ATE554198T1 - Vorrichtung und verfahren zur abscheidung von schichten aus diamantartigem kohlenstoff - Google Patents
Vorrichtung und verfahren zur abscheidung von schichten aus diamantartigem kohlenstoffInfo
- Publication number
- ATE554198T1 ATE554198T1 AT03720657T AT03720657T ATE554198T1 AT E554198 T1 ATE554198 T1 AT E554198T1 AT 03720657 T AT03720657 T AT 03720657T AT 03720657 T AT03720657 T AT 03720657T AT E554198 T1 ATE554198 T1 AT E554198T1
- Authority
- AT
- Austria
- Prior art keywords
- carbon
- diamond
- electrode
- power supply
- dlc
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0084—Producing gradient compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/029—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/517—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
- H01J37/32027—DC powered
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0205959.0A GB0205959D0 (en) | 2002-03-14 | 2002-03-14 | Apparatus and method for applying diamond-like carbon coatings |
PCT/GB2003/001078 WO2003078679A1 (en) | 2002-03-14 | 2003-03-14 | Apparatus and method for applying diamond-like carbon coatings |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE554198T1 true ATE554198T1 (de) | 2012-05-15 |
Family
ID=9932911
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03720657T ATE554198T1 (de) | 2002-03-14 | 2003-03-14 | Vorrichtung und verfahren zur abscheidung von schichten aus diamantartigem kohlenstoff |
Country Status (6)
Country | Link |
---|---|
US (1) | US7323219B2 (de) |
EP (1) | EP1483426B1 (de) |
AT (1) | ATE554198T1 (de) |
AU (1) | AU2003224234A1 (de) |
GB (1) | GB0205959D0 (de) |
WO (1) | WO2003078679A1 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3555844B2 (ja) | 1999-04-09 | 2004-08-18 | 三宅 正二郎 | 摺動部材およびその製造方法 |
US6969198B2 (en) | 2002-11-06 | 2005-11-29 | Nissan Motor Co., Ltd. | Low-friction sliding mechanism |
JP4863152B2 (ja) | 2003-07-31 | 2012-01-25 | 日産自動車株式会社 | 歯車 |
US7771821B2 (en) | 2003-08-21 | 2010-08-10 | Nissan Motor Co., Ltd. | Low-friction sliding member and low-friction sliding mechanism using same |
JP4696823B2 (ja) * | 2005-10-06 | 2011-06-08 | トヨタ自動車株式会社 | 金属複合ダイヤモンドライクカーボン(dlc)皮膜、その形成方法、及び摺動部材 |
TWI363742B (en) * | 2005-10-28 | 2012-05-11 | Hon Hai Prec Ind Co Ltd | Diamond-like carbon film |
JP4735309B2 (ja) * | 2006-02-10 | 2011-07-27 | トヨタ自動車株式会社 | 耐キャビテーションエロージョン用部材及びその製造方法 |
US20070259184A1 (en) * | 2006-05-04 | 2007-11-08 | Commonwealth Scientific And Industrial Research Organisation | Method of mounting objects for chemical vapour deposition |
GB2452190B (en) * | 2006-05-17 | 2011-12-28 | G & H Technologies Llc | Wear resistant depositied coating, method of coating deposition and applications therefor |
GB2446593B (en) | 2007-02-16 | 2009-07-22 | Diamond Hard Surfaces Ltd | Methods and apparatus for forming diamond-like coatings |
CN201614406U (zh) * | 2008-08-27 | 2010-10-27 | 梯尔涂层有限公司 | 沉积材料形成镀层的设备 |
CN102216487B (zh) * | 2008-10-29 | 2014-07-02 | Ntn株式会社 | 硬质多层膜成型体及其制造方法 |
US20100261058A1 (en) * | 2009-04-13 | 2010-10-14 | Applied Materials, Inc. | Composite materials containing metallized carbon nanotubes and nanofibers |
JP5577110B2 (ja) * | 2010-02-05 | 2014-08-20 | 富士フイルム株式会社 | 光学素子成形用型、並びに光学素子、及び該光学素子の製造方法 |
GB2476004B (en) * | 2011-02-23 | 2011-12-28 | Portal Medical Ltd | Medicament Dispenser Device |
US10224189B2 (en) * | 2011-09-30 | 2019-03-05 | Teer Coatings Limited | Apparatus and a method for deposition of material to form a coating |
US20150197918A1 (en) * | 2014-01-10 | 2015-07-16 | Caterpillar Inc. | Thin film coating for linkage pin |
US20150197295A1 (en) * | 2014-01-10 | 2015-07-16 | Caterpillar Inc. | Thin film coating on undercarriage track pins |
CN108359938B (zh) * | 2018-05-22 | 2020-04-07 | 南京飞燕活塞环股份有限公司 | 一种活塞环表面超厚类金刚石薄膜涂层制备方法 |
CN112899639B (zh) * | 2019-12-04 | 2022-08-19 | 江苏菲沃泰纳米科技股份有限公司 | 类金刚石薄膜制备装置和制备方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0221531A3 (de) * | 1985-11-06 | 1992-02-19 | Kanegafuchi Kagaku Kogyo Kabushiki Kaisha | Isoliertes gut wärmeleitendes Substrat und sein Herstellungsverfahren |
US6083570A (en) * | 1987-03-31 | 2000-07-04 | Lemelson; Jerome H. | Synthetic diamond coatings with intermediate amorphous metal bonding layers and methods of applying such coatings |
US5202156A (en) * | 1988-08-16 | 1993-04-13 | Canon Kabushiki Kaisha | Method of making an optical element mold with a hard carbon film |
US5112458A (en) * | 1989-12-27 | 1992-05-12 | Tdk Corporation | Process for producing diamond-like films and apparatus therefor |
FR2682125A1 (fr) * | 1991-10-07 | 1993-04-09 | Nitruvid | Procede de traitement pour deposer une couche de carbone en phase vapeur sur la surface d'une piece metallique et piece ainsi obtenue. |
US5249554A (en) * | 1993-01-08 | 1993-10-05 | Ford Motor Company | Powertrain component with adherent film having a graded composition |
JP2531438B2 (ja) * | 1993-06-17 | 1996-09-04 | 日本電気株式会社 | 磁気ヘッドおよびその製造方法 |
DE69609244T2 (de) * | 1995-03-31 | 2001-03-08 | Ceramoptec Gmbh | Verfahren zur Herstellung diamantartiger Beschichtungen |
JP3119172B2 (ja) * | 1995-09-13 | 2000-12-18 | 日新電機株式会社 | プラズマcvd法及び装置 |
US5780119A (en) * | 1996-03-20 | 1998-07-14 | Southwest Research Institute | Treatments to reduce friction and wear on metal alloy components |
US6726993B2 (en) * | 1997-12-02 | 2004-04-27 | Teer Coatings Limited | Carbon coatings, method and apparatus for applying them, and articles bearing such coatings |
USH1924H (en) * | 1998-09-15 | 2000-12-05 | The United States Of America As Represented By The Secretary Of The Air Force | Load-adaptive nanocrystalline carbon/amorphous diamond-like carbon composite and preparation method |
GB9910842D0 (en) * | 1999-05-10 | 1999-07-07 | Univ Nanyang | Composite coatings |
CN1138020C (zh) * | 1999-09-29 | 2004-02-11 | 永源科技股份有限公司 | 阴极电弧蒸镀方式淀积类金刚石碳膜的制备方法 |
DE10018143C5 (de) * | 2000-04-12 | 2012-09-06 | Oerlikon Trading Ag, Trübbach | DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems |
-
2002
- 2002-03-14 GB GBGB0205959.0A patent/GB0205959D0/en not_active Ceased
-
2003
- 2003-03-14 US US10/507,953 patent/US7323219B2/en not_active Expired - Fee Related
- 2003-03-14 EP EP03720657A patent/EP1483426B1/de not_active Expired - Lifetime
- 2003-03-14 WO PCT/GB2003/001078 patent/WO2003078679A1/en not_active Application Discontinuation
- 2003-03-14 AT AT03720657T patent/ATE554198T1/de active
- 2003-03-14 AU AU2003224234A patent/AU2003224234A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1483426A1 (de) | 2004-12-08 |
US20050126486A1 (en) | 2005-06-16 |
WO2003078679A1 (en) | 2003-09-25 |
EP1483426B1 (de) | 2012-04-18 |
GB0205959D0 (en) | 2002-04-24 |
US7323219B2 (en) | 2008-01-29 |
AU2003224234A1 (en) | 2003-09-29 |
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