent containers.
- All common wet chemical methods for producing optical layers such as, for. B. dipping, spinning, spraying, roll coating techniques or combinations of these, as well as common printing processes, eg. B. screen printing, flexographic printing or pad printing can be used.
- Other coating processes are knife coating, casting, brushing, flood coating, slot coating, meniscus coating or curtain coating.
- the coating is subjected to a thermal aftertreatment, for example above 50 ° C.
- the temperature used can vary within wide ranges, preferably a heat treatment in the temperature range from 100 ° C. and 600 ° C., more preferably from 300 to 500 ° C., particularly preferably from 400 to 450 ° C.
- the optical properties (eg reflection, refractive index) and the mechanical properties can be controlled by the choice of temperature. They depend on the optical properties of the substrate (refractive index), on the intended optical purpose (anti-reflective coating, interference layer package), on the thermal resistance of the substrate and on the desired application (outdoor application, indoor application).
- the heat treatment can, for example, harden or densify and / or convert the precursors into MgF 2 or the oxide.
- the ratio of Mg to metal or semimetal in the finished view corresponds at least approximately to the ratio in the coating composition.
- the ratio can vary widely.
- the material Quantity ratio of magnesium (Mg) in magnesium fluoride to metal or semimetal (M) in the at least one metal or semimetal oxide in the coating in the range from 1: 0.01 to 1: 1.8, more preferably in the range from 1: 0.05 to 1: 0.5 or 1: 0.1 to 1: 0.5 and particularly preferably from 1: 0.1 to 1: 0.2.
- the layers preferably consist essentially of MgF 2 and the at least one semimetal or metal oxide. If necessary, the above-mentioned complexing agents or adhesion promoters or other additives can be contained in the finished coating in relatively small amounts. Organic components used, such as complexing agents or from the adhesion promoter, can optionally be volatile during the heat treatment or burned out. It is usually mostly or essentially inorganic layers.
- Magnesium fluoride and the at least one metal or semimetal oxide preferably make up at least 80% by weight, more preferably at least 90% by weight and particularly preferably at least 95% by weight of the coating.
- the proportion of magnesium fluoride in the coating is preferably at least 10% by weight, more preferably at least 20% by weight and particularly preferably at least 30% by weight.
- the layer thickness can vary within wide ranges, but is usually in the range from 20 nm to 1 ⁇ m, preferably 30 to 500 nm and particularly preferably 50 to 250 nm.
- the coating according to the invention can be used as a single layer or as a layer from a multi-layer package.
- the other layers can be the same, possibly with different ratios, or different, usually also optical layers. Accordingly, further layers can be applied to the substrate in a conventional manner before and / or after the coating.
- the coating is used as an optical coating.
- the coating is particularly suitable for anti-reflective coatings, in particular as a single layer, and for interference layer packages. These antireflective and interference boundary layers are preferably used on transparent substrates or substrates which are translucent in at least one region of the wavelength range from UV light to IR light.
- MgF 2 sol The solution or sol with MgF 2 or its precursors is simply called MgF 2 sol, even if it is a solution of MgF 2 precursors.
- MgF 2 sol At room temperature, 25.396 g (0.22 mol) of magnesium ethylate are added to 522.810 g of 2-propanol. 51.016 g (0.35 mol) of trifluoroacetic acid (TFA) are added to the stirred dispersion and the mixture is stirred at room temperature. A slight warming of the reaction mixture is observed at the start of the reaction. As the reaction progresses, the reaction mixture becomes increasingly clear. After 2 hours, any insoluble constituents present are separated off using a syringe filter (1.2 ⁇ m) and the reaction mixture is then left to stand at room temperature. A colorless precipitate forms overnight, which is separated off using a pleated filter. The filtrate is filtered again through a 1.2 ⁇ m syringe filter and a yellow solution results. The coating composition is stable in storage at room temperature for at least 4 weeks.
- TFA trifluoroacetic acid
- SiO 2 sol At room temperature, 13.29 g (87.3 mmol) of tetramethoxysilane (TMOS) are dissolved in 11.80 g of ethanol. A mixture of 13.40 g (744.4 mmol) of water, 0.30 g of hydrochloric acid (37%) and 11.80 g of ethanol is added with stirring. The mixture is stirred at room temperature for at least 2 h (brief heating of the reaction mixture after addition) and diluted with 130 g of 2-propanol.
- TMOS tetramethoxysilane
- Al 2 O 3 sol 40 g (0.16 mol) of aluminum tri-sec-butoxide are dissolved in 240 g of 2-propanol at room temperature with stirring. 8 g (0.08 mol) of acetyl acetone and 3.2 g (0.18 mol) of water are added with stirring. The mixture is stirred at room temperature for 1 h and filtered through a 0.45 ⁇ m syringe filter. The result is a yellow, clear sol.
- Zr0 2 sol 24 g (51.3 mmol) of zirconium tetra-n-propylate (70% by weight in 1-propanol) are dissolved in 240 g of 2-propanol at room temperature. 2.553 g (25.5 mmol) of acetylacetone are added with stirring and the mixture is stirred for 10 min. Then 1.8 g of concentrated salsic acid are added and the mixture is stirred at room temperature for 1 h. Filtration through a 5 ⁇ m syringe filter results in a yellow, clear sol.
- MgF 2 composite sols are produced.
- Lime sodium silicate glass panes are cleaned by rubbing them with ethanol and coated with the respective sol using the immersion process (3.5 mm / s). The coating is cured at 450 ° C. for 30 minutes.
- the scratch resistance is tested with a steel wool test (steel wool 0000, 250 g / 1 cm 2 , 10 cycles).
- the damage (number of scratches generated) is assessed using light microscopy.
- the reflectivity is determined spectroscopically.
- a significant improvement in scratch resistance is achieved with a mixing ratio of MgF 2 sol / SiO 2 sol of 50/60.
- the transmission is higher than in the case of the uncoated glass and also higher than in the case of a pure SiO 2 layer.
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102004027842A DE102004027842A1 (de) | 2004-06-08 | 2004-06-08 | Abrieb- und kratzfeste Beschichtungen mit niedriger Brechzahl auf einem Substrat |
| PCT/EP2005/006113 WO2005120154A2 (de) | 2004-06-08 | 2005-06-07 | Abrieb- und kratzfeste beschichtungen mit niedriger brechzahl auf einem substrat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP1778598A2 true EP1778598A2 (de) | 2007-05-02 |
Family
ID=35457359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP05752553A Withdrawn EP1778598A2 (de) | 2004-06-08 | 2005-06-07 | Abrieb- und kratzfeste beschichtungen mit niedriger brechzahl auf einem substrat |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US20080261053A1 (enExample) |
| EP (1) | EP1778598A2 (enExample) |
| JP (1) | JP2008501557A (enExample) |
| DE (1) | DE102004027842A1 (enExample) |
| WO (1) | WO2005120154A2 (enExample) |
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| FR2893320B1 (fr) * | 2005-11-17 | 2009-05-29 | Univ Paris Curie | Oxyfluorure poreux nanostructure |
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| DE102006040200B4 (de) * | 2006-08-28 | 2008-09-04 | Webasto Ag | Verfahren zum Beschichten eines Kunststoffteils |
| FR2907112B1 (fr) * | 2006-10-16 | 2009-10-02 | Eurokera S N C Sa | Plaque vitroceramique et son procede de fabrication |
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| DE102007025590A1 (de) | 2007-05-31 | 2008-12-04 | Ferro Gmbh | Einbrennbare siebdruckfähige Antireflexbeschichtung für Glas |
| US8636845B2 (en) | 2008-06-25 | 2014-01-28 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Metal heterocyclic compounds for deposition of thin films |
| US20100180939A1 (en) * | 2009-01-22 | 2010-07-22 | Sharma Pramod K | Heat treatable magnesium fluoride inclusive coatings, coated articles including heat treatable magnesium fluoride inclusive coatings, and methods of making the same |
| EP2325675A2 (en) * | 2009-07-30 | 2011-05-25 | Canon Kabushiki Kaisha | Method for producing optical film, optical film, and optical component |
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| WO2013046157A1 (en) | 2011-09-27 | 2013-04-04 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Nickel bis diazabutadiene precursors, their synthesis, and their use for nickel containing film depositions |
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| DE102013010105A1 (de) | 2013-06-18 | 2014-12-18 | Ferro Gmbh | Verfahren zur Herstellung einer wässrigen Zusammensetzung umfassend ein Kondensat auf Basis von Silicium-Verbindungen zur Herstellung von Antireflexionsbeschichtungen |
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| US10295707B2 (en) | 2014-02-27 | 2019-05-21 | Corning Incorporated | Durability coating for oxide films for metal fluoride optics |
| JP6746502B2 (ja) * | 2014-05-23 | 2020-08-26 | コーニング インコーポレイテッド | 引っ掻き傷および指紋の視認性が低下した低コントラストの反射防止物品 |
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| DE102015200948A1 (de) | 2015-01-21 | 2016-07-21 | Automotive Lighting Reutlingen Gmbh | Verfahren zum Beschichten eines Kunststoffteils mit einem Lack, Lackieranlage zur Ausführung des Verfahrens und Abdeckscheibe einer Kraftfahrzeugbeleuchtungseinrichtung, die nach dem Verfahren beschichtet worden ist |
| CN104927416B (zh) * | 2015-06-09 | 2017-08-29 | 中国南玻集团股份有限公司 | 硅镁铝溶胶和掺杂核壳二氧化硅微球镀膜液及制备应用 |
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| JP6818433B2 (ja) * | 2016-05-12 | 2021-01-20 | キヤノン株式会社 | トリフルオロ酢酸マグネシウムゾル溶液 |
| JP6768346B2 (ja) * | 2016-05-12 | 2020-10-14 | キヤノン株式会社 | 光学膜 |
| JP6961775B2 (ja) * | 2016-05-12 | 2021-11-05 | キヤノン株式会社 | 光学膜 |
| JP2018049074A (ja) * | 2016-09-20 | 2018-03-29 | キヤノンファインテックニスカ株式会社 | 光学膜、該光学膜を備えた基材、及び該基材を有する光学デバイス |
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| CN108648883B (zh) * | 2018-05-15 | 2020-08-25 | 华东师范大学 | 一种双层减反结构与石墨烯复合的透明导电薄膜制备方法 |
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| EP3640688B1 (en) | 2018-10-18 | 2022-10-05 | Essilor International | Optical article having an interferential coating with an improved abrasion-resistance |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2005120154A2 (de) | 2005-12-22 |
| JP2008501557A (ja) | 2008-01-24 |
| DE102004027842A1 (de) | 2006-01-12 |
| US20140017399A1 (en) | 2014-01-16 |
| US20080261053A1 (en) | 2008-10-23 |
| WO2005120154A3 (de) | 2006-03-16 |
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