DE69608365D1 - Herstellungsverfahren einer Feldemissionsmatrix - Google Patents

Herstellungsverfahren einer Feldemissionsmatrix

Info

Publication number
DE69608365D1
DE69608365D1 DE69608365T DE69608365T DE69608365D1 DE 69608365 D1 DE69608365 D1 DE 69608365D1 DE 69608365 T DE69608365 T DE 69608365T DE 69608365 T DE69608365 T DE 69608365T DE 69608365 D1 DE69608365 D1 DE 69608365D1
Authority
DE
Germany
Prior art keywords
manufacturing process
field emission
emission matrix
matrix
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69608365T
Other languages
English (en)
Other versions
DE69608365T2 (de
Inventor
Toshihisa Suzuki
Koji Ogata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Corp
Original Assignee
Yamaha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaha Corp filed Critical Yamaha Corp
Application granted granted Critical
Publication of DE69608365D1 publication Critical patent/DE69608365D1/de
Publication of DE69608365T2 publication Critical patent/DE69608365T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
DE69608365T 1995-07-27 1996-07-26 Herstellungsverfahren einer Feldemissionsmatrix Expired - Fee Related DE69608365T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21098695A JP2874605B2 (ja) 1995-07-27 1995-07-27 電界放出型素子の製造方法

Publications (2)

Publication Number Publication Date
DE69608365D1 true DE69608365D1 (de) 2000-06-21
DE69608365T2 DE69608365T2 (de) 2001-01-04

Family

ID=16598429

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69608365T Expired - Fee Related DE69608365T2 (de) 1995-07-27 1996-07-26 Herstellungsverfahren einer Feldemissionsmatrix

Country Status (4)

Country Link
US (1) US5836797A (de)
EP (1) EP0756303B1 (de)
JP (1) JP2874605B2 (de)
DE (1) DE69608365T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10308162A (ja) * 1997-05-07 1998-11-17 Futaba Corp 電界放出素子
US6449026B1 (en) * 1999-06-25 2002-09-10 Hyundai Display Technology Inc. Fringe field switching liquid crystal display and method for manufacturing the same
US6426233B1 (en) 1999-08-03 2002-07-30 Micron Technology, Inc. Uniform emitter array for display devices, etch mask for the same, and methods for making the same
KR100370030B1 (ko) * 2000-10-06 2003-01-30 엘지전자 주식회사 평판표시소자 및 그 제조 방법
DE10133686C2 (de) * 2001-07-11 2003-07-17 Osram Opto Semiconductors Gmbh Organisches, elektrolumineszierendes Display und dessen Herstellung
DE10133685B4 (de) * 2001-07-11 2006-05-18 Osram Opto Semiconductors Gmbh Organisches, elektrolumineszierendes Display und dessen Herstellung
JP4300396B2 (ja) * 2002-09-20 2009-07-22 富士ゼロックス株式会社 表示素子の製造方法及び表示素子
JP4058764B2 (ja) * 2003-06-26 2008-03-12 住友電気工業株式会社 通信モジュール
KR20060019845A (ko) * 2004-08-30 2006-03-06 삼성에스디아이 주식회사 전자 방출 소자

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203731A (en) * 1990-07-18 1993-04-20 International Business Machines Corporation Process and structure of an integrated vacuum microelectronic device
US5141459A (en) * 1990-07-18 1992-08-25 International Business Machines Corporation Structures and processes for fabricating field emission cathodes
WO1992002030A1 (en) * 1990-07-18 1992-02-06 International Business Machines Corporation Process and structure of an integrated vacuum microelectronic device
US5334908A (en) * 1990-07-18 1994-08-02 International Business Machines Corporation Structures and processes for fabricating field emission cathode tips using secondary cusp
JP3253683B2 (ja) * 1992-07-14 2002-02-04 株式会社東芝 電界放出型冷陰極板の製造方法
JPH06310043A (ja) * 1992-08-25 1994-11-04 Sharp Corp 電子放出デバイス
JPH0982217A (ja) * 1995-09-08 1997-03-28 Yamaha Corp 電界放出型素子の製造方法

Also Published As

Publication number Publication date
DE69608365T2 (de) 2001-01-04
EP0756303A2 (de) 1997-01-29
EP0756303A3 (de) 1997-04-09
EP0756303B1 (de) 2000-05-17
JP2874605B2 (ja) 1999-03-24
JPH0945233A (ja) 1997-02-14
US5836797A (en) 1998-11-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee