EP0712147B1 - Procédé de fabrication d'une source d'électrons à effet de champ et source obtenue par ce procédé, application aux dispositifs de visualisation par cathodoluminescence - Google Patents
Procédé de fabrication d'une source d'électrons à effet de champ et source obtenue par ce procédé, application aux dispositifs de visualisation par cathodoluminescence Download PDFInfo
- Publication number
- EP0712147B1 EP0712147B1 EP95402451A EP95402451A EP0712147B1 EP 0712147 B1 EP0712147 B1 EP 0712147B1 EP 95402451 A EP95402451 A EP 95402451A EP 95402451 A EP95402451 A EP 95402451A EP 0712147 B1 EP0712147 B1 EP 0712147B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- diamond
- carbon
- source
- electrically insulating
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
- H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30403—Field emission cathodes characterised by the emitter shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30403—Field emission cathodes characterised by the emitter shape
- H01J2201/30426—Coatings on the emitter surface, e.g. with low work function materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30457—Diamond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
Definitions
- the present invention relates to a method of fabrication of a field effect electron source.
- the present invention applies to particular to the field of display devices dishes also called “flat screens”, as well as manufacture of pressure measurement gauges.
- microtips These are the sources of microtip electrons ("microtips").
- a source of microtip electrons includes at least one cathode conductor on a substrate electrically insulating, an electrically insulating layer which covers this cathode conductor and at least one grid formed on this electrically insulating layer.
- Holes are formed through the grid and the insulating layer above the cathode conductor.
- micro-tips are formed in these holes and carried by the cathode conductor.
- each micro-tip is substantially in the plane of the grid, this grid used to extract electrons from micro-tips.
- the holes have very small dimensions (they have a diameter less than 2 ⁇ m).
- These other known display devices include a cathodoluminescent anode placed opposite of an electron source comprising carbon layers diamond or diamond-like intended to emit electrons.
- Diamond or diamond carbon emits electrons much more easily than materials conventionally used for the manufacture of micro-tips.
- the minimum electric field from which one can obtain an electron emission can be twenty times lower that the minimum electric field corresponding to metals such as molybdenum.
- the deposits obtained are continuous layers and not micro-tips.
- the object of the present invention is to remedy to the previous drawbacks.
- the process which is the subject of the invention can be implemented used with large surface substrates and allows thus obtaining electron sources (and therefore screens large area (several dozen inches diagonally).
- the temperature at which deposits are formed main is close to room temperature, around 20 ° C for electrophoresis and around 40 ° C to 60 ° C for electrochemical deposition.
- the main deposits are covered with a secondary deposit of a metal, for example by electrochemical deposition, in order to consolidate these micro-clusters.
- the carbon particles diamond or diamond type have a size of around 1 ⁇ m or less than 1 ⁇ m (but of course less the size of the micro-tips).
- These particles can be obtained at from natural or artificial diamond or by a method chosen from laser synthesis, deposition chemical vapor phase and physical phase deposition steam.
- the holes formed through the grid layer and the electrically insulating layer can have a circular or rectangular shape.
- the size of these holes can be chosen in an interval of approximately 1 ⁇ m to several tens of micrometers.
- the size of the holes that we form to put implementing the process which is the subject of the invention can be significantly higher than that required for implementing a process for manufacturing a source classic with micro-tips (not covered).
- the source object of the present invention emits more of electrons than a microtip source, due to the use, in the present invention, of deposits of diamond or diamond-like carbon particles that have higher emissivity than emitting materials of conventional electrons such as molybdenum.
- this device has a more greater brightness than a conventional micro-tip device (not covered), for the same voltage of ordered.
- this device using a source according to the invention requires a voltage of lower order than that required for such classic micro-tip device.
- Deposits main can be made of carbon particles diamond or diamond type or can be made of such particles dispersed in a metal.
- Each of these main deposits can be covered with a deposit secondary of a metal intended to consolidate these deposits main.
- Holes 10 are formed through these grids 8 and the insulating layer 6 above the cathode conductors 4.
- Micro-tips 12 are formed in the holes 10 and carried by the cathode conductors 4.
- Each of these micro-tips 12 is covered with a deposit 13 of carbon particles diamond or diamond type.
- cathode conductors 4 are parallel and the grids 8 are parallel to each other and perpendicular to the conductors cathodic 4.
- the holes 10 and therefore the micro-tips 12 are found in the areas where these grids cross the cathode conductors.
- micro-tips of such an area covered with deposits 13, which emit electrons when an appropriate electrical voltage is applied, by means not shown, between the conductor cathode 4 and grid 8 which correspond to this zoned.
- a display device by cathodoluminescence is schematically represented in section in Figure 2.
- This device includes the source of electrons 14 in Figure 1.
- the device of Figure 2 also includes a cathodoluminescent anode 16 placed opposite the source 14 and separated from it by a space 18 in which we made the vacuum.
- the cathodoluminescent anode 16 comprises a electrically insulating and transparent substrate 20 which is provided with an electrically conductive layer and transparent 22 forming an anode.
- this layer 24 emits light that a user of the viewing device observes through the transparent substrate 20.
- FIG. 1 A process in accordance with the invention, allowing the manufacture of the source of electrons of figure 1, referring to figure 3 which schematically illustrates this process.
- the diameter D1 of holes (substantially circular) formed in the grid 8 and in the electrically insulating layer 6 can be advantageously greater than the diameter of the holes than contain micro-point electron sources described in documents (1) to (4).
- this diameter D1 can take values on the order of 1 ⁇ m up to 50 ⁇ m.
- Figure 4 schematically illustrates the makes the holes 10, instead of having a shape circular, may have a rectangular shape.
- the width D2 of these holes 10 in the figure 4, rectangular, can be taken equal to diameter D1 mentioned above and can therefore be also significantly larger than the diameter of the holes micro-tip sources.
- This powder can be obtained by deposit chemical vapor phase, from a mixture hydrogen and light hydrocarbons.
- This chemical vapor deposition can be assisted by an electron beam or be assisted by a plasma generated by microwaves.
- This powder can also be formed by a ultrasonic spraying process known as of "Pyrosol”, that is to say, more precisely by pyrolysis of an aerosol of a carbonaceous compound.
- the powder can also be synthesized by physical vapor deposition ("physical vapor” deposition "), from carbon targets (graphite for example) and a plasma gas such as argon alone or mixed with hydrogen, hydrocarbons, without dopant or with a dopant like for example the diborane.
- physical vapor deposition from carbon targets (graphite for example) and a plasma gas such as argon alone or mixed with hydrogen, hydrocarbons, without dopant or with a dopant like for example the diborane.
- This powder can also be obtained by laser ablation.
- diamonds can be prepared carbon compression, high pressure and high temperature, then make the powder from of these artificial diamonds.
- these carbon powders diamond and these diamond-like carbon powders are chosen so as to have a micronic particle size or submicronic or nanometric but, of course, smaller than the size of the micro-tips.
- micro-tips have a size of the order of 1 ⁇ m
- a particle size is used submicron.
- these carbon powders diamond or diamond type can be doped or not doped.
- the deposition of the powder (particles of diamond or diamond type) leading to the formation of deposits 13, can be achieved by electrophoresis (cataphoresis or anaphoresis), possibly supplemented by a metallic deposit electrochemical consolidation, or by co-deposit electrochemical of metal and carbon diamond or diamond type.
- micro-tips 12 In the case of anaphoresis filing, the structure provided with micro-tips 12 is placed in an appropriate solution 26 and each micro-tip 12 is brought to positive potential during this phase deposit.
- drivers cathodics 4 are brought to this positive potential thanks to a suitable voltage source 28 whose terminal positive is connected to these cathode conductors 4 while the negative terminal of this source is connected to a platinum or steel counter electrode 32 stainless steel located in the bath at a distance from substrate about 1 to 5 cm.
- the fine powder of carbon particles diamond or diamond type is suspended in solution 26 (before placing the structure in this solution).
- the voltage supplied by the source 28 can go up to around 200 V.
- micro-tips In the case of cataphoresis, a potential negative is applied to micro-tips.
- this is the source 28 negative terminal which is connected to cathode conductors 4 while the positive terminal of the source 28 is connected to a counter-electrode 32 in platinum or stainless steel located in the bath a distance from the substrate of about 1 to 5 cm.
- a metal for example chosen from Ni, Co, Ag, Au, Rh or Pt or, more generally, among the metals of transition, alloys thereof and metals precious.
- This electrode 33 is for example in nickel and solution 30 contains for example 300 g / l nickel sulfate, 30 g / l nickel chloride, 30 g / l of boric acid and 0.6 g / l of lauryl sulfate sodium.
- an electric current of 4 A / dm 2 is used .
- deposits 13 by electrochemical co-deposit of metal and carbon diamond or diamond type.
- An appropriate current source is used, for example of the order of 4 A / dm 2 , and the negative terminal of this source is applied to the cathode conductors and the positive terminal of this source to a nickel electrode placed in the bath.
- Nickel is deposited on micro-tips 12 by bringing with it the diamond particles, hence the formation of deposits 13 of nickel and diamond on micro-tips 12.
- tops of the micro-tips 12 covered with deposits 13 are found substantially in the plane of the grids and are not in contact with these grids.
Description
- on fabrique une structure comprenant un substrat électriquement isolant, au moins un conducteur cathodique sur ce substrat, une couche électriquement isolante qui recouvre chaque conducteur cathodique et une couche de grille électriquement conductrice qui recouvre cette couche électriquement isolante,
- on forme des trous à travers la couche de grille et la couche électriquement isolante, au niveau de chaque conducteur cathodique, et
- on forme, dans chaque trou, une micro-pointe faite d'un matériau métallique émetteur d'électrons,
- sur un substrat électriquement isolant, au moins une première électrode jouant le rôle de conducteur cathodique,
- une couche électriquement isolante qui recouvre ce conducteur cathodique,
- au moins une deuxième électrode jouant le rôle de grille, formée sur la couche électriquement isolante, des trous étant formés à travers cette grille et la couche électriquement isolante au-dessus du conducteur cathodique, et
- des micro-pointes qui sont faites d'un matériau métallique émetteur d'électrons et qui sont formées dans ces trous et portées par le conducteur cathodique,
- une source d'électrons à effet de champ, et
- une anode cathodoluminescente comprenant une couche d'un matériau cathodoluminescent,
- la figure 1 est une vue en coupe schématique d'une source d'électrons conforme à la présente invention,
- la figure 2 est une vue en coupe schématique d'un dispositif de visualisation utilisant la source de la figure 1,
- la figure 3 illustre schématiquement un procédé de fabrication d'une source d'électrons conforme à l'invention,
- la figure 4 illustre schématiquement la possibilité d'utiliser des trous rectangulaires pour fabriquer une source conforme à l'invention, et
- la figure 5 illustre schématiquement un autre procédé de fabrication d'une source d'électrons conforme à l'invention.
- sur un substrat électriquement isolant 2, des électrodes 4 jouant le rôle de conducteurs cathodiques (un seul conducteur cathodique est visible sur la figure 1),
- une couche électriquement isolante 6 qui recouvre chaque conducteur cathodique, et
- des électrodes 8 jouant le rôle de grilles et formées sur la couche électriquement isolante 6 (une seule grille est visible sur la figure 1).
- le substrat 2,
- les conducteurs cathodiques 4,
- la couche électriquement isolante 6,
- une couche de grille 25, qui recouvre cette couche électriquement isolante 6,
- les trous 10 formés dans cette couche de grille 25 et la couche électriquement isolante 6,
- les micro-pointes 12 formées dans les trous 10, sur les conducteurs cathodiques.
- de l'acétone,
- un acide qui peut être de l'acide sulfurique à 8 µl par litre de solution, et
- de la nitrocellulose qui joue le rôle de liant et de dispersant.
- de l'alcool isopropylique,
- un liant minéral comme exemple Mg(NO3)2, 6H2O (de concentration 10-5 mole par litre), et
- un dispersant tel que le glycérol (dont la concentration est de l'ordre de 1% en volume).
Claims (11)
- Procédé de fabrication d'une source d'électrons à effet de champ, procédé selon lequel :on fabrique une structure comprenant un substrat électriquement isolant (2), au moins un conducteur cathodique (4) sur ce substrat, une couche électriquement isolante (6) qui recouvre chaque conducteur cathodique et une couche de grille électriquement conductrice (25) qui recouvre cette couche électriquement isolante,on forme des trous (10) à travers la couche de grille et la couche électriquement isolante, au niveau de chaque conducteur cathodique, eton forme, dans chaque trou, une micro-pointe (12) faite d'un matériau métallique émetteur d'électrons,
- Procédé selon la revendication 1, caractérisé en ce que les dépôts principaux (13) sont ensuite recouverts d'un dépôt secondaire (36) d'un métal.
- Procédé selon la revendication 2, caractérisé en ce que ce dépôt secondaire est formé par dépôt électro-chimique.
- Procédé selon l'une quelconque des revendications 1 à 3, caractérisé en ce que les particules de carbone diamant ou de type diamant ont une taille de l'ordre de 1 µm ou de moins de 1 µm.
- Procédé selon l'une quelconque des revendications 1 à 4, caractérisé en ce que les particules sont obtenues à partir de diamant naturel ou artificiel ou par une méthode choisie parmi la synthèse par laser, le dépôt chimique en phase vapeur et le dépôt physique en phase vapeur.
- Procédé selon l'une quelconque des revendications 1 à 5, caractérisé en ce que les trous (10) ont une forme circulaire ou rectangulaire.
- Procédé selon l'une quelconque des revendications 1 à 6, caractérisé en ce que la taille des trous (10) est choisie dans un intervalle allant d'environ 1 µm à plusieurs dizaines de micromètres.
- Source d'électrons à effet de champ, cette source comprenant :sur un substrat électriquement isolant (2), au moins une première électrode (4) jouant le rôle de conducteur cathodique,une couche électriquement isolante (6) qui recouvre ce conducteur cathodique,au moins une deuxième électrode (8) jouant le rôle de grille, formée sur la couche électriquement isolante, des trous (10) étant formés à travers cette grille et la couche électriquement isolante au-dessus du conducteur cathodique, etdes micro-pointes (12) qui sont faites d'un matériau métallique émetteur d'électrons et qui sont formées dans ces trous et portées par le conducteur cathodique,
- Source selon la revendication 8, caractérisée en ce que les dépôts principaux (13) sont faits de particules de carbone diamant ou de type diamant ou sont faits de telles particules dispersées dans un métal.
- Source selon la revendication 9, caractérisée en ce que chacun de ces dépôts principaux (13) est recouvert d'un dépôt secondaire (36) d'un métal.
- Dispositif de visualisation par cathodoluminescence comprenant :une source d'électrons (14) à effet de champ, etune anode cathodoluminescente (16) comprenant une couche d'un matériau cathodoluminescent (24),
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9413372A FR2726689B1 (fr) | 1994-11-08 | 1994-11-08 | Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence |
FR9413372 | 1994-11-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0712147A1 EP0712147A1 (fr) | 1996-05-15 |
EP0712147B1 true EP0712147B1 (fr) | 1999-06-30 |
Family
ID=9468612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP95402451A Expired - Lifetime EP0712147B1 (fr) | 1994-11-08 | 1995-11-03 | Procédé de fabrication d'une source d'électrons à effet de champ et source obtenue par ce procédé, application aux dispositifs de visualisation par cathodoluminescence |
Country Status (5)
Country | Link |
---|---|
US (1) | US5836796A (fr) |
EP (1) | EP0712147B1 (fr) |
JP (1) | JPH08227655A (fr) |
DE (1) | DE69510522T2 (fr) |
FR (1) | FR2726689B1 (fr) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5853492A (en) * | 1996-02-28 | 1998-12-29 | Micron Display Technology, Inc. | Wet chemical emitter tip treatment |
KR100442982B1 (ko) * | 1996-04-15 | 2004-09-18 | 마츠시타 덴끼 산교 가부시키가이샤 | 전계방출형전자원및그제조방법 |
ATE279782T1 (de) * | 1996-06-25 | 2004-10-15 | Univ Vanderbilt | Strukturen, anordnungen und vorrichtungen mit vakuum-feldemissions-mikrospitzen und verfahren zu deren herstellung |
US5858478A (en) * | 1997-12-02 | 1999-01-12 | The Aerospace Corporation | Magnetic field pulsed laser deposition of thin films |
US5944573A (en) * | 1997-12-10 | 1999-08-31 | Bav Technologies, Ltd. | Method for manufacture of field emission array |
FR2778757B1 (fr) * | 1998-05-12 | 2001-10-05 | Commissariat Energie Atomique | Systeme d'inscription d'informations sur un support sensible aux rayons x |
JPH11329217A (ja) * | 1998-05-15 | 1999-11-30 | Sony Corp | 電界放出型カソードの製造方法 |
JP2000021287A (ja) * | 1998-06-30 | 2000-01-21 | Sharp Corp | 電界放出型電子源及びその製造方法 |
JP3595718B2 (ja) | 1999-03-15 | 2004-12-02 | 株式会社東芝 | 表示素子およびその製造方法 |
US6935917B1 (en) * | 1999-07-16 | 2005-08-30 | Mitsubishi Denki Kabushiki Kaisha | Discharge surface treating electrode and production method thereof |
US6342755B1 (en) * | 1999-08-11 | 2002-01-29 | Sony Corporation | Field emission cathodes having an emitting layer comprised of electron emitting particles and insulating particles |
US6462467B1 (en) * | 1999-08-11 | 2002-10-08 | Sony Corporation | Method for depositing a resistive material in a field emission cathode |
US6384520B1 (en) * | 1999-11-24 | 2002-05-07 | Sony Corporation | Cathode structure for planar emitter field emission displays |
KR100480771B1 (ko) * | 2000-01-05 | 2005-04-06 | 삼성에스디아이 주식회사 | 전계방출소자 및 그 제조방법 |
KR100464314B1 (ko) * | 2000-01-05 | 2004-12-31 | 삼성에스디아이 주식회사 | 전계방출소자 및 그 제조방법 |
JP3737696B2 (ja) | 2000-11-17 | 2006-01-18 | 株式会社東芝 | 横型の電界放出型冷陰極装置の製造方法 |
FR2843241A1 (fr) * | 2002-07-31 | 2004-02-06 | Framatome Connectors Int | Dispositif de retention de contact ameliore |
US8048789B2 (en) * | 2005-04-26 | 2011-11-01 | Northwestern University | Mesoscale pyramids, arrays and methods of preparation |
JP2007273270A (ja) * | 2006-03-31 | 2007-10-18 | Mitsubishi Electric Corp | 電界放出型表示装置およびその製造方法 |
EP1884978B1 (fr) * | 2006-08-03 | 2011-10-19 | Creepservice S.à.r.l. | Procédé pour la revêtement des substrats avec des couches de carbone de type diamant |
US20100261058A1 (en) * | 2009-04-13 | 2010-10-14 | Applied Materials, Inc. | Composite materials containing metallized carbon nanotubes and nanofibers |
GB2482728A (en) * | 2010-08-13 | 2012-02-15 | Element Six Production Pty Ltd | Polycrystalline superhard layer made by electrophoretic deposition |
TWI435360B (zh) * | 2011-10-17 | 2014-04-21 | Au Optronics Corp | 場發射顯示器及其顯示陣列基板的製造方法 |
CN107098342A (zh) * | 2017-04-07 | 2017-08-29 | 河南黄河旋风股份有限公司 | 金刚石粉体分离装置和分离方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2293593A (en) | 1941-07-25 | 1942-08-18 | Albert Shelby | Hair treating apparatus |
US4084942A (en) * | 1975-08-27 | 1978-04-18 | Villalobos Humberto Fernandez | Ultrasharp diamond edges and points and method of making |
FR2593953B1 (fr) | 1986-01-24 | 1988-04-29 | Commissariat Energie Atomique | Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ |
FR2623013A1 (fr) | 1987-11-06 | 1989-05-12 | Commissariat Energie Atomique | Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source |
JPH0275902A (ja) * | 1988-09-13 | 1990-03-15 | Seiko Instr Inc | ダイヤモンド探針及びその成形方法 |
FR2663462B1 (fr) | 1990-06-13 | 1992-09-11 | Commissariat Energie Atomique | Source d'electrons a cathodes emissives a micropointes. |
US5141460A (en) * | 1991-08-20 | 1992-08-25 | Jaskie James E | Method of making a field emission electron source employing a diamond coating |
US5129850A (en) * | 1991-08-20 | 1992-07-14 | Motorola, Inc. | Method of making a molded field emission electron emitter employing a diamond coating |
US5199918A (en) * | 1991-11-07 | 1993-04-06 | Microelectronics And Computer Technology Corporation | Method of forming field emitter device with diamond emission tips |
US5180951A (en) * | 1992-02-05 | 1993-01-19 | Motorola, Inc. | Electron device electron source including a polycrystalline diamond |
US5252833A (en) * | 1992-02-05 | 1993-10-12 | Motorola, Inc. | Electron source for depletion mode electron emission apparatus |
US5290610A (en) * | 1992-02-13 | 1994-03-01 | Motorola, Inc. | Forming a diamond material layer on an electron emitter using hydrocarbon reactant gases ionized by emitted electrons |
FR2687839B1 (fr) | 1992-02-26 | 1994-04-08 | Commissariat A Energie Atomique | Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ utilisant cette source. |
US5278475A (en) * | 1992-06-01 | 1994-01-11 | Motorola, Inc. | Cathodoluminescent display apparatus and method for realization using diamond crystallites |
EP0691032A1 (fr) * | 1993-03-11 | 1996-01-10 | Fed Corporation | Structure de tete d'emetteur, dispositif d'emission de champ comprenant cette structure et procede associe |
KR100314830B1 (ko) * | 1994-07-27 | 2002-02-28 | 김순택 | 전계방출표시장치의제조방법 |
US5623180A (en) * | 1994-10-31 | 1997-04-22 | Lucent Technologies Inc. | Electron field emitters comprising particles cooled with low voltage emitting material |
US5616368A (en) * | 1995-01-31 | 1997-04-01 | Lucent Technologies Inc. | Field emission devices employing activated diamond particle emitters and methods for making same |
-
1994
- 1994-11-08 FR FR9413372A patent/FR2726689B1/fr not_active Expired - Fee Related
-
1995
- 1995-10-25 US US08/548,039 patent/US5836796A/en not_active Expired - Fee Related
- 1995-11-01 JP JP30638295A patent/JPH08227655A/ja active Pending
- 1995-11-03 DE DE69510522T patent/DE69510522T2/de not_active Expired - Fee Related
- 1995-11-03 EP EP95402451A patent/EP0712147B1/fr not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0712147A1 (fr) | 1996-05-15 |
US5836796A (en) | 1998-11-17 |
DE69510522T2 (de) | 2000-03-16 |
DE69510522D1 (de) | 1999-08-05 |
JPH08227655A (ja) | 1996-09-03 |
FR2726689A1 (fr) | 1996-05-10 |
FR2726689B1 (fr) | 1996-11-29 |
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