DE69737862D1 - Automatische justierung eines energiefiltrierenden transmissionselektronenmikroskops - Google Patents

Automatische justierung eines energiefiltrierenden transmissionselektronenmikroskops

Info

Publication number
DE69737862D1
DE69737862D1 DE69737862T DE69737862T DE69737862D1 DE 69737862 D1 DE69737862 D1 DE 69737862D1 DE 69737862 T DE69737862 T DE 69737862T DE 69737862 T DE69737862 T DE 69737862T DE 69737862 D1 DE69737862 D1 DE 69737862D1
Authority
DE
Germany
Prior art keywords
energy
automatic adjustment
electronic microscope
feeding transmission
transmission electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69737862T
Other languages
English (en)
Other versions
DE69737862T2 (de
Inventor
Michael Karl Kundmann
Alexander Jozef Gubbens
Stuart Lawrence Friedman
Ondrej L Krivanek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gatan Inc
Original Assignee
Gatan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gatan Inc filed Critical Gatan Inc
Application granted granted Critical
Publication of DE69737862D1 publication Critical patent/DE69737862D1/de
Publication of DE69737862T2 publication Critical patent/DE69737862T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/282—Determination of microscope properties
    • H01J2237/2826—Calibration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE69737862T 1996-08-07 1997-07-10 Automatische justierung eines energiefiltrierenden transmissionselektronenmikroskops Expired - Lifetime DE69737862T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US684973 1996-08-07
US08/684,973 US5798524A (en) 1996-08-07 1996-08-07 Automated adjustment of an energy filtering transmission electron microscope
PCT/US1997/011896 WO1998006125A1 (en) 1996-08-07 1997-07-10 Automated adjustment of an energy filtering transmissiion electron microscope

Publications (2)

Publication Number Publication Date
DE69737862D1 true DE69737862D1 (de) 2007-08-09
DE69737862T2 DE69737862T2 (de) 2008-03-06

Family

ID=24750270

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69737862T Expired - Lifetime DE69737862T2 (de) 1996-08-07 1997-07-10 Automatische justierung eines energiefiltrierenden transmissionselektronenmikroskops

Country Status (5)

Country Link
US (1) US5798524A (de)
EP (1) EP0917725B1 (de)
JP (1) JP2000515675A (de)
DE (1) DE69737862T2 (de)
WO (1) WO1998006125A1 (de)

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US7238938B2 (en) * 2005-06-16 2007-07-03 Gatan, Inc. Energy selecting slit and energy selective sample analysis systems utilizing the same
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JP4399471B2 (ja) * 2007-02-28 2010-01-13 株式会社日立ハイテクノロジーズ 電子分光器を備えた透過型電子顕微鏡
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EP2091062A1 (de) 2008-02-13 2009-08-19 FEI Company TEM mit Aberrationskorrektor und Phasenplatte
JP5188846B2 (ja) * 2008-03-10 2013-04-24 日本電子株式会社 走査型透過電子顕微鏡の収差補正装置及び収差補正方法
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EP2131385A1 (de) * 2008-06-05 2009-12-09 FEI Company Hybridphasenplatte
EP2166557A1 (de) * 2008-09-22 2010-03-24 FEI Company Verfahren zur Berichtigung von Verzerrungen in einer teilchenoptischen Vorrichtung
JP5315033B2 (ja) * 2008-12-09 2013-10-16 株式会社日立ハイテクノロジーズ 電子分光器を備えた透過型電子顕微鏡
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EP2511936B1 (de) 2011-04-13 2013-10-02 Fei Company Verzerrungsfreie Stigmation eines TEM
US8933425B1 (en) 2011-11-02 2015-01-13 Kla-Tencor Corporation Apparatus and methods for aberration correction in electron beam based system
US9111715B2 (en) 2011-11-08 2015-08-18 Fei Company Charged particle energy filter
US9214127B2 (en) * 2013-07-09 2015-12-15 Apple Inc. Liquid crystal display using depletion-mode transistors
US9966219B2 (en) 2014-06-27 2018-05-08 Gatan, Inc. Electron energy loss spectrometer
JP6266467B2 (ja) * 2014-08-11 2018-01-24 日本電子株式会社 電子顕微鏡、およびモノクロメーターの調整方法
US9767984B2 (en) 2014-09-30 2017-09-19 Fei Company Chicane blanker assemblies for charged particle beam systems and methods of using the same
EP3065160B1 (de) 2015-11-02 2017-12-20 FEI Company Nachsäulenfilter mit verbessertem energiebereich
WO2017189212A1 (en) * 2016-04-29 2017-11-02 Battelle Memorial Institute Compressive scanning spectroscopy
US10295677B2 (en) 2017-05-08 2019-05-21 Battelle Memorial Institute Systems and methods for data storage and retrieval
US10283315B2 (en) 2017-05-16 2019-05-07 International Business Machines Corporation Measuring spherical and chromatic aberrations in cathode lens electrode microscopes
CN108036739B (zh) * 2017-11-17 2020-01-21 宁波大学 一种基于移动光阑的显微三维测量系统及方法
EP3496129B1 (de) * 2017-12-07 2023-11-01 FEI Company Transmissionsaufgeladeneteilchenmikroskop mit verbessertem eels/eftem-modul
US20220367141A1 (en) * 2019-09-03 2022-11-17 Cornell University A monochromator device and methods of use thereof
EP4002420A1 (de) * 2020-11-12 2022-05-25 FEI Company Verfahren zur bestimmung der energiebreite eines geladenen teilchenstrahls

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Also Published As

Publication number Publication date
JP2000515675A (ja) 2000-11-21
EP0917725B1 (de) 2007-06-27
WO1998006125A1 (en) 1998-02-12
EP0917725A1 (de) 1999-05-26
DE69737862T2 (de) 2008-03-06
US5798524A (en) 1998-08-25

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