FR2723799B1 - Procede de fabrication d'une source d'electrons a micropointes - Google Patents

Procede de fabrication d'une source d'electrons a micropointes

Info

Publication number
FR2723799B1
FR2723799B1 FR9410041A FR9410041A FR2723799B1 FR 2723799 B1 FR2723799 B1 FR 2723799B1 FR 9410041 A FR9410041 A FR 9410041A FR 9410041 A FR9410041 A FR 9410041A FR 2723799 B1 FR2723799 B1 FR 2723799B1
Authority
FR
France
Prior art keywords
manufacturing
electron source
micropoint
micropoint electron
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9410041A
Other languages
English (en)
Other versions
FR2723799A1 (fr
Inventor
Gilles Delapierre
Robert Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9410041A priority Critical patent/FR2723799B1/fr
Priority to EP95401863A priority patent/EP0697710B1/fr
Priority to DE69505914T priority patent/DE69505914T2/de
Priority to US08/512,827 priority patent/US5676818A/en
Priority to JP20825195A priority patent/JPH0869749A/ja
Publication of FR2723799A1 publication Critical patent/FR2723799A1/fr
Application granted granted Critical
Publication of FR2723799B1 publication Critical patent/FR2723799B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
FR9410041A 1994-08-16 1994-08-16 Procede de fabrication d'une source d'electrons a micropointes Expired - Fee Related FR2723799B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR9410041A FR2723799B1 (fr) 1994-08-16 1994-08-16 Procede de fabrication d'une source d'electrons a micropointes
EP95401863A EP0697710B1 (fr) 1994-08-16 1995-08-09 Procédé de fabrication d'une source d'électrons à micropointes
DE69505914T DE69505914T2 (de) 1994-08-16 1995-08-09 Herstellungsverfahren einer Mikrospitzen-Elektronenquelle
US08/512,827 US5676818A (en) 1994-08-16 1995-08-09 Process for the production of a microtip electron source
JP20825195A JPH0869749A (ja) 1994-08-16 1995-08-15 マイクロチップ電子源の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9410041A FR2723799B1 (fr) 1994-08-16 1994-08-16 Procede de fabrication d'une source d'electrons a micropointes

Publications (2)

Publication Number Publication Date
FR2723799A1 FR2723799A1 (fr) 1996-02-23
FR2723799B1 true FR2723799B1 (fr) 1996-09-20

Family

ID=9466324

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9410041A Expired - Fee Related FR2723799B1 (fr) 1994-08-16 1994-08-16 Procede de fabrication d'une source d'electrons a micropointes

Country Status (5)

Country Link
US (1) US5676818A (fr)
EP (1) EP0697710B1 (fr)
JP (1) JPH0869749A (fr)
DE (1) DE69505914T2 (fr)
FR (1) FR2723799B1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5893967A (en) * 1996-03-05 1999-04-13 Candescent Technologies Corporation Impedance-assisted electrochemical removal of material, particularly excess emitter material in electron-emitting device
US5766446A (en) * 1996-03-05 1998-06-16 Candescent Technologies Corporation Electrochemical removal of material, particularly excess emitter material in electron-emitting device
FR2757999B1 (fr) * 1996-12-30 1999-01-29 Commissariat Energie Atomique Procede d'auto-alignement utilisable en micro-electronique et application a la realisation d'une grille de focalisation pour ecran plat a micropointes
US6120674A (en) * 1997-06-30 2000-09-19 Candescent Technologies Corporation Electrochemical removal of material in electron-emitting device
US6007695A (en) * 1997-09-30 1999-12-28 Candescent Technologies Corporation Selective removal of material using self-initiated galvanic activity in electrolytic bath
FR2770683B1 (fr) * 1997-11-03 1999-11-26 Commissariat Energie Atomique Procede de fabrication d'une source d'electrons a micropointes
FR2778757B1 (fr) * 1998-05-12 2001-10-05 Commissariat Energie Atomique Systeme d'inscription d'informations sur un support sensible aux rayons x

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02503728A (ja) * 1988-03-25 1990-11-01 トムソン‐セーエスエフ 電界放出形ソースの製造方法及びエミッタアレイの製造へのその応用
US5026437A (en) * 1990-01-22 1991-06-25 Tencor Instruments Cantilevered microtip manufacturing by ion implantation and etching
FR2663462B1 (fr) * 1990-06-13 1992-09-11 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes.
JP2961334B2 (ja) * 1991-05-28 1999-10-12 セイコーインスツルメンツ株式会社 尖鋭な金属針を持つ原子間力顕微鏡のカンチレバー製造法
US5151061A (en) * 1992-02-21 1992-09-29 Micron Technology, Inc. Method to form self-aligned tips for flat panel displays

Also Published As

Publication number Publication date
EP0697710A1 (fr) 1996-02-21
US5676818A (en) 1997-10-14
FR2723799A1 (fr) 1996-02-23
JPH0869749A (ja) 1996-03-12
DE69505914D1 (de) 1998-12-17
DE69505914T2 (de) 1999-06-10
EP0697710B1 (fr) 1998-11-11

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Legal Events

Date Code Title Description
ST Notification of lapse