EP0558393B1 - Elektronenquelle mit Mikropunktkathoden und Anzeigevorrichtung mit Kathodolumineszenz erregt durch Feldemission unter Anwendung dieser Quelle - Google Patents

Elektronenquelle mit Mikropunktkathoden und Anzeigevorrichtung mit Kathodolumineszenz erregt durch Feldemission unter Anwendung dieser Quelle Download PDF

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Publication number
EP0558393B1
EP0558393B1 EP93400449A EP93400449A EP0558393B1 EP 0558393 B1 EP0558393 B1 EP 0558393B1 EP 93400449 A EP93400449 A EP 93400449A EP 93400449 A EP93400449 A EP 93400449A EP 0558393 B1 EP0558393 B1 EP 0558393B1
Authority
EP
European Patent Office
Prior art keywords
electrodes
source
series
layer
cathodoluminescent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP93400449A
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English (en)
French (fr)
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EP0558393A1 (de
Inventor
Robert Chemin De La Limite Meyer
Thierry Leroux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of EP0558393A1 publication Critical patent/EP0558393A1/de
Application granted granted Critical
Publication of EP0558393B1 publication Critical patent/EP0558393B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/16—Cathodes heated directly by an electric current characterised by the shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/319—Circuit elements associated with the emitters by direct integration

Definitions

  • the invention applies in particular to the field of visualization and, more particularly, to flat screens.
  • FIG. 1A An example of realization of this source of known electrons is schematically represented in top view in FIG. 1A and in cross-section on Figure 1B which is the section CC of Figure 1A.
  • This known source has a structure matrix and comprises a substrate 2 for example in glass and possibly, on this substrate 2, a thin layer of silica 4.
  • silica 4 On this layer of silica 4 is formed a series of electrodes in the form of conductive strips parallel acting as cathode conductors and constituting the columns of the matrix structure.
  • Cathode conductors are covered each with a resistive layer 7.
  • An electrically insulating layer 8 in silica covers the resistive layers 7.
  • the insulating layer 8 Above the insulating layer 8 is formed a series of electrodes which are also shaped parallel conductive strips and one of which appears in FIGS. 1A and 1B and bears the reference 10.
  • Electrodes formed above the layer insulator 8 are perpendicular to the conductors cathodic and play the role of grids which constitute the lines of the matrix structure.
  • the known source also includes a plurality of microdots which constitute transmitters elementary electrons.
  • the layer resistive 7 corresponding to this area supports microtips 12 and the grid corresponding to this area has a hole 14 opposite each of the microtips 12.
  • the insulating layer 8 is also provided with openings 15 allowing passage microtips 12.
  • each of the electrodes of one of the two sets of electrodes has a lattice structure in contact with a resistive layer.
  • each cathode conductor has this structure in trellis and thus includes conductive tracks 5a which cross.
  • each cathode conductor has openings 6 which are delimited by these tracks 5a.
  • Microtips occupy regions central lattice meshes.
  • the electrodes of the other series have a continuous structure (ignoring the small diameter holes 14 arranged opposite the microtips 12).
  • Electrodes with a structure trellis is intended to minimize the risk of breakdown at the microtips, limiting the electric current in them, and therefore avoid the formation of short circuits between lines and columns via these microtips.
  • the layer insulator 8 because of the defects that the layer insulator 8 is likely to present, it remains possibility of short circuit in areas of covering of the lattice electrodes by the continuous electrodes.
  • the area of the overlap areas is equal to the surface of the lattice structure electrodes.
  • the object of the present invention is to reduce the risk of short circuits more than it does this known source and, to do this, suggests reduce the overlapping areas of the two series even more importantly than in the source known from document (3).
  • the source object of the present invention comprising the first series of electrodes and the second set of electrodes that have been mentioned above, is characterized by the fact that the second openings are offset from at the first openings and thus placed opposite the trellis tracks, the first and second openings are therefore not superimposed.
  • each discontinuous electrode must be such as to allow to apply the electric field on the microtips corresponding.
  • each discontinuous electrode an area as small as possible and a structure that minimizes areas of covering with the lattice structure electrode corresponding.
  • the second openings are placed opposite the intersections of the lattice tracks.
  • the electrodes having the lattice structure are the electrodes of the second set of electrodes and the discontinuous electrodes are the electrodes of the first series of electrodes.
  • the electrodes having the structure in trellis are the electrodes of the first series of electrodes and the discontinuous electrodes are the electrodes of the second set of electrodes.
  • the resistive layer and the support on which the first series is formed of electrodes are at least partially transparent to the light emitted by the cathodoluminescent material under the impact of electrons, in order to observe what cathodoluminescent material through this support.
  • the anode cathodoluminescent includes an electrode which is able to reflect the light emitted by the layer of cathodoluminescent material, the latter being formed on this electrode and opposite the second series of electrodes.
  • each of the electrodes first and second series of electrodes either formed on a layer which is capable of adsorbing the light coming from outside the device.
  • Figure 2A is a top view schematic of an electron source conforming to the invention and Figure 2B is a sectional view schematic, according to DD, of this source.
  • This source according to the invention differs simply from the known source which is depicted on Figures 1A and 1B by the fact that its grids are discontinuous electrodes.
  • Cathode conductors 5 from a source Figures 2A and 2B still have a structure of lattice while 10g grids from this source have openings 11 which make these grids discontinuous or openwork.
  • openings 11 are opposite the areas of crossing of the conductive tracks 5a of the trellis and are even centered on these areas, seen from above, as seen in Figure 2A.
  • the grids still have holes 14a respectively opposite the microtips 12 from the source.
  • each 10g grid of the source of FIGS. 2A and 2B has substantially the structure of a trellis identical to the conductor's trellis corresponding cathodic but the trellis of this grid is offset from the trellis of the cathode conductor, half a step parallel to lines and half a step parallel to the columns of the source and, above an area where are gathered micro-tips, this grid has, in top view, a square surface 10a which is pierced by the holes 14a and which lead to four tracks 10b making part of the trellis of this grid.
  • This square area is less than the surface of the opening 6 opposite which it is find.
  • each cathode conductor 18 is formed on layer 4, and is thus under the resistive layer 7, and has, in top view, the same shape as the electrode 10g of Figures 2A and 2B, except that this cathode conductor has no holes at the level of the microtips which are carried by the layer resistive 7.
  • a layer resistive 20 is formed on the insulating layer 8 and provided with holes 21 opposite the microtips for let pass the electrons emitted by it during the excitement of the source.
  • Grid 22 corresponding to the conductor cathode 10g is formed on this resistive layer 20 and has a trellis structure which we see, in section, tracks 22a in FIG. 3.
  • each driver to trellis structure can be either above the corresponding resistive layer (case of Figure 3) either below this resistive layer (case of Figure 2B).
  • a source according to the invention presents, in relation to the source known from document (3), the key benefit of reducing the likelihood of short circuit between the rows and columns of the source and therefore improve manufacturing yield from the source.
  • a source according to the invention has plus a very important advantage: it allows reduce the capacity between rows and columns in a proportion substantially identical to that of reducing the area of the electrode which is made discontinuous.
  • a known cathodoluminescent screen is schematically represented in section in FIG. 4.
  • This known screen has a source of microtip electrons 24 whose substrate can be seen insulator 26, resistive layer 28, microtips 12, the insulating layer 8 and a grid 10.
  • a space 30 in which we made the vacuum separates this microtip source 24 from a substrate electrically insulating and transparent 32 which is provided an electrically conductive and transparent layer 34 forming an anode.
  • this layer 36 emits a light 38 that a user 40 of the screen observe through the transparent substrate 32.
  • FIG. 5 a screen conforming to the invention, which is represented in FIG. 5 and which includes an electron source 42 for example kind of that of Figures 2A and 2B which we see the substrate 2, the silica layer 4, a conductor cathodic 5, the resistive layer 7, the insulating layer 8, the microtips 12 and a grid 10g.
  • an electron source 42 for example kind of that of Figures 2A and 2B which we see the substrate 2, the silica layer 4, a conductor cathodic 5, the resistive layer 7, the insulating layer 8, the microtips 12 and a grid 10g.
  • the additional advantage is as follows: if the resistive layer 7 is transparent to the light 50 emitted by the phosphor 48 under the impact of the electrons coming from the microtips 12, which is obtained by producing this resistive layer in SnO 2 by example, then the electron source 22 according to the invention can have a high transmission coefficient, greater than 50%, vis-à-vis this light 50.
  • a conductive layer 46 a layer capable of reflect the light 50 emitted by the phosphor.
  • each cathode conductor and each grid are preferably formed on an underlay 52 able to adsorb light 54 outside the screen, as seen in the example shown on the figure 6.
  • This exterior light 54 is thus adsorbed instead of being reflected back to the observer.
  • the width d of the conductive tracks 5a forming the trellis is 2 micrometers.
  • a network of sixteen microtips 12 is made in the center of the mesh.
  • the distance a between two microtips is 3 micrometers.
  • the distance r between this microtip network and the tracks is 7 micrometers.
  • the 10g grid which is associated with the conductor cathode 5 and seen in Figure 7B has a perforated surface and this grid has square conductors 10a whose sides d1 are equal to 11 micrometers and which are positioned in the center of mesh of the trellis so as to cover the networks of microtips.
  • each driver square is powered by four conductive tracks, this which makes the probability of having a driver very low square not powered.
  • the surface of the overlap zones 16 between a cathode conductor and the corresponding grid is worth 4 x 4 micrometers 2, that is to say 16 micrometers 2 , instead of 200 micrometers 2 in a known source by document (3).
  • the grid surface is thus reduced by one coefficient greater than 4 compared to a source described in document (3).
  • Capacity between rows and columns is therefore substantially divided by 4, which reduces all the more capacitive consumption.
  • the transmission of a grid is worth about 75% and the transmission of a cathode conductor is worth about 85%.
  • the cathode conductors to lattice structure and openwork grids are advantageously formed on an absorbent layer, for improve the contrast under illumination.
  • This adsorbent layer is for example formed by a black chrome film of a few tens nanometers thick.

Landscapes

  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)

Claims (8)

  1. Elektronenquelle, umfassend:
    auf einem elektrisch isolierenden Träger (2) eine erste Serie paralleler Elektroden (5, 18), die die Rolle von Kathodenleitern spielen und eine Vielzahl Mikropunkte (12) aus elektronenemittierendem Material tragen,
    eine zweite Serie paralleler Elektroden (10g, 22), die Rolle von Gittern spielend, elektrisch von den Kathodenleitern isoliert und mit diesen einen Winkel bildend, was Überkreuzungszonen (16) der Kathodenleiter und der Gitter definiert,
    eine resistive Schicht (7, 20) in Kontakt mit jeder der Elektroden von einer der eine netzwerkförmige Struktur besitzenden und Leiterbahnen (5a, 22a) aufweisenden Serien, die sich überkreuzen und erste Öffnungen (6) begrenzen,
    zweite Öffnungen (11), gebildet durch Diskontinuitäten der Elektroden der anderen Serie,
    dadurch gekennzeichnet,
    daß die zweiten Öffnungen (11) in bezug auf die ersten Öffnungen (6) versetzt sind und infolgedessen den Leiterbahnen (5a, 22a) der Netzwerke gegenüberstehen.
  2. Quelle nach Anspruch 1, dadurch gekennzeichnet, daß die zweiten Öffnungen (11) den Schnittpunkten der Leiterbahnen der Netzwerke gegenüberstehen.
  3. Quelle nach einem der Ansprüche 1 und 2, dadurch gekennzeichnet, daß die Elektroden mit der netzwerkförmigen Struktur die Elektroden (22) der zweiten Elektrodenserie sind, und dadurch, daß die diskontinuierlichen Elektroden die Elektroden (18) der ersten Elektrodenserie sind.
  4. Quelle nach einem der Ansprüche 1 und 2, dadurch gekennzeichnet, daß die Elektroden mit der netzwerkförmigen Struktur die Elektroden (5) der ersten Elektrodenserie sind, und dadurch, daß die diskontinuierlichen Elektroden die Elektroden (10g) der zweiten Elektrodenserie sind.
  5. Anzeigevorrichtung mit Kathodolumineszenz, umfassend:
    eine Elektronenquelle (42) mit Mikropunkt-Emissionskathoden, und
    eine kathodolumineszente Anode mit einer Schicht (48) aus einem kathodolumineszenten Material,
    wobei diese Vorrichtung dadurch gekennzeichnet ist, daß die Quelle (42) eine Quelle nach einem der Ansprüche 1 bis 4 ist.
  6. Vorrichtung nach Anspruch 5, dadurch gekennzeichnet, daß die resistive Schicht (7) und der Träger (2), auf dem die erste Serie von Elektroden (5) ausgebildet ist, wenigstens partiell transparent sind für das Licht (50), welches das kathodolumineszente Material (48) unter dem Aufprall der Elektronen abstrahlt, um dieses kathodolumineszente Material durch diesen Träger betrachten zu können.
  7. Vorrichtung nach Anspruch 6, dadurch gekennzeichnet, daß die kathodolumimeszente Anode eine Elektrode (46) umfaßt, die fähig ist, das Licht (50) zu reflektieren, welches das kathodolumineszente Material (48) abstrahlt, wobei dieses letztere auf dieser Elektrode und gegenüber der zweiten Serie von Elektroden (10g) ausgebildet ist.
  8. Vorrichtung nach einem der Ansprüche 6 und 7, dadurch gekennzeichnet, daß jede der Elektroden (5, 10g) der ersten und der zweiten Elektrodenserie auf einer Schicht (52) ausgebildet ist, die das Licht (54) absorbieren kann, das von außerhalb der Vorrichtung eintrifft.
EP93400449A 1992-02-26 1993-02-22 Elektronenquelle mit Mikropunktkathoden und Anzeigevorrichtung mit Kathodolumineszenz erregt durch Feldemission unter Anwendung dieser Quelle Expired - Lifetime EP0558393B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9202220A FR2687839B1 (fr) 1992-02-26 1992-02-26 Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ utilisant cette source.
FR9202220 1992-02-26

Publications (2)

Publication Number Publication Date
EP0558393A1 EP0558393A1 (de) 1993-09-01
EP0558393B1 true EP0558393B1 (de) 1998-05-13

Family

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EP93400449A Expired - Lifetime EP0558393B1 (de) 1992-02-26 1993-02-22 Elektronenquelle mit Mikropunktkathoden und Anzeigevorrichtung mit Kathodolumineszenz erregt durch Feldemission unter Anwendung dieser Quelle

Country Status (8)

Country Link
US (1) US5534744A (de)
EP (1) EP0558393B1 (de)
JP (1) JPH0684478A (de)
KR (1) KR930018613A (de)
CA (1) CA2089986A1 (de)
DE (1) DE69318444T2 (de)
FR (1) FR2687839B1 (de)
TW (1) TW386234B (de)

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FR2726581B1 (fr) 1994-11-08 1996-12-06 Commissariat Energie Atomique Suspension pour le depot de materiaux luminescents par electrophorese, notamment pour la realisation d'ecrans plats
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Also Published As

Publication number Publication date
CA2089986A1 (en) 1993-08-27
KR930018613A (ko) 1993-09-22
TW386234B (en) 2000-04-01
JPH0684478A (ja) 1994-03-25
DE69318444D1 (de) 1998-06-18
DE69318444T2 (de) 1998-12-03
FR2687839A1 (fr) 1993-08-27
US5534744A (en) 1996-07-09
EP0558393A1 (de) 1993-09-01
FR2687839B1 (fr) 1994-04-08

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