DE69621540D1 - Elektronenmikroskop - Google Patents

Elektronenmikroskop

Info

Publication number
DE69621540D1
DE69621540D1 DE69621540T DE69621540T DE69621540D1 DE 69621540 D1 DE69621540 D1 DE 69621540D1 DE 69621540 T DE69621540 T DE 69621540T DE 69621540 T DE69621540 T DE 69621540T DE 69621540 D1 DE69621540 D1 DE 69621540D1
Authority
DE
Germany
Prior art keywords
electron microscope
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69621540T
Other languages
English (en)
Other versions
DE69621540T2 (de
Inventor
Tomoyuki Miyata
Peter Hohmann
Atsushi Katayama
Daiji Tsuboi
Hiroyuki Kobayashi
Hisashi Sato
Hiroyuki Kuriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP23697095A external-priority patent/JP3450945B2/ja
Priority claimed from JP23695595A external-priority patent/JP3399713B2/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69621540D1 publication Critical patent/DE69621540D1/de
Publication of DE69621540T2 publication Critical patent/DE69621540T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0216—Means for avoiding or correcting vibration effects
DE69621540T 1995-09-14 1996-08-30 Elektronenmikroskop Expired - Lifetime DE69621540T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP23697095A JP3450945B2 (ja) 1995-09-14 1995-09-14 電子顕微鏡
JP23695595A JP3399713B2 (ja) 1995-09-14 1995-09-14 電子顕微鏡

Publications (2)

Publication Number Publication Date
DE69621540D1 true DE69621540D1 (de) 2002-07-11
DE69621540T2 DE69621540T2 (de) 2003-01-09

Family

ID=26532966

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69621540T Expired - Lifetime DE69621540T2 (de) 1995-09-14 1996-08-30 Elektronenmikroskop

Country Status (3)

Country Link
US (2) US5864138A (de)
EP (2) EP0763847B1 (de)
DE (1) DE69621540T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6827902B1 (en) * 1996-10-23 2004-12-07 Hitachi, Ltd. Biochemical analyzer
DE10102542B4 (de) * 2001-01-19 2009-01-15 Vistec Semiconductor Systems Jena Gmbh Anordnung zur visuellen Inspektion von Substraten
US6630668B1 (en) 2001-10-04 2003-10-07 The United States Of America As Represented By The United States Department Of Energy Remote control of a scanning electron microscope aperture and gun alignment
DE102004034848B4 (de) * 2004-07-19 2006-05-18 Leica Microsystems Cms Gmbh Inverses Mikroskop
DE102004048100B4 (de) * 2004-09-30 2017-10-05 Carl Zeiss Microscopy Gmbh Anordnung von Bedienelementen an einem Mikroskop
DE102005020541A1 (de) * 2005-05-03 2006-11-09 Carl Zeiss Jena Gmbh Laser-Scanning-Mikroskop
EP1722421A3 (de) 2005-05-13 2007-04-18 Stmicroelectronics Sa Integrierte massefreie Fotodiode
NL1036186A1 (nl) * 2007-12-03 2009-06-04 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
BRPI1011689B1 (pt) 2009-03-11 2019-12-17 Sakura Finetek Usa Inc método de autofocalização e dispositivo de autofocalização
NL2002678C2 (en) 2009-03-27 2010-09-28 Rotec Engineering B V Robot and method for milking a cow by this robot.
US8329611B2 (en) * 2009-12-16 2012-12-11 Lyondell Chemical Technology, L,P. Titania-containing extrudate
US10139613B2 (en) 2010-08-20 2018-11-27 Sakura Finetek U.S.A., Inc. Digital microscope and method of sensing an image of a tissue sample
DE102013103971A1 (de) 2013-04-19 2014-11-06 Sensovation Ag Verfahren zum Erzeugen eines aus mehreren Teilbildern zusammengesetzten Gesamtbilds eines Objekts
US10007102B2 (en) 2013-12-23 2018-06-26 Sakura Finetek U.S.A., Inc. Microscope with slide clamping assembly
JP6246393B2 (ja) * 2015-04-28 2017-12-13 株式会社日立ハイテクノロジーズ 荷電粒子線装置、設置方法
US10428953B2 (en) 2016-02-25 2019-10-01 United Technologies Corporation C-seal backed brush seal with a compressible core
US11280803B2 (en) 2016-11-22 2022-03-22 Sakura Finetek U.S.A., Inc. Slide management system

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1927410B2 (de) * 1969-05-28 1972-03-30 Siemens AG, 1000 Berlin u 8000 München Korpuskularstrahlgeraet mit mitteln zur daempfung mechanischer schwingungen
JPS4834348B1 (de) * 1969-08-11 1973-10-20
US3814356A (en) * 1970-10-02 1974-06-04 J Coleman Electron microscope
US3873831A (en) * 1971-02-05 1975-03-25 Max Planck Gesellschaft Particle-beam device equipped with a foundation supported to permit swinging movement
DE2540595A1 (de) * 1975-09-09 1977-03-10 Siemens Ag Korpuskularstrahlmikroskop, insbesondere elektronenmikroskop
JPS563962A (en) * 1979-06-22 1981-01-16 Mitsubishi Electric Corp High-pressure metal vapor discharge lamp
DE8105611U1 (de) * 1981-02-27 1981-11-19 Fa. Carl Zeiss, 7920 Heidenheim Auswertevorrichtung fuer elektronenoptische bilder
JPS60108227U (ja) * 1983-12-27 1985-07-23 株式会社　秀光 金融機関用事務机
JP2777505B2 (ja) * 1992-07-29 1998-07-16 株式会社日立製作所 自動分析電子顕微鏡および分析評価方法

Also Published As

Publication number Publication date
EP0763847A2 (de) 1997-03-19
EP0763847B1 (de) 2002-06-05
EP1069593A2 (de) 2001-01-17
US5864138A (en) 1999-01-26
DE69621540T2 (de) 2003-01-09
US6084239A (en) 2000-07-04
EP0763847A3 (de) 1998-03-11
EP1069593A3 (de) 2001-01-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition