FR2707795B1 - Perfectionnement à un procédé de fabrication d'une source d'électrons à micropointes. - Google Patents

Perfectionnement à un procédé de fabrication d'une source d'électrons à micropointes.

Info

Publication number
FR2707795B1
FR2707795B1 FR9308556A FR9308556A FR2707795B1 FR 2707795 B1 FR2707795 B1 FR 2707795B1 FR 9308556 A FR9308556 A FR 9308556A FR 9308556 A FR9308556 A FR 9308556A FR 2707795 B1 FR2707795 B1 FR 2707795B1
Authority
FR
France
Prior art keywords
improvement
manufacturing process
electron source
microtip electron
microtip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9308556A
Other languages
English (en)
Other versions
FR2707795A1 (fr
Inventor
Vaudaine Pierre
Montmayeul Brigitte
Borel Michel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9308556A priority Critical patent/FR2707795B1/fr
Priority to US08/266,465 priority patent/US5482486A/en
Priority to JP17769494A priority patent/JPH0729485A/ja
Priority to DE69400562T priority patent/DE69400562T2/de
Priority to EP94401582A priority patent/EP0634769B1/fr
Publication of FR2707795A1 publication Critical patent/FR2707795A1/fr
Application granted granted Critical
Publication of FR2707795B1 publication Critical patent/FR2707795B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/319—Circuit elements associated with the emitters by direct integration
FR9308556A 1993-07-12 1993-07-12 Perfectionnement à un procédé de fabrication d'une source d'électrons à micropointes. Expired - Lifetime FR2707795B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR9308556A FR2707795B1 (fr) 1993-07-12 1993-07-12 Perfectionnement à un procédé de fabrication d'une source d'électrons à micropointes.
US08/266,465 US5482486A (en) 1993-07-12 1994-06-27 Process for the production of a microtip electron source
JP17769494A JPH0729485A (ja) 1993-07-12 1994-07-07 マイクロチップ型電子ソースの製造法
DE69400562T DE69400562T2 (de) 1993-07-12 1994-07-08 Herstellungsverfahren für Mikrospitzenkaltkathoden
EP94401582A EP0634769B1 (fr) 1993-07-12 1994-07-08 Procédé de fabrication d'une source d'électrons à micropointe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9308556A FR2707795B1 (fr) 1993-07-12 1993-07-12 Perfectionnement à un procédé de fabrication d'une source d'électrons à micropointes.

Publications (2)

Publication Number Publication Date
FR2707795A1 FR2707795A1 (fr) 1995-01-20
FR2707795B1 true FR2707795B1 (fr) 1995-08-11

Family

ID=9449175

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9308556A Expired - Lifetime FR2707795B1 (fr) 1993-07-12 1993-07-12 Perfectionnement à un procédé de fabrication d'une source d'électrons à micropointes.

Country Status (5)

Country Link
US (1) US5482486A (fr)
EP (1) EP0634769B1 (fr)
JP (1) JPH0729485A (fr)
DE (1) DE69400562T2 (fr)
FR (1) FR2707795B1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5731228A (en) 1994-03-11 1998-03-24 Fujitsu Limited Method for making micro electron beam source
US5542866A (en) * 1994-12-27 1996-08-06 Industrial Technology Research Institute Field emission display provided with repair capability of defects
US5589728A (en) * 1995-05-30 1996-12-31 Texas Instruments Incorporated Field emission device with lattice vacancy post-supported gate
US5686782A (en) * 1995-05-30 1997-11-11 Texas Instruments Incorporated Field emission device with suspended gate
US5621272A (en) * 1995-05-30 1997-04-15 Texas Instruments Incorporated Field emission device with over-etched gate dielectric
FR2736465B1 (fr) * 1995-07-03 1997-08-08 Commissariat Energie Atomique Dispositif d'amorcage et/ou de maintien d'une decharge et jauge a vide a cathode froide comportant un tel dispositif
FR2737927B1 (fr) * 1995-08-17 1997-09-12 Commissariat Energie Atomique Procede et dispositif de formation de trous dans une couche de materiau photosensible, en particulier pour la fabrication de sources d'electrons
US5746634A (en) * 1996-04-03 1998-05-05 The Regents Of The University Of California Process system and method for fabricating submicron field emission cathodes
US6611093B1 (en) * 2000-09-19 2003-08-26 Display Research Laboratories, Inc. Field emission display with transparent cathode
US6620012B1 (en) * 2000-10-27 2003-09-16 Science Applications International Corporation Method for testing a light-emitting panel and the components therein
US6545422B1 (en) * 2000-10-27 2003-04-08 Science Applications International Corporation Socket for use with a micro-component in a light-emitting panel
US6822626B2 (en) * 2000-10-27 2004-11-23 Science Applications International Corporation Design, fabrication, testing, and conditioning of micro-components for use in a light-emitting panel
US7288014B1 (en) 2000-10-27 2007-10-30 Science Applications International Corporation Design, fabrication, testing, and conditioning of micro-components for use in a light-emitting panel
US6612889B1 (en) 2000-10-27 2003-09-02 Science Applications International Corporation Method for making a light-emitting panel
US9159527B2 (en) * 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source
FR2873852B1 (fr) * 2004-07-28 2011-06-24 Commissariat Energie Atomique Structure de cathode a haute resolution
JP6953917B2 (ja) 2017-09-01 2021-10-27 王子ホールディングス株式会社 反射防止構造体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3817592A (en) * 1972-09-29 1974-06-18 Linfield Res Inst Method for reproducibly fabricating and using stable thermal-field emission cathodes
US4324999A (en) * 1980-04-30 1982-04-13 Burroughs Corporation Electron-beam cathode having a uniform emission pattern
FR2593953B1 (fr) * 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
FR2623013A1 (fr) * 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
FR2663462B1 (fr) * 1990-06-13 1992-09-11 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes.
FR2687839B1 (fr) * 1992-02-26 1994-04-08 Commissariat A Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ utilisant cette source.

Also Published As

Publication number Publication date
EP0634769B1 (fr) 1996-09-18
DE69400562D1 (de) 1996-10-24
FR2707795A1 (fr) 1995-01-20
JPH0729485A (ja) 1995-01-31
EP0634769A1 (fr) 1995-01-18
US5482486A (en) 1996-01-09
DE69400562T2 (de) 1997-03-27

Similar Documents

Publication Publication Date Title
FR2707795B1 (fr) Perfectionnement à un procédé de fabrication d'une source d'électrons à micropointes.
FR2663462B1 (fr) Source d'electrons a cathodes emissives a micropointes.
FR2743191B1 (fr) Source d'ions a derive fermee d'electrons
DE69320617T2 (de) Elektronenemitter
FR2641412B1 (fr) Source d'electrons du type a emission de champ
FR2691769B1 (fr) Joint homocinétique à billes et son procédé de fabrication.
FR2713394B1 (fr) Source d'électron de type à émission de champ.
BR9405198A (pt) Processo para a manufatura de um carpete resistente a manchas e carpete resistente a manchas obtido
FR2693721B1 (fr) Charge d'amorçage à percussion annulaire et son procédé de fabrication.
FR2684512B1 (fr) Accelerateur d'electrons a cavite resonante.
FR2686597B1 (fr) Procede de fabrication d'un tube en verre, notamment en verre fluore.
FR2700770B1 (fr) Procédé de fabrication du 1,1,1,2-tétrafluoro-2-chloroéthane et du pentafluoroéthane.
FR2726122B1 (fr) Procede de fabrication d'une source d'electrons a micropointes
FR2650448B1 (fr) Laser a electrons libres a accelerateur d'electrons perfectionne
FR2716571B1 (fr) Procédé de fabrication de cathode d'écran fluorescent à micropointes et produit obtenu par ce procédé .
FR2705043B1 (fr) Procédé de fabrication d'un châssis.
FR2717304B1 (fr) Source d'électrons à cathodes émissives à micropointes.
FR2723799B1 (fr) Procede de fabrication d'une source d'electrons a micropointes
FR2706078B1 (fr) Tube à faisceau d'électrons.
DE69401688T2 (de) Herstellungsverfahren einer Kathodenstrahlröhre
FR2724869B1 (fr) Procede de fabrication d'un panneau de matiere revetu d'une zone d'aspect, notamment textile
FR2687841B1 (fr) Ecran cathodoluminescent comprenant une source matricielle d'electrons.
DE69622445D1 (de) Herstellungsverfahren einer Feldemissionskaltkathode
DE69601986T2 (de) Herstellungsverfahren einer gespannten fokussierenden Schattenmaske
DE69208583T2 (de) Elektronenstrahl-Lithographieverfahren

Legal Events

Date Code Title Description
CA Change of address