DE69941711D1 - Automatischer einstellung eines energie gefiltertem transmissions-elektronenmikroskops - Google Patents

Automatischer einstellung eines energie gefiltertem transmissions-elektronenmikroskops

Info

Publication number
DE69941711D1
DE69941711D1 DE69941711T DE69941711T DE69941711D1 DE 69941711 D1 DE69941711 D1 DE 69941711D1 DE 69941711 T DE69941711 T DE 69941711T DE 69941711 T DE69941711 T DE 69941711T DE 69941711 D1 DE69941711 D1 DE 69941711D1
Authority
DE
Germany
Prior art keywords
automatic adjustment
electronic microscope
transmission electronic
filtered transmission
energy filtered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69941711T
Other languages
German (de)
English (en)
Inventor
Henri Adriaan Brink
John Andrew Hunt
Michael Karl Kundmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gatan Inc
Original Assignee
Gatan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gatan Inc filed Critical Gatan Inc
Application granted granted Critical
Publication of DE69941711D1 publication Critical patent/DE69941711D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/282—Determination of microscope properties
    • H01J2237/2826—Calibration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE69941711T 1998-08-24 1999-08-11 Automatischer einstellung eines energie gefiltertem transmissions-elektronenmikroskops Expired - Lifetime DE69941711D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/138,416 US6184524B1 (en) 1996-08-07 1998-08-24 Automated set up of an energy filtering transmission electron microscope
PCT/US1999/018186 WO2000011702A1 (en) 1998-08-24 1999-08-11 Automated set up of an energy filtering transmission electron microscope

Publications (1)

Publication Number Publication Date
DE69941711D1 true DE69941711D1 (de) 2010-01-07

Family

ID=22481908

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69941711T Expired - Lifetime DE69941711D1 (de) 1998-08-24 1999-08-11 Automatischer einstellung eines energie gefiltertem transmissions-elektronenmikroskops

Country Status (5)

Country Link
US (1) US6184524B1 (enExample)
EP (1) EP1110232B1 (enExample)
JP (1) JP2002523869A (enExample)
DE (1) DE69941711D1 (enExample)
WO (1) WO2000011702A1 (enExample)

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NL1009959C2 (nl) * 1998-08-28 2000-02-29 Univ Delft Tech Elektronenmicroscoop.
JP3687541B2 (ja) * 1999-01-04 2005-08-24 株式会社日立製作所 元素マッピング装置、走査透過型電子顕微鏡および元素マッピング方法
EP1209720A3 (en) * 2000-11-21 2006-11-15 Hitachi High-Technologies Corporation Energy spectrum measurement
US20020170887A1 (en) * 2001-03-01 2002-11-21 Konica Corporation Optical element producing method, base material drawing method and base material drawing apparatus
US6878935B2 (en) * 2002-04-03 2005-04-12 General Phosphorix Method of measuring sizes in scan microscopes
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JP2004288519A (ja) * 2003-03-24 2004-10-14 Hitachi High-Technologies Corp 電子顕微鏡
DE102005014794B4 (de) * 2005-03-31 2009-01-15 Advanced Micro Devices, Inc., Sunnyvale Verfahren zum Prüfen einer Halbleiterprobe mit mehreren Abtastungen
JP4464857B2 (ja) * 2005-04-05 2010-05-19 株式会社日立ハイテクノロジーズ 荷電粒子線装置
NL1029129C2 (nl) * 2005-05-25 2006-11-28 Univ Delft Tech Scanningtransmissie-elektronenmicroscoop.
US7238938B2 (en) * 2005-06-16 2007-07-03 Gatan, Inc. Energy selecting slit and energy selective sample analysis systems utilizing the same
JP5315033B2 (ja) * 2008-12-09 2013-10-16 株式会社日立ハイテクノロジーズ 電子分光器を備えた透過型電子顕微鏡
US8373137B2 (en) * 2010-09-24 2013-02-12 Nion Co. High resolution energy-selecting electron beam apparatus
JP6340216B2 (ja) * 2014-03-07 2018-06-06 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
CN106804114B (zh) * 2014-06-27 2019-05-28 加坦公司 电子能量损失光谱仪
EP2998979A1 (en) * 2014-09-22 2016-03-23 Fei Company Improved spectroscopy in a transmission charged-particle microscope
JP2017143060A (ja) 2016-01-20 2017-08-17 ガタン インコーポレイテッドＧａｔａｎ，Ｉｎｃ． 直接検出センサを用いる電子エネルギー損失分光器
EP4002420A1 (en) 2020-11-12 2022-05-25 FEI Company Method of determining an energy width of a charged particle beam
US20240201112A1 (en) * 2022-12-14 2024-06-20 Gatan, Inc. System and method of operating an electron energy loss spectrometer
US20250308838A1 (en) * 2024-03-29 2025-10-02 Fei Company Automatic correction of energy dependent defocus in particle beam systems due to a configuration change

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JP2842879B2 (ja) 1989-01-06 1999-01-06 株式会社日立製作所 表面分析方法および装置
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Also Published As

Publication number Publication date
EP1110232A1 (en) 2001-06-27
WO2000011702A1 (en) 2000-03-02
EP1110232B1 (en) 2009-11-25
JP2002523869A (ja) 2002-07-30
US6184524B1 (en) 2001-02-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition