CN108359938B - 一种活塞环表面超厚类金刚石薄膜涂层制备方法 - Google Patents
一种活塞环表面超厚类金刚石薄膜涂层制备方法 Download PDFInfo
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- CN108359938B CN108359938B CN201810493053.XA CN201810493053A CN108359938B CN 108359938 B CN108359938 B CN 108359938B CN 201810493053 A CN201810493053 A CN 201810493053A CN 108359938 B CN108359938 B CN 108359938B
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- Prior art keywords
- piston ring
- coating
- target
- group
- etching
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Pistons, Piston Rings, And Cylinders (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201810493053.XA CN108359938B (zh) | 2018-05-22 | 2018-05-22 | 一种活塞环表面超厚类金刚石薄膜涂层制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201810493053.XA CN108359938B (zh) | 2018-05-22 | 2018-05-22 | 一种活塞环表面超厚类金刚石薄膜涂层制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN108359938A CN108359938A (zh) | 2018-08-03 |
CN108359938B true CN108359938B (zh) | 2020-04-07 |
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CN201810493053.XA Active CN108359938B (zh) | 2018-05-22 | 2018-05-22 | 一种活塞环表面超厚类金刚石薄膜涂层制备方法 |
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CN (1) | CN108359938B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113512699A (zh) * | 2021-07-13 | 2021-10-19 | 华闽南配集团股份有限公司 | 一种适用于不同厚度pvd涂层的活塞环pvd处理工艺及其设备 |
CN113549880A (zh) * | 2021-07-27 | 2021-10-26 | 华闽南配集团股份有限公司 | 一种活塞环dlc涂层沉积工艺及涂层沉积设备 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0205959D0 (en) * | 2002-03-14 | 2002-04-24 | Teer Coatings Ltd | Apparatus and method for applying diamond-like carbon coatings |
CN102534614A (zh) * | 2011-12-30 | 2012-07-04 | 星弧涂层科技(苏州工业园区)有限公司 | 纺织钢筘上的dlc涂层镀膜方法及设备 |
CN102658684B (zh) * | 2012-04-27 | 2014-07-30 | 赛屋(天津)涂层技术有限公司 | 类金刚石薄膜及其制备方法 |
CN103225064A (zh) * | 2012-10-22 | 2013-07-31 | 安庆帝伯格茨活塞环有限公司 | 类金刚石涂层活塞环的制备方法 |
CN102912298B (zh) * | 2012-10-29 | 2014-02-26 | 西安浩元涂层技术有限公司 | 具有抗腐蚀和减摩性能的掺Cr的DLC涂层及制备方法 |
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2018
- 2018-05-22 CN CN201810493053.XA patent/CN108359938B/zh active Active
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A preparation method of ultra thick DLC film coating on piston ring surface Effective date of registration: 20200820 Granted publication date: 20200407 Pledgee: Jiangsu bank Limited by Share Ltd. Lishui branch Pledgor: NANJING FEIYAN PISTON RING Co.,Ltd. Registration number: Y2020980005174 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20211022 Granted publication date: 20200407 Pledgee: Jiangsu bank Limited by Share Ltd. Lishui branch Pledgor: NANJING FEIYAN PISTON RING Co.,Ltd. Registration number: Y2020980005174 |