FR2726689B1 - Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence - Google Patents

Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence

Info

Publication number
FR2726689B1
FR2726689B1 FR9413372A FR9413372A FR2726689B1 FR 2726689 B1 FR2726689 B1 FR 2726689B1 FR 9413372 A FR9413372 A FR 9413372A FR 9413372 A FR9413372 A FR 9413372A FR 2726689 B1 FR2726689 B1 FR 2726689B1
Authority
FR
France
Prior art keywords
cathodoluminescence
manufacturing
application
field
electron source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9413372A
Other languages
English (en)
Other versions
FR2726689A1 (fr
Inventor
Joel Danroc
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9413372A priority Critical patent/FR2726689B1/fr
Priority to US08/548,039 priority patent/US5836796A/en
Priority to JP30638295A priority patent/JPH08227655A/ja
Priority to DE69510522T priority patent/DE69510522T2/de
Priority to EP95402451A priority patent/EP0712147B1/fr
Publication of FR2726689A1 publication Critical patent/FR2726689A1/fr
Application granted granted Critical
Publication of FR2726689B1 publication Critical patent/FR2726689B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/021Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30403Field emission cathodes characterised by the emitter shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30403Field emission cathodes characterised by the emitter shape
    • H01J2201/30426Coatings on the emitter surface, e.g. with low work function materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30446Field emission cathodes characterised by the emitter material
    • H01J2201/30453Carbon types
    • H01J2201/30457Diamond
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
FR9413372A 1994-11-08 1994-11-08 Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence Expired - Fee Related FR2726689B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR9413372A FR2726689B1 (fr) 1994-11-08 1994-11-08 Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence
US08/548,039 US5836796A (en) 1994-11-08 1995-10-25 Field effect electron source, associated display device and the method of production thereof
JP30638295A JPH08227655A (ja) 1994-11-08 1995-11-01 電界効果電子ソースおよびその製造法
DE69510522T DE69510522T2 (de) 1994-11-08 1995-11-03 Feldeffekt-Elektronenquelle und Verfahren zur Herstellung; Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz
EP95402451A EP0712147B1 (fr) 1994-11-08 1995-11-03 Procédé de fabrication d'une source d'électrons à effet de champ et source obtenue par ce procédé, application aux dispositifs de visualisation par cathodoluminescence

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9413372A FR2726689B1 (fr) 1994-11-08 1994-11-08 Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence

Publications (2)

Publication Number Publication Date
FR2726689A1 FR2726689A1 (fr) 1996-05-10
FR2726689B1 true FR2726689B1 (fr) 1996-11-29

Family

ID=9468612

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9413372A Expired - Fee Related FR2726689B1 (fr) 1994-11-08 1994-11-08 Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence

Country Status (5)

Country Link
US (1) US5836796A (fr)
EP (1) EP0712147B1 (fr)
JP (1) JPH08227655A (fr)
DE (1) DE69510522T2 (fr)
FR (1) FR2726689B1 (fr)

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US5853492A (en) * 1996-02-28 1998-12-29 Micron Display Technology, Inc. Wet chemical emitter tip treatment
KR100442982B1 (ko) * 1996-04-15 2004-09-18 마츠시타 덴끼 산교 가부시키가이샤 전계방출형전자원및그제조방법
EP0974156B1 (fr) 1996-06-25 2004-10-13 Vanderbilt University Structures, reseaux et dispositifs a emission de champ sous vide a micro-pointe et techniques de fabrication
US5858478A (en) * 1997-12-02 1999-01-12 The Aerospace Corporation Magnetic field pulsed laser deposition of thin films
US5944573A (en) * 1997-12-10 1999-08-31 Bav Technologies, Ltd. Method for manufacture of field emission array
FR2778757B1 (fr) * 1998-05-12 2001-10-05 Commissariat Energie Atomique Systeme d'inscription d'informations sur un support sensible aux rayons x
JPH11329217A (ja) * 1998-05-15 1999-11-30 Sony Corp 電界放出型カソードの製造方法
JP2000021287A (ja) * 1998-06-30 2000-01-21 Sharp Corp 電界放出型電子源及びその製造方法
JP3595718B2 (ja) 1999-03-15 2004-12-02 株式会社東芝 表示素子およびその製造方法
US6935917B1 (en) * 1999-07-16 2005-08-30 Mitsubishi Denki Kabushiki Kaisha Discharge surface treating electrode and production method thereof
US6342755B1 (en) * 1999-08-11 2002-01-29 Sony Corporation Field emission cathodes having an emitting layer comprised of electron emitting particles and insulating particles
US6462467B1 (en) * 1999-08-11 2002-10-08 Sony Corporation Method for depositing a resistive material in a field emission cathode
US6384520B1 (en) * 1999-11-24 2002-05-07 Sony Corporation Cathode structure for planar emitter field emission displays
KR100464314B1 (ko) * 2000-01-05 2004-12-31 삼성에스디아이 주식회사 전계방출소자 및 그 제조방법
KR100480771B1 (ko) * 2000-01-05 2005-04-06 삼성에스디아이 주식회사 전계방출소자 및 그 제조방법
JP3737696B2 (ja) 2000-11-17 2006-01-18 株式会社東芝 横型の電界放出型冷陰極装置の製造方法
FR2843241A1 (fr) * 2002-07-31 2004-02-06 Framatome Connectors Int Dispositif de retention de contact ameliore
US8048789B2 (en) * 2005-04-26 2011-11-01 Northwestern University Mesoscale pyramids, arrays and methods of preparation
JP2007273270A (ja) * 2006-03-31 2007-10-18 Mitsubishi Electric Corp 電界放出型表示装置およびその製造方法
EP1884978B1 (fr) * 2006-08-03 2011-10-19 Creepservice S.à.r.l. Procédé pour la revêtement des substrats avec des couches de carbone de type diamant
EP2419949A2 (fr) * 2009-04-13 2012-02-22 Applied Materials, Inc. Fibres métallisées pour stockage d'énergie électrochimique
GB2482728A (en) * 2010-08-13 2012-02-15 Element Six Production Pty Ltd Polycrystalline superhard layer made by electrophoretic deposition
TWI435360B (zh) * 2011-10-17 2014-04-21 Au Optronics Corp 場發射顯示器及其顯示陣列基板的製造方法
CN107098342A (zh) * 2017-04-07 2017-08-29 河南黄河旋风股份有限公司 金刚石粉体分离装置和分离方法

Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
US2293593A (en) 1941-07-25 1942-08-18 Albert Shelby Hair treating apparatus
US4084942A (en) * 1975-08-27 1978-04-18 Villalobos Humberto Fernandez Ultrasharp diamond edges and points and method of making
FR2593953B1 (fr) * 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
FR2623013A1 (fr) 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
JPH0275902A (ja) * 1988-09-13 1990-03-15 Seiko Instr Inc ダイヤモンド探針及びその成形方法
FR2663462B1 (fr) 1990-06-13 1992-09-11 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes.
US5141460A (en) * 1991-08-20 1992-08-25 Jaskie James E Method of making a field emission electron source employing a diamond coating
US5129850A (en) * 1991-08-20 1992-07-14 Motorola, Inc. Method of making a molded field emission electron emitter employing a diamond coating
US5199918A (en) * 1991-11-07 1993-04-06 Microelectronics And Computer Technology Corporation Method of forming field emitter device with diamond emission tips
US5180951A (en) * 1992-02-05 1993-01-19 Motorola, Inc. Electron device electron source including a polycrystalline diamond
US5252833A (en) * 1992-02-05 1993-10-12 Motorola, Inc. Electron source for depletion mode electron emission apparatus
US5290610A (en) * 1992-02-13 1994-03-01 Motorola, Inc. Forming a diamond material layer on an electron emitter using hydrocarbon reactant gases ionized by emitted electrons
FR2687839B1 (fr) 1992-02-26 1994-04-08 Commissariat A Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ utilisant cette source.
US5278475A (en) * 1992-06-01 1994-01-11 Motorola, Inc. Cathodoluminescent display apparatus and method for realization using diamond crystallites
JPH08507643A (ja) * 1993-03-11 1996-08-13 フェド.コーポレイション エミッタ先端構造体及び該エミッタ先端構造体を備える電界放出装置並びにその製造方法
KR100314830B1 (ko) * 1994-07-27 2002-02-28 김순택 전계방출표시장치의제조방법
US5623180A (en) * 1994-10-31 1997-04-22 Lucent Technologies Inc. Electron field emitters comprising particles cooled with low voltage emitting material
US5616368A (en) * 1995-01-31 1997-04-01 Lucent Technologies Inc. Field emission devices employing activated diamond particle emitters and methods for making same

Also Published As

Publication number Publication date
EP0712147A1 (fr) 1996-05-15
DE69510522T2 (de) 2000-03-16
EP0712147B1 (fr) 1999-06-30
US5836796A (en) 1998-11-17
DE69510522D1 (de) 1999-08-05
JPH08227655A (ja) 1996-09-03
FR2726689A1 (fr) 1996-05-10

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