DE69507418T2 - Verfahren zur Herstellung einer Mikrospitzen-Elektronenquelle - Google Patents

Verfahren zur Herstellung einer Mikrospitzen-Elektronenquelle

Info

Publication number
DE69507418T2
DE69507418T2 DE69507418T DE69507418T DE69507418T2 DE 69507418 T2 DE69507418 T2 DE 69507418T2 DE 69507418 T DE69507418 T DE 69507418T DE 69507418 T DE69507418 T DE 69507418T DE 69507418 T2 DE69507418 T2 DE 69507418T2
Authority
DE
Germany
Prior art keywords
producing
electron source
microtip electron
microtip
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69507418T
Other languages
English (en)
Other versions
DE69507418D1 (de
Inventor
Robert Meyer
Michel Borel
Marie-Dominique Bruni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69507418D1 publication Critical patent/DE69507418D1/de
Application granted granted Critical
Publication of DE69507418T2 publication Critical patent/DE69507418T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
DE69507418T 1994-10-19 1995-10-17 Verfahren zur Herstellung einer Mikrospitzen-Elektronenquelle Expired - Fee Related DE69507418T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9412467A FR2726122B1 (fr) 1994-10-19 1994-10-19 Procede de fabrication d'une source d'electrons a micropointes

Publications (2)

Publication Number Publication Date
DE69507418D1 DE69507418D1 (de) 1999-03-04
DE69507418T2 true DE69507418T2 (de) 1999-07-15

Family

ID=9467993

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69507418T Expired - Fee Related DE69507418T2 (de) 1994-10-19 1995-10-17 Verfahren zur Herstellung einer Mikrospitzen-Elektronenquelle

Country Status (5)

Country Link
US (1) US5679044A (de)
EP (1) EP0708473B1 (de)
JP (1) JPH08227653A (de)
DE (1) DE69507418T2 (de)
FR (1) FR2726122B1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6027632A (en) * 1996-03-05 2000-02-22 Candescent Technologies Corporation Multi-step removal of excess emitter material in fabricating electron-emitting device
US5766446A (en) * 1996-03-05 1998-06-16 Candescent Technologies Corporation Electrochemical removal of material, particularly excess emitter material in electron-emitting device
US5893967A (en) * 1996-03-05 1999-04-13 Candescent Technologies Corporation Impedance-assisted electrochemical removal of material, particularly excess emitter material in electron-emitting device
US5944975A (en) * 1996-03-26 1999-08-31 Texas Instruments Incorporated Method of forming a lift-off layer having controlled adhesion strength
US6120674A (en) * 1997-06-30 2000-09-19 Candescent Technologies Corporation Electrochemical removal of material in electron-emitting device
US6007695A (en) * 1997-09-30 1999-12-28 Candescent Technologies Corporation Selective removal of material using self-initiated galvanic activity in electrolytic bath
US6062931A (en) * 1999-09-01 2000-05-16 Industrial Technology Research Institute Carbon nanotube emitter with triode structure
JP4803998B2 (ja) * 2004-12-08 2011-10-26 ソニー株式会社 電界放出型電子放出素子の製造方法
TWI437615B (zh) * 2011-06-07 2014-05-11 Au Optronics Corp 場發射顯示元件之製作方法及應用於製作場發射顯示元件之電化學系統

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3340777A1 (de) * 1983-11-11 1985-05-23 M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München Verfahren zur herstellung von duennfilm-feldeffekt-kathoden
FR2593953B1 (fr) 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
FR2623013A1 (fr) 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
US5053673A (en) * 1988-10-17 1991-10-01 Matsushita Electric Industrial Co., Ltd. Field emission cathodes and method of manufacture thereof
US4964946A (en) * 1990-02-02 1990-10-23 The United States Of America As Represented By The Secretary Of The Navy Process for fabricating self-aligned field emitter arrays
FR2663462B1 (fr) 1990-06-13 1992-09-11 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes.
FR2687839B1 (fr) 1992-02-26 1994-04-08 Commissariat A Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ utilisant cette source.
US5458520A (en) * 1994-12-13 1995-10-17 International Business Machines Corporation Method for producing planar field emission structure

Also Published As

Publication number Publication date
US5679044A (en) 1997-10-21
DE69507418D1 (de) 1999-03-04
EP0708473A1 (de) 1996-04-24
JPH08227653A (ja) 1996-09-03
FR2726122A1 (fr) 1996-04-26
FR2726122B1 (fr) 1996-11-22
EP0708473B1 (de) 1999-01-20

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee