EP0712147B1 - Feldeffekt-Elektronenquelle und Verfahren zur Herstellung; Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz - Google Patents

Feldeffekt-Elektronenquelle und Verfahren zur Herstellung; Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz Download PDF

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Publication number
EP0712147B1
EP0712147B1 EP95402451A EP95402451A EP0712147B1 EP 0712147 B1 EP0712147 B1 EP 0712147B1 EP 95402451 A EP95402451 A EP 95402451A EP 95402451 A EP95402451 A EP 95402451A EP 0712147 B1 EP0712147 B1 EP 0712147B1
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EP
European Patent Office
Prior art keywords
diamond
carbon
source
electrically insulating
insulating layer
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Expired - Lifetime
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EP95402451A
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English (en)
French (fr)
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EP0712147A1 (de
Inventor
Joel Danroc
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H01J2201/30426—Coatings on the emitter surface, e.g. with low work function materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels

Definitions

  • the present invention relates to a method of fabrication of a field effect electron source.
  • the present invention applies to particular to the field of display devices dishes also called “flat screens”, as well as manufacture of pressure measurement gauges.
  • microtips These are the sources of microtip electrons ("microtips").
  • a source of microtip electrons includes at least one cathode conductor on a substrate electrically insulating, an electrically insulating layer which covers this cathode conductor and at least one grid formed on this electrically insulating layer.
  • Holes are formed through the grid and the insulating layer above the cathode conductor.
  • micro-tips are formed in these holes and carried by the cathode conductor.
  • each micro-tip is substantially in the plane of the grid, this grid used to extract electrons from micro-tips.
  • the holes have very small dimensions (they have a diameter less than 2 ⁇ m).
  • These other known display devices include a cathodoluminescent anode placed opposite of an electron source comprising carbon layers diamond or diamond-like intended to emit electrons.
  • Diamond or diamond carbon emits electrons much more easily than materials conventionally used for the manufacture of micro-tips.
  • the minimum electric field from which one can obtain an electron emission can be twenty times lower that the minimum electric field corresponding to metals such as molybdenum.
  • the deposits obtained are continuous layers and not micro-tips.
  • the object of the present invention is to remedy to the previous drawbacks.
  • the process which is the subject of the invention can be implemented used with large surface substrates and allows thus obtaining electron sources (and therefore screens large area (several dozen inches diagonally).
  • the temperature at which deposits are formed main is close to room temperature, around 20 ° C for electrophoresis and around 40 ° C to 60 ° C for electrochemical deposition.
  • the main deposits are covered with a secondary deposit of a metal, for example by electrochemical deposition, in order to consolidate these micro-clusters.
  • the carbon particles diamond or diamond type have a size of around 1 ⁇ m or less than 1 ⁇ m (but of course less the size of the micro-tips).
  • These particles can be obtained at from natural or artificial diamond or by a method chosen from laser synthesis, deposition chemical vapor phase and physical phase deposition steam.
  • the holes formed through the grid layer and the electrically insulating layer can have a circular or rectangular shape.
  • the size of these holes can be chosen in an interval of approximately 1 ⁇ m to several tens of micrometers.
  • the size of the holes that we form to put implementing the process which is the subject of the invention can be significantly higher than that required for implementing a process for manufacturing a source classic with micro-tips (not covered).
  • the source object of the present invention emits more of electrons than a microtip source, due to the use, in the present invention, of deposits of diamond or diamond-like carbon particles that have higher emissivity than emitting materials of conventional electrons such as molybdenum.
  • this device has a more greater brightness than a conventional micro-tip device (not covered), for the same voltage of ordered.
  • this device using a source according to the invention requires a voltage of lower order than that required for such classic micro-tip device.
  • Deposits main can be made of carbon particles diamond or diamond type or can be made of such particles dispersed in a metal.
  • Each of these main deposits can be covered with a deposit secondary of a metal intended to consolidate these deposits main.
  • Holes 10 are formed through these grids 8 and the insulating layer 6 above the cathode conductors 4.
  • Micro-tips 12 are formed in the holes 10 and carried by the cathode conductors 4.
  • Each of these micro-tips 12 is covered with a deposit 13 of carbon particles diamond or diamond type.
  • cathode conductors 4 are parallel and the grids 8 are parallel to each other and perpendicular to the conductors cathodic 4.
  • the holes 10 and therefore the micro-tips 12 are found in the areas where these grids cross the cathode conductors.
  • micro-tips of such an area covered with deposits 13, which emit electrons when an appropriate electrical voltage is applied, by means not shown, between the conductor cathode 4 and grid 8 which correspond to this zoned.
  • a display device by cathodoluminescence is schematically represented in section in Figure 2.
  • This device includes the source of electrons 14 in Figure 1.
  • the device of Figure 2 also includes a cathodoluminescent anode 16 placed opposite the source 14 and separated from it by a space 18 in which we made the vacuum.
  • the cathodoluminescent anode 16 comprises a electrically insulating and transparent substrate 20 which is provided with an electrically conductive layer and transparent 22 forming an anode.
  • this layer 24 emits light that a user of the viewing device observes through the transparent substrate 20.
  • FIG. 1 A process in accordance with the invention, allowing the manufacture of the source of electrons of figure 1, referring to figure 3 which schematically illustrates this process.
  • the diameter D1 of holes (substantially circular) formed in the grid 8 and in the electrically insulating layer 6 can be advantageously greater than the diameter of the holes than contain micro-point electron sources described in documents (1) to (4).
  • this diameter D1 can take values on the order of 1 ⁇ m up to 50 ⁇ m.
  • Figure 4 schematically illustrates the makes the holes 10, instead of having a shape circular, may have a rectangular shape.
  • the width D2 of these holes 10 in the figure 4, rectangular, can be taken equal to diameter D1 mentioned above and can therefore be also significantly larger than the diameter of the holes micro-tip sources.
  • This powder can be obtained by deposit chemical vapor phase, from a mixture hydrogen and light hydrocarbons.
  • This chemical vapor deposition can be assisted by an electron beam or be assisted by a plasma generated by microwaves.
  • This powder can also be formed by a ultrasonic spraying process known as of "Pyrosol”, that is to say, more precisely by pyrolysis of an aerosol of a carbonaceous compound.
  • the powder can also be synthesized by physical vapor deposition ("physical vapor” deposition "), from carbon targets (graphite for example) and a plasma gas such as argon alone or mixed with hydrogen, hydrocarbons, without dopant or with a dopant like for example the diborane.
  • physical vapor deposition from carbon targets (graphite for example) and a plasma gas such as argon alone or mixed with hydrogen, hydrocarbons, without dopant or with a dopant like for example the diborane.
  • This powder can also be obtained by laser ablation.
  • diamonds can be prepared carbon compression, high pressure and high temperature, then make the powder from of these artificial diamonds.
  • these carbon powders diamond and these diamond-like carbon powders are chosen so as to have a micronic particle size or submicronic or nanometric but, of course, smaller than the size of the micro-tips.
  • micro-tips have a size of the order of 1 ⁇ m
  • a particle size is used submicron.
  • these carbon powders diamond or diamond type can be doped or not doped.
  • the deposition of the powder (particles of diamond or diamond type) leading to the formation of deposits 13, can be achieved by electrophoresis (cataphoresis or anaphoresis), possibly supplemented by a metallic deposit electrochemical consolidation, or by co-deposit electrochemical of metal and carbon diamond or diamond type.
  • micro-tips 12 In the case of anaphoresis filing, the structure provided with micro-tips 12 is placed in an appropriate solution 26 and each micro-tip 12 is brought to positive potential during this phase deposit.
  • drivers cathodics 4 are brought to this positive potential thanks to a suitable voltage source 28 whose terminal positive is connected to these cathode conductors 4 while the negative terminal of this source is connected to a platinum or steel counter electrode 32 stainless steel located in the bath at a distance from substrate about 1 to 5 cm.
  • the fine powder of carbon particles diamond or diamond type is suspended in solution 26 (before placing the structure in this solution).
  • the voltage supplied by the source 28 can go up to around 200 V.
  • micro-tips In the case of cataphoresis, a potential negative is applied to micro-tips.
  • this is the source 28 negative terminal which is connected to cathode conductors 4 while the positive terminal of the source 28 is connected to a counter-electrode 32 in platinum or stainless steel located in the bath a distance from the substrate of about 1 to 5 cm.
  • a metal for example chosen from Ni, Co, Ag, Au, Rh or Pt or, more generally, among the metals of transition, alloys thereof and metals precious.
  • This electrode 33 is for example in nickel and solution 30 contains for example 300 g / l nickel sulfate, 30 g / l nickel chloride, 30 g / l of boric acid and 0.6 g / l of lauryl sulfate sodium.
  • an electric current of 4 A / dm 2 is used .
  • deposits 13 by electrochemical co-deposit of metal and carbon diamond or diamond type.
  • An appropriate current source is used, for example of the order of 4 A / dm 2 , and the negative terminal of this source is applied to the cathode conductors and the positive terminal of this source to a nickel electrode placed in the bath.
  • Nickel is deposited on micro-tips 12 by bringing with it the diamond particles, hence the formation of deposits 13 of nickel and diamond on micro-tips 12.
  • tops of the micro-tips 12 covered with deposits 13 are found substantially in the plane of the grids and are not in contact with these grids.

Claims (11)

  1. Verfahren zur Herstellung einer Feldeffekt-Elektronenquelle mit folgenden Schritten:
    Herstellen einer Struktur mit einem elektrisch isolierenden Substrat (2), wenigstens einem Kathodenleiter (4) auf diesem Substrat, einer elektrisch isolierenden Schicht (6), die jeden Kathodenleiter bedeckt, und einer elektrisch leitenden Gitterschicht (25), die diese elektrisch isolierende Schicht bedeckt,
    Bilden von Löchern (10) durch die Gitterschicht und die elektrisch isolierende Schicht in Höhe jedes Kathodenleiters, und
    Bilden einer Mikrospitze (12) aus einem elektronenemittierenden metallischen Material in jedem Loch,
    dadurch gekennzeichnet,
    daß jede dieser Mikrospitzen (12) anschließend überzogen wird mit einer Hauptabscheidung (13) aus Partikeln aus Diamant- oder diamantartigem Kohlenstoff und die Hauptabscheidungen (13) gebildet werden durch Elektrophorese oder durch gemeinsames elektrochemisches Abscheiden von Metall und von Diamant- oder diamantartigem Kohlenstoff.
  2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß die Hauptabscheidungen (13) anschließend mit einer sekundären Abscheidung (36) eines Metalls überzogen werden.
  3. Verfahren nach Anspruch 2, dadurch gekennzeichnet, daß diese sekundäre Abscheidung eine elektrochemische Abscheidung ist.
  4. Verfahren nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Partikel aus Diamant- oder diamantartigem Kohlenstoff eine Größe in der Größenordnung von 1µm oder weniger als 1µm aufweisen.
  5. Verfahren nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Partikel aus natürlichem oder künstlichem Diamant hergestellt werden oder mittels einer Methode, ausgewählt zwischen der Lasersynthese, der chemischen Gasphasenabscheidung und der physikalischen Gasphasenabscheidung.
  6. Verfahren nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, daß die Löcher (10) eine kreisförmige oder rechteckige Form aufweisen.
  7. Verfahren nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, daß die Größe der Löcher (10) ausgewählt wird aus einem Intervall, das von ungefähr 1µm bis mehrere zehn Mikrometer geht.
  8. Feldeffekt-Elektronenquelle, umfassend:
    ein elektrisch isolierendes Substrat (2), wenigstens eine erste, die Rolle des Kathodenleiters spielende Elektrode (4),
    eine elektrisch isolierende Schicht (6), die diesen Kathodenleiter bedeckt,
    wenigstens eine zweite, die Rolle des Gitters spielende Elektrode (8), ausgebildet auf der elektrisch isolierenden Schicht, wobei Löcher (10) durch dieses Gitter und die elektrisch isolierende Schicht über dem Kathodenleiter ausgebildet sind, und
    Mikrospitzen (12) aus einem elektronenemittierenden Material, die in diesen Löchern ausgebildet sind und durch den Kathodenleiter getragen werden,
    dadurch gekennzeichnet,
    daß jede dieser Mikrospitzen mit einer Hauptabscheidung (13) aus Diamant- oder diamantartigem Kohlenstoff überzogen ist, gebildet nach dem Verfahren nach Anspruch 1.
  9. Quelle nach Anspruch 8, dadurch gekennzeichnet, daß die Hauptabscheidungen (13) aus Partikeln aus Diamant- oder diamantartigem Kohlenstoff gemacht sind, oder aus derartigen Partikeln, dispergiert in einem Metall, gemacht sind.
  10. Quelle nach Anspruch 2, dadurch gekennzeichnet, daß jede dieser Hauptabscheidungen (13) mit einer sekundären Abscheidung (36) aus einem Metall überzogen ist.
  11. Kathodolumineszenz-Anzeigevorrichtung, umfassend:
    eine Feldeffekt-Elektronenquelle (14), und
    eine Kathodolumineszenzanode (16) mit einer Schicht aus einem kathodolumineszenten Material (24),
    dadurch gekennzeichnet,
    daß die Quelle (14) einem der Ansprüche 8 bis 10 entspricht.
EP95402451A 1994-11-08 1995-11-03 Feldeffekt-Elektronenquelle und Verfahren zur Herstellung; Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz Expired - Lifetime EP0712147B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9413372A FR2726689B1 (fr) 1994-11-08 1994-11-08 Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence
FR9413372 1994-11-08

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EP0712147A1 EP0712147A1 (de) 1996-05-15
EP0712147B1 true EP0712147B1 (de) 1999-06-30

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US (1) US5836796A (de)
EP (1) EP0712147B1 (de)
JP (1) JPH08227655A (de)
DE (1) DE69510522T2 (de)
FR (1) FR2726689B1 (de)

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Also Published As

Publication number Publication date
FR2726689A1 (fr) 1996-05-10
JPH08227655A (ja) 1996-09-03
DE69510522T2 (de) 2000-03-16
EP0712147A1 (de) 1996-05-15
US5836796A (en) 1998-11-17
DE69510522D1 (de) 1999-08-05
FR2726689B1 (fr) 1996-11-29

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