DE69510522T2 - Feldeffekt-Elektronenquelle und Verfahren zur Herstellung; Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz - Google Patents

Feldeffekt-Elektronenquelle und Verfahren zur Herstellung; Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz

Info

Publication number
DE69510522T2
DE69510522T2 DE69510522T DE69510522T DE69510522T2 DE 69510522 T2 DE69510522 T2 DE 69510522T2 DE 69510522 T DE69510522 T DE 69510522T DE 69510522 T DE69510522 T DE 69510522T DE 69510522 T2 DE69510522 T2 DE 69510522T2
Authority
DE
Germany
Prior art keywords
manufacture
field effect
electron source
effect electron
cathodoluminescent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69510522T
Other languages
English (en)
Other versions
DE69510522D1 (de
Inventor
Joel Danroc
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69510522D1 publication Critical patent/DE69510522D1/de
Publication of DE69510522T2 publication Critical patent/DE69510522T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H01J2201/30426—Coatings on the emitter surface, e.g. with low work function materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
DE69510522T 1994-11-08 1995-11-03 Feldeffekt-Elektronenquelle und Verfahren zur Herstellung; Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz Expired - Fee Related DE69510522T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9413372A FR2726689B1 (fr) 1994-11-08 1994-11-08 Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence

Publications (2)

Publication Number Publication Date
DE69510522D1 DE69510522D1 (de) 1999-08-05
DE69510522T2 true DE69510522T2 (de) 2000-03-16

Family

ID=9468612

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69510522T Expired - Fee Related DE69510522T2 (de) 1994-11-08 1995-11-03 Feldeffekt-Elektronenquelle und Verfahren zur Herstellung; Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz

Country Status (5)

Country Link
US (1) US5836796A (de)
EP (1) EP0712147B1 (de)
JP (1) JPH08227655A (de)
DE (1) DE69510522T2 (de)
FR (1) FR2726689B1 (de)

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US5853492A (en) * 1996-02-28 1998-12-29 Micron Display Technology, Inc. Wet chemical emitter tip treatment
KR100442982B1 (ko) * 1996-04-15 2004-09-18 마츠시타 덴끼 산교 가부시키가이샤 전계방출형전자원및그제조방법
ATE279782T1 (de) * 1996-06-25 2004-10-15 Univ Vanderbilt Strukturen, anordnungen und vorrichtungen mit vakuum-feldemissions-mikrospitzen und verfahren zu deren herstellung
US5858478A (en) * 1997-12-02 1999-01-12 The Aerospace Corporation Magnetic field pulsed laser deposition of thin films
US5944573A (en) * 1997-12-10 1999-08-31 Bav Technologies, Ltd. Method for manufacture of field emission array
FR2778757B1 (fr) * 1998-05-12 2001-10-05 Commissariat Energie Atomique Systeme d'inscription d'informations sur un support sensible aux rayons x
JPH11329217A (ja) * 1998-05-15 1999-11-30 Sony Corp 電界放出型カソードの製造方法
JP2000021287A (ja) * 1998-06-30 2000-01-21 Sharp Corp 電界放出型電子源及びその製造方法
JP3595718B2 (ja) 1999-03-15 2004-12-02 株式会社東芝 表示素子およびその製造方法
US6935917B1 (en) * 1999-07-16 2005-08-30 Mitsubishi Denki Kabushiki Kaisha Discharge surface treating electrode and production method thereof
US6342755B1 (en) * 1999-08-11 2002-01-29 Sony Corporation Field emission cathodes having an emitting layer comprised of electron emitting particles and insulating particles
US6462467B1 (en) * 1999-08-11 2002-10-08 Sony Corporation Method for depositing a resistive material in a field emission cathode
US6384520B1 (en) * 1999-11-24 2002-05-07 Sony Corporation Cathode structure for planar emitter field emission displays
KR100480771B1 (ko) * 2000-01-05 2005-04-06 삼성에스디아이 주식회사 전계방출소자 및 그 제조방법
KR100464314B1 (ko) * 2000-01-05 2004-12-31 삼성에스디아이 주식회사 전계방출소자 및 그 제조방법
JP3737696B2 (ja) 2000-11-17 2006-01-18 株式会社東芝 横型の電界放出型冷陰極装置の製造方法
FR2843241A1 (fr) * 2002-07-31 2004-02-06 Framatome Connectors Int Dispositif de retention de contact ameliore
US8048789B2 (en) * 2005-04-26 2011-11-01 Northwestern University Mesoscale pyramids, arrays and methods of preparation
JP2007273270A (ja) * 2006-03-31 2007-10-18 Mitsubishi Electric Corp 電界放出型表示装置およびその製造方法
EP1884978B1 (de) * 2006-08-03 2011-10-19 Creepservice S.à.r.l. Verfahren zur Beschichtung von Substraten mit diamantähnlichen Kohlenstoffschichten
US20100261058A1 (en) * 2009-04-13 2010-10-14 Applied Materials, Inc. Composite materials containing metallized carbon nanotubes and nanofibers
GB2482728A (en) * 2010-08-13 2012-02-15 Element Six Production Pty Ltd Polycrystalline superhard layer made by electrophoretic deposition
TWI435360B (zh) * 2011-10-17 2014-04-21 Au Optronics Corp 場發射顯示器及其顯示陣列基板的製造方法
CN107098342A (zh) * 2017-04-07 2017-08-29 河南黄河旋风股份有限公司 金刚石粉体分离装置和分离方法

Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
US2293593A (en) 1941-07-25 1942-08-18 Albert Shelby Hair treating apparatus
US4084942A (en) * 1975-08-27 1978-04-18 Villalobos Humberto Fernandez Ultrasharp diamond edges and points and method of making
FR2593953B1 (fr) 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
FR2623013A1 (fr) 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
JPH0275902A (ja) * 1988-09-13 1990-03-15 Seiko Instr Inc ダイヤモンド探針及びその成形方法
FR2663462B1 (fr) 1990-06-13 1992-09-11 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes.
US5141460A (en) * 1991-08-20 1992-08-25 Jaskie James E Method of making a field emission electron source employing a diamond coating
US5129850A (en) * 1991-08-20 1992-07-14 Motorola, Inc. Method of making a molded field emission electron emitter employing a diamond coating
US5199918A (en) * 1991-11-07 1993-04-06 Microelectronics And Computer Technology Corporation Method of forming field emitter device with diamond emission tips
US5180951A (en) * 1992-02-05 1993-01-19 Motorola, Inc. Electron device electron source including a polycrystalline diamond
US5252833A (en) * 1992-02-05 1993-10-12 Motorola, Inc. Electron source for depletion mode electron emission apparatus
US5290610A (en) * 1992-02-13 1994-03-01 Motorola, Inc. Forming a diamond material layer on an electron emitter using hydrocarbon reactant gases ionized by emitted electrons
FR2687839B1 (fr) 1992-02-26 1994-04-08 Commissariat A Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ utilisant cette source.
US5278475A (en) * 1992-06-01 1994-01-11 Motorola, Inc. Cathodoluminescent display apparatus and method for realization using diamond crystallites
EP0691032A1 (de) * 1993-03-11 1996-01-10 Fed Corporation Emitterspitzensstruktur und feldemissionsvorrichtung mis solcher struktur, und verfahren zu ihrer herstellung
KR100314830B1 (ko) * 1994-07-27 2002-02-28 김순택 전계방출표시장치의제조방법
US5623180A (en) * 1994-10-31 1997-04-22 Lucent Technologies Inc. Electron field emitters comprising particles cooled with low voltage emitting material
US5616368A (en) * 1995-01-31 1997-04-01 Lucent Technologies Inc. Field emission devices employing activated diamond particle emitters and methods for making same

Also Published As

Publication number Publication date
EP0712147A1 (de) 1996-05-15
US5836796A (en) 1998-11-17
DE69510522D1 (de) 1999-08-05
JPH08227655A (ja) 1996-09-03
EP0712147B1 (de) 1999-06-30
FR2726689A1 (fr) 1996-05-10
FR2726689B1 (fr) 1996-11-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee