DE69505914D1 - Herstellungsverfahren einer Mikrospitzen-Elektronenquelle - Google Patents

Herstellungsverfahren einer Mikrospitzen-Elektronenquelle

Info

Publication number
DE69505914D1
DE69505914D1 DE69505914T DE69505914T DE69505914D1 DE 69505914 D1 DE69505914 D1 DE 69505914D1 DE 69505914 T DE69505914 T DE 69505914T DE 69505914 T DE69505914 T DE 69505914T DE 69505914 D1 DE69505914 D1 DE 69505914D1
Authority
DE
Germany
Prior art keywords
manufacturing process
electron source
microtip electron
microtip
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69505914T
Other languages
English (en)
Other versions
DE69505914T2 (de
Inventor
Gilles Delapierre
Robert Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69505914D1 publication Critical patent/DE69505914D1/de
Application granted granted Critical
Publication of DE69505914T2 publication Critical patent/DE69505914T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
DE69505914T 1994-08-16 1995-08-09 Herstellungsverfahren einer Mikrospitzen-Elektronenquelle Expired - Fee Related DE69505914T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9410041A FR2723799B1 (fr) 1994-08-16 1994-08-16 Procede de fabrication d'une source d'electrons a micropointes

Publications (2)

Publication Number Publication Date
DE69505914D1 true DE69505914D1 (de) 1998-12-17
DE69505914T2 DE69505914T2 (de) 1999-06-10

Family

ID=9466324

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69505914T Expired - Fee Related DE69505914T2 (de) 1994-08-16 1995-08-09 Herstellungsverfahren einer Mikrospitzen-Elektronenquelle

Country Status (5)

Country Link
US (1) US5676818A (de)
EP (1) EP0697710B1 (de)
JP (1) JPH0869749A (de)
DE (1) DE69505914T2 (de)
FR (1) FR2723799B1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5766446A (en) * 1996-03-05 1998-06-16 Candescent Technologies Corporation Electrochemical removal of material, particularly excess emitter material in electron-emitting device
US5893967A (en) * 1996-03-05 1999-04-13 Candescent Technologies Corporation Impedance-assisted electrochemical removal of material, particularly excess emitter material in electron-emitting device
FR2757999B1 (fr) * 1996-12-30 1999-01-29 Commissariat Energie Atomique Procede d'auto-alignement utilisable en micro-electronique et application a la realisation d'une grille de focalisation pour ecran plat a micropointes
US6120674A (en) * 1997-06-30 2000-09-19 Candescent Technologies Corporation Electrochemical removal of material in electron-emitting device
US6007695A (en) * 1997-09-30 1999-12-28 Candescent Technologies Corporation Selective removal of material using self-initiated galvanic activity in electrolytic bath
FR2770683B1 (fr) * 1997-11-03 1999-11-26 Commissariat Energie Atomique Procede de fabrication d'une source d'electrons a micropointes
FR2778757B1 (fr) * 1998-05-12 2001-10-05 Commissariat Energie Atomique Systeme d'inscription d'informations sur un support sensible aux rayons x

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989009479A1 (fr) * 1988-03-25 1989-10-05 Thomson-Csf Procede de fabrication de sources d'electrons du type a emission de champ, et son application a la realisation de reseaux d'emetteurs
US5026437A (en) * 1990-01-22 1991-06-25 Tencor Instruments Cantilevered microtip manufacturing by ion implantation and etching
FR2663462B1 (fr) * 1990-06-13 1992-09-11 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes.
JP2961334B2 (ja) * 1991-05-28 1999-10-12 セイコーインスツルメンツ株式会社 尖鋭な金属針を持つ原子間力顕微鏡のカンチレバー製造法
US5151061A (en) * 1992-02-21 1992-09-29 Micron Technology, Inc. Method to form self-aligned tips for flat panel displays

Also Published As

Publication number Publication date
FR2723799B1 (fr) 1996-09-20
EP0697710B1 (de) 1998-11-11
JPH0869749A (ja) 1996-03-12
US5676818A (en) 1997-10-14
EP0697710A1 (de) 1996-02-21
FR2723799A1 (fr) 1996-02-23
DE69505914T2 (de) 1999-06-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee