FR2726122B1 - Procede de fabrication d'une source d'electrons a micropointes - Google Patents

Procede de fabrication d'une source d'electrons a micropointes

Info

Publication number
FR2726122B1
FR2726122B1 FR9412467A FR9412467A FR2726122B1 FR 2726122 B1 FR2726122 B1 FR 2726122B1 FR 9412467 A FR9412467 A FR 9412467A FR 9412467 A FR9412467 A FR 9412467A FR 2726122 B1 FR2726122 B1 FR 2726122B1
Authority
FR
France
Prior art keywords
manufacturing
electron source
micropoint
micropoint electron
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9412467A
Other languages
English (en)
Other versions
FR2726122A1 (fr
Inventor
Robert Meyer
Michel Borel
Marie Dominique Bruni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9412467A priority Critical patent/FR2726122B1/fr
Priority to US08/535,465 priority patent/US5679044A/en
Priority to EP95402312A priority patent/EP0708473B1/fr
Priority to DE69507418T priority patent/DE69507418T2/de
Priority to JP29377495A priority patent/JPH08227653A/ja
Publication of FR2726122A1 publication Critical patent/FR2726122A1/fr
Application granted granted Critical
Publication of FR2726122B1 publication Critical patent/FR2726122B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
FR9412467A 1994-10-19 1994-10-19 Procede de fabrication d'une source d'electrons a micropointes Expired - Fee Related FR2726122B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR9412467A FR2726122B1 (fr) 1994-10-19 1994-10-19 Procede de fabrication d'une source d'electrons a micropointes
US08/535,465 US5679044A (en) 1994-10-19 1995-09-28 Process for the production of a microtip electron source
EP95402312A EP0708473B1 (fr) 1994-10-19 1995-10-17 Procédé de fabrication d'une source d'électrons à micropointes
DE69507418T DE69507418T2 (de) 1994-10-19 1995-10-17 Verfahren zur Herstellung einer Mikrospitzen-Elektronenquelle
JP29377495A JPH08227653A (ja) 1994-10-19 1995-10-18 マイクロチップ電子源の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9412467A FR2726122B1 (fr) 1994-10-19 1994-10-19 Procede de fabrication d'une source d'electrons a micropointes

Publications (2)

Publication Number Publication Date
FR2726122A1 FR2726122A1 (fr) 1996-04-26
FR2726122B1 true FR2726122B1 (fr) 1996-11-22

Family

ID=9467993

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9412467A Expired - Fee Related FR2726122B1 (fr) 1994-10-19 1994-10-19 Procede de fabrication d'une source d'electrons a micropointes

Country Status (5)

Country Link
US (1) US5679044A (fr)
EP (1) EP0708473B1 (fr)
JP (1) JPH08227653A (fr)
DE (1) DE69507418T2 (fr)
FR (1) FR2726122B1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6027632A (en) * 1996-03-05 2000-02-22 Candescent Technologies Corporation Multi-step removal of excess emitter material in fabricating electron-emitting device
US5766446A (en) * 1996-03-05 1998-06-16 Candescent Technologies Corporation Electrochemical removal of material, particularly excess emitter material in electron-emitting device
US5893967A (en) * 1996-03-05 1999-04-13 Candescent Technologies Corporation Impedance-assisted electrochemical removal of material, particularly excess emitter material in electron-emitting device
US5944975A (en) * 1996-03-26 1999-08-31 Texas Instruments Incorporated Method of forming a lift-off layer having controlled adhesion strength
US6120674A (en) * 1997-06-30 2000-09-19 Candescent Technologies Corporation Electrochemical removal of material in electron-emitting device
US6007695A (en) * 1997-09-30 1999-12-28 Candescent Technologies Corporation Selective removal of material using self-initiated galvanic activity in electrolytic bath
US6062931A (en) * 1999-09-01 2000-05-16 Industrial Technology Research Institute Carbon nanotube emitter with triode structure
JP4803998B2 (ja) * 2004-12-08 2011-10-26 ソニー株式会社 電界放出型電子放出素子の製造方法
TWI437615B (zh) * 2011-06-07 2014-05-11 Au Optronics Corp 場發射顯示元件之製作方法及應用於製作場發射顯示元件之電化學系統

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3340777A1 (de) * 1983-11-11 1985-05-23 M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München Verfahren zur herstellung von duennfilm-feldeffekt-kathoden
FR2593953B1 (fr) * 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
FR2623013A1 (fr) 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
EP0364964B1 (fr) * 1988-10-17 1996-03-27 Matsushita Electric Industrial Co., Ltd. Cathodes à émission de champ
US4964946A (en) * 1990-02-02 1990-10-23 The United States Of America As Represented By The Secretary Of The Navy Process for fabricating self-aligned field emitter arrays
FR2663462B1 (fr) 1990-06-13 1992-09-11 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes.
FR2687839B1 (fr) 1992-02-26 1994-04-08 Commissariat A Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ utilisant cette source.
US5458520A (en) * 1994-12-13 1995-10-17 International Business Machines Corporation Method for producing planar field emission structure

Also Published As

Publication number Publication date
DE69507418D1 (de) 1999-03-04
EP0708473A1 (fr) 1996-04-24
JPH08227653A (ja) 1996-09-03
EP0708473B1 (fr) 1999-01-20
DE69507418T2 (de) 1999-07-15
US5679044A (en) 1997-10-21
FR2726122A1 (fr) 1996-04-26

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Legal Events

Date Code Title Description
ST Notification of lapse