EP0734042B1 - Anode eines flachen Bildschirms mit Widerstandsstreifen - Google Patents

Anode eines flachen Bildschirms mit Widerstandsstreifen Download PDF

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Publication number
EP0734042B1
EP0734042B1 EP96410029A EP96410029A EP0734042B1 EP 0734042 B1 EP0734042 B1 EP 0734042B1 EP 96410029 A EP96410029 A EP 96410029A EP 96410029 A EP96410029 A EP 96410029A EP 0734042 B1 EP0734042 B1 EP 0734042B1
Authority
EP
European Patent Office
Prior art keywords
strips
anode
resistive
strip
resistivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96410029A
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English (en)
French (fr)
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EP0734042A1 (de
Inventor
Stéphane Mougin
Francis Courreges
Jean-Marc Sol
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Pixtech SA
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Pixtech SA
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Publication date
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Publication of EP0734042A1 publication Critical patent/EP0734042A1/de
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Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/18—Luminescent screens
    • H01J29/30—Luminescent screens with luminescent material discontinuously arranged, e.g. in dots, in lines
    • H01J29/32—Luminescent screens with luminescent material discontinuously arranged, e.g. in dots, in lines with adjacent dots or lines of different luminescent material, e.g. for colour television
    • H01J29/325—Luminescent screens with luminescent material discontinuously arranged, e.g. in dots, in lines with adjacent dots or lines of different luminescent material, e.g. for colour television with adjacent lines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/08—Electrodes intimately associated with a screen on or from which an image or pattern is formed, picked-up, converted or stored, e.g. backing-plates for storage tubes or collecting secondary electrons
    • H01J29/085—Anode plates, e.g. for screens of flat panel displays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/18—Luminescent screens
    • H01J29/28—Luminescent screens with protective, conductive or reflective layers

Definitions

  • the present invention relates to a flat screen anode of visualization. It applies more particularly to the making luminescent elements of an anode a color screen, such as a microtip color screen.
  • Figure 1 shows the structure of a flat screen microtips of the type to which the invention relates.
  • Such a microtip screen essentially consists a cathode 1 with microtips 2 and a grid 3 provided of holes 4 corresponding to the locations of the microtips 2.
  • Cathode 1 is placed opposite a cathodoluminescent anode 5 of which a glass substrate 6 constitutes the surface screen.
  • Cathode 1 is organized in columns and is made up, on a glass substrate 10, cathode conductors organized in mesh from a conductive layer.
  • the microtips 2 are made on a resistive layer 11 deposited on the cathode conductors and are arranged inside meshes defined by the cathode conductors.
  • the FIG. 1 partially representing the interior of a mesh, cathode conductors do not appear in this figure.
  • Cathode 1 is associated with grid 3 which is organized in lines. The intersection of a line in grid 3 and a column of cathode 1 defines a pixel.
  • This device uses the electric field created between cathode 1 and grid 3 so that electrons are extracts from microtips 2 to phosphor elements 7 of anode 5.
  • anode 5 is provided of alternating bands of phosphor elements 7r, 7b, 7g corresponding each one in a color (Red, Blue, Green). Groups are separated from each other by an insulator 8.
  • the phosphor elements 7 are deposited on electrodes 9, consisting of corresponding strips of a layer transparent conductor such as indium oxide and tin (ITO).
  • ITO indium oxide and tin
  • the sets of blue, red, green bands are alternately positively polarized with respect to the cathode 1, so that the electrons extracted from the microtips 2 of a cathode / grid pixel are alternately directed to the phosphor elements 7 facing each of the colors.
  • the phosphor 7 selection command (the phosphor 7g in figure 1) which must be bombarded by electrons from microdots 2 of cathode 1 requires ordering, selectively, the polarization of the phosphor elements 7 of anode 5, color by color.
  • FIG. 2 schematically illustrates a structure classic color screen anode. This figure partially represents, in elevation on the phosphor side, an anode 5 made according to known techniques. Strips 9 of electrodes anode, deposited on the substrate 6, are interconnected outside of the useful surface of the screen, by color of phosphor elements, to be connected to a control system (not represented). Two interconnection tracks 12 and 13, respectively anode electrodes 9g and 9b are produced for two of the three colors of phosphor elements. A diaper isolation 14 (shown in phantom in Figure 2) is deposited on interconnection track 13. A third interconnection track 15 is connected, via conductors 16 deposited on the insulation layer 14, at the strips 9r anode electrodes for the phosphor elements of the third color.
  • the rows of grid 3 are sequentially polarized at a potential of the order of 80 volts while the strips of phosphor elements (for example 7g in Figure 1) to be excited are biased under a voltage of the order of 400 volts, the other bands (for example 7r and 7b in FIG. 1) being at zero potential.
  • the columns of the cathode 1, whose potential represents for each row of grid 3 the brightness of the pixel defined by the intersection of the cathode column and the grid row in the color considered, are brought to respective potentials between a maximum emission potential and a potential no emission (for example, 0 and 30 respectively volts).
  • the choice of the values of the polarization potentials is related to the characteristics of phosphor elements 7 and microtips 2.
  • the potential difference between the anode and the cathode is related to the inter-electrode distance.
  • screen brightness which means that we are looking for a the greatest possible distance between electrodes.
  • the structure of the inter-electrode space which has spacers (not shown) capable of creating zones shadow on the screen if they are too large, prevents this inter-electrode distance from being increased.
  • the inter-electrode space of a conventional screen is therefore about 0.2 mm. This leads to choosing a voltage value anode-cathode which is critical from a training standpoint electric arcs.
  • Destructive electric arcs can then occur at the slightest dimensional irregularity of the distance between a microtip, or the grid layer, phosphor elements of the anode. Such irregularities are, moreover, inevitable given the small dimensions and techniques used to carry out the anode and the grid cathode.
  • the resistive layer 11 makes it possible to limit the formation of destructive short circuits between microtips and the grid.
  • arcs can occur between the grid 3 and those of the phosphor elements 7 of the anode which are polarized to attract the electrons emitted by microtips 2 (for example the 7g phosphors in figure 1). Arcs can also occur between two bands neighbors of phosphor elements (for example 7g and 7r in figure 1) due to the potential difference between these two bands.
  • the invention aims to overcome these drawbacks by proposing a flat screen display anode which removes the risk of arcing between the anode and the grid or between two neighboring bands of phosphor elements the anode, without affecting the brightness of the screen.
  • the present invention provides a flat screen display anode of the type comprising at least one set of strips of phosphor elements deposited on separate strips of corresponding electrodes of the others by an insulator open to the right of the strips of elements phosphors, and at least one interconnection conductor strips of electrodes of said set, each strip of electrodes consisting of a resistive strip intended to receive a strip of phosphor elements and at least one first strip of polarization which is parallel to it and which joins said conductor interconnection, said polarization band having low resistivity compared to that of said resistive strip to which it is associated.
  • each resistive strip is associated with two strips of parallel polarizations that frame it, each polarization band joining said interconnection conductor.
  • said resistive strips are made of non-stoichiometric oxide transparent and electrically conductive, their resistivity being fixed by the oxygen level that the oxide contains.
  • said resistive bands and said bias bands are in the same material whose resistivity is higher important in a central area intended to receive the tapes phosphor elements only in lateral areas joining said interconnection conductor.
  • said insulator serves as a mask for increasing the resistivity of said resistive strips by annealing under atmosphere oxygen.
  • the resistivity of said resistive strips is fixed by the thickness of these strips.
  • said insulator serves as an etching mask for a process of reduction in thickness of said resistive strips.
  • the anode has three sets of resistive strips alternating carrying phosphor elements each corresponding to one color and at least three interconnection conductors polarization bands associated with the bands resistives of the same color.
  • all resistive bands associated with the same track interconnection have the same resistivity.
  • said resistive strips are made of indium oxide or of tin.
  • Figure 3 is a cross-sectional view of some bands of phosphors constituting a flat screen anode according to a first embodiment of the invention.
  • a feature of the present invention is that the strips 17 of anode electrodes each consist of a resistive strip 18 supporting phosphor elements 7 and at least one polarization strip 19, parallel.
  • each strip resistive 18 is framed longitudinally by two strips of polarization 19.
  • an anode according to the invention is formed, at from a transparent substrate 6, for example glass, of parallel strips 18 of electrically conductive material and transparent, such as indium or tin oxide.
  • Each strip 18 supports a corresponding strip of phosphor elements 7.
  • Each band 18 is framed by two polarization bands 19 highly conductive, for example aluminum, in copper or gold. For a color screen, these bands 19 are connected by one of their ends to an interconnection track (not shown) strips of phosphor elements 7 of the same color.
  • a feature of the present invention is that the bias strips 19 are made in such a way that they have a low resistivity compared to the resistivity of the material of the strips 18. Thus, the strips resistives 18 create lateral access resistance to each screen pixel.
  • the intrinsic properties of a transparent oxide layer are used. It may be, for example, indium oxide (In 2 O x ), tin oxide (SnO x ) or indium tin oxide (ITO).
  • the oxide layer is optimized in thickness and oxygen level to give resistance to each band 18 and the desired transparency.
  • the oxide used is preferably an indium oxide or tin.
  • An advantage of using such an oxide is that it is easy to control its resistivity to give the strip the desired resistance. Indeed, the resistivity of such band increases with the oxygen rate.
  • annealing is carried out under oxygen atmosphere at a temperature of the order of 300 to 400 ° C.
  • indium or tin oxide has better transparency than indium oxide and tin (ITO).
  • Figures 5 and 6 illustrate two other modes of production of an anode according to the invention. According to these modes of realization, the resistive and bias bands are all made of transparent, electrically conductive oxide.
  • Figure 5 is a cross-sectional view of some bands of phosphors constituting a flat screen anode according to a third embodiment of the invention.
  • the anode consists of strips of electrodes 17 'in transparent and electrically conductive oxide including an area central 18, having a high resistivity, plays the role of resistive strip and which is framed by two zones side 19 'with minimal resistivity and playing the role of polarization bands.
  • the difference in resistivity is obtained by a different oxygen rate from the lateral zones 19 'and the central area 18.
  • the layer isolation 8 for example in silicon oxide, which is opened directly above the central zones 18 intended to receive the strips phosphor elements 7.
  • the layer 8 then serves as a mask to increase the resistivity of the central zones 18 by increasing their oxygen level, by annealing in an oven in an atmosphere of oxygen at a temperature of the order of 400 ° C.
  • Figure 6 is a cross-sectional view of some bands of phosphors constituting a flat screen anode according to a fourth embodiment of the invention.
  • the anode is made up of strips of electrodes 17 'in transparent and electrically conductive oxide including a central zone 18 ', having a high resistivity, plays the role of resistive strip and which is framed by two lateral zones 19 'with minimal resistivity and playing the role of polarization bands.
  • the resistivity is identical for the central 18 'and lateral zones 19 'and preferably corresponds to a minimum resistivity.
  • the significant resistance of the central zones 18 ' is obtained by giving these areas a small thickness.
  • the isolation layer 8 serves as an engraving mask for the central zones 18 ′.
  • the polarization bands have been represented in the form of metal strips, for example in aluminium.
  • the insulation layer which covers the strips of polarization and thus the lateral zones of conductive oxide and transparent, as an engraving mask and / or to enhance the oxygen level.
  • FIG. 8 represents the equivalent electrical diagram of a microtip color screen provided with an anode according to the invention.
  • This interconnection electric is similar to that exposed in relation to the Figure 2, except that the interconnection tracks 21 connect the polarization bands 19, or 19 ', and no longer directly the strips 18, or 18 ', receiving the phosphor elements 7.
  • the addressing of an anode according to the invention can be carried out in a conventional manner.
  • each strip of phosphor elements 7r, 7g or 7b is individually protected against electric arcs by a resistance Ra series between this strip and the interconnection track 21 with which it is associated.
  • the resistance Ra brought by the resistive strip 18, or 18 ′ is of such a value that limits the current in the electrode strip 17, or 17 ', to one given value chosen to avoid the appearance of electric arcs destructive, without causing a significant fall of the anode voltage.
  • the resistance Ra corresponds in made to the lateral resistances provided, by the resistive strip 18, or 18 ', between the phosphor elements 7 and the strips of polarization 19, or 19 '.
  • the microdots of cathode 1 in the form of a microtip 2 per pixel then that they are in reality several thousand per screen pixels. It thus appears a resistance Rk which corresponds to the resistive layer 11 between the cathode conductors and microtips.
  • This resistance Rk makes it possible to homogenize electronic emission of microtips 2 and avoid the appearance short circuits between grid 3 and the microtips 2.
  • the resistance Ra provided by each resistive strip 18, or 18 ', is electrically in series with this resistor Rk globalized at the pixel level.
  • the value of the resistance Ra can be chosen significantly higher than the resistance value Rk globalized at the pixel level without causing a voltage drop too large in resistive bands.
  • the strip polarization voltage (of the order of 400 volts) anode is generally greater than the potential difference grid-cathode on which the resistance Rk intervenes.
  • the value of the resistance Rk is generally of the order of 500 k ⁇ for a grid line bias voltage of the order of 80 volts and a potential Vk of polarization of cathode columns between 0 and 30 volts.
  • 18 or 18' strips can be used, having a resistivity of the order of 200 ⁇ .cm.
  • Such strips made with a thickness of the order of 50 nm lead at a layer resistivity of around 40 megohms per square.
  • Such a resistivity value prevents the formation of destructive electric arcs by limiting the current in each band 19, or 19 ', to approximately 200 microamps, while making the decrease in brightness of the screen imperceptible.
  • Ra resistances do not affect the switching speed of anode lines since the resistance of the bias strips remains low (a few k ⁇ maximum), the product of their resistance by the capacity of the anode lines (a few nanofarad) corresponds to a time constant much lower than the switching time of the anode (a few milliseconds).
  • Ra resistance is the same for all screen pixels. In effect, for a given pixel, this resistance is independent the distance between this pixel and the interconnection track 21, provided that the resistivity of the bias strips 19, or 19 ', or weak.
  • each of the constituents described for the constituent layers of the anode may be replaced by one or more constituents filling the same function.
  • the invention applies also on a monochrome screen if it has a anode provided with parallel strips of phosphor elements.
  • the invention also applies to a multi-color screen in which of the ranges, or segments, covering several pixels are dedicated to a color.
  • the invention also applies to a color display in which the anode strips are not switched but continuously polarized. In this case, only one track interconnection is necessary but, on the anode side, the pixels are divided into sub-pixels, each sub-pixel being dedicated to one of the colors and being placed opposite the anode strip corresponding.

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  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Claims (10)

  1. Anode (5) für einen Flachbildschirm umfassend wenigstens eine Gruppe Phosphorelementstreifen (7), die über entsprechenden Elektrodenstreifen angeordnet sind, die voneinander durch eine Isolierschicht (8) getrennt sind, welcher bei den Phosphor-elementstreifen (7) offen ist, und wenigstens einen Leiter (21), welche die Elektrodenstreifen der Gruppe verbindet, dadurch gekennzeichnet, daß jeder Elektrodenstreifen (17, 17') aus einem Widerstandsstreifen (18, 18') zum Aufnehmen eines Phosphorelementstreifens (7) und wenigstens einem ersten Polarisationsstreifen (19, 19') gebildet ist, der zu diesem parallel ist und sich an den Verbindungsleiter (21) anfiigt, wobei der Polarisationsstreifen (19, 19') einen niedrigen Widerstandswert in bezug auf den Widerstandswert des Widerstandsstreifens (18, 18'), dem er zugeordnet ist, aufweist.
  2. Anode für einen Flachbildschirm nach Anspruch 1, dadurch gekennzeichnet, daß jeder Widerstandsstreifen (18, 18') durch zwei parallele Polarisationsstreifen (19, 19') eingegrenzt ist, wobei jeder Polarisationsstreifen (19, 19') sich an den Verbindungsleiter (21) anfügt.
  3. Anode für einen Flachbildschirm nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Widerstandsstreifen (18, 18') aus einem transparenten und elektrisch leitenden nicht-stöchiometrischen Oxid bestehen, wobei der Widerstandswert der Widerstandsstreifen durch den Sauerstoffanteil des Oxids bestimmt wird.
  4. Anode für einen Flachbildschirm nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Widerstandsstreifen (18, 18') und die Polarisationsstreifen (19') aus demselben Material hergestellt sind, dessen Widerstandswert in einem mittleren Abschnitt (18, 18'), welcher die Phosphor-Elementstreifen (7) aufnehmen soll, höher ist als in seitlichen Abschnitten (19'), die an den Verbindungsleiter (21) angefügt sind.
  5. Anode für einen Flachbildschirm nach Anspruch 4, dadurch gekennzeichnet, daß die Isolierschicht (8) als eine Maske zur Erhöhung des Widerstandswertes der Widerstandsstreifen (18) durch Glühen in einer Sauerstoffatmosphäre verwendet wird.
  6. Anode für einen Flachbildschirm nach Anspruch 4, dadurch gekennzeichnet, daß der Widerstandswert der Widerstandsstreifen (18') durch die Dicke dieser Streifen bestimmt wird.
  7. Anode für einen Flachbildschirm nach Anspruch 6, dadurch gekennzeichnet, daß die Isolierschicht (8) als eine Ätzmaske in einem Prozeß zum Verringern der Dikke der Widerstandsstreifen (18') verwendet wird.
  8. Anode für einen Flachbildschirm nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, daß sie drei Gruppen (r, g, b) alternierender Widerstandsstreifen (18, 18') aufweist, welche Phosphorelemente (7) tragen, die jeweils einer Farbe entsprechen, sowie wenigstens drei Verbindungsleiter (21) der Widerstandsstreifen (19, 19'), die den Widerstandsstreifen (18, 18') derselben Farbe zugeordnet sind.
  9. Anode für einen Flachbildschirm nach Anspruch 8, dadurch gekennzeichnet, daß alle Widerstandsstreifen (18, 18'), welche demselben Verbindungspfad (21) zugeordnet sind, denselben Widerstandswert haben.
  10. Anode für einen Flachbildschirm nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, daß die Widerstandsstreifen (18, 18') aus Indium- oder Zinnoxid hergestellt sind.
EP96410029A 1995-03-22 1996-03-19 Anode eines flachen Bildschirms mit Widerstandsstreifen Expired - Lifetime EP0734042B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9503571A FR2732160B1 (fr) 1995-03-22 1995-03-22 Anode d'ecran plat de visualisation a bandes resistives
FR9503571 1995-03-22

Publications (2)

Publication Number Publication Date
EP0734042A1 EP0734042A1 (de) 1996-09-25
EP0734042B1 true EP0734042B1 (de) 2001-09-05

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EP96410029A Expired - Lifetime EP0734042B1 (de) 1995-03-22 1996-03-19 Anode eines flachen Bildschirms mit Widerstandsstreifen

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US (1) US5764000A (de)
EP (1) EP0734042B1 (de)
JP (1) JP3540502B2 (de)
DE (1) DE69614906T2 (de)
FR (1) FR2732160B1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3199682B2 (ja) * 1997-03-21 2001-08-20 キヤノン株式会社 電子放出装置及びそれを用いた画像形成装置
FR2790329B1 (fr) * 1999-02-26 2001-05-18 Pixtech Sa Anode resistive d'ecran plat de visualisation
FR2797092B1 (fr) * 1999-07-27 2001-09-14 Commissariat Energie Atomique Procede de fabrication d'une anode d'un ecran plat de visualisation
KR100319453B1 (ko) * 1999-08-04 2002-01-05 오길록 2극형 전계 에미터를 가진 전계 방출 디스플레이
KR100542317B1 (ko) * 1999-12-24 2006-01-12 비오이 하이디스 테크놀로지 주식회사 전계 방출 표시 소자
JP4131238B2 (ja) 2003-12-26 2008-08-13 ソニー株式会社 表示用パネル及び表示装置
JP4115403B2 (ja) 2004-02-18 2008-07-09 キヤノン株式会社 発光体基板及び画像表示装置
KR20060037878A (ko) * 2004-10-29 2006-05-03 삼성에스디아이 주식회사 전자방출 표시장치
JP4551755B2 (ja) * 2004-12-24 2010-09-29 キヤノン株式会社 画像表示装置
KR100814813B1 (ko) 2006-08-14 2008-03-19 삼성에스디아이 주식회사 발광 장치 및 이 발광 장치를 백라이트 유닛으로 사용하는액정 표시장치

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JPS529372A (en) * 1975-07-11 1977-01-24 Narumi China Corp Fluorescent display tube substratge
US4149148A (en) * 1977-04-19 1979-04-10 Sperry Rand Corporation Aircraft flight instrument display system
US4135117A (en) * 1978-03-20 1979-01-16 Wagner Electric Corporation Vacuum fluorescent device with continuous strokes
JPS609039A (ja) * 1983-06-28 1985-01-18 Ise Electronics Corp 螢光表示管
JPH0326617Y2 (de) * 1984-09-17 1991-06-10
US5063327A (en) * 1988-07-06 1991-11-05 Coloray Display Corporation Field emission cathode based flat panel display having polyimide spacers
FR2669124B1 (fr) * 1990-11-08 1993-01-22 Commissariat Energie Atomique Dispositif electrooptique bistable, ecran comportant un tel dispositif et procede de mise en óoeuvre de cet ecran.
US5378962A (en) * 1992-05-29 1995-01-03 The United States Of America As Represented By The Secretary Of The Navy Method and apparatus for a high resolution, flat panel cathodoluminescent display device
FR2725072A1 (fr) * 1994-09-28 1996-03-29 Pixel Int Sa Protection electrique d'une anode d'ecran plat de visualisation

Also Published As

Publication number Publication date
DE69614906T2 (de) 2002-05-02
US5764000A (en) 1998-06-09
FR2732160B1 (fr) 1997-06-13
DE69614906D1 (de) 2001-10-11
FR2732160A1 (fr) 1996-09-27
JPH08329867A (ja) 1996-12-13
JP3540502B2 (ja) 2004-07-07
EP0734042A1 (de) 1996-09-25

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