EP0558393B1 - Micropoint cathode electron source and display device with cathodo-luminescence excited by field emission using same source - Google Patents

Micropoint cathode electron source and display device with cathodo-luminescence excited by field emission using same source Download PDF

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Publication number
EP0558393B1
EP0558393B1 EP93400449A EP93400449A EP0558393B1 EP 0558393 B1 EP0558393 B1 EP 0558393B1 EP 93400449 A EP93400449 A EP 93400449A EP 93400449 A EP93400449 A EP 93400449A EP 0558393 B1 EP0558393 B1 EP 0558393B1
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EP
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Prior art keywords
electrodes
source
series
layer
cathodoluminescent
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EP93400449A
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German (de)
French (fr)
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EP0558393A1 (en
Inventor
Robert Chemin De La Limite Meyer
Thierry Leroux
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/16—Cathodes heated directly by an electric current characterised by the shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/319—Circuit elements associated with the emitters by direct integration

Definitions

  • the invention applies in particular to the field of visualization and, more particularly, to flat screens.
  • FIG. 1A An example of realization of this source of known electrons is schematically represented in top view in FIG. 1A and in cross-section on Figure 1B which is the section CC of Figure 1A.
  • This known source has a structure matrix and comprises a substrate 2 for example in glass and possibly, on this substrate 2, a thin layer of silica 4.
  • silica 4 On this layer of silica 4 is formed a series of electrodes in the form of conductive strips parallel acting as cathode conductors and constituting the columns of the matrix structure.
  • Cathode conductors are covered each with a resistive layer 7.
  • An electrically insulating layer 8 in silica covers the resistive layers 7.
  • the insulating layer 8 Above the insulating layer 8 is formed a series of electrodes which are also shaped parallel conductive strips and one of which appears in FIGS. 1A and 1B and bears the reference 10.
  • Electrodes formed above the layer insulator 8 are perpendicular to the conductors cathodic and play the role of grids which constitute the lines of the matrix structure.
  • the known source also includes a plurality of microdots which constitute transmitters elementary electrons.
  • the layer resistive 7 corresponding to this area supports microtips 12 and the grid corresponding to this area has a hole 14 opposite each of the microtips 12.
  • the insulating layer 8 is also provided with openings 15 allowing passage microtips 12.
  • each of the electrodes of one of the two sets of electrodes has a lattice structure in contact with a resistive layer.
  • each cathode conductor has this structure in trellis and thus includes conductive tracks 5a which cross.
  • each cathode conductor has openings 6 which are delimited by these tracks 5a.
  • Microtips occupy regions central lattice meshes.
  • the electrodes of the other series have a continuous structure (ignoring the small diameter holes 14 arranged opposite the microtips 12).
  • Electrodes with a structure trellis is intended to minimize the risk of breakdown at the microtips, limiting the electric current in them, and therefore avoid the formation of short circuits between lines and columns via these microtips.
  • the layer insulator 8 because of the defects that the layer insulator 8 is likely to present, it remains possibility of short circuit in areas of covering of the lattice electrodes by the continuous electrodes.
  • the area of the overlap areas is equal to the surface of the lattice structure electrodes.
  • the object of the present invention is to reduce the risk of short circuits more than it does this known source and, to do this, suggests reduce the overlapping areas of the two series even more importantly than in the source known from document (3).
  • the source object of the present invention comprising the first series of electrodes and the second set of electrodes that have been mentioned above, is characterized by the fact that the second openings are offset from at the first openings and thus placed opposite the trellis tracks, the first and second openings are therefore not superimposed.
  • each discontinuous electrode must be such as to allow to apply the electric field on the microtips corresponding.
  • each discontinuous electrode an area as small as possible and a structure that minimizes areas of covering with the lattice structure electrode corresponding.
  • the second openings are placed opposite the intersections of the lattice tracks.
  • the electrodes having the lattice structure are the electrodes of the second set of electrodes and the discontinuous electrodes are the electrodes of the first series of electrodes.
  • the electrodes having the structure in trellis are the electrodes of the first series of electrodes and the discontinuous electrodes are the electrodes of the second set of electrodes.
  • the resistive layer and the support on which the first series is formed of electrodes are at least partially transparent to the light emitted by the cathodoluminescent material under the impact of electrons, in order to observe what cathodoluminescent material through this support.
  • the anode cathodoluminescent includes an electrode which is able to reflect the light emitted by the layer of cathodoluminescent material, the latter being formed on this electrode and opposite the second series of electrodes.
  • each of the electrodes first and second series of electrodes either formed on a layer which is capable of adsorbing the light coming from outside the device.
  • Figure 2A is a top view schematic of an electron source conforming to the invention and Figure 2B is a sectional view schematic, according to DD, of this source.
  • This source according to the invention differs simply from the known source which is depicted on Figures 1A and 1B by the fact that its grids are discontinuous electrodes.
  • Cathode conductors 5 from a source Figures 2A and 2B still have a structure of lattice while 10g grids from this source have openings 11 which make these grids discontinuous or openwork.
  • openings 11 are opposite the areas of crossing of the conductive tracks 5a of the trellis and are even centered on these areas, seen from above, as seen in Figure 2A.
  • the grids still have holes 14a respectively opposite the microtips 12 from the source.
  • each 10g grid of the source of FIGS. 2A and 2B has substantially the structure of a trellis identical to the conductor's trellis corresponding cathodic but the trellis of this grid is offset from the trellis of the cathode conductor, half a step parallel to lines and half a step parallel to the columns of the source and, above an area where are gathered micro-tips, this grid has, in top view, a square surface 10a which is pierced by the holes 14a and which lead to four tracks 10b making part of the trellis of this grid.
  • This square area is less than the surface of the opening 6 opposite which it is find.
  • each cathode conductor 18 is formed on layer 4, and is thus under the resistive layer 7, and has, in top view, the same shape as the electrode 10g of Figures 2A and 2B, except that this cathode conductor has no holes at the level of the microtips which are carried by the layer resistive 7.
  • a layer resistive 20 is formed on the insulating layer 8 and provided with holes 21 opposite the microtips for let pass the electrons emitted by it during the excitement of the source.
  • Grid 22 corresponding to the conductor cathode 10g is formed on this resistive layer 20 and has a trellis structure which we see, in section, tracks 22a in FIG. 3.
  • each driver to trellis structure can be either above the corresponding resistive layer (case of Figure 3) either below this resistive layer (case of Figure 2B).
  • a source according to the invention presents, in relation to the source known from document (3), the key benefit of reducing the likelihood of short circuit between the rows and columns of the source and therefore improve manufacturing yield from the source.
  • a source according to the invention has plus a very important advantage: it allows reduce the capacity between rows and columns in a proportion substantially identical to that of reducing the area of the electrode which is made discontinuous.
  • a known cathodoluminescent screen is schematically represented in section in FIG. 4.
  • This known screen has a source of microtip electrons 24 whose substrate can be seen insulator 26, resistive layer 28, microtips 12, the insulating layer 8 and a grid 10.
  • a space 30 in which we made the vacuum separates this microtip source 24 from a substrate electrically insulating and transparent 32 which is provided an electrically conductive and transparent layer 34 forming an anode.
  • this layer 36 emits a light 38 that a user 40 of the screen observe through the transparent substrate 32.
  • FIG. 5 a screen conforming to the invention, which is represented in FIG. 5 and which includes an electron source 42 for example kind of that of Figures 2A and 2B which we see the substrate 2, the silica layer 4, a conductor cathodic 5, the resistive layer 7, the insulating layer 8, the microtips 12 and a grid 10g.
  • an electron source 42 for example kind of that of Figures 2A and 2B which we see the substrate 2, the silica layer 4, a conductor cathodic 5, the resistive layer 7, the insulating layer 8, the microtips 12 and a grid 10g.
  • the additional advantage is as follows: if the resistive layer 7 is transparent to the light 50 emitted by the phosphor 48 under the impact of the electrons coming from the microtips 12, which is obtained by producing this resistive layer in SnO 2 by example, then the electron source 22 according to the invention can have a high transmission coefficient, greater than 50%, vis-à-vis this light 50.
  • a conductive layer 46 a layer capable of reflect the light 50 emitted by the phosphor.
  • each cathode conductor and each grid are preferably formed on an underlay 52 able to adsorb light 54 outside the screen, as seen in the example shown on the figure 6.
  • This exterior light 54 is thus adsorbed instead of being reflected back to the observer.
  • the width d of the conductive tracks 5a forming the trellis is 2 micrometers.
  • a network of sixteen microtips 12 is made in the center of the mesh.
  • the distance a between two microtips is 3 micrometers.
  • the distance r between this microtip network and the tracks is 7 micrometers.
  • the 10g grid which is associated with the conductor cathode 5 and seen in Figure 7B has a perforated surface and this grid has square conductors 10a whose sides d1 are equal to 11 micrometers and which are positioned in the center of mesh of the trellis so as to cover the networks of microtips.
  • each driver square is powered by four conductive tracks, this which makes the probability of having a driver very low square not powered.
  • the surface of the overlap zones 16 between a cathode conductor and the corresponding grid is worth 4 x 4 micrometers 2, that is to say 16 micrometers 2 , instead of 200 micrometers 2 in a known source by document (3).
  • the grid surface is thus reduced by one coefficient greater than 4 compared to a source described in document (3).
  • Capacity between rows and columns is therefore substantially divided by 4, which reduces all the more capacitive consumption.
  • the transmission of a grid is worth about 75% and the transmission of a cathode conductor is worth about 85%.
  • the cathode conductors to lattice structure and openwork grids are advantageously formed on an absorbent layer, for improve the contrast under illumination.
  • This adsorbent layer is for example formed by a black chrome film of a few tens nanometers thick.

Landscapes

  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)

Description

La présente invention concerne une source d'électrons comprenant :

  • sur un support électriquement isolant, une première série d'électrodes parallèles jouant le rôle de conducteurs cathodiques et portant une pluralité de micropointes en matériau émetteur d'électrons,
  • une deuxième série d'électrodes parallèles, jouant le rôle de grilles, électriquenent isolées des conducteurs cathodiques et faisant un angle avec ceux-ci, ce qui définit des zones de croisement des conducteurs cathodiques et des grilles,
  • chacune des électrodes de l'une des séries étant en contact avec une couche résistive et possédant une structure en treillis, comportant ainsi des pistes qui se croisent et délimitent des premières ouvertures,
  • chacune des électrodes de l'autre série étant discontinue et comportant ainsi des deuxièmes ouvertures.
The present invention relates to an electron source comprising:
  • on an electrically insulating support, a first series of parallel electrodes acting as cathode conductors and carrying a plurality of microtips in electron emitting material,
  • a second series of parallel electrodes, playing the role of grids, electrically isolated from the cathode conductors and making an angle with them, which defines the crossing zones of the cathode conductors and the grids,
  • each of the electrodes of one of the series being in contact with a resistive layer and having a lattice structure, thus comprising tracks which intersect and delimit first openings,
  • each of the electrodes of the other series being discontinuous and thus comprising second openings.

L'invention s'applique notamment au domaine de la visualisation et, plus particulièrement, aux écrans plats. The invention applies in particular to the field of visualization and, more particularly, to flat screens.

On connaít déjà des sources d'électrons à cathodes émissives à micropointes par les documents suivants :

  • (1) demande de brevet français n° 86 01024 du 24 janvier 1986, correspondant à US-A-4,857,161
  • (2) demande de brevet français n° 87 15432 du 6 novembre 1987, correspondant à US-A-4,940,916
  • (3) demande de brevet français n° 90 07347 du 13 juin 1990.
    • We already know sources of electrons with microtip emissive cathodes by the following documents:
  • (1) French patent application no. 86 01 024 of January 24, 1986, corresponding to US-A-4,857,161
  • (2) French patent application no. 87 15432 of November 6, 1987, corresponding to US-A-4,940,916
  • (3) French patent application No. 90 07347 of June 13, 1990.

    • De telles sources sont également connues par les documents WO-A-8911157 et FR-A-2650119. Such sources are also known from documents WO-A-8911157 and FR-A-2650119.

    En particulier, on connaít par le document (3), auquel on se reportera, une source d'électrons du genre de celle qui a été mentionnée plus haut et dont des électrodes ont ainsi une structure en treillis. In particular, we know from the document (3), to which reference will be made, a source of electrons from the kind of the one that was mentioned above and whose electrodes thus have a lattice structure.

    Un exemple de réalisation de cette source d'électrons connue est schématiquement représentée en vue de dessus sur la figure 1A et en vue en coupe sur la figure 1B qui est la coupe CC de la figure 1A. An example of realization of this source of known electrons is schematically represented in top view in FIG. 1A and in cross-section on Figure 1B which is the section CC of Figure 1A.

    Cette source connue a une structure matricielle et comprend un substrat 2 par exemple en verre et éventuellement, sur ce substrat 2, une mince couche de silice 4. This known source has a structure matrix and comprises a substrate 2 for example in glass and possibly, on this substrate 2, a thin layer of silica 4.

    Sur cette couche de silice 4 est formée une série d'électrodes en forme de bandes conductrices parallèles jouant le rôle de conducteurs cathodiques et constituant les colonnes de la structure matricielle. On this layer of silica 4 is formed a series of electrodes in the form of conductive strips parallel acting as cathode conductors and constituting the columns of the matrix structure.

    On voit sur les figures lA et 1B l'un de ces conducteurs cathodiques, qui porte la référence 5. One of these is seen in Figures 1A and 1B cathode conductors, which bears the reference 5.

    Les conducteurs cathodiques sont recouverts chacun par une couche résistive 7. Cathode conductors are covered each with a resistive layer 7.

    Une couche électriquement isolante 8 en silice recouvre les couches résistives 7. An electrically insulating layer 8 in silica covers the resistive layers 7.

    Au-dessus de la couche isolante 8 est formée une série d'électrodes qui sont également en forme de bandes conductrices parallèles et dont l'une apparaít sur les figures 1A et 1B et porte la référence 10. Above the insulating layer 8 is formed a series of electrodes which are also shaped parallel conductive strips and one of which appears in FIGS. 1A and 1B and bears the reference 10.

    Ces électrodes formées au-dessus de la couche isolante 8 sont perpendiculaires aux conducteurs cathodiques et jouent le rôle de grilles qui constituent les lignes de la structure matricielle. These electrodes formed above the layer insulator 8 are perpendicular to the conductors cathodic and play the role of grids which constitute the lines of the matrix structure.  

    La source connue comporte également une pluralité de micropointes qui constituent des émetteurs élémentaires d'électrons. The known source also includes a plurality of microdots which constitute transmitters elementary electrons.

    Dans chacune des zones de croisement des conducteurs cathodiques et des grilles, la couche résistive 7 correspondant à cette zone supporte des micropointes 12 et la grille correspondant à cette zone comporte un trou 14 en regard de chacune des micropointes 12. In each of the crossing zones of cathode conductors and grids, the layer resistive 7 corresponding to this area supports microtips 12 and the grid corresponding to this area has a hole 14 opposite each of the microtips 12.

    Chacune de ces dernières épouse sensiblement la forme d'un cône dont la base repose sur la couche résistive 7 et dont le sommet est situé au niveau de l'ouverture 14 correspondante. Each of these latter marries appreciably the shape of a cone whose base rests on the layer resistive 7 and the apex of which is located at the corresponding opening 14.

    Bien entendu, la couche isolante 8 est également pourvue d'ouvertures 15 permettant le passage des micropointes 12. Of course, the insulating layer 8 is also provided with openings 15 allowing passage microtips 12.

    De plus, chacune des électrodes de l'une des deux séries d'électrodes a une structure en treillis en contact avec une couche résistive. In addition, each of the electrodes of one of the two sets of electrodes has a lattice structure in contact with a resistive layer.

    Dans l'exemple représenté sur les figures 1A et 1B, chaque conducteur cathodique a cette structure en treillis et comporte ainsi des pistes conductrices 5a qui se croisent. In the example shown in Figures 1A and 1B, each cathode conductor has this structure in trellis and thus includes conductive tracks 5a which cross.

    De ce fait, chaque conducteur cathodique comporte des ouvertures 6 qui sont délimitées par ces pistes 5a. Therefore, each cathode conductor has openings 6 which are delimited by these tracks 5a.

    Les micropointes occupent des régions centrales des mailles du treillis. Microtips occupy regions central lattice meshes.

    Les électrodes de l'autre série (les grilles dans l'exemple représenté) ont une structure continue (en faisant abstraction des trous 14 de faible diamètre disposés en regard des micropointes 12). The electrodes of the other series (the grids in the example shown) have a continuous structure (ignoring the small diameter holes 14 arranged opposite the microtips 12).

    L'utilisation des électrodes à structure en treillis est destinée à minimiser les risques de claquage au niveau des micropointes, en limitant le courant électrique dans celles-ci, et donc d'éviter la formation de courts-circuits entre les lignes et les colonnes par l'intermédiaire de ces micropointes. The use of electrodes with a structure trellis is intended to minimize the risk of breakdown at the microtips, limiting the   electric current in them, and therefore avoid the formation of short circuits between lines and columns via these microtips.

    Cependant, la source connue dont on vient de rappeler les caractéristiques présente un inconvénient. However, the known source which we just recalling the characteristics has a drawback.

    En effet, à cause des défauts que la couche isolante 8 est susceptible de présenter, il subsiste une possibilité de court-circuit dans les zones de recouvrement des électrodes en treillis par les électrodes continues. Indeed, because of the defects that the layer insulator 8 is likely to present, it remains possibility of short circuit in areas of covering of the lattice electrodes by the continuous electrodes.

    En se reportant à la figure 1A on remarque que la surface des zones de recouvrement est égale à la surface des électrodes à structure en treillis. Referring to Figure 1A we note that the area of the overlap areas is equal to the surface of the lattice structure electrodes.

    La présente invention a pour but de réduire les risques de courts-circuits plus que ne le fait cette source connue et, pour ce faire, propose de réduire les zones de recouvrement des deux séries d'électrodes de façon encore plus importante que dans la source connue par le document (3). The object of the present invention is to reduce the risk of short circuits more than it does this known source and, to do this, suggests reduce the overlapping areas of the two series even more importantly than in the source known from document (3).

    Plus précisément, la source objet de la présente invention, comportant la première série d'électrodes et la deuxième série d'électrodes qui ont été mentionnées plus haut, est caractérisée par le fait que les deuxièmes ouvertures sont décalées par rapport aux premières ouvertures et ainsi placées en regard des pistes des treillis, les premières et deuxièmes ouvertures n'étant donc pas superposées. More specifically, the source object of the present invention, comprising the first series of electrodes and the second set of electrodes that have been mentioned above, is characterized by the fact that the second openings are offset from at the first openings and thus placed opposite the trellis tracks, the first and second openings are therefore not superimposed.

    Bien entendu, la structure de chaque électrode discontinue doit être telle qu'elle permette d'appliquer le champ électrique sur les micropointes correspondantes. Of course, the structure of each discontinuous electrode must be such as to allow to apply the electric field on the microtips corresponding.

    De plus, on donne de préférence à chaque électrode discontinue une surface aussi faible que possible et une structure qui minimise les zones de recouvrement avec l'électrode à structure en treillis correspondante. In addition, each discontinuous electrode an area as small as possible and a structure that minimizes areas of covering with the lattice structure electrode   corresponding.

    De préférence, afin de réduire encore plus les zones de recouvrement avec les électrodes en treillis, les deuxièmes ouvertures (correspondant aux électrodes discontinues) sont placées en regard des intersections des pistes des treillis. Preferably, in order to further reduce overlapping areas with the electrodes trellis, the second openings (corresponding to discontinuous electrodes) are placed opposite the intersections of the lattice tracks.

    Selon un premier mode de réalisation particulier de la source objet de l'invention, les électrodes possédant la structure en treillis sont les électrodes de la deuxième série d'électrodes et les électrodes discontinues sont les électrodes de la première série d'électrodes. According to a first embodiment particular of the source object of the invention, the electrodes having the lattice structure are the electrodes of the second set of electrodes and the discontinuous electrodes are the electrodes of the first series of electrodes.

    Selon un deuxiène mode de réalisation particulier, les électrodes possédant la structure en treillis sont les électrodes de la première série d'électrodes et les électrodes discontinues sont les électrodes de la deuxième série d'électrodes. According to a second embodiment particular, the electrodes having the structure in trellis are the electrodes of the first series of electrodes and the discontinuous electrodes are the electrodes of the second set of electrodes.

    La présente invention a également pour objet un dispositif de visualisation par cathodoluminescence, comprenant :

    • une source d'électrons à cathodes émissives à micropointes, et
    • une anode cathodoluminescente comportant une couche d'un matériau cathodoluminescent,
    ce dispositif étant caractérisé en ce que la source est conforme à la source objet de la présente invention. The present invention also relates to a display device by cathodoluminescence, comprising:
    • a source of electrons with microtip emissive cathodes, and
    • a cathodoluminescent anode comprising a layer of a cathodoluminescent material,
    this device being characterized in that the source conforms to the source object of the present invention.

    De préférence, la couche résistive et le support sur lequel est formée la première série d'électrodes sont au moins partiellement transparents à la lumière émise par le matériau cathodoluminescent sous l'impact des électrons, afin d'observer ce matériau cathodoluminescent à travers ce support. Preferably, the resistive layer and the support on which the first series is formed of electrodes are at least partially transparent to the light emitted by the cathodoluminescent material under the impact of electrons, in order to observe what cathodoluminescent material through this support.

    Ceci permet d'améliorer de façon importante le rendement lumineux du dispositif et de réduire ainsi la consommation électrique du dispositif. This significantly improves the light output of the device and thereby reduce the power consumption of the device.  

    Pour améliorer encore plus le rendement lumineux, il est préférable que l'anode cathodoluminescente comprenne une électrode qui est apte à réfléchir la lumière émise par la couche de matériau cathodoluminescent, cette dernière étant formée sur cette électrode et en regard de la deuxième série d'électrodes. To further improve performance bright, it is better that the anode cathodoluminescent includes an electrode which is able to reflect the light emitted by the layer of cathodoluminescent material, the latter being formed on this electrode and opposite the second series of electrodes.

    Enfin, en vue d'améliorer également le contraste du dispositif sous éclairement (le matériau cathodoluminescent étant observé à travers ledit support), il est préférable que chacune des électrodes des première et deuxième séries d'électrodes soit formée sur une couche qui est apte à adsorber la lumière arrivant de l'extérieur du dispositif. Finally, with a view also to improving the contrast of the device under illumination (the material cathodoluminescent being observed through said support), it is preferable that each of the electrodes first and second series of electrodes either formed on a layer which is capable of adsorbing the light coming from outside the device.

    La présente invention sera mieux comprise à la lecture de la description d'exemples de réalisation donnés ci-après, à titre purement indicatif et nullement limitatif, en faisant référence aux dessins annexés sur lesquels :

    • les figures 1A et 1B représentent respectivement une vue de dessus schématique et une vue en coupe schématique d'une source d'électrons connue et ont déjà été décrites,
    • les figures 2A et 2B représentent respectivement une vue de dessus schématique et une vue en coupe schématique d'un mode de réalisation particulier de la source d'électrons objet de l'invention, dans lequel les conducteurs cathodiques ont une structure de treillis tandis que les grilles sont des électrodes discontinues,
    • la figure 3 est une vue en coupe schématique d'un autre mode de réalisation particulier de la source objet de l'invention, dans lequel les conducteurs cathodiques forment des électrodes discontinues tandis que les grilles ont une structure de treillis,
    • la figure 4 est une vue en coupe schématique d'un dispositif connu de visualisation par cathodoluminescence, dont le matériau cathodoluminescent est observé du côté opposé à son excitation,
    • la figure 5 est une vue en coupe schématique d'un dispositif de visualisation par cathodoluminescence conforme à l'invention, dont le matériau cathodoluminescent est observé du côté de l'excitation de ce matériau,
    • la figure 6 est une vue schématique et partielle d'un dispositif de visualisation par cathodoluminescence conforme à l'invention, dont les conducteurs cathodiques et les grilles sont munis de sous-couches adsorbantes, et
    • les figures 7A, 7B et 7C illustrent schématiquement et partiellement les structures d'un conducteur cathodique d'un grille et d'une cathode émissive faisant partie d'une source conforme à l'invention.
    The present invention will be better understood on reading the description of exemplary embodiments given below, by way of purely indicative and in no way limiting, with reference to the appended drawings in which:
    • FIGS. 1A and 1B respectively represent a schematic top view and a schematic sectional view of a known electron source and have already been described,
    • FIGS. 2A and 2B respectively represent a schematic top view and a schematic sectional view of a particular embodiment of the electron source object of the invention, in which the cathode conductors have a lattice structure while the grids are discontinuous electrodes,
    • FIG. 3 is a schematic sectional view of another particular embodiment of the source which is the subject of the invention, in which the cathode conductors form discontinuous electrodes while the grids have a lattice structure,
    • FIG. 4 is a schematic sectional view of a known cathodoluminescence display device, the cathodoluminescent material of which is observed on the side opposite to its excitation,
    • FIG. 5 is a schematic sectional view of a cathodoluminescence display device according to the invention, the cathodoluminescent material of which is observed on the excitation side of this material,
    • FIG. 6 is a schematic and partial view of a cathodoluminescence display device according to the invention, the cathode conductors and the grids of which are provided with adsorbent sublayers, and
    • FIGS. 7A, 7B and 7C schematically and partially illustrate the structures of a cathode conductor of a grid and of an emissive cathode forming part of a source according to the invention.

    La figure 2A est une vue de dessus schématique d'une source d'électrons conforme à l'invention et la figure 2B est une vue en coupe schématique, selon DD, de cette source. Figure 2A is a top view schematic of an electron source conforming to the invention and Figure 2B is a sectional view schematic, according to DD, of this source.

    Cette source conforme à l'invention diffère simplement de la source connue qui est représentée sur les figures 1A et 1B par le fait que ses grilles sont des électrodes discontinues. This source according to the invention differs simply from the known source which is depicted on Figures 1A and 1B by the fact that its grids are discontinuous electrodes.

    Les conducteurs cathodiques 5 de la source des figures 2A et 2B ont encore une structure de treillis tandis que les grilles 10g de cette source comportent des ouvertures 11 qui rendent ces grilles discontinues ou ajourées. Cathode conductors 5 from a source Figures 2A and 2B still have a structure of lattice while 10g grids from this source have openings 11 which make these grids discontinuous or openwork.

    Ces ouvertures 11 sont en regard des zones de croisement des pistes conductrices 5a des treillis et sont même centrées sur ces zones, en vue de dessus, comme on le voit sur la figure 2A. These openings 11 are opposite the areas of   crossing of the conductive tracks 5a of the trellis and are even centered on these areas, seen from above, as seen in Figure 2A.

    Bien entendu, les grilles comportent encore des trous 14a respectivement en regard des micropointes 12 de la source. Of course, the grids still have holes 14a respectively opposite the microtips 12 from the source.

    Plus précisément, chaque grille 10g de la source des figures 2A et 2B a sensiblement la structure d'un treillis identique au treillis du conducteur cathodique correspondant, mais le treillis de cette grille est décalé, par rapport au treillis du conducteur cathodique, d'un demi-pas parallèlement aux lignes et d'un demi-pas parallèlement aux colonnes de la source et, au-dessus d'une zone où sont rassemblées des micro-pointes, cette grille a, en vue de dessus, une surface carrée 10a qui est percée par les trous 14a et à laquelle aboutissent quatre pistes 10b faisant partie du treillis de cette grille. Specifically, each 10g grid of the source of FIGS. 2A and 2B has substantially the structure of a trellis identical to the conductor's trellis corresponding cathodic but the trellis of this grid is offset from the trellis of the cathode conductor, half a step parallel to lines and half a step parallel to the columns of the source and, above an area where are gathered micro-tips, this grid has, in top view, a square surface 10a which is pierced by the holes 14a and which lead to four tracks 10b making part of the trellis of this grid.

    Cette surface carrée est inférieure à la surface de l'ouverture 6 en regard de laquelle elle se trouve. This square area is less than the surface of the opening 6 opposite which it is find.

    On voit sur la figure 2A que les zones 16 de recouvrement des pistes 5a du conducteur cathodique et des pistes 10b de la grille qui lui fait face ont une surface très faible. It can be seen in FIG. 2A that the zones 16 of covering the tracks 5a of the cathode conductor and tracks 10b of the grid in front of it have a very small surface.

    Dans la source d'électrons conforme à l'invention, dont une vue en coupe est schématiquement représentée sur la figure 3, ce sont les grilles qui ont une structure de treillis tandis que les conducteurs cathodiques forment des électrodes discontinues. In the electron source conforming to the invention, a section view of which is schematically shown in Figure 3, these are the grids that have a trellis structure while the cathode conductors form electrodes discontinuous.

    Plus précisément, dans l'exemple représenté sur la figure 3, chaque conducteur cathodique 18 est formé sur la couche 4, et se trouve ainsi sous la couche résistive 7, et a, en vue de dessus, la même forme que l'électrode 10g des figures 2A et 2B, excepté que ce conducteur cathodique ne comporte aucun trou au niveau des micropointes qui sont portées par la couche résistive 7. More specifically, in the example shown in FIG. 3, each cathode conductor 18 is formed on layer 4, and is thus under the resistive layer 7, and has, in top view, the same   shape as the electrode 10g of Figures 2A and 2B, except that this cathode conductor has no holes at the level of the microtips which are carried by the layer resistive 7.

    Dans le cas de la figure 3, une couche résistive 20 est formée sur la couche isolante 8 et pourvue de trous 21 en regard des micropointes pour laisser passer les électrons émis par celle-ci lors de l'excitation de la source. In the case of Figure 3, a layer resistive 20 is formed on the insulating layer 8 and provided with holes 21 opposite the microtips for let pass the electrons emitted by it during the excitement of the source.

    La grille 22 correspondant au conducteur cathodique 10g est formée sur cette couche résistive 20 et a une structure de treillis dont on voit, en coupe, des pistes 22a sur la figure 3. Grid 22 corresponding to the conductor cathode 10g is formed on this resistive layer 20 and has a trellis structure which we see, in section, tracks 22a in FIG. 3.

    Bien entendu, comme dans le cas de la source décrite dans le document (3), chaque conducteur à structure de treillis peut être soit au-dessus de la couche résistive correspondante (cas de la figure 3) soit au-dessous de cette couche résistive (cas de la figure 2B). Of course, as in the case of the source described in document (3), each driver to trellis structure can be either above the corresponding resistive layer (case of Figure 3) either below this resistive layer (case of Figure 2B).

    Une source conforme à l'invention présente, par rapport à la source connue par le document (3), l'avantage essentiel de réduire la probabilité de court-circuit entre les lignes et les colonnes de la source et donc d'améliorer le rendement de fabrication de la source. A source according to the invention presents, in relation to the source known from document (3), the key benefit of reducing the likelihood of short circuit between the rows and columns of the source and therefore improve manufacturing yield from the source.

    Une source conforme à l'invention présente de plus un avantage très important : elle permet de réduire la capacité entre les lignes et les colonnes dans une proportion sensiblement identique à celle de la réduction de la surface de l'électrode qui est rendue discontinue. A source according to the invention has plus a very important advantage: it allows reduce the capacity between rows and columns in a proportion substantially identical to that of reducing the area of the electrode which is made discontinuous.

    Ceci est très important car la diminution de cette capacité permet de réduire la consommation électrique d'un dispositif de visualisation par cathodoluminescence (plus simplement appelé écran cathodoluminescent) que l'on réalise avec une source d'électrons à micropointes, consommation électrique dont une part importante est la consommation capacitive de la source d'électrons. This is very important because the decrease in this capacity reduces consumption display device cathodoluminescence (more simply called screen   cathodoluminescent) that we realize with a source microtip electrons, power consumption a large part of which is capacitive consumption from the electron source.

    On explique ci-après un avantage supplémentaire important d'une source conforme à l'invention. An advantage is explained below significant additional from a source consistent with the invention.

    Un écran cathodoluminescent connu est schématiquement représenté en coupe sur la figure 4. A known cathodoluminescent screen is schematically represented in section in FIG. 4.

    Cet écran connu comporte une source d'électrons à micropointes 24 dont on voit le substrat isolant 26, la couche résistive 28, les micropointes 12, la couche isolante 8 et une grille 10. This known screen has a source of microtip electrons 24 whose substrate can be seen insulator 26, resistive layer 28, microtips 12, the insulating layer 8 and a grid 10.

    Un espace 30 dans lequel on a fait le vide sépare cette source à micropointes 24 d'un substrat électriquement isolant et transparent 32 qui est pourvu d'une couche électriquement conductrice et transparente 34 formant une anode. A space 30 in which we made the vacuum separates this microtip source 24 from a substrate electrically insulating and transparent 32 which is provided an electrically conductive and transparent layer 34 forming an anode.

    Celle-ci est disposée en regard de la source à micropointes 24 et revêtue, en face de cette source, d'une couche 36 d'un matériau cathodoluminescent, encore appelé "luminophore". This is arranged opposite the source to microtips 24 and coated, opposite this source, a layer 36 of a cathodoluminescent material, also called "luminophore".

    Sous l'impact des électrons émis par les micropointes lorsque la source fonctionne, cette couche 36 émet une lumière 38 qu'un utilisateur 40 de l'écran observe à travers le substrat transparent 32. Under the impact of electrons emitted by microtips when the source is working, this layer 36 emits a light 38 that a user 40 of the screen observe through the transparent substrate 32.

    Avec cet écran connu, le luminophore est donc observé du côté opposé à son excitation. With this known screen, the phosphor is therefore observed from the side opposite his excitement.

    On considère maintenant un écran conforme à l'invention, que l'on a représenté sur la figure 5 et qui comprend une source d'électrons 42 par exemple du genre de celle des figures 2A et 2B dont on voit le substrat 2, la couche de silice 4, un conducteur cathodique 5, la couche résistive 7, la couche isolante 8, les micropointes 12 et une grille 10g. We now consider a screen conforming to the invention, which is represented in FIG. 5 and which includes an electron source 42 for example kind of that of Figures 2A and 2B which we see the substrate 2, the silica layer 4, a conductor cathodic 5, the resistive layer 7, the insulating layer 8, the microtips 12 and a grid 10g.  

    En regard de cette source 42, on a encore un substrat électriquement isolant 44 revêtu d'une couche conductrice 46, elle-même revêtue d'une couche de luminophore 48 en regard de la source à micropointes 42, un espace vide d'air 30 étant encore prévu entre la source 42 et la couche 48. Next to this source 42, we still have a electrically insulating substrate 44 coated with a layer conductive 46, itself coated with a layer of phosphor 48 next to the microtip source 42, an air void space 30 still being provided between the source 42 and layer 48.

    L'avantage supplémentaire est le suivant : si la couche résistive 7 est transparente à la lumière 50 émise par le luminophore 48 sous l'impact des électrons provenant des micropointes 12, ce que l'on obtient en réalisant cette couche résistive en SnO2 par exemple, alors la source d'électrons 22 conforme à l'invention peut avoir un coefficient de transmission élevé, supérieur à 50%, vis-à-vis de cette lumière 50. The additional advantage is as follows: if the resistive layer 7 is transparent to the light 50 emitted by the phosphor 48 under the impact of the electrons coming from the microtips 12, which is obtained by producing this resistive layer in SnO 2 by example, then the electron source 22 according to the invention can have a high transmission coefficient, greater than 50%, vis-à-vis this light 50.

    Dans ce cas, on peut réaliser une nouvelle structure d'écran dans laquelle le luminophore 48 est observé du côté de l'excitation de celui-ci, à travers la source à micropointes (les couches de silice 4 et 8 sont transparentes à la lumière 50 et le substrat 2 est par exemple réalisé en verre pour l'être aussi). In this case, we can perform a new screen structure in which the phosphor 48 is observed from the excitement side of it, through the microtip source (the silica layers 4 and 8 are transparent to light 50 and the substrate 2 is for example made of glass to be it too).

    Ceci permet d'améliorer le rendement lumineux de cet écran et donc d'abaisser la consommation électrique de celui-ci. This improves the light output of this screen and therefore lower consumption electric of it.

    Dans ce cas, on choisit de préférence, en tant que couche conductrice 46, une couche apte à réfléchir la lumière 50 émise par le luminophore. In this case, we preferably choose, by as a conductive layer 46, a layer capable of reflect the light 50 emitted by the phosphor.

    Dans le cas d'un écran conforme à l'invention qui est observable à travers la source d'électrons qu'il comporte, chaque conducteur cathodique et chaque grille sont de préférence formés sur une sous-couche 52 apte à adsorber la lumière 54 extérieure à l'écran, comme on le voit dans l'exemple représenté sur la figure 6. In the case of a screen according to the invention which is observable through the electron source that it comprises, each cathode conductor and each grid are preferably formed on an underlay 52 able to adsorb light 54 outside the screen, as seen in the example shown on the figure 6.

    Ceci permet d'améliorer le contraste de l'écran éclairé par cette lumière 54. This improves the contrast of the screen lit by this light 54.  

    Cette lumière extérieure 54 est ainsi adsorbée au lieu d'être réfléchie vers l'observateur. This exterior light 54 is thus adsorbed instead of being reflected back to the observer.

    On donne ci-après, à titre purement indicatif et nullement limitatif, en faisant référence aux figures 7A, 7B et 7C, des valeurs numériques relatives aux améliorations apportées par l'invention vis-à-vis de sources d'électrons à micropointes connues. We give below, for information only and in no way limitative, by referring to Figures 7A, 7B and 7C, relative numerical values improvements made by the invention vis-à-vis from known microtip electron sources.

    Dans l'exemple de la figure 7A, on voit un conducteur cathodique 5 à structure en treillis, avec des mailles dont le pas p vaut 25 micromètres. In the example of FIG. 7A, we see a cathode conductor 5 with a lattice structure, with meshes whose pitch p is 25 micrometers.

    La largeur d des pistes conductrices 5a formant le treillis vaut 2 micromètres. The width d of the conductive tracks 5a forming the trellis is 2 micrometers.

    Un réseau de seize micropointes 12 est réalisé au centre des mailles du treillis. A network of sixteen microtips 12 is made in the center of the mesh.

    La distance a entre deux micropointes vaut 3 micromètres. The distance a between two microtips is 3 micrometers.

    La distance r entre ce réseau de micropointes et les pistes vaut 7 micromètres. The distance r between this microtip network and the tracks is 7 micrometers.

    La grille 10g qui est associée au conducteur cathodique 5 et que l'on voit sur la figure 7B a une surface ajourée et cette grille comporte des conducteurs carrés 10a dont les côtés d1 valent 11 micromètres et qui sont positionnés au centre des mailles du treillis de façon à recouvrir les réseaux de micropointes. The 10g grid which is associated with the conductor cathode 5 and seen in Figure 7B has a perforated surface and this grid has square conductors 10a whose sides d1 are equal to 11 micrometers and which are positioned in the center of mesh of the trellis so as to cover the networks of microtips.

    Tous ces conducteurs carrés sont reliés entre eux par des pistes conductrices 10b dont la largeur d2 vaut 2 micromètres. All these square conductors are connected between them by conductive tracks 10b whose width d2 is worth 2 micrometers.

    Dans l'exemple représenté, chaque conducteur carré est alimenté par quatre pistes conductrices, ce qui rend très faible la probalité d'avoir un conducteur carré non alimenté. In the example shown, each driver square is powered by four conductive tracks, this which makes the probability of having a driver very low square not powered.

    On peut faire les constatations suivantes à propos de l'exemple numérique que l'on vient de donner à titre purement indicatif et nullement limitatif. The following observations can be made at about the digital example that we just gave purely for information and in no way limitative.  

    Pour chaque maille, la surface des zones de recouvrement 16 entre un conducteur cathodique et la grille correspondante (figure 7C) vaut 4 x 4 micromètres2 c'est-à-dire 16 micromètres2, au lieu de 200 micromètres2 dans une source connue par le document (3). For each mesh, the surface of the overlap zones 16 between a cathode conductor and the corresponding grid (FIG. 7C) is worth 4 x 4 micrometers 2, that is to say 16 micrometers 2 , instead of 200 micrometers 2 in a known source by document (3).

    Dans ce cas, la probabilité d'avoir un court-circuit est donc réduite d'un coefficient supérieur à 10 grâce à la présente invention. In this case, the probability of having a short circuit is therefore reduced by a coefficient greater than 10 through the present invention.

    La surface couverte par la grille vaut
       (11 x 11) + (2x14) soit environ 150 micromètres2 dans des mailles de
       25 x 25 = 625 micromètres2.     The area covered by the grid is worth
    (11 x 11) + (2x14) or about 150 micrometers 2 in meshes of
    25 x 25 = 625 micrometers 2 .

    La surface de grille est ainsi réduite d'un coefficient supérieur à 4 par rapport à une source décrite dans le document (3). The grid surface is thus reduced by one coefficient greater than 4 compared to a source described in document (3).

    La capacité entre les lignes et les colonnes est donc sensiblement divisée par 4, ce qui réduit d'autant la consommation capacitive. Capacity between rows and columns is therefore substantially divided by 4, which reduces all the more capacitive consumption.

    Dans l'exemple numérique que l'on vient de donner, la transmission d'une grille vaut environ 75% et la transmission d'un conducteur cathodique vaut environ 85%. In the numerical example that we just give, the transmission of a grid is worth about 75% and the transmission of a cathode conductor is worth about 85%.

    Par conséquent, avec une couche résistive transparente, la transmission de la source d'électrons ainsi réalisée vaut environ 60%, ce qui permet de fabriquer un écran pour lequel le luminophore est avantageusement observé du côté de son excitation, à travers la source d'électrons. Therefore, with a resistive layer transparent, electron source transmission thus achieved is worth approximately 60%, which allows make a screen for which the phosphor is advantageously observed from the side of its excitement, through the electron source.

    Dans ce cas, les conducteurs cathodiques à structure de treillis et les grilles ajourées sont avantageusement formés sur une couche absorbante, pour améliorer le contraste sous éclairement. In this case, the cathode conductors to lattice structure and openwork grids are   advantageously formed on an absorbent layer, for improve the contrast under illumination.

    Cette couche adsorbante est par exemple formée par un film de chrome noir de quelques dizaines de nanomètres d'épaisseur. This adsorbent layer is for example formed by a black chrome film of a few tens nanometers thick.

    Claims (8)

    1. Electron source having on an electrically insulating support (2), a first series of parallel electrodes (5, 18) serving as cathode conductors and carrying a plurality of micropoints (12) made from an electron emitting material, a second series of parallel electrodes (10g, 22) serving as grids, which are electrically insulated from the cathode conductors and form an angle therewith, which defines intersection zones (16) between the cathode conductors and the grids, each of the electrodes of one of the series being in contact with a resistive layer (7, 20) and having a lattice structure, so that it has tracks (5a, 22a) which intersect and define first openings (6), each of the electrodes of the other series being discontinuous and having second openings (11), said source being characterized in that the second openings (11) are displaced with respect to the first opening (6) and consequently positioned facing the tracks (5a, 22a) of the lattices.
    2. Source according to claim 1, characterized in that the second openings (11) are positioned facing intersections of the lattice tracks.
    3. Source according to either of the claims 1 and 2, characterized in that the electrodes having the lattice structure are electrodes (22) of the second series of electrodes and in that the discontinuous electrodes are electrodes (18) of the first series of electrodes.
    4. Source according to either of the claims 1 and 2, characterized in that the electrodes having the lattice structure are electrodes (5) of the first series of electrodes and in that the discontinuous electrodes are electrodes (10g) of the second series of electrodes.
    5. Cathodoluminescence display means incorporating a micropoint emissive cathode electron source (42) and a cathodoluminescent anode having a cathodoluminescent material layer (48), characterized in that the source (42) is in accordance with any one of the claims 1 to 4.
    6. Means according to claim 5, characterized in that the resistive layer (7) and the support (2) on which is formed the first series of electrodes (5) are at least partly transparent to the light (50) emitted by the cathodoluminescent material (48) under the impact of the electrons, in order to observe said cathodoluminescent material through said support.
    7. Means according to claim 6, characterized in that the cathodoluminescent anode comprises an electrode (46) able to reflect the light (50) emitted by the cathodoluminescent material layer (48), the latter being formed on said electrode and facing the second series of electrodes (10g).
    8. Means according to either of the claims 6 and 7, characterized in that each of the electrodes (5, 10g) of the first and second series of electrodes is formed on a layer (52) able to adsorb the light (54) arriving from the exterior of the means.
    EP93400449A 1992-02-26 1993-02-22 Micropoint cathode electron source and display device with cathodo-luminescence excited by field emission using same source Expired - Lifetime EP0558393B1 (en)

    Applications Claiming Priority (2)

    Application Number Priority Date Filing Date Title
    FR9202220A FR2687839B1 (en) 1992-02-26 1992-02-26 ELECTRON SOURCE WITH MICROPOINT EMISSIVE CATHODES AND FIELD EMISSION-EXCITED CATHODOLUMINESCENCE VISUALIZATION DEVICE USING THE SOURCE.
    FR9202220 1992-02-26

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    EP0558393A1 EP0558393A1 (en) 1993-09-01
    EP0558393B1 true EP0558393B1 (en) 1998-05-13

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    EP0558393A1 (en) 1993-09-01
    US5534744A (en) 1996-07-09
    FR2687839A1 (en) 1993-08-27
    DE69318444T2 (en) 1998-12-03
    TW386234B (en) 2000-04-01
    FR2687839B1 (en) 1994-04-08
    JPH0684478A (en) 1994-03-25
    CA2089986A1 (en) 1993-08-27
    KR930018613A (en) 1993-09-22
    DE69318444D1 (en) 1998-06-18

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