DE975179C - Verfahren zur Herstellung eines Flaechengleichrichters oder Flaechentransistors - Google Patents
Verfahren zur Herstellung eines Flaechengleichrichters oder FlaechentransistorsInfo
- Publication number
- DE975179C DE975179C DER13270A DER0013270A DE975179C DE 975179 C DE975179 C DE 975179C DE R13270 A DER13270 A DE R13270A DE R0013270 A DER0013270 A DE R0013270A DE 975179 C DE975179 C DE 975179C
- Authority
- DE
- Germany
- Prior art keywords
- activator
- semiconductor
- semiconductor body
- layer
- delimitation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000000034 method Methods 0.000 title claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 59
- 239000000463 material Substances 0.000 claims description 43
- 239000012190 activator Substances 0.000 claims description 35
- 239000000356 contaminant Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 16
- 125000006850 spacer group Chemical group 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- 230000004888 barrier function Effects 0.000 claims 2
- 230000004927 fusion Effects 0.000 claims 1
- 230000002401 inhibitory effect Effects 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 11
- 238000000576 coating method Methods 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 239000006187 pill Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 208000031872 Body Remains Diseases 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910000498 pewter Inorganic materials 0.000 description 1
- 239000010957 pewter Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
-
- G—PHYSICS
- G04—HOROLOGY
- G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
- G04B19/00—Indicating the time by visual means
- G04B19/22—Arrangements for indicating different local apparent times; Universal time pieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66893—Unipolar field-effect transistors with a PN junction gate, i.e. JFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1203—Rectifying Diode
- H01L2924/12036—PN diode
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S165/00—Heat exchange
- Y10S165/905—Materials of manufacture
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/965—Shaped junction formation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Thyristors (AREA)
- Die Bonding (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US32885852A | 1952-12-31 | 1952-12-31 | |
US343945A US2937960A (en) | 1952-12-31 | 1953-03-23 | Method of producing rectifying junctions of predetermined shape |
US836770A US2962396A (en) | 1952-12-31 | 1959-08-28 | Method of producing rectifying junctions of predetermined size |
Publications (1)
Publication Number | Publication Date |
---|---|
DE975179C true DE975179C (de) | 1961-09-21 |
Family
ID=27406635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DER13270A Expired DE975179C (de) | 1952-12-31 | 1954-01-01 | Verfahren zur Herstellung eines Flaechengleichrichters oder Flaechentransistors |
Country Status (7)
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1027322B (de) * | 1956-04-14 | 1958-04-03 | Philips Patentverwaltung | Verfahren zur Herstellung von Halbleiteranordnungen mittels Legierformen |
DE1132246B (de) * | 1954-05-18 | 1962-06-28 | Philips Nv | Verfahren zum Herstellen einer Halbleiteranordnung durch Aufschmelzen einer Elektrode auf einen Halbleiterkoerper mit einer Aushoehlung |
DE1135580B (de) * | 1954-01-12 | 1962-08-30 | Intermetall | Legierungsform und Verfahren zum Herstellen einer Halbleiteranordnung |
DE1153119B (de) * | 1955-08-05 | 1963-08-22 | Siemens Ag | Verfahren zur Herstellung einer Halbleiteranordnung |
DE1176283B (de) * | 1953-04-03 | 1964-08-20 | Gen Electric | Verfahren und Vorrichtung zur Herstellung von pn-UEbergaengen durch Legieren |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2942568A (en) * | 1954-10-15 | 1960-06-28 | Sylvania Electric Prod | Manufacture of junction transistors |
NL109558C (US06342305-20020129-C00040.png) * | 1955-05-10 | 1900-01-01 | ||
US3299331A (en) * | 1955-05-10 | 1967-01-17 | Texas Instruments Inc | Transistor structure with heatconductive housing for cooling |
NL251064A (US06342305-20020129-C00040.png) * | 1955-11-04 | |||
DE1045549B (de) * | 1956-02-15 | 1958-12-04 | Intermetall | Verfahren zur Herstellung von Legierungskontakten mit p-n-UEbergaengen |
NL224458A (US06342305-20020129-C00040.png) * | 1956-05-15 | |||
DE1079745B (de) * | 1957-11-02 | 1960-04-14 | Siemens Ag | Halbleiteranordnung mit einem scheibenfoermigen Grundkoerper und Verfahren zu ihrer Herstellung |
US3100927A (en) * | 1957-12-30 | 1963-08-20 | Westinghouse Electric Corp | Semiconductor device |
DE1064636B (de) * | 1958-03-21 | 1959-09-03 | Eberle & Co Appbau Ges | Verfahren zur Herstellung der elektrischen Anschluesse an die Elektroden von Halbleiterelementen von Halbleiteranordnungen |
US3176376A (en) * | 1958-04-24 | 1965-04-06 | Motorola Inc | Method of making semiconductor device |
GB869863A (en) * | 1958-06-18 | 1961-06-07 | A & M Fell Ltd | Improvements in or relating to the manufacture of transistors, rectifiers and other semi-conductor devices |
NL249774A (US06342305-20020129-C00040.png) * | 1959-03-26 | |||
NL252855A (US06342305-20020129-C00040.png) * | 1959-06-23 | |||
NL126558C (US06342305-20020129-C00040.png) * | 1959-08-25 | |||
FR1148316A (fr) * | 1959-10-20 | 1957-12-06 | Thomson Houston Comp Francaise | Procédé et appareil pour la réalisation de circuits imprimés |
US3131459A (en) * | 1959-11-09 | 1964-05-05 | Corning Glass Works | Method of bonding absorbing material to a delay line |
US3176147A (en) * | 1959-11-17 | 1965-03-30 | Ibm | Parallel connected two-terminal semiconductor devices of different negative resistance characteristics |
US3114864A (en) * | 1960-02-08 | 1963-12-17 | Fairchild Camera Instr Co | Semiconductor with multi-regions of one conductivity-type and a common region of opposite conductivity-type forming district tunneldiode junctions |
US3196325A (en) * | 1960-02-16 | 1965-07-20 | Microwave Ass | Electrode connection to mesa type semiconductor device |
US3241013A (en) * | 1962-10-25 | 1966-03-15 | Texas Instruments Inc | Integral transistor pair for use as chopper |
US3300694A (en) * | 1962-12-20 | 1967-01-24 | Westinghouse Electric Corp | Semiconductor controlled rectifier with firing pin portion on emitter |
US3436612A (en) * | 1964-12-03 | 1969-04-01 | Csf | Semi-conductor device having dielectric and metal protectors |
US3418543A (en) * | 1965-03-01 | 1968-12-24 | Westinghouse Electric Corp | Semiconductor device contact structure |
US3283224A (en) * | 1965-08-18 | 1966-11-01 | Trw Semiconductors Inc | Mold capping semiconductor device |
US4777564A (en) * | 1986-10-16 | 1988-10-11 | Motorola, Inc. | Leadform for use with surface mounted components |
DE102007006601B4 (de) * | 2007-02-09 | 2008-12-04 | Siemens Ag | Anschluss, Verfahren und Vorrichtung zur gleichmäßigen Einkopplung von Laserstrahlen beim Laserschweißen und Laserlöten, insbesondere an hoch reflektierenden Materialien |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2395743A (en) * | 1942-12-22 | 1946-02-26 | Bell Telephone Labor Inc | Method of making dry rectifiers |
CH243490A (de) * | 1943-11-16 | 1946-07-15 | Telefunken Gmbh | Kristalldetektor für hochfrequente Schwingungen. |
CH247861A (de) * | 1943-05-01 | 1947-03-31 | Standard Telephon & Radio Ag | Verfahren zur Herstellung von Trockengleichrichterscheiben und nach diesem Verfahren hergestellte Gleichrichterscheibe. |
GB596910A (en) * | 1943-08-14 | 1948-01-14 | Standard Telephones Cables Ltd | Selenium rectifiers and methods of making the same |
US2530110A (en) * | 1944-06-02 | 1950-11-14 | Sperry Corp | Nonlinear circuit device utilizing germanium |
DE814487C (de) * | 1948-06-26 | 1951-09-24 | Western Electric Co | Feste, leitende elektrische Vorrichtung unter Verwendung von Halbleiterschichten zur Steuerung elektrischer Energie |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2310915A (en) * | 1938-04-16 | 1943-02-09 | Bendix Aviat Corp | Projectile |
US2433903A (en) * | 1943-12-30 | 1948-01-06 | Mallory & Co Inc P R | Method of making clad metal bodies |
GB728244A (en) * | 1951-10-19 | 1955-04-13 | Gen Electric | Improvements in and relating to germanium photocells |
US2743201A (en) * | 1952-04-29 | 1956-04-24 | Hughes Aircraft Co | Monatomic semiconductor devices |
US2742383A (en) * | 1952-08-09 | 1956-04-17 | Hughes Aircraft Co | Germanium junction-type semiconductor devices |
US2735050A (en) * | 1952-10-22 | 1956-02-14 | Liquid soldering process and articles | |
US2697052A (en) * | 1953-07-24 | 1954-12-14 | Bell Telephone Labor Inc | Fabricating of semiconductor translating devices |
US2791542A (en) * | 1954-02-16 | 1957-05-07 | Kellogg M W Co | Fluidized hydrocarbon conversion process using a platinum containing catalyst |
-
0
- NL NL104654D patent/NL104654C/xx active
- BE BE525280D patent/BE525280A/xx unknown
-
1953
- 1953-03-23 US US343945A patent/US2937960A/en not_active Expired - Lifetime
- 1953-12-23 GB GB35757/53A patent/GB783511A/en not_active Expired
- 1953-12-23 CH CH336128D patent/CH336128A/de unknown
- 1953-12-29 FR FR1093724D patent/FR1093724A/fr not_active Expired
-
1954
- 1954-01-01 DE DER13270A patent/DE975179C/de not_active Expired
-
1959
- 1959-08-28 US US836770A patent/US2962396A/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2395743A (en) * | 1942-12-22 | 1946-02-26 | Bell Telephone Labor Inc | Method of making dry rectifiers |
CH247861A (de) * | 1943-05-01 | 1947-03-31 | Standard Telephon & Radio Ag | Verfahren zur Herstellung von Trockengleichrichterscheiben und nach diesem Verfahren hergestellte Gleichrichterscheibe. |
GB596910A (en) * | 1943-08-14 | 1948-01-14 | Standard Telephones Cables Ltd | Selenium rectifiers and methods of making the same |
CH243490A (de) * | 1943-11-16 | 1946-07-15 | Telefunken Gmbh | Kristalldetektor für hochfrequente Schwingungen. |
US2530110A (en) * | 1944-06-02 | 1950-11-14 | Sperry Corp | Nonlinear circuit device utilizing germanium |
DE814487C (de) * | 1948-06-26 | 1951-09-24 | Western Electric Co | Feste, leitende elektrische Vorrichtung unter Verwendung von Halbleiterschichten zur Steuerung elektrischer Energie |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1176283B (de) * | 1953-04-03 | 1964-08-20 | Gen Electric | Verfahren und Vorrichtung zur Herstellung von pn-UEbergaengen durch Legieren |
DE1135580B (de) * | 1954-01-12 | 1962-08-30 | Intermetall | Legierungsform und Verfahren zum Herstellen einer Halbleiteranordnung |
DE1132246B (de) * | 1954-05-18 | 1962-06-28 | Philips Nv | Verfahren zum Herstellen einer Halbleiteranordnung durch Aufschmelzen einer Elektrode auf einen Halbleiterkoerper mit einer Aushoehlung |
DE1153119B (de) * | 1955-08-05 | 1963-08-22 | Siemens Ag | Verfahren zur Herstellung einer Halbleiteranordnung |
DE1027322B (de) * | 1956-04-14 | 1958-04-03 | Philips Patentverwaltung | Verfahren zur Herstellung von Halbleiteranordnungen mittels Legierformen |
Also Published As
Publication number | Publication date |
---|---|
NL104654C (US06342305-20020129-C00040.png) | 1900-01-01 |
US2962396A (en) | 1960-11-29 |
US2937960A (en) | 1960-05-24 |
CH336128A (de) | 1959-02-15 |
BE525280A (US06342305-20020129-C00040.png) | 1900-01-01 |
GB783511A (en) | 1957-09-25 |
FR1093724A (fr) | 1955-05-09 |
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