EP0806787B1 - Herstellung einer Anode eines flachen Bildschirms - Google Patents

Herstellung einer Anode eines flachen Bildschirms Download PDF

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Publication number
EP0806787B1
EP0806787B1 EP97410049A EP97410049A EP0806787B1 EP 0806787 B1 EP0806787 B1 EP 0806787B1 EP 97410049 A EP97410049 A EP 97410049A EP 97410049 A EP97410049 A EP 97410049A EP 0806787 B1 EP0806787 B1 EP 0806787B1
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EP
European Patent Office
Prior art keywords
anode
layer
bands
electrons
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97410049A
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English (en)
French (fr)
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EP0806787A1 (de
Inventor
Stéphane Mougin
Guy Reynaud
Catherine Oules-Chaton
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Pixtech SA
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Pixtech SA
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/08—Electrodes intimately associated with a screen on or from which an image or pattern is formed, picked-up, converted or stored, e.g. backing-plates for storage tubes or collecting secondary electrons
    • H01J29/085—Anode plates, e.g. for screens of flat panel displays

Definitions

  • the present invention relates to flat screens of visualization, and more particularly of cathodoluminescence screens, whose anode carries luminescent elements, separated from each other by insulating zones, and susceptible to be excited by electronic bombardment.
  • This bombing electronics requires luminescent elements are polarized and can come from microtips, layers with low potential for extraction or thermionic source.
  • Such a flat display screen corresponding to the preamble of claim 1, is disclosed in document EP-A-0 635 865.
  • Figure 1 shows the structure of a flat screen microtip color.
  • Such a microtip screen essentially consists a cathode 1 with microtips 2 and a grid 3 provided with holes 4 corresponding to the locations of the microtips 2.
  • the cathode 1 is placed opposite a cathodoluminescent anode 5 including a glass substrate 6 constitutes the screen surface.
  • Cathode 1 is organized in columns and is made up, on a glass substrate 10, cathode conductors organized in mesh from a conductive layer.
  • the microtips 2 are made on a resistive layer 11 deposited on the cathode conductors and are arranged inside meshes defined by the cathode conductors.
  • Figure 1 partially represents the interior of a mesh and the conductors cathode do not appear in this figure.
  • Cathode 1 is associated with grid 3 organized in lines. The intersection a row of grid 3 and a column of cathode 1 defines a pixel.
  • This device uses the electric field which is created between the cathode 1 and the grid 3 so that electrons are extracted from the microtips 2. These electrons are then attracted by phosphor elements 7 from the anode 5 if these are suitably polarized.
  • the anode 5 is provided with alternating bands of phosphor elements 7r, 7g, 7b each corresponding to a color (Red, Green, Blue). The strips are parallel to the columns of the cathode and are separated from each other by an insulator 8, generally silicon oxide (SiO 2 ).
  • the phosphor elements 7 are deposited on electrodes 9, made up of corresponding strips of a transparent conductive layer such as indium tin oxide (ITO).
  • ITO indium tin oxide
  • the sets of red, green and blue bands are alternately polarized with respect to the cathode 1, so that electrons extracted from the microtips 2 of a pixel of the cathode / grid are alternately directed towards the phosphor elements 7 opposite of each of the colors.
  • the phosphor 7 selection command (the phosphor 7g in figure 1) which must be bombarded by electrons from the microtips of cathode 1 requires ordering, selectively, the polarization of the phosphor elements 7 of anode 5, color by color.
  • the rows of grid 3 are sequentially polarized at a potential on the order of 80 volts, while that the bands of phosphor elements (for example 7g in Figure 1) to be excited are biased under a voltage of the order of 400 volts via the ITO strip on which these phosphor elements are deposited.
  • Groups of ITO, carrying the other bands of phosphor elements (for example example 7r and 7b in figure 1), are at a low or zero potential.
  • the columns of cathode 1 are brought to respective potentials between a maximum emission potential and a no emission potential (for example 0 and 0 respectively 30 volts). We thus fix the brightness of a color component of each of the pixels in a line.
  • the choice of the values of the polarization potentials is linked to the characteristics of the phosphor elements 7 and microtips 2. Conventionally, below a difference of potential of 50 volts between the cathode and the grid, there is no electronic emission, and the maximum emission used corresponds at a potential difference of 80 volts.
  • a disadvantage of conventional screens is that they suffer a short lifespan, that is to say after relatively short operating time (around a hundred hours), the screen brightness decreases considerably and we even sometimes see destructive phenomena appear due to the formation of arcs between the cathode and the anode of the screen.
  • drift colored In practice, this means that at least one of the strips of phosphor material adjacent to the polarized strips begins to exhibit luminescence.
  • the object of the present invention is to propose a new solution to the aforementioned life time problems of the screen and color drift.
  • the present invention provides a flat display anode of the type comprising at least two sets of parallel strips alternating anode conductors coated with phosphor elements intended to be excited by primary electrons, characterized in that said strips are separated from each other others by isolation strips which are made up a first thin layer of insulating material covered with a very thin second layer of material whose secondary emission factor is less than the unit, the second layer having a width lower than the first layer to leave remain, on either side of the second layer, a space insulating.
  • said second layer is made of a conductive material.
  • said secondary emission factor material less than the unit is chosen from chromium oxide and iron oxide.
  • said constituent material of the second layer is carbon graphite.
  • said second layer of the insulation bands is polarized at a negative or zero potential.
  • the invention also relates to a flat display screen of the type comprising a microtip cathode and a anode consisting of at least two sets of alternating strips phosphor elements, said anode having bands isolation according to one of the above-mentioned embodiments.
  • the present invention originates from an interpretation phenomena that cause the above problems in classic screens.
  • the inventors consider that these problems are due, in particular, to a phenomenon of secondary emission occurring on the surface of the anode.
  • Figure 2 shows, schematically and in section transverse, three bands of phosphor elements of an anode separated by insulation.
  • the bands 9b and 9r are not polarized and so-called "primary" electrons ei, emitted by the microtips (not shown) of the cathode, arrive on the phosphor elements 7g. Electrons called “secondary" e S are re-emitted by the phosphor elements 7g. In addition, a number of primary electrons arrive on the edge of the insulating strips 8 separating the strip 9g from the strips 9b and 9r. Here, too, there is an emission of secondary electrons.
  • ⁇ secondary emission factor
  • the secondary emission factor of a material varies with the energy of the electrons touching its surface.
  • the energy of primary electrons is related to the bias potential of the anode and is, for example, of the order of 400 eV.
  • the secondary emission factor ⁇ When the secondary emission factor ⁇ is higher at 1, this means that the surface of the material re-emits more of electrons than it receives and tends to charge positively. Conversely, when the secondary emission factor ⁇ is less than 1, there is an accumulation of electrons.
  • microtip screens are made using technologies derived from those used in the manufacture of integrated circuits, led to the use of silicon oxide to make the insulating strips 8.
  • silicon oxide constitutes a usual material and which one master the use well.
  • silicon oxide has a particularly high secondary emission factor Student.
  • FIG. 3 illustrates the characteristic of the evolution of the secondary emission coefficient of silicon oxide (SiO 2 ) as a function of the energy of the incident electrons in eV.
  • this characteristic has a bell shape, that is to say that the coefficient ⁇ begins to increase until it reaches a level ⁇ max for a quantity of energy U max then decreases towards a value d 'asymptote.
  • the phosphor elements generally have a coefficient ⁇ max of the order of 2 to 2.5 for an energy U max of the order of 500 eV.
  • ⁇ max is around 3 for an energy U max around 400 eV.
  • Conventional screens therefore operate in the maximum secondary emission region and the primary electrons which manage to touch the silicon oxide of the bands 8 generate a significant emission of secondary electrons.
  • the tracks 8 of oxide insulating material of silicon are at zero potential.
  • the primary electrons which arrive on the edges of the adjacent insulating tracks of a strip (for example 9g) polarized result, by the emission of electrons secondary, a positive charge on the surface of the silicon oxide.
  • this area of positive charge develops, as the electrons are attracted to the surface more and more as as its positive charge increases, which causes a decrease the brightness of the polarized 7g strip.
  • the area of positive charge propagates towards non-polarized tracks 9b and 9r neighbors and its potential may exceed the potential of polarization of the anode bands.
  • an insulating strip 8 can become such that it causes the formation of a destructive arc between the anode and the cathode.
  • the silicon oxide and the elements phosphors have a secondary emission factor less than 1 for an energy of the order of 30 to 50 eV which corresponds to the energy of the majority of secondary electrons, the emission of a secondary electron in turn gives rise to a re-emission of secondary electrons, which has an effect avalanche.
  • the transverse electric field between two bands phosphor elements accelerates the secondary electrons which then have an energy very much higher than their initial energy (of around 250 eV).
  • the phosphors are relatively insulating materials (they generally have a linear resistance of the order of 10 8 ⁇ .cm), they do not discharge completely when the strip of ITO which supports them is no longer polarized but remains charged at a potential, generally of the order of 50 volts. Thus, the phosphors of a non-polarized band end up being excited by the secondary electrons re-emitted by the insulating tracks 8.
  • the phenomenon of secondary electron emission presents a second drawback in microtip screens.
  • electrons come into contact with the material of layer 8, they can either generate a positive ion or desorb a neutral species (any molecule stuck on the surface from runway 8) or even strike a neutral species and generate then a positive ion.
  • This phenomenon leads to the formation of a microplasma on the surface of runway 8.
  • the microtips of the cathode then attract the positive ions from this plasma and are found polluted by these positive ions.
  • these plasmas generally emit radiation. These radiations translate into a bluish glow which can be seen through the surface of the screen.
  • positive ions are likely to excite the phosphor elements of the neighboring band (non-polarized) by photoluminescence.
  • This phenomenon of secondary electron emission is a known phenomenon, in particular, in cathode ray tubes where the surface of the screen also carries phosphors which are bombarded by an electron gun.
  • the problem due to secondary emission phenomenon is resolved by coating the phosphors a metallization, generally a thin layer of aluminum, polarized at a positive high voltage.
  • the role of this metallization is, on the one hand, to polarize the phosphors and, on the other hand, to drain the unused primary charges as well as the secondary charges which are then collected.
  • the electrons emitted by the electron gun have an energy of the order of 20 to 30 keV and therefore pass through the thin metallization layer while the low energy secondary electrons (30 eV) are collected by this metallization.
  • the energy primary electrons (around 400 eV) is not sufficient.
  • the present invention proposes to suppress the appearance of the secondary emission phenomenon on the anode of a flat display screen.
  • a feature of the present invention is select a surface material, for insulating tracks separating two strips of phosphor elements from an anode provided sets of alternating bands of phosphor elements, among materials with low secondary emission factor ⁇ .
  • the material is chosen so that its secondary emission factor is less than 1, at least in the energy range of the primary electrons emitted by them microdots.
  • the material chosen must meet certain conditions inherent in the operation of a flat screen for viewing this guy. In particular, this material must meet the requirements of isolation between the bands of phosphor elements of the anode, i.e. it must bear a difference of potential of approximately 500 volts without driving (i.e. with a low leakage current).
  • a metallic material which will then be deposited in a very thin layer to present sufficient resistance between the strips of phosphor elements. It could also be a dielectric (oxide metallic), reduced so that it only has metal in area.
  • FIG. 4 represents an embodiment of the invention.
  • the ITO 9 bands of the anode 5 ′ are separated by insulation strips 20 made up of a first insulating layer 8 '(a few microns thick, or less), for example in silicon oxide, covered with a second very thin layer 21 (of a thickness less than a ⁇ m) made of a material with a secondary emission factor less than 1.
  • An advantage of this embodiment is that the resistivity of the material is much easier to control on such a very thin layer.
  • the width of the second layer 21 is less than the width of the first layer 8 'in order to leave on both sides of layer 21, a space (with a width of the order of 5 to 10 ⁇ m) insulator.
  • the surface material 21 of the strips 20 has a secondary emission factor less than 1, this is charge negatively, as the operation of the screen, when the edge of the surface 21 receives electrons primary from microtips (not shown). This charge negative leads to what the electrons are, unlike classic screens, more and more repelled by bands isolation 20.
  • This negative charge increases to an equilibrium point load due to the positive bias of the band of neighboring phosphor elements.
  • the secondary strips 21 deposited on silicon oxide are polarized at zero potential or negative.
  • the resistance of the secondary bands is not a problem vis-à-vis such a polarization. Indeed, the current which circulates is very low and therefore there are few resistive losses.
  • the potential drop caused by the tape resistance on the polarization is weak.
  • An advantage of such a variant is that it allows check the negative charge level of these bands 21 and, thus, to guarantee that there is no destructive effect of the screen by a current flowing from a non-polarized strip.
  • An advantage of the present invention is that it eliminates any phenomenon of color drift.
  • Another advantage of the present invention is that it suppresses the formation of microplasmas between the bands of elements phosphors 7 and thus avoids pollution of the microtips of the cathode (not shown).
  • Another advantage of the present invention is that the accumulation of negative charges between the bands of elements luminophores constitutes a focusing barrier towards the bands polarized.
  • chromium oxide (Cr 2 O 3 ) is deposited by sputtering on the first layer 8 'of silicon oxide. This deposition is preferably carried out on a thickness of the order of 1000 to 2000 angstroms for a screen whose anode / cathode voltage is of the order of 500 volts. This gives an inter-track resistance of around 500 M ⁇ .
  • the maximum secondary emission coefficient ⁇ max for chromium oxide is of the order of 0.95 for an energy U max of the order of 300 eV ( Figure 3).
  • iron oxide Fe 2 O 3
  • the maximum secondary emission coefficient ⁇ max being of the order of 0.9 for an energy U max of the order of 350 eV. This deposition takes place over a thickness of the order of 1000 angstroms and the inter-track insulation resistance obtained is of the order of 500 M ⁇ .
  • graphite carbon (C) whose maximum secondary emission coefficient ⁇ max is equal to 1 for an energy U max of the order of 300 eV, is deposited by sputtering on silicon oxide. .
  • the implementation of the present invention is compatible with small thicknesses (some microns or less) of the constituent layers of the anode and with conventional thin layer deposition processes (in particular isolation strips) which are commonly used for the manufacture of conventional anodes.
  • the present invention is capable of various variants and modifications which will appear to the man of art.
  • the thickness of coefficient materials secondary emission lower than 1 will be chosen according to functional indications given above.
  • others materials that those mentioned above can be used for perform the blocking function of the secondary broadcast and deposition processes for these materials are within the reach of man art.
  • the invention applies not only to a color screen, but also a monochrome screen including the anode consists of two sets of alternate parallel bands phosphor elements of the same polarized color alternately.

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  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Claims (6)

  1. Flachbildschirm - Anode (5') des Typs mit wenigstens zwei Gruppen paralleler alternierender Streifen (9) von Anodenleitern, die mit Leuchtstoffelementen (7) überzogen sind, die zur Anregung durch Primärelektronen (ei) vorgesehen sind, dadurch gekennzeichnet, daß die genannten Streifen (9) voneinander durch Isolierstreifen (20) getrennt sind, welche von einer ersten dünnen Schicht (8') aus einem isolierenden Material gebildet werden, die mit einer sehr dünnen Schicht (21) aus einem Material überzogen ist, dessen Sekundäremissions-Koeffizient (δ) kleiner als 1 ist, und daß die zweite Schicht (21) eine Breite besitzt, die kleiner als die der ersten Schicht (8') ist, derart daß zu beiden Seiten der zweiten Schicht ein isolierender Abstand verbleibt.
  2. Anode nach Anspruch 1, dadurch gekennzeichnet, daß die genannte zweite Schicht (21) aus einem Leitermaterial besteht.
  3. Anode nach Anspruch 1, dadurch gekennzeichnet, daß das genannte Material mit einem Sekundäremissions-Koeffizienten (8) kleiner 1 aus Chromoxyd (Cr2O3) und Eisenoxyd (Fe2O3) gewählt wird.
  4. Anode nach Anspruch 1, dadurch gekennzeichnet, daß das genannte die zweite Schicht (21) bildende Material GraphitKohlenstoff (C) ist.
  5. Anode nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die genannte zweite Schicht (21) der Isolierstreifen (20) auf ein negatives Potential oder auf Potential Null vorgespannt ist.
  6. Flachbildschirm des Typs, welcher eine Kathode (1) mit Mikrospitzen (2) und eine Anode (5') nach einem der Ansprüche 1 bis 5 umfaßt.
EP97410049A 1996-05-06 1997-05-02 Herstellung einer Anode eines flachen Bildschirms Expired - Lifetime EP0806787B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9605930 1996-05-06
FR9605930A FR2748346B1 (fr) 1996-05-06 1996-05-06 Realisation d'une anode d'ecran plat de visualisation

Publications (2)

Publication Number Publication Date
EP0806787A1 EP0806787A1 (de) 1997-11-12
EP0806787B1 true EP0806787B1 (de) 2002-03-20

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EP97410049A Expired - Lifetime EP0806787B1 (de) 1996-05-06 1997-05-02 Herstellung einer Anode eines flachen Bildschirms

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US (1) US6002205A (de)
EP (1) EP0806787B1 (de)
JP (1) JPH1097834A (de)
DE (1) DE69711115D1 (de)
FR (1) FR2748346B1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3724589B2 (ja) * 1996-07-29 2005-12-07 ケンブリッジ ディスプレイ テクノロジー リミテッド エレクトロルミネセンス素子
KR101002648B1 (ko) * 2003-11-26 2010-12-20 삼성에스디아이 주식회사 평판 디스플레이 장치 및 그 제조방법
EP2780919B1 (de) 2011-11-16 2017-07-19 Martin A. Stuart Speichervorrichtung mit hoher energiedichte

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2858466A (en) * 1955-11-25 1958-10-28 Westinghouse Electric Corp Method of reducing secondary emission from bombarded surfaces
US3614504A (en) * 1970-04-09 1971-10-19 Zenith Radio Corp Color picture tube screen with phosphors dots overlapping portions of a partial-digit-transmissive black-surround material
DE2436622C2 (de) * 1974-07-30 1983-12-01 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Bildwandler- oder Bildverstärkerröhre
JP3252545B2 (ja) * 1993-07-21 2002-02-04 ソニー株式会社 電界放出型カソードを用いたフラットディスプレイ
US5543691A (en) * 1995-05-11 1996-08-06 Raytheon Company Field emission display with focus grid and method of operating same

Also Published As

Publication number Publication date
FR2748346A1 (fr) 1997-11-07
FR2748346B1 (fr) 1998-07-24
DE69711115D1 (de) 2002-04-25
JPH1097834A (ja) 1998-04-14
EP0806787A1 (de) 1997-11-12
US6002205A (en) 1999-12-14

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