ATE529881T1 - Verfahren zur beschichtung von substraten mit diamantähnlichen kohlenstoffschichten - Google Patents

Verfahren zur beschichtung von substraten mit diamantähnlichen kohlenstoffschichten

Info

Publication number
ATE529881T1
ATE529881T1 AT06016249T AT06016249T ATE529881T1 AT E529881 T1 ATE529881 T1 AT E529881T1 AT 06016249 T AT06016249 T AT 06016249T AT 06016249 T AT06016249 T AT 06016249T AT E529881 T1 ATE529881 T1 AT E529881T1
Authority
AT
Austria
Prior art keywords
substrate
diamond
carbon
carbon layers
coating substrates
Prior art date
Application number
AT06016249T
Other languages
English (en)
Inventor
Anna Andreyevna Chizik
Alexei Sergueievitch Mikhailov
Original Assignee
Creepservice S A R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Creepservice S A R L filed Critical Creepservice S A R L
Application granted granted Critical
Publication of ATE529881T1 publication Critical patent/ATE529881T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
    • E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
    • E03C1/02—Plumbing installations for fresh water
    • E03C1/04—Water-basin installations specially adapted to wash-basins or baths
    • E03C1/0408—Water installations especially for showers
    • E03C1/0409—Shower handles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
    • F16K3/08—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages with circular plates rotatable around their centres
    • F16K3/085—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages with circular plates rotatable around their centres the axis of supply passage and the axis of discharge passage being coaxial and parallel to the axis of rotation of the plates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/32—Means for additional adjustment of the rate of flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/16—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening having selectively- effective outlets
    • B05B1/1609—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening having selectively- effective outlets with a selecting mechanism comprising a lift valve
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B05B7/0408—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing two or more liquids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24752—Laterally noncoextensive components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Water Supply & Treatment (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
AT06016249T 2006-08-03 2006-08-03 Verfahren zur beschichtung von substraten mit diamantähnlichen kohlenstoffschichten ATE529881T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06016249A EP1884978B1 (de) 2006-08-03 2006-08-03 Verfahren zur Beschichtung von Substraten mit diamantähnlichen Kohlenstoffschichten

Publications (1)

Publication Number Publication Date
ATE529881T1 true ATE529881T1 (de) 2011-11-15

Family

ID=37667177

Family Applications (2)

Application Number Title Priority Date Filing Date
AT06016249T ATE529881T1 (de) 2006-08-03 2006-08-03 Verfahren zur beschichtung von substraten mit diamantähnlichen kohlenstoffschichten
AT07801508T ATE531071T1 (de) 2006-08-03 2007-08-03 Vorrichtung zur veränderung von oberflächen

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT07801508T ATE531071T1 (de) 2006-08-03 2007-08-03 Vorrichtung zur veränderung von oberflächen

Country Status (9)

Country Link
US (1) US20100129615A1 (de)
EP (2) EP1884978B1 (de)
JP (1) JP2009545670A (de)
KR (1) KR20090043551A (de)
CN (1) CN101501813B (de)
AT (2) ATE529881T1 (de)
RU (1) RU2470407C2 (de)
TW (1) TWI368667B (de)
WO (1) WO2008015016A1 (de)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8039096B2 (en) * 2008-06-30 2011-10-18 Eaton Corporation Friction- and wear-reducing coating
US8550792B2 (en) 2008-06-30 2013-10-08 Eaton Corporation Energy conversion device and method of reducing friction therein
US8449995B2 (en) * 2009-03-31 2013-05-28 Seagate Technology Llc Corrosion resistant coating for copper substrate
JP5780704B2 (ja) * 2010-01-19 2015-09-16 株式会社リケン 水素含有非晶質硬質炭素被覆部材
CN101787518A (zh) * 2010-03-24 2010-07-28 中国地质大学（北京） 掺杂类金刚石涂层的多离子束溅射沉积技术
US9205531B2 (en) 2011-09-16 2015-12-08 Baker Hughes Incorporated Methods of fabricating polycrystalline diamond, and cutting elements and earth-boring tools comprising polycrystalline diamond
US10005672B2 (en) 2010-04-14 2018-06-26 Baker Hughes, A Ge Company, Llc Method of forming particles comprising carbon and articles therefrom
SA111320374B1 (ar) 2010-04-14 2015-08-10 بيكر هوغيس انكوبوريتد طريقة تشكيل الماسة متعدد البلورات من الماس المستخرج بحجم النانو
JP5868017B2 (ja) * 2010-04-14 2016-02-24 キヤノン株式会社 光学素子成形用型の製造方法および光学素子成形用型
DE102010031539A1 (de) * 2010-07-20 2012-01-26 Robert Bosch Gmbh Verschleißschutzsystem mit graduellem Härteverlauf
WO2012021821A2 (en) 2010-08-13 2012-02-16 Baker Hughes Incorporated Cutting elements including nanoparticles in at least one portion thereof, earth-boring tools including such cutting elements, and ralted methods
CN103459652A (zh) * 2010-11-11 2013-12-18 Nci瑞士纳米涂层公司 用于表面处理的设备和方法
US8658578B2 (en) 2010-12-29 2014-02-25 Industrial Technology Research Institute Lubricating oil composition and method for manufacturing the same
CN102230156A (zh) * 2011-06-21 2011-11-02 深圳市金洲精工科技股份有限公司 微型刀具上制备复合硬质涂层的方法及微型刀具
RU2459887C1 (ru) * 2011-07-21 2012-08-27 Учреждение Российской Академии Наук Институт Физики Прочности И Материаловедения Сибирского Отделения Ран (Ифпм Со Ран) Металлокерамический сплав на основе карбида титана и металлического связующего с модифицированной структурой поверхностного слоя
RU2482218C1 (ru) * 2011-09-07 2013-05-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный индустриальный университет" Способ ионной имплантации поверхностей деталей из конструкционной стали
BR112014006306A2 (pt) 2011-09-16 2017-04-11 Baker Hughes Inc métodos de fabricação de diamante policristalino, e elementos de corte e ferramentas de perfuração terrestre compreendendo diamante policristalino
FR2983640B1 (fr) 2011-12-02 2014-06-20 Soc Fr Detecteurs Infrarouges Sofradir Matrice de detection compacte a conditions de polarisation ameliorees
FR2990246B1 (fr) * 2012-05-03 2014-05-02 Hydromecanique & Frottement Chemise de moteur a combustion interne
RU2530432C2 (ru) * 2013-01-31 2014-10-10 Общество с ограниченной ответственностью "Научно-технический центр "Информационные и промышленные технологии" Способ нанесения наноалмазного материала комбинированной электромеханической обработкой
US9140072B2 (en) 2013-02-28 2015-09-22 Baker Hughes Incorporated Cutting elements including non-planar interfaces, earth-boring tools including such cutting elements, and methods of forming cutting elements
WO2014177641A1 (de) * 2013-04-30 2014-11-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. VERFAHREN ZUR HERSTELLUNG EINER VERSCHLEIßSCHUTZSCHICHT UND MIT DEM VERFAHREN HERGESTELLTE VERSCHLEIßSCHUTZSCHICHT
RU2540227C2 (ru) * 2013-06-19 2015-02-10 Андрей Леонидович Калинин Способ формирования тонкопленочного защитного покрытия на базисах съемных зубных протезов, обтураторах и компонентах челюстно-лицевых протезов
CN104250722A (zh) * 2013-06-27 2014-12-31 深圳富泰宏精密工业有限公司 被覆件及其制造方法
JP5627148B1 (ja) * 2013-07-24 2014-11-19 株式会社リケン ピストンリング及びその製造方法
RU2582181C1 (ru) * 2015-02-11 2016-04-20 федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) Способ лазерного управляемого термораскалывания сапфировых пластин
KR101734170B1 (ko) * 2015-05-11 2017-05-16 (주)제너코트 그라파이트 방열시트의 제조방법
US10662523B2 (en) * 2015-05-27 2020-05-26 John Crane Inc. Extreme durability composite diamond film
US10688565B2 (en) * 2015-05-28 2020-06-23 Kyocera Corporation Cutting tool
US10907264B2 (en) 2015-06-10 2021-02-02 Advanced Diamond Technologies, Inc. Extreme durability composite diamond electrodes
JP5997417B1 (ja) * 2015-06-24 2016-09-28 キヤノンアネルバ株式会社 真空アーク成膜装置および成膜方法
KR102156989B1 (ko) 2015-06-24 2020-09-16 캐논 아네르바 가부시키가이샤 진공 아크 성막 장치 및 성막 방법
CN104985237A (zh) * 2015-06-29 2015-10-21 唐萍 高强度钻头
RU2617189C1 (ru) * 2016-03-28 2017-04-21 Общество с ограниченной ответственностью "Завод электрических исполнительных механизмов и приводов "ПРИМЕХ" Способ нанесения износостойкого покрытия
WO2017192975A1 (en) * 2016-05-05 2017-11-09 The Coca-Cola Company Containers and methods for improved mechanical strength
WO2017218197A1 (en) 2016-06-15 2017-12-21 Eastman Chemical Company Physical vapor deposited biosensor components
EP3512958B1 (de) 2016-09-16 2022-04-06 Eastman Chemical Company Biosensorelektroden hergestellt durch physikalische gasphasenabscheidung
EP3512957B1 (de) 2016-09-16 2022-03-09 Eastman Chemical Company Biosensorelektroden hergestellt durch physikalische gasphasenabscheidung
CN106567036B (zh) * 2016-10-26 2018-10-23 东南大学 一种手术器械刃口表面的处理方法
US10662550B2 (en) 2016-11-03 2020-05-26 John Crane Inc. Diamond nanostructures with large surface area and method of producing the same
CN106756858B (zh) * 2016-11-14 2019-07-05 北京师范大学 一种圆珠笔笔珠的表面改性方法
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EP3355338A1 (de) * 2017-01-25 2018-08-01 Sergueï Mikhailov Vorrichtung und verfahren zur oberflächenbearbeitung
CN110770575A (zh) 2017-06-22 2020-02-07 伊士曼化工公司 用于电化学传感器的物理气相沉积电极
WO2019122958A1 (en) * 2017-12-19 2019-06-27 Arcelormittal A coated steel substrate
CN109811303A (zh) * 2019-01-23 2019-05-28 上海大学 基于类金刚石薄膜中间层的纳米金刚石薄膜制备方法
RU2737578C2 (ru) * 2019-05-20 2020-12-01 Анастасия Владимировна Демьянова Устройство для фиксации перелома кости и способ его изготовления
CN110275097B (zh) * 2019-06-25 2020-09-22 清华大学 纳米级间隙电火花放电测试系统及方法
RU2761440C2 (ru) * 2019-12-27 2021-12-08 Иван Александрович Кудашов Способ нанесения покрытия на медицинское устройство, входящее в контакт с тканями тела
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RU2757458C1 (ru) * 2021-01-26 2021-10-18 Акционерное Общество "Центр Прикладной Физики Мгту Им. Н.Э. Баумана" Способ управления холодной плазмой посредством микрорельефа на твёрдом диэлектрике
CN113857653B (zh) * 2021-12-03 2022-02-18 太原理工大学 一种超声辅助激光的表面改性装置
CN116676557A (zh) * 2023-06-08 2023-09-01 广东省广新离子束科技有限公司 一种具有自润滑性dlc涂层的钻头及其制备方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6455375A (en) * 1987-08-26 1989-03-02 Nissin Electric Co Ltd Device for projecting ion beam
US5435900A (en) 1992-11-04 1995-07-25 Gorokhovsky; Vladimir I. Apparatus for application of coatings in vacuum
FR2726689B1 (fr) * 1994-11-08 1996-11-29 Commissariat Energie Atomique Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence
US5599144A (en) * 1995-06-23 1997-02-04 International Business Machines Corporation Low friction flute tungsten carbon microdrill
US5653812A (en) 1995-09-26 1997-08-05 Monsanto Company Method and apparatus for deposition of diamond-like carbon coatings on drills
DE19637450C1 (de) * 1996-09-13 1998-01-15 Fraunhofer Ges Forschung Verschleißbeständiger, mechanisch hochbelastbarer und reibungsarmer Randschichtaufbau für Titan und dessen Legierungen sowie Verfahren zu seiner Herstellung
RU2173911C2 (ru) * 1997-04-04 2001-09-20 Додонов Александр Игоревич Получение электродуговой плазмы в криволинейном плазмоводе и нанесение покрытия на подложку
RU2114210C1 (ru) * 1997-05-30 1998-06-27 Валерий Павлович Гончаренко Способ формирования углеродного алмазоподобного покрытия в вакууме
JP2000256850A (ja) * 1999-03-04 2000-09-19 Riken Corp ダイヤモンドライクカーボン薄膜及びその製造方法
CA2327031C (en) 1999-11-29 2007-07-03 Vladimir Gorokhovsky Composite vapour deposited coatings and process therefor
JP4560964B2 (ja) * 2000-02-25 2010-10-13 住友電気工業株式会社 非晶質炭素被覆部材
CA2305938C (en) * 2000-04-10 2007-07-03 Vladimir I. Gorokhovsky Filtered cathodic arc deposition method and apparatus
DE10018143C5 (de) * 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems
JP4449187B2 (ja) * 2000-07-19 2010-04-14 住友電気工業株式会社 薄膜形成方法
EP1186683B1 (de) 2000-09-04 2005-11-30 Cafi Centre d'Analyses par Faisceau Ionique Verfahren zur Härtung von Oberflächen eines Substrats
US6756596B2 (en) * 2002-04-10 2004-06-29 Paul E. Sathrum Filtered ion source
JP4096606B2 (ja) * 2002-04-24 2008-06-04 日本板硝子株式会社 チタン化合物膜被覆物品の製造方法
JP4145629B2 (ja) * 2002-11-11 2008-09-03 住友電工ハードメタル株式会社 マイクロドリル
RU2238999C1 (ru) * 2003-02-19 2004-10-27 Государственное научное учреждение "Научно-исследовательский институт ядерной физики при Томском политехническом университете" Способ импульсно-периодической имплантации ионов и плазменного осаждения покрытий
US7815735B2 (en) 2003-03-21 2010-10-19 Cemecon Ag Body having a smooth diamond layer, device and method therefor
RU2240376C1 (ru) * 2003-05-22 2004-11-20 Ооо "Альбатэк" Способ формирования сверхтвердого аморфного углеродного покрытия в вакууме
US7489493B2 (en) * 2003-12-01 2009-02-10 Magnecomp Corporation Method to form electrostatic discharge protection on flexible circuits using a diamond-like carbon material

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TW200808994A (en) 2008-02-16
CN101501813B (zh) 2011-09-14
ATE531071T1 (de) 2011-11-15
RU2470407C2 (ru) 2012-12-20
EP1884978B1 (de) 2011-10-19
EP1884978A1 (de) 2008-02-06
TWI368667B (en) 2012-07-21
EP2057661B1 (de) 2011-10-26
CN101501813A (zh) 2009-08-05
US20100129615A1 (en) 2010-05-27
KR20090043551A (ko) 2009-05-06
RU2010106883A (ru) 2011-09-10
JP2009545670A (ja) 2009-12-24
WO2008015016A1 (en) 2008-02-07

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