EP1814136B1 - Ionenpumpen eines Flachbildschirms mit Mikropunkten - Google Patents
Ionenpumpen eines Flachbildschirms mit Mikropunkten Download PDFInfo
- Publication number
- EP1814136B1 EP1814136B1 EP07102656A EP07102656A EP1814136B1 EP 1814136 B1 EP1814136 B1 EP 1814136B1 EP 07102656 A EP07102656 A EP 07102656A EP 07102656 A EP07102656 A EP 07102656A EP 1814136 B1 EP1814136 B1 EP 1814136B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- microtips
- screen
- sacrificial
- cathode
- active
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/94—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/16—Means for permitting pumping during operation of the tube or lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
- H01J9/39—Degassing vessels
Definitions
- the present invention relates to the field of flat microtip display screens.
- the invention relates more particularly to the manufacture of such screens.
- a microtip screen generally consists of a cathode provided with electron emission microtips placed opposite an anode provided with phosphor elements capable of being excited by electron bombardment.
- the cathode is associated with a grid provided with holes corresponding to the locations of the microtips.
- This device uses the electric field that is created between the cathode and the grid so that electrons are extracted from microtips. These electrons are then attracted by the phosphor elements of the anode if they are suitably polarized.
- the microtips are generally deposited on cathode conductors arranged in columns and addressable individually.
- the grid is organized in rows perpendicular to the columns of the cathode, also addressable individually.
- the anode is generally provided with alternating bands of phosphor elements each corresponding to a color (Red, Green, Blue).
- the bands are parallel to columns of the cathode and are separated from each other by an insulator.
- the phosphor elements are deposited on electrodes consisting of corresponding strips of a transparent conductive layer, for example indium tin oxide (ITO).
- ITO indium tin oxide
- intersection of a column of the cathode and a row of the grid defines a pixel of the screen.
- the sets of red, green, blue bands are alternately polarized with respect to the cathode so that electrons extracted from the microtips of a pixel of the cathode-grid are alternately directed towards each of the colors.
- the intersection of a row of the grid with a column of the cathode then defines a subpixel of a color.
- the rows of the gate are sequentially polarized at a potential of the order of 80 volts, while the bands of phosphor elements to be excited are biased at a voltage of the order of 400 volts via the ITO strip on which these phosphor elements are deposited.
- the ITO strips carrying the other strips of phosphor elements are at a low or zero potential.
- the columns of the cathode are brought to respective potentials between a maximum emission potential and a no-emission potential (for example, respectively 0 and 30 volts). This fixes the brightness of a color component of each of the pixels of a line.
- the anode In a monochrome screen, the anode generally consists of a plane of phosphor elements of the same color polarized simultaneously, or two sets of alternating strips of phosphor elements of the same color addressed alternately.
- the choice of the polarization potential values is related to the characteristics of the phosphor elements and the microtips.
- the manufacture of microtip screens uses techniques commonly used in the manufacture of integrated circuits.
- the cathode is generally formed of deposits in thin layers on a substrate, for example glass constituting the bottom of the screen.
- the anode is generally formed on a glass substrate constituting the screen surface.
- the anode and the cathode-grid are made independently of one another on the two substrates, and are then assembled by means of a peripheral sealing joint by providing, between the gate and the anode, an empty space for allow the circulation of the electrons emitted by the cathode up to the anode.
- the screen is subjected to various heat treatment degassing. These treatments are generally carried out under pumping by means of a tube communicating with the empty space and intended to be closed at the end of the manufacturing process.
- An impurity trapping element is generally introduced into the screen, for example into the tube, before closing.
- This getter has the role of trapping desorbed elements, in particular by the anode, during operation of the screen.
- this getter is inactive with respect to the neutral species, in particular rare gases, which remain in the empty space after closure of the screen.
- This final step is performed once the pumping tube is closed. It consists in causing an electron emission of the microtips in order to ionize neutral species remaining in the inter-electrode space. The bombardment of the neutral species causes an extraction of an electron from their valence layer and these species are then positively charged. They are then attracted by the microtips to the potential more negative. This step is commonly referred to as ion pumping.
- the present invention relates more particularly to improving the vacuum of the inter-electrode space by ion pumping.
- a disadvantage of conventional screens is that ion pumping damages the microtips of the cathode. Indeed, the collection of species ionized by microtips causes mechanical erosion and / or chemical (in particular, rare gases) microtips. If the vacuum of the screen is improved, there is a decrease in the emissivity of the microtips.
- the invention aims in particular to improve the emissive capacity of the microtips.
- the present invention also aims to propose a new flat screen display structure that is adapted to the implementation of this method.
- the present invention also aims to allow, in a simple manner, the implementation of ion pumping by the control system of the screen and, in particular, to not require the provision of other potentials than those which are conventionally used in a conventional screen for its operation.
- the present invention further aims to provide a screen that allows a vacuum improvement not only during the manufacture of the screen but also after the commissioning of the screen.
- the present invention provides a microtip flat panel display according to claim 1.
- the flat screen comprises a cathode provided with active areas electron micropoints ; a cathodoluminescent anode provided, at least opposite said active zones of microtips, with active zones of phosphor elements: a main electron extraction grid emitted by the active microtips in the direction of the phosphor elements; and cathode side, at least one sacrificial zone microtips adapted to be addressed, out of operating periods of the screen and independently of said active areas.
- the microtip sacrificial zone is associated with a secondary grid.
- the screen comprises, at the anode side, at least one conductive track perpendicular to the sacrificial zone of microtips, said conductive track being, during an ionic pumping phase, biased to a potential greater than a bias potential of said secondary gate, preferably at a potential corresponding to a nominal address potential of the active areas of phosphor elements of the anode.
- the secondary gate is biased, during an ion pumping phase, to a potential corresponding to a nominal address potential of the main gate during the operating periods of the screen.
- the main and secondary grids are one and the same grid extending vertically above the active and sacrificial zones of microtips.
- said sacrificial microtips are addressed, during an ion pumping phase, to a potential lying within a range of nominal potentials for addressing the active areas of microtips during operation of the screen.
- the surface of the microtip sacrificial zone is included between 0.1% and 10% of the area of the microtip active areas.
- the screen comprises sacrificial zones of microtips parallel to said columns, each sacrificial zone being sandwiched between two neighboring columns.
- the screen comprises two sacrificial zones of microtips on each side of the active zones.
- the invention also provides a vacuum improvement method in a microtip flat screen, which consists, during an ion pumping phase, of applying a positive voltage between a gate associated with the sacrificial microtips and the microtip sacrificial zone.
- an ionic pumping phase is carried out before putting the screen into operation.
- an ion pumping phase is carried out after each period of operation of the screen.
- a feature of the present invention is to provide, in addition to microtips participating in the display, at least one area of sacrificial micropoints dedicated to ion pumping.
- the figure 1 represents an embodiment of a display screen according to the present invention.
- a screen according to the invention consists of a cathode 1 with microtips 2 and a grid 3 provided with holes 4 corresponding to the locations of the microtips 2.
- the cathode 1 is placed facing a cathodoluminescent anode 5 a glass substrate 6 constitutes the screen surface.
- the microtips 2 are generally deposited on cathode conductors 7 organized in columns. Most often, the microtips 2 are made on a resistive layer (not shown) deposited on the cathode conductors organized in a stitch from a conductive layer, the microtips being arranged inside the cells defined by the cathode conductors. .
- the grid 3 consists of a conductive layer organized in rows perpendicular to the columns of cathode conductors with the interposition of an insulator 8 between the cathode and the gate.
- the grid rows 3 are provided with a hole 4 in line with each microtip 2.
- the intersection of a column 7 of the cathode and a row of the grid 3 defines a pixel of the screen.
- only one microtip 2 has been shown associated with each cathode conductor 7. Note however that the microtips are generally several thousand per pixel screen.
- the cathode / grid is made on a substrate 9, for example glass, constituting the bottom of the screen.
- the anode substrate 6 carries an electrode 10 consisting of a plane of a transparent conductive layer such as indium tin oxide (ITO). Phosphor elements 16 of the same color are deposited on this 10.
- the anode is generally provided with alternating bands of phosphor elements each corresponding to a color (red, green, blue). The strips are parallel to the columns of the cathode and are separated from each other by an insulator. The phosphor elements are then deposited on electrodes consisting of corresponding bands of ITO.
- An empty space 11 is formed between the anode and the cathode / gate during the assembly of the substrates 6 and 9.
- Spacers generally regularly distributed between the grid 3 and the anode 5 define the height of the space 11 and a sealing peripheral seal (not shown) seals the assembly.
- such a screen is controlled by means of an electronic circuit 12 capable of individually addressing the columns of conductors 7 of the cathode by links 13, to address sequentially the rows of the grid 3 by links 14, and to polarizing the anode electrode 10 by means of a link 15.
- an electronic circuit 12 capable of individually addressing the columns of conductors 7 of the cathode by links 13, to address sequentially the rows of the grid 3 by links 14, and to polarizing the anode electrode 10 by means of a link 15.
- the sets of red, green and blue bands are alternately polarized with respect to the cathode by means of appropriate links.
- the cathode 1 comprises a sacrificial zone of microtips 2 'addressable independently of the columns 7 by means of an additional electrode 7'.
- This zone is associated with a secondary grid 3 'which, according to the embodiment shown in FIG. figure 1 , is addressable independently of the rows of the grid 3.
- the secondary grid may correspond to row extensions of the main grid 3 participating in the display.
- the microtip sacrificial zone 2 is intended to be addressed, once the screen has been completed, to improve the vacuum in the inter-electrode space 11.
- the screen comprises active zones of microtips 2 and at least one sacrificial zone of microtips 2 'addressable independently of each other.
- the sacrificial micropoints are damaged by the ionic pumping in which they participate while the microtips of the active area of the screen are preserved.
- the anode is provided with a secondary electron collection electrode 10 'emitted by the microtip sacrificial zone.
- a secondary electron collection electrode 10 'emitted by the microtip sacrificial zone For example, an ITO zone, preferably devoid of phosphor elements, is provided in line with the microtip sacrificial zone.
- This electrode 10 ' is, during the ionic pumping, polarized at a potential that is definitely greater than the potential of the gate 3'.
- This electrode 10 ' is, during the ionic pumping, polarized at a potential that is definitely greater than the potential of the gate 3'.
- the electrons then cross the entire inter-electrode space, which increases the probability of hitting a neutral molecule and turning it into a positive ion.
- the region where the ionized molecules will be housed (the
- the secondary electrode 10 'of the anode is coincident with the electrode 10, the phosphor elements 16 being however deposited, preferably, only vertically above the active areas of microtips.
- the secondary electrode 10 ' is coated with a secondary emission coefficient material greater than one so as to multiply the number of emitted electrons.
- a transverse field to this secondary electrode 10 'to further increase the number of electrons by avalanche effect.
- the electrode 7 ', the secondary gate 3' and the secondary electrode 10 ' are addressable by the circuit 12 by means of links 13', 14 'and 15'. Ionic pumping can then be controlled by the electronic control circuit of the screen.
- the drivers 13 ', 14' and 15 ' are also accessible to be connected individually, during the manufacture of the screen or of maintenance operations, to a particular ion pump system which will be described later in connection with the figure 2 .
- an ionic pumping of the inter-electrode space is carried out once the screen has been completed by biasing the secondary gate electrode 3 'to a suitable potential, preferably corresponding to the nominal potential of the gate 3 in operation (for example, of the order of 80 volts), and by bringing the electrode 7 'to a potential for electronic emission.
- the bias potential of the electrode 7 ' is within the range of nominal potentials (for example, between 0 and 30 volts) of operation of the active area of the screen. The choice of the bias potential of the electrode 7 'depends on the desired electron emission intensity for the ionic pumping.
- the sacrificial zone of microtips 2 ' will be biased to a potential (for example, 0 volts) corresponding to a maximum emission.
- the secondary electrode 10 'of the anode 5 is biased to a potential (for example of the order of 400 volts) corresponding to the nominal polarization potential of the electrode 10 of the screen.
- An advantage of the present invention is that, while allowing ionic pumping of the inter-electrode space 11, the emissive power of the microtips 2 which participate in the display is substantially not impaired.
- control circuit 12 is adapted to control the sacrificial zone of microtips 2 ', ionic pumping is carried out after putting the screen into operation in order to trap species not absorbed by the getter and thus prevent the degradation of the vacuum.
- this ion pumping is carried out outside the operating periods of the screen, that is to say out of the periods when the screen displays images.
- this ionic pumping is controlled after each extinction of the screen at the end of use for display.
- the vacuum is regenerated for the next use. It has indeed been found that the vacuum is degraded despite ionic pumping that could perform active areas of microtips during periods of operation. It is assumed that species continue to be desorbed just after extinction.
- One advantage of providing ionic pumping by means of the sacrificial microtips after each use is that these species are then immediately trapped. In addition, damage to the micropoints of the active zones which are otherwise polluted during the next ignition of the screen is minimized.
- zones of sacrificial microtips may be provided in different regions of the screen in order to improve the spatial distribution of ion pumping.
- it may provide columns parallel to the columns 7, outside the display area, that is to say on either side of the screen.
- sacrificial zones are organized in columns arranged between two adjacent columns 7 of active microtips 2, that is to say used for display.
- the columns of sacrificial microtips thus obtained are addressable independently of the active columns.
- the grid rows 3 serving for the normal addressing of the screen in operation are used to address the sacrificial zones during the ionic pumping phases.
- the active zones of the anode are then preferably biased to their nominal operating potential and serve to collect electrons, not only during the operating phases but also during the ionic pumping phases.
- sacrificial zone locations depend on the characteristics (shape, resolution, available space between columns) of the active microtip area.
- An advantage of the present invention is that ion pumping requires no additional potential generation compared to those available in the electronic control circuit 12 of the screen, which limits the adaptations of this circuit 12 if one wish to perform an ionic pumping after commissioning the screen.
- the grid 3 ' may be covered with a specific material (for example, titanium) which will sublimate when it is struck by an ionized molecule.
- a specific material for example, titanium
- the gas emitted by this material is then redeposited on the gate and the ionized molecules are then buried under the metal. They are therefore more stable and will have a much harder time being extracted.
- This variant is more particularly intended for cases where the anode is devoid of secondary electrode facing the sacrificial zone of microtips.
- this area of sacrificial microtips 2 may be placed opposite orifices (not shown) formed in the substrate 6 to communicate with a housing enclosure of the getter. This benefits from the presence of an unusable surface for the active area of the screen.
- a screen according to the present invention does not require any modification of the manufacturing process of the cathode, the anode and the grid. Only the deposition and etching masks used for the different layers are, according to the invention, adapted to create the sacrificial zone or zones, the secondary grid (s), and the additional anode electrode (s).
- the figure 2 illustrates an embodiment of an ion pumping method of a screen according to the present invention.
- This mode of implementation is more particularly intended for ion pumping during the manufacture of the screen or during maintenance operation by means of a system independent of the circuit 12 ( figure 1 ) control of the screen.
- the screen has been shown schematically in the form of a cathode plate 1 and anode plate 5.
- the active and sacrificial areas of microtips are illustrated by the respective positions of the main gates 3 and 3 'represented in dotted line.
- An ion pumping system comprises a controllable supply circuit (ALIM) capable of generating the polarization potentials required for ionic pumping.
- the circuit 20 generates a voltage Va (for example, 400 volts) of polarization of the secondary electrode (10 ', figure 1 ) anode.
- This voltage Va is sent on a voltage divider 21 generating the secondary gate voltages Vg and Vc of the electrode 7 '(FIG. figure 1 ) carrying the sacrificial microtips.
- the voltage Vgc is positive and is preferably adjustable to obtain an adjustable transmitting current.
- the sacrificial zone of microtips can be addressed either in pulsed mode or in continuous mode. The advantage of continuous mode addressing is that it reduces ion pumping time.
- the voltage Va is a constant voltage greater than the gate voltage Vg in order to collect the emitted electrons.
- the duration of ion pumping during manufacture depends on the volume of the screen, the initial standard of living and the area of sacrificial microtips.
- a sacrificial zone representing between 0.1% and 10% of the active zone constitutes, according to the invention, a good compromise between the necessary duration of ion pumping and the size of the screen.
- the present invention is susceptible of various variations and modifications which will be apparent to those skilled in the art.
- the polarization potentials during the ionic pumping phase will preferably be chosen as a function of the nominal operating potentials of the screen.
- the practical realization of an ion pump system as shown in FIG. figure 2 is within the reach of the skilled person according to the functional indications given above.
- the adaptations of the circuit (12, figure 1 ) ordering the screen, in an embodiment where it is desired ion pumping after commissioning of the screen are within the reach of the skilled person.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
Claims (3)
- Flachbildschirm mit:einer Kathode (1), die mit aktiven Bereichen von Elektronenemissionsmikrospitzen (2) versehen ist;einer kathodolumineszenten Anode (5), die zumindest gegenüber den aktiven Mikrospitzenbereichen mit aktiven Bereichen von Leuchtstoffelementen (16) versehen ist;einer Hauptleitschicht (3) zur Absaugung von Elektronen, die von den aktiven Mikrospitzen (2) emittiert werden, in Richtung der Leuchtstoffelemente (16);Opferbereichen mit Opfermikrospitzen (2') auf der Seite der Kathode (1) und einer zu den Opfermikrospitzen (2') senkrechten Leitbahn (10') auf der Seite der Anode (5), die sich außerhalb der aktiven Bereiche befinden; undeiner Steuerschaltung (12) zum Adressieren der Opfermikrospitzen (2') außerhalb von Betriebszeiträumen der aktiven Bereiche, unabhängig von den aktiven Bereichen der Elektronenemissionsmikrospitzen (2),dadurch gekennzeichnet, dass die Leitbahn (10') mit einem Material zum Vervielfachen der Anzahl von den Opfermikrospitzen (2') emittierter Elektronen beschichtet ist.
- Bildschirm gemäß Anspruch 1, dadurch gekennzeichnet, dass die Oberfläche der Opferbereiche von Opfermikrospitzen (2') zwischen 0,1% und 10% der Oberfläche der aktiven Bereiche von Mikrospitzen (2) liegt.
- Bildschirm gemäß Anspruch 1 oder 2, dadurch gekennzeichnet, dass er auf beiden Seiten der aktiven Bereiche zwei Opferbereiche von Opfermikrospitzen (2') aufweist.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9708363A FR2765392B1 (fr) | 1997-06-27 | 1997-06-27 | Pompage ionique d'un ecran plat a micropointes |
EP98410073A EP0893817B1 (de) | 1997-06-27 | 1998-06-26 | Ionenpumpen eines flachen Mikrospitzen-Schirms |
Related Parent Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98410073A Division EP0893817B1 (de) | 1997-06-27 | 1998-06-26 | Ionenpumpen eines flachen Mikrospitzen-Schirms |
EP98410073.5 Division | 1998-06-26 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1814136A2 EP1814136A2 (de) | 2007-08-01 |
EP1814136A3 EP1814136A3 (de) | 2007-08-15 |
EP1814136B1 true EP1814136B1 (de) | 2010-10-06 |
Family
ID=9508759
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98410073A Expired - Lifetime EP0893817B1 (de) | 1997-06-27 | 1998-06-26 | Ionenpumpen eines flachen Mikrospitzen-Schirms |
EP07102656A Expired - Lifetime EP1814136B1 (de) | 1997-06-27 | 1998-06-26 | Ionenpumpen eines Flachbildschirms mit Mikropunkten |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98410073A Expired - Lifetime EP0893817B1 (de) | 1997-06-27 | 1998-06-26 | Ionenpumpen eines flachen Mikrospitzen-Schirms |
Country Status (5)
Country | Link |
---|---|
US (1) | US6107745A (de) |
EP (2) | EP0893817B1 (de) |
JP (1) | JP4011742B2 (de) |
DE (2) | DE69838467T2 (de) |
FR (1) | FR2765392B1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070161010A1 (en) * | 1998-08-04 | 2007-07-12 | Gjerde Douglas T | Methods and compositions for mutation analysis |
DE10241549B4 (de) * | 2002-09-05 | 2004-07-22 | Nawotec Gmbh | Orbitron-Pumpe |
JP3908708B2 (ja) * | 2003-09-22 | 2007-04-25 | 株式会社東芝 | 画像形成装置の駆動方法 |
JP4475646B2 (ja) * | 2004-08-27 | 2010-06-09 | キヤノン株式会社 | 画像表示装置 |
JP2006066267A (ja) * | 2004-08-27 | 2006-03-09 | Canon Inc | 画像表示装置 |
JP4817641B2 (ja) * | 2004-10-26 | 2011-11-16 | キヤノン株式会社 | 画像形成装置 |
US20060113888A1 (en) * | 2004-12-01 | 2006-06-01 | Huai-Yuan Tseng | Field emission display device with protection structure |
GB2454508B (en) * | 2007-11-09 | 2010-04-28 | Microsaic Systems Ltd | Electrode structures |
JP2009244625A (ja) * | 2008-03-31 | 2009-10-22 | Canon Inc | 画像表示装置およびその駆動方法 |
GB2479190B (en) * | 2010-04-01 | 2014-03-19 | Microsaic Systems Plc | Microengineered multipole rod assembly |
GB2479191B (en) * | 2010-04-01 | 2014-03-19 | Microsaic Systems Plc | Microengineered multipole ion guide |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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GB1045721A (en) * | 1963-01-24 | 1966-10-19 | Standard Telephones Cables Ltd | Ion transport pump |
US4389165A (en) * | 1979-09-29 | 1983-06-21 | Tohoku University | Ion pump for producing an ultrahigh degree of vacuum |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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US5063323A (en) * | 1990-07-16 | 1991-11-05 | Hughes Aircraft Company | Field emitter structure providing passageways for venting of outgassed materials from active electronic area |
JPH04289640A (ja) * | 1991-03-19 | 1992-10-14 | Hitachi Ltd | 画像表示素子 |
JP3430560B2 (ja) * | 1993-07-08 | 2003-07-28 | 双葉電子工業株式会社 | ゲッター装置及びゲッター装置を有する蛍光表示管 |
KR0139489B1 (ko) * | 1993-07-08 | 1998-06-01 | 호소야 레이지 | 전계방출형 표시장치 |
JP3217579B2 (ja) * | 1994-03-07 | 2001-10-09 | 株式会社東芝 | 表示装置 |
JP2992927B2 (ja) * | 1994-11-29 | 1999-12-20 | キヤノン株式会社 | 画像形成装置 |
US5655886A (en) * | 1995-06-06 | 1997-08-12 | Color Planar Displays, Inc. | Vacuum maintenance device for high vacuum chambers |
JP3183122B2 (ja) * | 1995-08-31 | 2001-07-03 | 双葉電子工業株式会社 | 電界放出型表示素子 |
US5578900A (en) * | 1995-11-01 | 1996-11-26 | Industrial Technology Research Institute | Built in ion pump for field emission display |
US5697827A (en) * | 1996-01-11 | 1997-12-16 | Rabinowitz; Mario | Emissive flat panel display with improved regenerative cathode |
FR2748347B1 (fr) * | 1996-05-06 | 1998-07-24 | Pixtech Sa | Anode d'ecran plat de visualisation a anneau de protection |
GB2321335A (en) * | 1997-01-16 | 1998-07-22 | Ibm | Display device |
-
1997
- 1997-06-27 FR FR9708363A patent/FR2765392B1/fr not_active Expired - Fee Related
-
1998
- 1998-06-25 JP JP19360298A patent/JP4011742B2/ja not_active Expired - Fee Related
- 1998-06-25 US US09/104,683 patent/US6107745A/en not_active Expired - Lifetime
- 1998-06-26 DE DE69838467T patent/DE69838467T2/de not_active Expired - Lifetime
- 1998-06-26 EP EP98410073A patent/EP0893817B1/de not_active Expired - Lifetime
- 1998-06-26 EP EP07102656A patent/EP1814136B1/de not_active Expired - Lifetime
- 1998-06-26 DE DE69841931T patent/DE69841931D1/de not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1045721A (en) * | 1963-01-24 | 1966-10-19 | Standard Telephones Cables Ltd | Ion transport pump |
US4389165A (en) * | 1979-09-29 | 1983-06-21 | Tohoku University | Ion pump for producing an ultrahigh degree of vacuum |
Also Published As
Publication number | Publication date |
---|---|
FR2765392B1 (fr) | 2005-08-26 |
EP0893817B1 (de) | 2007-09-26 |
DE69841931D1 (de) | 2010-11-18 |
DE69838467D1 (de) | 2007-11-08 |
EP0893817A1 (de) | 1999-01-27 |
US6107745A (en) | 2000-08-22 |
DE69838467T2 (de) | 2008-06-26 |
EP1814136A2 (de) | 2007-08-01 |
EP1814136A3 (de) | 2007-08-15 |
JPH1125889A (ja) | 1999-01-29 |
JP4011742B2 (ja) | 2007-11-21 |
FR2765392A1 (fr) | 1998-12-31 |
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