ATE147889T1 - Diamantüberzogene feldemissions-elektronenquelle und herstellungsverfahren dazu - Google Patents

Diamantüberzogene feldemissions-elektronenquelle und herstellungsverfahren dazu

Info

Publication number
ATE147889T1
ATE147889T1 AT92113953T AT92113953T ATE147889T1 AT E147889 T1 ATE147889 T1 AT E147889T1 AT 92113953 T AT92113953 T AT 92113953T AT 92113953 T AT92113953 T AT 92113953T AT E147889 T1 ATE147889 T1 AT E147889T1
Authority
AT
Austria
Prior art keywords
diamond
field emission
emission electron
production method
electron source
Prior art date
Application number
AT92113953T
Other languages
English (en)
Inventor
James E Jaskie
Robert C Kane
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of ATE147889T1 publication Critical patent/ATE147889T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT92113953T 1991-08-20 1992-08-17 Diamantüberzogene feldemissions-elektronenquelle und herstellungsverfahren dazu ATE147889T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/747,563 US5141460A (en) 1991-08-20 1991-08-20 Method of making a field emission electron source employing a diamond coating

Publications (1)

Publication Number Publication Date
ATE147889T1 true ATE147889T1 (de) 1997-02-15

Family

ID=25005646

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92113953T ATE147889T1 (de) 1991-08-20 1992-08-17 Diamantüberzogene feldemissions-elektronenquelle und herstellungsverfahren dazu

Country Status (9)

Country Link
US (1) US5141460A (de)
EP (1) EP0528391B1 (de)
JP (1) JP2742750B2 (de)
CN (1) CN1042072C (de)
AT (1) ATE147889T1 (de)
CA (1) CA2071065A1 (de)
DE (1) DE69216710T2 (de)
DK (1) DK0528391T3 (de)
ES (1) ES2096687T3 (de)

Families Citing this family (91)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE40566E1 (en) 1987-07-15 2008-11-11 Canon Kabushiki Kaisha Flat panel display including electron emitting device
USRE40062E1 (en) 1987-07-15 2008-02-12 Canon Kabushiki Kaisha Display device with electron-emitting device with electron-emitting region insulated from electrodes
USRE39633E1 (en) 1987-07-15 2007-05-15 Canon Kabushiki Kaisha Display device with electron-emitting device with electron-emitting region insulated from electrodes
JP3255960B2 (ja) * 1991-09-30 2002-02-12 株式会社神戸製鋼所 冷陰極エミッタ素子
US5536193A (en) * 1991-11-07 1996-07-16 Microelectronics And Computer Technology Corporation Method of making wide band gap field emitter
US5399238A (en) * 1991-11-07 1995-03-21 Microelectronics And Computer Technology Corporation Method of making field emission tips using physical vapor deposition of random nuclei as etch mask
US5199918A (en) * 1991-11-07 1993-04-06 Microelectronics And Computer Technology Corporation Method of forming field emitter device with diamond emission tips
US5397428A (en) * 1991-12-20 1995-03-14 The University Of North Carolina At Chapel Hill Nucleation enhancement for chemical vapor deposition of diamond
US5449970A (en) * 1992-03-16 1995-09-12 Microelectronics And Computer Technology Corporation Diode structure flat panel display
US5679043A (en) 1992-03-16 1997-10-21 Microelectronics And Computer Technology Corporation Method of making a field emitter
US6127773A (en) 1992-03-16 2000-10-03 Si Diamond Technology, Inc. Amorphic diamond film flat field emission cathode
US5763997A (en) * 1992-03-16 1998-06-09 Si Diamond Technology, Inc. Field emission display device
US5675216A (en) 1992-03-16 1997-10-07 Microelectronics And Computer Technololgy Corp. Amorphic diamond film flat field emission cathode
US5659224A (en) 1992-03-16 1997-08-19 Microelectronics And Computer Technology Corporation Cold cathode display device
US5543684A (en) * 1992-03-16 1996-08-06 Microelectronics And Computer Technology Corporation Flat panel display based on diamond thin films
US5548185A (en) * 1992-03-16 1996-08-20 Microelectronics And Computer Technology Corporation Triode structure flat panel display employing flat field emission cathode
US5256888A (en) * 1992-05-04 1993-10-26 Motorola, Inc. Transistor device apparatus employing free-space electron emission from a diamond material surface
JP3353943B2 (ja) * 1992-06-01 2002-12-09 モトローラ・インコーポレイテッド 反転モード電子放出器
US5697926A (en) * 1992-12-17 1997-12-16 Megadyne Medical Products, Inc. Cautery medical instrument
WO1994015352A1 (en) * 1992-12-23 1994-07-07 Microelectronics And Computer Technology Corporation Triode structure flat panel display employing flat field emission cathodes
DE69331709D1 (de) * 1993-01-19 2002-04-18 Leonid Danilovic Karpov Feldeffekt-emissionsvorrichtung
JP3198362B2 (ja) 1993-01-29 2001-08-13 キヤノン株式会社 電子放出素子及び画像形成装置
US5619092A (en) * 1993-02-01 1997-04-08 Motorola Enhanced electron emitter
US5903243A (en) * 1993-03-11 1999-05-11 Fed Corporation Compact, body-mountable field emission display device, and display panel having utility for use therewith
EP0691032A1 (de) * 1993-03-11 1996-01-10 Fed Corporation Emitterspitzensstruktur und feldemissionsvorrichtung mis solcher struktur, und verfahren zu ihrer herstellung
US5561339A (en) * 1993-03-11 1996-10-01 Fed Corporation Field emission array magnetic sensor devices
US5534743A (en) * 1993-03-11 1996-07-09 Fed Corporation Field emission display devices, and field emission electron beam source and isolation structure components therefor
US5410166A (en) * 1993-04-28 1995-04-25 The United States Of America As Represented By The Secretary Of The Air Force P-N junction negative electron affinity cathode
AU5897594A (en) * 1993-06-02 1994-12-20 Microelectronics And Computer Technology Corporation Amorphic diamond film flat field emission cathode
US5462467A (en) * 1993-09-08 1995-10-31 Silicon Video Corporation Fabrication of filamentary field-emission device, including self-aligned gate
US7025892B1 (en) 1993-09-08 2006-04-11 Candescent Technologies Corporation Method for creating gated filament structures for field emission displays
US5559389A (en) * 1993-09-08 1996-09-24 Silicon Video Corporation Electron-emitting devices having variously constituted electron-emissive elements, including cones or pedestals
US5564959A (en) * 1993-09-08 1996-10-15 Silicon Video Corporation Use of charged-particle tracks in fabricating gated electron-emitting devices
US5492867A (en) * 1993-09-22 1996-02-20 Westinghouse Elect. Corp. Method for manufacturing a miniaturized solid state mass spectrograph
RU2141698C1 (ru) * 1993-11-04 1999-11-20 Микроэлектроникс энд Компьютер Текнолоджи Корпорейшн Способ изготовления систем дисплея с плоским экраном и компонентов
DE69432174T2 (de) * 1993-11-24 2003-12-11 Tdk Corp., Tokio/Tokyo Kaltkathoden-elektrodenquellenelement und verfahren zur herstellung desselben
US6802752B1 (en) * 1993-12-27 2004-10-12 Canon Kabushiki Kaisha Method of manufacturing electron emitting device
CA2126509C (en) * 1993-12-27 2000-05-23 Toshikazu Ohnishi Electron-emitting device and method of manufacturing the same as well as electron source and image-forming apparatus
US5602439A (en) * 1994-02-14 1997-02-11 The Regents Of The University Of California, Office Of Technology Transfer Diamond-graphite field emitters
US5578901A (en) * 1994-02-14 1996-11-26 E. I. Du Pont De Nemours And Company Diamond fiber field emitters
US5552659A (en) * 1994-06-29 1996-09-03 Silicon Video Corporation Structure and fabrication of gated electron-emitting device having electron optics to reduce electron-beam divergence
US5608283A (en) * 1994-06-29 1997-03-04 Candescent Technologies Corporation Electron-emitting devices utilizing electron-emissive particles which typically contain carbon
US5631196A (en) * 1994-07-18 1997-05-20 Motorola Method for making inversion mode diamond electron source
US5629583A (en) * 1994-07-25 1997-05-13 Fed Corporation Flat panel display assembly comprising photoformed spacer structure, and method of making the same
RU2074444C1 (ru) * 1994-07-26 1997-02-27 Евгений Инвиевич Гиваргизов Матричный автоэлектронный катод и электронный прибор для оптического отображения информации
US6204834B1 (en) 1994-08-17 2001-03-20 Si Diamond Technology, Inc. System and method for achieving uniform screen brightness within a matrix display
US5531880A (en) * 1994-09-13 1996-07-02 Microelectronics And Computer Technology Corporation Method for producing thin, uniform powder phosphor for display screens
RU2144235C1 (ru) * 1994-10-18 2000-01-10 Научно-исследовательский институт "Волга" Вакуумный пленочный микроприбор с автоэлектронными эмиттерами
FR2726689B1 (fr) * 1994-11-08 1996-11-29 Commissariat Energie Atomique Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence
US5592053A (en) * 1994-12-06 1997-01-07 Kobe Steel Usa, Inc. Diamond target electron beam device
US5705886A (en) * 1994-12-21 1998-01-06 Philips Electronics North America Corp. Cathode for plasma addressed liquid crystal display
US6296740B1 (en) 1995-04-24 2001-10-02 Si Diamond Technology, Inc. Pretreatment process for a surface texturing process
US5628659A (en) * 1995-04-24 1997-05-13 Microelectronics And Computer Corporation Method of making a field emission electron source with random micro-tip structures
IL113551A0 (en) * 1995-04-30 1995-07-31 Fish Galina Tapered structure suitable for microthermocouples microelectrodes field emission tips and micromagnetic sensors with force sensing capabilities
US5679895A (en) * 1995-05-01 1997-10-21 Kobe Steel Usa, Inc. Diamond field emission acceleration sensor
US5713775A (en) * 1995-05-02 1998-02-03 Massachusetts Institute Of Technology Field emitters of wide-bandgap materials and methods for their fabrication
US5647998A (en) * 1995-06-13 1997-07-15 Advanced Vision Technologies, Inc. Fabrication process for laminar composite lateral field-emission cathode
US5703380A (en) * 1995-06-13 1997-12-30 Advanced Vision Technologies Inc. Laminar composite lateral field-emission cathode
JPH11510307A (ja) * 1995-08-04 1999-09-07 プリンタブル フィールド エミッターズ リミテッド 電界電子放出材料および装置
JPH11510951A (ja) * 1995-08-14 1999-09-21 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー 蛍光灯
US5688158A (en) * 1995-08-24 1997-11-18 Fed Corporation Planarizing process for field emitter displays and other electron source applications
US5828288A (en) * 1995-08-24 1998-10-27 Fed Corporation Pedestal edge emitter and non-linear current limiters for field emitter displays and other electron source applications
US5844351A (en) * 1995-08-24 1998-12-01 Fed Corporation Field emitter device, and veil process for THR fabrication thereof
US5739637A (en) * 1995-09-28 1998-04-14 Sandia Corporation Cold cathode vacuum discharge tube
US5857882A (en) * 1996-02-27 1999-01-12 Sandia Corporation Processing of materials for uniform field emission
RU2158036C2 (ru) * 1996-02-29 2000-10-20 ООО "Высокие технологии" Способ получения алмазных пленок методом газофазного синтеза
JP2871579B2 (ja) * 1996-03-28 1999-03-17 日本電気株式会社 発光装置およびこれに用いる冷陰極
KR100442982B1 (ko) * 1996-04-15 2004-09-18 마츠시타 덴끼 산교 가부시키가이샤 전계방출형전자원및그제조방법
RU2158037C2 (ru) * 1996-07-16 2000-10-20 ООО "Высокие технологии" Способ получения алмазных пленок методом газофазного синтеза
US6231412B1 (en) * 1996-09-18 2001-05-15 Canon Kabushiki Kaisha Method of manufacturing and adjusting electron source array
US6020677A (en) * 1996-11-13 2000-02-01 E. I. Du Pont De Nemours And Company Carbon cone and carbon whisker field emitters
US5921838A (en) * 1996-12-27 1999-07-13 Motorola, Inc. Method for protecting extraction electrode during processing of Spindt-tip field emitters
US6103133A (en) * 1997-03-19 2000-08-15 Kabushiki Kaisha Toshiba Manufacturing method of a diamond emitter vacuum micro device
US6356014B2 (en) 1997-03-27 2002-03-12 Candescent Technologies Corporation Electron emitters coated with carbon containing layer
US6064148A (en) * 1997-05-21 2000-05-16 Si Diamond Technology, Inc. Field emission device
RU2161838C2 (ru) * 1997-06-24 2001-01-10 Тарис Технолоджис, Инк. Холодноэмиссионный пленочный катод и способы его получения
US6033924A (en) * 1997-07-25 2000-03-07 Motorola, Inc. Method for fabricating a field emission device
US6091190A (en) * 1997-07-28 2000-07-18 Motorola, Inc. Field emission device
US5944573A (en) * 1997-12-10 1999-08-31 Bav Technologies, Ltd. Method for manufacture of field emission array
AU8041698A (en) * 1998-02-27 1999-09-15 Isle Bright Limited Field emitter and method for producing the same
US6181055B1 (en) 1998-10-12 2001-01-30 Extreme Devices, Inc. Multilayer carbon-based field emission electron device for high current density applications
US6441550B1 (en) 1998-10-12 2002-08-27 Extreme Devices Inc. Carbon-based field emission electron device for high current density applications
US6235545B1 (en) * 1999-02-16 2001-05-22 Micron Technology, Inc. Methods of treating regions of substantially upright silicon-comprising structures, method of treating silicon-comprising emitter structures, methods of forming field emission display devices, and cathode assemblies
US7105997B1 (en) * 1999-08-31 2006-09-12 Micron Technology, Inc. Field emitter devices with emitters having implanted layer
US6553786B1 (en) 1999-10-18 2003-04-29 Kiwiat, Inc. Jewelry design employing fluorescent diamonds to create a hidden message
FR2804623B1 (fr) * 2000-02-09 2002-05-03 Univ Paris Curie Procede de traitement d'une surface de diamant et surface de diamant correspondante
CN100454471C (zh) * 2001-03-27 2009-01-21 佳能株式会社 用于形成碳纤维的催化剂,其制造方法和电子发射装置
US6554673B2 (en) 2001-07-31 2003-04-29 The United States Of America As Represented By The Secretary Of The Navy Method of making electron emitters
US6891324B2 (en) * 2002-06-26 2005-05-10 Nanodynamics, Inc. Carbon-metal nano-composite materials for field emission cathodes and devices
RU2530224C1 (ru) * 2013-05-20 2014-10-10 Российская Федерация, от имени которой выступает Министерство промышленности и торговли РФ Способ формирования защитного покрытия на основе пленки некристаллического углерода
US10117847B2 (en) 2015-12-04 2018-11-06 Ventis Pharma Extended duration local anesthetic formulation

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1599668A (en) * 1977-06-02 1981-10-07 Nat Res Dev Semiconductors
JPS5436828B2 (de) * 1974-08-16 1979-11-12
US4164680A (en) * 1975-08-27 1979-08-14 Villalobos Humberto F Polycrystalline diamond emitter
US4307507A (en) * 1980-09-10 1981-12-29 The United States Of America As Represented By The Secretary Of The Navy Method of manufacturing a field-emission cathode structure
JPS62140332A (ja) * 1985-12-16 1987-06-23 Hitachi Ltd 電界放射陰極
EP0278405B1 (de) * 1987-02-06 1996-08-21 Canon Kabushiki Kaisha Elektronen emittierendes Element und dessen Herstellungsverfahren
EP0307109A1 (de) * 1987-08-24 1989-03-15 Canon Kabushiki Kaisha Verfahren zur Herstellung eines Halbleiterkristalls und dabei hergestellter Halbleiterkristall
JPH03505861A (ja) * 1988-06-03 1991-12-19 マサチューセッツ・インステチュート・オブ・テクノロジー ダイヤモンド上の二酸化ケイ素フィルム
US5074456A (en) * 1990-09-18 1991-12-24 Lam Research Corporation Composite electrode for plasma processes
US5129850A (en) * 1991-08-20 1992-07-14 Motorola, Inc. Method of making a molded field emission electron emitter employing a diamond coating

Also Published As

Publication number Publication date
CA2071065A1 (en) 1993-02-21
DE69216710D1 (de) 1997-02-27
DE69216710T2 (de) 1997-07-10
EP0528391B1 (de) 1997-01-15
US5141460A (en) 1992-08-25
DK0528391T3 (da) 1997-02-03
CN1042072C (zh) 1999-02-10
ES2096687T3 (es) 1997-03-16
CN1069826A (zh) 1993-03-10
JP2742750B2 (ja) 1998-04-22
EP0528391A1 (de) 1993-02-24
JPH05205617A (ja) 1993-08-13

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